Combined plasma electrode head and plasma cleaning machine

Abstract

The utility model relates to a combined plasma electrode head and plasma cleaning machine, construct a kind of plasma cleaning machine, including high voltage power supply, pneumatic control box, plasma electrode head, the ozone treatment module, the plasma electrode head includes cavity, electrode portion being arranged in the bottom of the cavity, the cavity top is provided with high voltage line socket and gas inlet interface, the electrode portion includes conductive module, electrode module, ground plate, fixed module, the electrode module includes multiple electrode blocks. In the utility model, the plasma electrode head is spliced by multiple electrode blocks, a thin electrode layer is arranged in the electrode block, and multiple electrode blocks are included, multiple electrode blocks are spliced into the electrode module, so that the electrode head is thinned, and assembly is facilitated, can be extended, and maintenance is facilitated.

Description

Technical Field

[0001] This utility model relates to a plasma electrode head and a plasma cleaning machine, and more particularly to a combined plasma electrode head and a plasma cleaning machine. Background Technology

[0002] Generally, surface treatment of substrates involves removing contaminants such as organic matter from the substrate surface, removing resist, bonding organic thin films, surface modification, improving thin film formation, reducing metal oxides, or cleaning glass substrates for liquid crystal displays. To perform this surface treatment, there are mainly methods using chemicals and methods using plasma. However, methods using chemicals have the disadvantage of causing adverse environmental impacts.

[0003] Plasma processing equipment includes processes such as rinsing etching, resetting Ion etch (RIE), and plasma-enhanced transistor correction (PECVD). Plasma processing equipment is used in the processing of semiconductor wafers, flat panel displays, and the cover glass of user terminals such as smartphones.

[0004] In the panel industry, panel sizes are getting larger and larger. For example, the size of the 7th generation panel was 1950*2250mm, the size of the 8th generation panel was 2200*2500mm, and the size of the 10th generation panel was 2940*3300mm. Subsequent panel sizes will continue to increase, and the processing length requirements for plasma will also increase accordingly.

[0005] Electrode heads play a crucial role in plasma equipment. Existing plasma electrode heads are not only thick and heavy, but also difficult to expand, which limits the use of plasma cleaning machines. Summary of the Invention

[0006] The technical problem solved by this utility model is to construct a combined plasma electrode head and plasma cleaning machine to overcome the technical problem of existing plasma electrode heads being thick, heavy, and difficult to expand.

[0007] The technical solution of this utility model is as follows: A combined plasma electrode head is constructed, including a cavity and an electrode section disposed at the bottom of the cavity. A high-voltage wire inlet and an air inlet are disposed at the top of the cavity. The electrode section includes a conductive module, an electrode module, a ground plane, a fixing module, and conductive wires. The conductive module connects to the electrode module and is disposed below the conductive module. The ground plane is disposed below the electrode module. The conductive module includes a conductive plate. The fixing module is used to fix the electrode module. The electrode module is formed by splicing one or more strip electrodes. The strip electrode includes multiple L-shaped electrode blocks and one or more T-shaped electrode blocks. The L-shaped electrode blocks and T-shaped electrode blocks are spliced ​​to form the strip electrode. Each electrode block is independently packaged, and each electrode block is independently connected to the conductive plate through the conductive wires.

[0008] A further technical solution of this utility model is: one end of the electrode block is a convex connecting end, and the other end is a concave connecting end, and the concave connecting end is connected to the convex connecting end to form the second strip electrode.

[0009] A further technical solution of this utility model is: the electrode block is a block-shaped electrode block or a strip-shaped electrode block, including block-shaped electrode blocks or strip-shaped electrode blocks of different sizes, and the electrode blocks are connected end to end to form the second strip-shaped electrode.

[0010] A further technical solution of this utility model is: the gaps where the block-shaped electrode blocks or strip-shaped electrode blocks are connected end to end are staggered from the gaps where adjacent strip-shaped electrode blocks or strip-shaped electrode blocks are connected end to end.

[0011] A further technical solution of this utility model is: the present invention includes a first substrate, a second substrate, and an electrode, wherein the electrode is located between the first substrate and the second substrate.

[0012] A further technical solution of this utility model is: the electrode in the electrode block is an electrode coating, and the electrode coating is disposed on the first substrate or the second substrate.

[0013] A further technical solution of this utility model is: a groove is provided on the conductive base plate to accommodate the conductive plate, the conductive plate is disposed in the groove, and the conductive cover plate abuts against the conductive plate.

[0014] A further technical solution of this utility model is: an arc-shaped groove is provided on the top surface of one end of the conductive cover plate, and a through hole for connecting the conductive plate and the high-voltage power supply is provided in the center of the arc-shaped groove.

[0015] The technical solution of this utility model is as follows: A plasma cleaning machine is constructed, comprising a high-voltage power supply, a combined plasma electrode head, a gas control box, and an ozone treatment module. The combined plasma electrode head includes a cavity and an electrode portion disposed at the bottom of the cavity. A high-voltage wire socket and an air inlet interface are disposed at the top of the cavity. The electrode portion includes a conductive module, an electrode module, a grounding plate, and a fixing module. The conductive module connects to the electrode module and is disposed below the conductive module. The grounding plate is disposed below the electrode module. The conductive module includes a conductive plate. The fixing module is used to fix the electrode module. The electrode module is formed by splicing one or more strip electrodes. The strip electrode includes multiple L-shaped electrode blocks and one or more T-shaped electrode blocks. The L-shaped electrode blocks and T-shaped electrode blocks are spliced ​​to form the strip electrode. Each electrode block is independently packaged. Each electrode block is independently connected to the conductive plate through the conductive wire. The high-voltage power supply is connected to the conductive plate through the high-voltage wire socket. The gas control box supplies gas to the cavity through the air inlet interface. The ozone treatment module is disposed above the cavity and surrounds the cavity.

[0016] A further technical solution of this utility model is: it also includes a busbar, which is disposed in the upper part of the cavity.

[0017] The technical effect of this utility model is as follows: This utility model provides a combined plasma electrode head and a plasma cleaner. The plasma cleaner includes a high-voltage power supply, a combined plasma electrode head, a gas control box, and an ozone treatment module. The combined plasma electrode head includes a cavity and an electrode portion disposed at the bottom of the cavity. A high-voltage line connector and an air inlet are provided at the top of the cavity. The electrode portion includes a conductive module, an electrode module, a grounding plate, and a fixing module. The conductive module is connected to the electrode module, and the electrode module is disposed below the conductive module. The grounding plate is disposed below the electrode module. The conductive module includes a conductive plate. The fixing module is used to fix the electrode module. The electrode module is formed by splicing one or more strip electrodes. The strip electrode includes multiple L-shaped electrode blocks and one or more T-shaped electrode blocks. The L-shaped electrode blocks and T-shaped electrode blocks are spliced ​​to form the strip electrode. Each electrode block is independently packaged and independently connected to the conductive plate through the conductive wire. The high-voltage power supply is connected to the conductive plate through the high-voltage wire socket. The gas control box supplies gas to the cavity through the air inlet interface. The ozone treatment module is disposed above the cavity and surrounds the cavity. In this utility model, the plasma electrode head is formed by splicing multiple electrode blocks. Each electrode block has a thin electrode layer and includes multiple electrode blocks. Multiple electrode blocks are spliced ​​to form the electrode module. This reduces the thickness of the electrode head, facilitates assembly, allows for extension, and facilitates maintenance. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of this utility model.

[0019] Figure 2 This is a schematic diagram of the cavity structure of this utility model.

[0020] Figure 3 This is a schematic diagram of the cross-sectional structure of the electrode module of this utility model.

[0021] Figure 4 This is a schematic diagram of the electrode block splicing structure of this utility model. Detailed Implementation

[0022] The technical solution of this utility model will be further described below with reference to specific embodiments.

[0023] like Figure 1 , Figure 2 , Figure 3 As shown, the specific embodiment of this utility model is as follows: A combined plasma electrode head is constructed, including a cavity 100 and an electrode part disposed at the bottom of the cavity 100. A high-voltage line socket 104 and an air inlet interface 105 are disposed at the top of the cavity. The electrode part includes a conductive module, an electrode module 308, a ground plane 102, and a fixing module 305. The conductive module is connected to the electrode module 308. The electrode module 308 is disposed at the lower part of the conductive module. The ground plane 102 is disposed at the lower part of the electrode module 308. The conductive module includes a conductive plate 303. The fixing module 305 is used to fix the electrode module 308. The electrode module 308 is formed by splicing one or more strip electrodes. The strip electrode 308 includes multiple L-shaped electrode blocks a1 and one or more T-shaped electrode blocks a2. The L-shaped electrode blocks a1 and T-shaped electrode blocks a2 are spliced ​​to form the strip electrode. Each electrode block 306 is independently encapsulated. Each electrode block 306 is independently connected to the conductive plate 303 through the conductive line 3065.

[0024] like Figure 1 , Figure 2 , Figure 3As shown, the specific implementation process of this utility model is as follows: The plasma electrode head includes a cavity 100 and an electrode section. The conductive plate 303 of the electrode section is connected to the high-voltage line socket 104 through the conductive cover plate 301, and then connected to a high-voltage power supply. Gas enters the cavity through the air inlet interface 105. The electrode section includes a conductive module, an electrode module 308, a ground plane 102, and a fixing module 305. The electrode module 308 includes multiple electrode blocks 306 and conductive wires 3065. The electrode blocks 306 are independently packaged. The electrode module 308 is formed by splicing one or more strip electrodes. The strip electrode 308 includes multiple L-shaped electrode blocks a1 and one or more T-shaped electrode blocks a2. The L-shaped electrode blocks a1 and T-shaped electrode blocks a2 are spliced ​​to form the strip electrode, as shown. Figure 2 As shown in the specific embodiment, the first strip electrode a is formed by splicing two L-shaped electrode blocks a1 and two T-shaped electrode blocks a2. The electrode module 308 is installed between the conductive module and the ground plane 102, and also includes a fixing block 305, which fixes the electrode module 308. The plasma electrode head of this utility model has an electrode module 308 formed by splicing multiple electrode blocks 306, which allows for convenient and unlimited expansion. By splicing, it can be extended or deformed according to the usage, and spliced ​​into the required shape. In addition, the electrode module 308 is formed by splicing multiple electrode blocks 306, which can also prevent the problem of needing to replace the entire electrode module 308 when damaged. When a certain electrode block 306 is damaged, only that electrode block 306 needs to be replaced, which greatly saves costs.

[0025] like Figure 2 As shown, the preferred embodiment of this utility model is as follows: Figure 2 As shown in the specific embodiment, the first strip electrode a is formed by splicing together two L-shaped electrode blocks a1 and two T-shaped electrode blocks a2.

[0026] like Figure 1 As shown, a preferred embodiment of this utility model is as follows: the electrode block 306 includes an electrode, a first substrate 3063, and a second substrate 3061. An electrode 3062 is disposed between the first substrate 3063 and the second substrate 3061. The electrode is layered, forming an electrode layer 3062, which is disposed between the first substrate 3063 and the second substrate 3061. The electrode layer 3062 is an electrode coating, which is disposed on the first substrate 3063 or the second substrate 3061. This utility model's plasma electrode head, by setting an ultra-thin electrode and using a coating or printing method, significantly reduces the electrode thickness, making the plasma electrode head smaller and lighter.

[0027] like Figure 1As shown, the preferred embodiment of this utility model is as follows: the conductive module includes a conductive plate 303, a conductive base plate 304, and a conductive cover plate 301. The conductive base plate 304 has a groove for accommodating the conductive plate 303, which is disposed within the groove. The conductive cover plate 301 abuts against the conductive plate 303. The conductive cover plate 301 is strip-shaped and vertically abuts against the conductive plate 303. The conductive cover plate 301 is connected to a high-voltage power supply, and the conductive plate 303 is connected to multiple electrode blocks 306.

[0028] like Figure 3 As shown, in a preferred embodiment of this invention, the first substrate 3063 is located below the second substrate 3061, the electrode layer 3062 is an electrode coating, and the electrode coating is coated on the first substrate 3063. In a specific embodiment, the electrode coating can also be coated on the second substrate 3061. This invention's plasma electrode head, by setting ultra-thin electrodes and using coating or printing methods, significantly reduces the thickness of the electrodes, making the plasma electrode head smaller and lighter.

[0029] like Figure 4 As shown, in a preferred embodiment of the present invention, each electrode block 306 is independently connected to the conductive plate 303. Each electrode block 306 has a hole 3066 on its second substrate 3061 for a conductive wire to pass through, and the conductive wire 3065 is connected to the conductive plate 303 through the hole 3066.

[0030] like Figure 1 As shown, the preferred embodiment of this utility model is: an arc-shaped groove is provided on the top surface of one end of the conductive cover plate 301, and a through hole for connecting the conductive plate and the high-voltage power supply is provided in the center of the arc-shaped groove.

[0031] The preferred embodiment of this utility model is that the electrode block 306 is configured as one or more of the following shapes: strip, block, or irregular shape. Electrode blocks 306 of various shapes can be spliced ​​together to form electrode modules of various shapes as needed.

[0032] like Figure 1 , Figure 2 , Figure 3As shown, the specific embodiment of this utility model is as follows: A plasma cleaning machine is constructed, including a high-voltage power supply (not shown in the figure), a gas control box (not shown in the figure), a combined plasma electrode head, and an ozone treatment module (not shown in the figure). The combined plasma electrode head includes a cavity 100 and an electrode portion disposed at the bottom of the cavity 100. A high-voltage line socket 104 and an air inlet interface 105 are provided at the top of the cavity. The electrode portion includes a conductive module, an electrode module 308, a grounding plate 102, and a fixing module 305. The conductive module connects to the electrode module 308, and the electrode module 308 is disposed at the lower part of the conductive module. The grounding plate 102 is disposed at the lower part of the electrode module 308. The conductive module includes a conductive plate 303. The fixing module 305 is used to fix the electrode module 308. The electrode module 308 is formed by splicing one or more strip electrodes. The strip electrode 308 includes multiple L-shaped electrode blocks a1 and one or more T-shaped electrode blocks a2. The L-shaped electrode blocks a1 and T-shaped electrode blocks a2 are spliced ​​to form the strip electrode. Figure 2 As shown in the specific embodiment, the first strip electrode a is formed by splicing together two L-shaped electrode blocks a1 and two T-shaped electrode blocks a2. The high-voltage power supply is connected to the conductive plate 303 through the high-voltage line socket 104, thereby connecting to the electrode module 308. The gas control box supplies gas to the cavity 100 through the air inlet interface 105. The ozone treatment module is disposed above the cavity 100 and surrounds the cavity 100.

[0033] like Figure 1 , Figure 2 , Figure 3 As shown, the specific implementation process of this utility model is as follows: The plasma cleaner includes a high-voltage power supply (not shown in the figure), a gas control box (not shown in the figure), a plasma electrode head, and the ozone treatment module. The plasma electrode head includes a cavity 100 and an electrode part. The conductive plate 303 of the electrode part is connected to the high-voltage power supply through the high-voltage line socket 104. Gas enters the cavity through the air inlet interface 105. The electrode part includes a conductive module, an electrode module 308, a ground plate 102, and a fixing module 305. The ground plate 102 is provided with multiple micropores. The electrode module 308 includes multiple electrode blocks 306. The electrode module 308 is formed by splicing one or more strip electrodes. The strip electrode 308 includes multiple L-shaped electrode blocks a1 and one or more T-shaped electrode blocks a2. The L-shaped electrode blocks a1 and T-shaped electrode blocks a2 are spliced ​​to form the strip electrode, as shown in the figure. Figure 2As shown in the specific embodiment, the first strip electrode a is formed by splicing two L-shaped electrode blocks a1 and two T-shaped electrode blocks a2. Each electrode block 306 is independently packaged, and multiple electrode blocks 306 are spliced ​​together to form the electrode module 308. The electrode module 308, after splicing, is installed between the conductive module and the ground plane 102, and also includes a fixing block 305 that fixes the electrode module 308. The high-voltage power supply is connected to the conductive plate 303 through the high-voltage line socket 104, thereby connecting to the electrode module 308. The gas control box supplies gas to the cavity 100 through the air inlet interface 105. The ozone treatment module is positioned above and surrounds the cavity 100. During cleaning, the electrode module 308 is energized with high voltage, which discharges with the ground plane 102 below, decomposing the flowing gas into oxygen free radicals, which are then discharged from the micropores of the ground plane 102, and finally react chemically with the surface of the product being cleaned to complete the cleaning process.

[0034] like Figure 1 As shown, a preferred embodiment of this utility model further includes a manifold 106, which is disposed in the upper part of the cavity 100. The manifold 106 is used to guide the incoming gas into the lower part of the cavity, ensuring the uniformity of gas flow throughout the cavity 100.

[0035] The technical effect of this utility model is as follows: This utility model provides a combined plasma electrode head and a plasma cleaner, including a high-voltage power supply (not shown in the figure), a gas control box (not shown in the figure), a combined plasma electrode head, and an ozone treatment module. The combined plasma electrode head includes a cavity 100 and an electrode part disposed at the bottom of the cavity 100. The top of the cavity is provided with a high-voltage line socket 104 and an air inlet interface 105. The electrode part includes a conductive module, an electrode module 308, a grounding plate 102, and a fixing module 305. The conductive module is connected to the electrode module 308. 8 is disposed at the lower part of the conductive module, and the ground plane 102 is disposed at the lower part of the electrode module 308. The conductive module includes a conductive plate 303 and a conductive base plate 304 for mounting the conductive plate 303. The conductive plate 303 is connected to a high-voltage power supply through the high-voltage line socket 104. The fixing module 305 is used to fix the electrode module 308. The electrode module 308 is formed by splicing one or more strip electrodes. The strip electrode 308 includes multiple L-shaped electrode blocks a1 and one or more T-shaped electrode blocks a2. The L-shaped electrode blocks a1 and T-shaped electrode blocks a2 are spliced ​​to form the strip electrode. The electrode blocks 306 are independently packaged, and multiple electrode blocks 306 are spliced ​​to form the electrode module 308. The conductive line 3065 connects the electrode layer 3062 and the conductive plate 303. The high-voltage power supply is connected to the conductive plate 303 via the high-voltage line socket 104, thereby connecting to the electrode module 308. The gas control box supplies gas to the cavity 100 via the air inlet interface 105. The ozone treatment module is positioned above and surrounds the cavity 100. In this invention, the electrode block 306 has a thin electrode layer and comprises multiple electrode blocks 306. These multiple electrode blocks 306 are assembled to form the electrode module 308. This design reduces the electrode head thickness, facilitates assembly, allows for extension, and facilitates maintenance.

[0036] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the protection scope of the present invention.

Claims

1. A combined plasma electrode head, characterized in that, The device includes a cavity and an electrode section disposed at the bottom of the cavity. A high-voltage wire inlet and an air inlet are disposed at the top of the cavity. The electrode section includes a conductive module, an electrode module, a ground plane, a fixing module, and conductive wires. The conductive module connects to the electrode module and is disposed below the conductive module. The ground plane is disposed below the electrode module. The conductive module includes a conductive plate. The fixing module is used to fix the electrode module. The electrode module is formed by splicing one or more strip electrodes. The strip electrode includes multiple L-shaped electrode blocks and one or more T-shaped electrode blocks. The L-shaped electrode blocks and T-shaped electrode blocks are spliced ​​to form the strip electrode. Each electrode block is independently packaged, and each electrode block is independently connected to the conductive plate through the conductive wires.

2. The combined plasma electrode head according to claim 1, characterized in that, The electrode block includes a first substrate, a second substrate, and an electrode, wherein the electrode is located between the first substrate and the second substrate.

3. The combined plasma electrode head according to claim 2, characterized in that, The electrodes in the electrode block are electrode coatings, which are disposed on the first substrate or the second substrate.

4. The combined plasma electrode head according to claim 1, characterized in that, The conductive module also includes a conductive base plate and a conductive cover plate. The conductive plate is mounted on the conductive base plate, and the conductive cover plate abuts against the conductive plate.

5. The combined plasma electrode head according to claim 4, characterized in that, The conductive base plate is provided with a groove to accommodate the conductive plate, and the conductive plate is disposed in the groove.

6. The combined plasma electrode head according to claim 4, characterized in that, An arc-shaped groove is provided on the top surface of one end of the conductive cover plate, and a through hole for connecting the conductive plate and the high-voltage power supply is provided in the center of the arc-shaped groove.

7. A plasma cleaner, characterized in that, The device includes a high-voltage power supply, a combined plasma electrode head, a gas control box, and an ozone treatment module. The combined plasma electrode head includes a cavity and an electrode section located at the bottom of the cavity. The top of the cavity has a high-voltage wire connector and an air inlet interface. The electrode section includes a conductive module, an electrode module, a ground plane, a fixing module, and conductive wires. The conductive module connects to the electrode module and is located below the conductive module. The ground plane is located below the electrode module. The conductive module includes a conductive plate. The fixing module is used to fix the electrode module. The electrode module is formed by splicing one or more strip electrodes. The strip electrode includes multiple L-shaped electrode blocks and one or more T-shaped electrode blocks. The L-shaped electrode blocks and T-shaped electrode blocks are spliced ​​to form the strip electrode. Each electrode block is independently packaged and independently connected to the conductive plate through the conductive wires. The high-voltage power supply is connected to the conductive plate through the high-voltage wire connector. The gas control box supplies gas to the cavity through the air inlet interface. The ozone treatment module is located above the cavity and surrounds the cavity.

8. The plasma cleaner according to claim 7, characterized in that, It also includes a busbar, which is disposed in the upper part of the cavity.

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