A polysilicon reactor cleaning device

Abstract

The utility model provides a kind of polysilicon reaction kettle cleaning device, it is related to polysilicon production equipment technical field.The polysilicon reaction kettle cleaning device includes: mobile trolley, silicon material crushing mechanism and dust extraction mechanism.Mobile trolley has trolley body, and moving assembly is arranged on trolley body;Silicon material crushing mechanism is set on trolley body;Silicon material crushing mechanism at least has lifting cylinder and drill bit, and lifting cylinder can drive drill bit to work;Dust extraction mechanism has suction line and conveying line;Suction line is arranged on mobile trolley, and conveying line is communicated with suction line;When mobile trolley is placed inside polysilicon reaction kettle body, conveying line can pass through the reaction kettle inlet and outlet opening on polysilicon reaction kettle body and be communicated with external suction equipment.The utility model can replace artificial to carry out efficient polysilicon reaction kettle inside residual silicon material cleaning.

Description

Technical Field

[0001] This utility model relates to the technical field of polysilicon production equipment, specifically a polysilicon reactor cleaning device. Background Technology

[0002] The polycrystalline silicon reactor, also known as the Siemens process reduction furnace, is a key piece of equipment for producing high-purity polycrystalline silicon materials using the "modified Siemens process". Its core function is to reduce gaseous high-purity trichlorosilane (SiHCl3) with hydrogen (H2) at high temperature through chemical vapor deposition (CVD) to generate solid high-purity polycrystalline silicon, which is then deposited onto silicon cores (or silicon rods) placed pre-positioned in the furnace.

[0003] Currently, during maintenance of polysilicon reactors, it is necessary to remove waste silicon material from inside. However, due to the extremely narrow inlet and outlet of the reactor, large equipment cannot be used for waste removal. Furthermore, because the reactor contains a high-temperature hydrogen-containing environment, nitrogen purging is required, making manual entry for silicon material removal inconvenient. If manual entry were to be performed, cumbersome protective clothing, numerous auxiliary equipment, and dedicated personnel would be required to ensure the smooth progress of the cleaning work. Therefore, manual cleaning methods incur significant labor costs, material costs, and safety risks. Utility Model Content

[0004] This invention addresses the problems in existing technologies where cleaning polycrystalline silicon reactors requires personnel to enter a nitrogen-confined space, posing significant safety hazards. Furthermore, the cleaning process is limited by personnel's physical strength, making continuous operation impossible and resulting in low cleaning efficiency. The invention provides a polycrystalline silicon reactor cleaning device that can replace manual labor for efficient cleaning of residual silicon material inside polycrystalline silicon reactors.

[0005] The technical solution adopted in this utility model is:

[0006] A polycrystalline silicon reactor cleaning device, comprising:

[0007] A mobile vehicle, having at least a vehicle body, on which a moving component is provided;

[0008] A silicon material crushing mechanism is mounted on the trolley body; the silicon material crushing mechanism has at least a lifting cylinder and a drill bit, and the lifting cylinder can drive the drill bit to work;

[0009] The dust collection mechanism includes at least a suction line and a conveying line; the suction line is mounted on the mobile trolley, and the conveying line is connected to the suction line;

[0010] When the mobile trolley is placed inside the polycrystalline silicon reactor body, the delivery pipeline can pass through the reactor inlet / outlet opening on the polycrystalline silicon reactor body and connect with the external suction equipment.

[0011] Furthermore, the moving component includes vehicle tracks disposed on both sides of the vehicle body.

[0012] Furthermore, the silicon material crushing mechanism is provided with a first support frame; the first support frame is provided with a first camera that shoots towards the bottom of the moving trolley.

[0013] Furthermore, the silicon material crushing mechanism also includes at least a crusher body; the feed port of the suction pipe is connected to the interior of the shell of the crusher body.

[0014] Furthermore, the conveying pipeline includes a first conveying pipe and a second conveying pipe; the first conveying pipe connects the suction pipeline and the second conveying pipe, and the first conveying pipe is provided with a flexible conveying section; the second conveying pipe connects the first conveying pipe and a suction device outside the polycrystalline silicon reactor body.

[0015] Furthermore, a resistance temperature sensor is installed on the delivery pipeline.

[0016] Furthermore, a second support frame is provided on the delivery pipeline, and a second camera is provided on the second support frame. The second camera is a panoramic camera.

[0017] Furthermore, a pipeline vibrator is installed on the delivery pipeline.

[0018] Furthermore, an outlet dust flow meter is installed on the conveying pipeline near the silicon material outlet. Both the pipeline vibrator and the outlet dust flow meter are connected to a control terminal located outside the polycrystalline silicon reactor body.

[0019] Furthermore, the trolley body and the lifting cylinder are both connected to a control terminal located outside the polycrystalline silicon reactor body.

[0020] The beneficial effects of this utility model are:

[0021] 1. This utility model, by setting the silicon material crushing mechanism on a mobile trolley with movable components, enables the silicon material crushing mechanism to flexibly clean multiple different locations inside the polycrystalline silicon reactor body. Combined with the suction and conveying pipelines of the dust extraction mechanism, the location of the silicon material crushing mechanism is connected to the external suction equipment of the polycrystalline silicon reactor body, allowing the cleaned-off silicon material to be transferred in a timely manner. This achieves efficient and continuous cleaning of the polycrystalline silicon reactor interior by automated equipment, replacing manual labor. This solves the problems of existing technologies where cleaning polycrystalline silicon reactors requires personnel to enter a nitrogen-confined space, posing significant safety hazards, and the cleaning process is limited by personnel physical strength, making long-term continuous operation impossible and resulting in low cleaning efficiency. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the cleaning device according to an embodiment of the present invention;

[0024] Figure 2 for Figure 1 Enlarged view of point A in the middle;

[0025] Figure 3 This is a top view of the cleaning device according to an embodiment of the present invention;

[0026] Figure 4 This is a side view of the cleaning device according to an embodiment of the present invention.

[0027] Reference numerals: 100 - mobile trolley, 110 - trolley body, 120 - trolley tracks;

[0028] 200-Silicon material crushing mechanism, 210-Drill bit, 220-Lifting cylinder, 230-Crusher body, 240-First support frame, 242-First camera;

[0029] 300-Dust collection mechanism, 310-Suction pipeline, 320-Conveying pipeline, 330-First conveying pipe, 332-Flexible connection conveying section, 340-Second conveying pipe, 342-Silicon material discharge port, 344-Thermocouple temperature sensor, 346-Second support frame, 347-Second camera, 348-Pipeline vibrator, 349-Outlet dust flow meter;

[0030] 400 - Polycrystalline silicon reactor body; 410 - Reactor inlet / outlet opening. Detailed Implementation

[0031] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0032] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the scope of this invention.

[0033] The embodiments of the utility model will now be described in detail with reference to the accompanying drawings.

[0034] Example 1

[0035] During maintenance of existing polysilicon reactors, residual silicon material needs to be removed. However, due to the extremely narrow inlet and outlet of the reactor, large equipment cannot be used for waste removal. Manual cleaning presents the following problems: 1. Personnel entering a nitrogen-confined space for cleaning operations pose a significant safety hazard, easily leading to asphyxiation. 2. The cleaning process is limited by personnel's physical strength, making continuous operation for extended periods impossible and resulting in low cleaning efficiency.

[0036] To address the aforementioned problems in the prior art, this embodiment provides a polycrystalline silicon reactor cleaning device. This device allows operators to clean residual silicon material inside the polycrystalline silicon reactor under external control. This device can replace manual labor for efficient and continuous cleaning of residual silicon material inside the polycrystalline silicon reactor. Please refer to... Figures 1-4 The polycrystalline silicon reactor cleaning device mainly includes: a mobile trolley 100, a silicon material crushing mechanism 200, and a dust collection mechanism 300. The polycrystalline silicon reactor used by the cleaning device in this embodiment has a reactor inlet / outlet opening 410 on the side wall of its main body 400.

[0037] The mobile trolley 100 provides mobility for the polycrystalline silicon reactor cleaning device of this embodiment. For example... Figure 1 As shown, the mobile trolley 100 mainly includes a trolley body 110 and a moving component. The trolley body 110 is equipped with a control and signal receiving and transmitting unit that is connected to an external control terminal. Under the control of the external control terminal, it can drive the moving component, thereby moving the entire polysilicon reactor cleaning device inside the polysilicon reactor body 400.

[0038] The silicon material crushing mechanism 200 is used to crush and clean residual silicon material inside the polycrystalline silicon reactor body 400, causing it to detach from the inner wall of the polycrystalline silicon reactor body 400. The silicon material crushing mechanism 200 mainly includes a crusher body 230, a drill bit 210, and a lifting cylinder 220. The crusher body 230 is located at one end of the moving trolley 100, and the lifting cylinder 220 is located on top of the crusher body 230. The shell of the crusher body 230 is connected to the dust collection mechanism 300. The drill bit 210 is movably located inside the lower part of the crusher body 230 and can be moved by the lifting cylinder 220. Furthermore, the lifting cylinder 220 also has a control and signal receiving / transmitting unit connected to an external control terminal, allowing it to be started and stopped under the control of the external control terminal.

[0039] The dust collection mechanism 300 is used to collect broken silicon material that has detached from the inner wall of the polycrystalline silicon reactor body 400 after being cleaned by the silicon material crushing mechanism 200. The dust collection mechanism 300 mainly includes a suction pipe 310 and a conveying pipe 320. The suction pipe 310 is located on top of the mobile trolley 100. One end of the suction pipe 310 has an inlet port for sucking up the broken silicon material that has detached from the silicon material crushing mechanism 200; the other end of the suction pipe 310 is connected to the conveying pipe 320. One end of the conveying pipe 320 is connected to the suction pipe 310; the other end of the conveying pipe 320 passes through the reactor inlet / outlet opening 410 on the side wall of the polycrystalline silicon reactor body 400 and connects to external suction equipment such as a vacuum pump. Because the dust collection mechanism 300 promptly transfers the silicon material processed by the silicon material crushing mechanism 200, it prevents the detached silicon material from affecting the normal operation and movement of the mobile trolley 100 and the silicon material crushing mechanism 200, thus facilitating continuous operation.

[0040] One specific working method of this embodiment is as follows:

[0041] First, the mobile trolley 100 and silicon material crushing mechanism 200 of the polycrystalline silicon reactor cleaning device of this embodiment are placed inside the polycrystalline silicon reactor body 400. The conveying pipeline 320 of the dust collection mechanism 300 is set through the reactor inlet / outlet opening 410 on the side wall of the polycrystalline silicon reactor body 400. Next, the mobile trolley 100 is started, so that the mobile trolley 100 and silicon material crushing mechanism 200 move inside the polycrystalline silicon reactor body 400. The silicon material crushing mechanism 200 is started to clean the residual silicon material inside the polycrystalline silicon reactor body 400 during the movement. At the same time, the dust collection mechanism 300 is started to transfer the cleaned and dislodged silicon material in a timely manner.

[0042] In this embodiment, the polysilicon reactor cleaning device sets the silicon material crushing mechanism 200 on a mobile trolley 100 with movable components, enabling the silicon material crushing mechanism 200 to flexibly clean multiple different locations inside the polysilicon reactor body 400. Furthermore, in conjunction with the suction pipe 310 and conveying pipe 320 of the dust extraction mechanism 300, the location of the silicon material crushing mechanism 200 is connected to the external suction equipment of the polysilicon reactor body 400, allowing the cleaned-off silicon material to be transferred in a timely manner. This achieves efficient and continuous cleaning of the polysilicon reactor interior by automated equipment, replacing manual labor. This solves the problems of existing technologies where cleaning polysilicon reactors requires personnel to enter a nitrogen-confined space, posing significant safety hazards, and the cleaning process is limited by personnel physical strength, making long-term continuous operation impossible and resulting in low cleaning efficiency.

[0043] Furthermore, in the mobile trolley 100 of this embodiment, the moving component is the trolley track 120 disposed on both sides of the trolley body 110. Since the polycrystalline silicon reactor body 400 being processed generally has residual silicon material inside, resulting in an uneven bottom, choosing the trolley track 120 as the moving component, compared to choosing rollers, can improve the stability of the polycrystalline silicon reactor cleaning device in this embodiment during movement and reduce the probability of tipping over.

[0044] Furthermore, in the silicon material crushing mechanism 200 of this embodiment, a first support frame 240 is provided on the shell of the crusher body 230 of the silicon material crushing mechanism 200. One end of the first support frame 240 is annular and is fitted onto the outer side wall of the shell of the silicon material crushing mechanism 200; the other end of the first support frame 240 extends outward, and a first camera 242 is provided on the side facing the bottom of the moving trolley 100 to capture images of the bottom of the moving trolley 100. The first camera 242 is a vehicle-mounted camera used to monitor whether there is residual silicon material in the area below the silicon material crushing mechanism 200 during the cleaning process. With the first camera 242 provided, the operator can promptly control the silicon material crushing mechanism 200 to start crushing after observing residual silicon material, without needing to keep the silicon material crushing mechanism 200 running continuously during operation, thereby saving energy consumption.

[0045] Furthermore, in the dust collection mechanism 300 of this embodiment, the feed port of the suction pipe 310 is connected to the interior of the crusher body 230 of the silicon material crushing mechanism 200, enabling direct and rapid suction of the drill bit 210 of the silicon material crushing mechanism 200 to clean the crushed silicon material generated after crushing. In one or more other embodiments, the feed port of the suction pipe 310 may also be located on both sides of the suction pipe 310 that are not connected to the housing of the silicon material crushing mechanism 200, allowing suction of the drill bit 210 of the silicon material crushing mechanism 200 from both sides to clean the crushed silicon material generated after crushing. Additionally, the conveying pipe 320 includes a first conveying pipe 330 and a second conveying pipe 340. The first conveying pipe 330 connects the other end of the suction pipe 310 and the second conveying pipe 340. The first conveying pipe 330 is provided with a flexible connecting conveying section 332, which enhances the flexibility of the rotating and moving trolley 100. The second conveying pipe 340 connects the first conveying pipe 330 and the suction device outside the polycrystalline silicon reactor body 400. One end of the second conveying pipe 340 is the silicon material discharge port 342. The second conveying pipe 340 is mainly a rigid pipe structure and is set through the reactor inlet / outlet opening 410 on the side wall of the polycrystalline silicon reactor body 400 to avoid the movement of the moving trolley 100 affecting the stability of the connection between the dust collection mechanism 300 and the suction device.

[0046] Furthermore, a resistance temperature sensor 344 is installed at the top of the connection between the second conveying pipe 340 and the first conveying pipe 330. The resistance temperature sensor 344 is connected to an external control terminal signal to detect the temperature inside the pipeline, preventing overheating and damage to the pipeline, and avoiding silicon powder leakage that could cause burns to nearby personnel. Additionally, a second support frame 346 is installed on the side of the connection between the second conveying pipe 340 and the first conveying pipe 330. A second camera 347, a panoramic camera, is installed on the second support frame 346 and is connected to an external control terminal signal to view the overall condition inside the polycrystalline silicon reactor body 400 and the accumulation of silicon material inside the polycrystalline silicon reactor body 400, facilitating identification, positioning, and determination of the work area, as well as ensuring thorough cleaning. Simultaneously, a pipeline vibrator 348 is installed in the middle of the second conveying pipe 340. The pipeline vibrator 348 is connected to an external control terminal signal to provide vibration frequency to the pipeline when the dust collection mechanism 300 is working, facilitating smooth material conveying and preventing blockages. In addition, an outlet dust flow meter 349 can be installed on the second conveying pipe 340 near the silicon material outlet 342. The outlet dust flow meter 349 is connected to an external control terminal signal to detect whether the pipeline is blocked during operation. With the outlet dust flow meter 349 installed, the pipeline vibrator 348 does not need to be kept running during the cleaning process, but can be started in a timely manner according to the signal fed back by the outlet dust flow meter 349, thereby saving energy consumption.

[0047] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A cleaning device for a polycrystalline silicon reactor, characterized in that, Include: The mobile trolley (100) has at least a trolley body (110) on which a moving component is provided; A silicon material crushing mechanism (200) is provided on the trolley body (110); the silicon material crushing mechanism (200) has at least a lifting cylinder (220) and a drill bit (210), and the lifting cylinder (220) can drive the drill bit (210) to work; The dust collection mechanism (300) has at least a suction line (310) and a conveying line (320); the suction line (310) is disposed on the mobile trolley (100), and the conveying line (320) is connected to the suction line (310); When the mobile trolley (100) is placed inside the polycrystalline silicon reactor body (400), the delivery pipeline (320) can pass through the reactor inlet / outlet opening (410) on the polycrystalline silicon reactor body (400) and connect with the external suction device.

2. The polycrystalline silicon reactor cleaning device as described in claim 1, characterized in that, The moving component includes trolley tracks (120) disposed on both sides of the trolley body (110).

3. The polycrystalline silicon reactor cleaning device as described in claim 1, characterized in that, The silicon material crushing mechanism (200) is provided with a first support frame (240); the first support frame (240) is provided with a first camera (242) that shoots towards the bottom of the mobile trolley (100).

4. The polycrystalline silicon reactor cleaning device as described in claim 1, characterized in that, The silicon material crushing mechanism (200) also has at least a crusher body (230); the feed port of the suction pipe (310) is connected to the interior of the shell of the crusher body (230).

5. The polycrystalline silicon reactor cleaning device as described in claim 1, characterized in that, The conveying pipeline (320) includes a first conveying pipe (330) and a second conveying pipe (340); the first conveying pipe (330) connects the suction pipeline (310) and the second conveying pipe (340), and a flexible connecting conveying section (332) is provided on the first conveying pipe (330); the second conveying pipe (340) connects the first conveying pipe (330) and a suction device outside the polycrystalline silicon reactor body (400).

6. The polycrystalline silicon reactor cleaning device as described in claim 1, characterized in that, A resistance temperature sensor (344) is installed on the delivery pipeline (320).

7. The polycrystalline silicon reactor cleaning device as described in claim 1, characterized in that, The delivery pipeline (320) is provided with a second support frame (346), and the second support frame (346) is provided with a second camera (347), which is a panoramic camera.

8. The polycrystalline silicon reactor cleaning device as described in claim 1, characterized in that, A pipeline vibrator (348) is installed on the delivery pipeline (320).

9. The polycrystalline silicon reactor cleaning device as described in claim 8, characterized in that, An outlet dust flow meter (349) is installed on the conveying pipeline (320) near the silicon material outlet (342). Both the pipeline vibrator (348) and the outlet dust flow meter (349) are connected to a control terminal located outside the polycrystalline silicon reactor body (400).

10. The polycrystalline silicon reactor cleaning device according to any one of claims 1-9, characterized in that, The trolley body (110) and the lifting cylinder (220) are both connected to a control terminal located outside the polycrystalline silicon reactor body (400).

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