Single crystal silicon rod outer circle processing equipment

Abstract

The utility model relates to monocrystalline silicon rod production technical field, concretely to a kind of monocrystalline silicon rod cylindrical surface processing equipment, including grinding machine, the headstock for driving monocrystalline silicon rod rotation and the tailstock for pressing monocrystalline silicon rod free end are equipped on the grinding machine, the output end of the headstock is equipped with the clamping assembly for limiting placement and clamping monocrystalline silicon rod and the trigger assembly for pressure control the clamping assembly clamping monocrystalline silicon rod;By setting clamping assembly and trigger assembly, utilize the linkage mechanism of trigger plate, wedge and movable clamp jaw, realize the automatic clamping when silicon rod insertion, after processing is completed, by the spring reset action, movable clamp jaw is realized automatic loosening by synchronous strip pulling, the step of manually screwing or loosening clamp jaw is saved, reduce artificial intervention and loading and unloading time consumption, improve the continuity of batch processing, in addition, fixed clamp jaw cooperation ball structure forms guide channel, can guide silicon rod accurate insertion and reduce frictional resistance, further optimize clamping convenience.

Description

Technical Field

[0001] This utility model relates to the field of monocrystalline silicon rod production technology, and in particular to a monocrystalline silicon rod outer diameter processing equipment. Background Technology

[0002] Monocrystalline silicon rod outer diameter processing equipment is a key piece of equipment in the photovoltaic and semiconductor industry chain. It is mainly used to perform precision processing on the diameter, roundness, and surface roughness of monocrystalline silicon rods to meet the process requirements of subsequent slicing or application.

[0003] A cylindrical grinding machine with easily replaceable grinding wheels is disclosed in Chinese Patent Publication No. CN223211175U. This cylindrical grinding machine with easily replaceable grinding wheels facilitates the replacement of grinding wheels through a unique grinding wheel fixing and replacement mechanism, greatly reducing maintenance and replacement time and labor intensity, and improving production efficiency. However, according to the cylindrical grinding machine with easily replaceable grinding wheels provided by related technologies and existing technologies: when processing single crystal silicon rods, traditional cylindrical grinding machines generally rely on a three-jaw chuck for centering and clamping. The workpiece needs to be centered and clamped by manually adjusting the position of the chuck. The steps are cumbersome and rely on human experience. After processing, the chuck needs to be loosened by reversing the operation. The entire loading and unloading process is time-consuming, which not only reduces the processing cycle of single crystal silicon rods, but also restricts the continuity of mass production. Utility Model Content

[0004] The purpose of this utility model is to overcome the shortcomings of the prior art, solve the problems mentioned in the background art, and provide a single crystal silicon rod outer circle processing equipment.

[0005] The purpose of this utility model is achieved through the following technical solution: a single crystal silicon rod outer diameter processing equipment, including a grinding machine, the grinding machine is provided with a headstock for driving the single crystal silicon rod to rotate and a tailstock for clamping the free end of the single crystal silicon rod, the output end of the headstock is provided with a clamping component for limiting and clamping the single crystal silicon rod and a triggering component for controlling the clamping component to clamp the single crystal silicon rod under pressure, and a pin is fixedly installed on the tailstock at the position corresponding to the axis of the clamping component.

[0006] Preferably, the clamping assembly includes a mounting flange fixedly installed at the output end of the head frame, and three fixed clamping jaws are fixedly provided on the side of the mounting flange away from the head frame. The three fixed clamping jaws are distributed in a circumferential array, and movable clamping jaws are slidably installed radially between each two adjacent fixed clamping jaws.

[0007] Preferably, the triggering assembly includes a trigger plate that is slidably mounted on the inner side of the three fixed grippers along the axial direction. Each trigger plate is fixedly provided with an L-shaped claw at the position corresponding to each of the movable grippers. A plurality of first wedge blocks are fixedly provided on the back side of each movable gripper, and a second wedge block is fixedly provided at the position corresponding to each of the first wedge blocks of the L-shaped claw.

[0008] Preferably, the fixed gripper is arc-shaped with a chamfer at the opening, and multiple balls are evenly installed on the side of the fixed gripper facing the clamping axis.

[0009] Preferably, slide bars are fixedly provided on both sides of the fixed gripper, and slide grooves are provided on the movable gripper corresponding to the positions of the slide bars.

[0010] Preferably, a synchronization bar is fixedly provided on the wedge-shaped surface of the second wedge block, and a synchronization groove for limiting the synchronization bar is provided on the wedge-shaped surface of the first wedge block.

[0011] Preferably, a spring is provided on the side of the trigger plate near the mounting flange.

[0012] Beneficial effects:

[0013] This monocrystalline silicon rod outer diameter processing equipment, through the setting of clamping components and triggering components, utilizes the linkage mechanism of trigger plate, wedge block and movable jaw to achieve automatic clamping when silicon rod is inserted. After processing, the movable jaw is automatically released by the spring reset action and the synchronous bar pulls it, eliminating the step of manually tightening or loosening the jaw, reducing manual intervention and loading and unloading time, and improving the continuity of batch processing. In addition, the fixed jaw and the ball structure form a guide channel, which can guide the silicon rod to be inserted accurately and reduce frictional resistance, further optimizing the clamping convenience and operation smoothness. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of the structure of this utility model;

[0016] Figure 2 This utility model Figure 1 A magnified schematic diagram of the local structure at point A;

[0017] Figure 3 This is a schematic diagram of the clamping assembly of this utility model;

[0018] Figure 4 This is a schematic diagram showing the cooperation between the first wedge block and the second wedge block of this utility model;

[0019] Figure 5 This is a schematic diagram of the installation of the trigger plate of this utility model;

[0020] Figure 6 This is a schematic diagram of the trigger component of this utility model;

[0021] Figure 7 This is a schematic diagram of the slide groove of this utility model.

[0022] In the diagram: 1. Grinding machine; 2. Headstock; 3. Tailstock; 4. Clamping assembly; 41. Mounting flange; 42. Fixed jaw; 421. Ball bearing; 43. Movable jaw; 431. First wedge block; 432. Synchronization groove; 5. Trigger assembly; 51. Trigger plate; 52. L-shaped jaw; 53. Second wedge block; 531. Synchronization bar; 6. Spring; 7. Ejector pin; 8. Slide bar; 9. Slide groove. Detailed Implementation

[0023] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0024] Additional aspects and advantages of this invention will be further set forth in the description which follows in conjunction with the accompanying drawings, and in part will be obvious from the description or may be learned by practice of the invention.

[0025] like Figures 1 to 7 As shown, a single-crystal silicon rod outer diameter processing equipment includes a grinding machine 1. The grinding machine 1 is equipped with a headstock 2 for driving the rotation of the single-crystal silicon rod and a tailstock 3 for clamping the free end of the single-crystal silicon rod. The output end of the headstock 2 is equipped with a clamping component 4 for limiting and clamping the single-crystal silicon rod and a trigger component 5 for controlling the clamping component 4 to clamp the single-crystal silicon rod under pressure. The tailstock 3 is fixedly installed with a pin 7 at the position corresponding to the axis of the clamping component 4. In use, one end of the single-crystal silicon rod is inserted into the clamping component 4. As the silicon rod is inserted, its end contacts and presses inward against the trigger component 5. The trigger component 5 then controls the clamping component 4 to automatically clamp the single-crystal silicon rod, thereby clamping and fixing the single-crystal silicon rod. After clamping, the position of the silicon rod remains unchanged. The tailstock 3 drives the pin 7 to clamp the other end of the silicon rod, limiting its lateral displacement, while maintaining the clamping state of the movable jaw 43. Subsequently, the headstock 2 drives the mounting flange 41 to rotate, causing the silicon rod to rotate synchronously. At the same time, the grinding disc of the grinding machine 1 processes the outer diameter of the silicon rod.

[0026] like Figure 2 , Figure 5 and Figure 6As shown, the clamping assembly 4 includes a mounting flange 41 fixedly installed at the output end of the head frame 2. Three fixed jaws 42 are fixedly provided on the side of the mounting flange 41 away from the head frame 2. The three fixed jaws 42 are arranged in a circumferential array. A movable jaw 43 is slidably installed radially between each pair of adjacent fixed jaws 42. The fixed jaws 42 are arc-shaped and have chamfered openings. Multiple balls 421 are evenly installed on the side of the fixed jaws 42 facing the clamping axis. Slide strips 8 are fixedly provided on both sides of the fixed jaws 42. Slide grooves 9 are provided on the movable jaws 43 corresponding to the positions of the slide strips 8. One end of the single crystal silicon rod is inserted between the three fixed jaws 42 under the guidance of the chamfered opening of the fixed jaws 42. During this process, the balls 421 on the fixed jaws 42 can effectively reduce the insertion resistance and reduce the wear on the surface of the silicon rod. After the silicon rod is inserted, the movable jaws 43 move along the slide grooves 9 towards the silicon rod under the limiting action of the slide strips 8, thereby clamping and fixing the single crystal silicon rod.

[0027] like Figures 4 to 7 As shown, the trigger assembly 5 includes a trigger plate 51 slidably mounted axially inside three fixed grippers 42. Each trigger plate 51 has an L-shaped claw 52 fixedly mounted at the position corresponding to each movable gripper 43. Multiple first wedge blocks 431 are fixedly mounted on the back side of each movable gripper 43. Each L-shaped claw 52 has a second wedge block 53 fixedly mounted at the position corresponding to each first wedge block 431. A synchronization bar 531 is fixedly mounted on the wedge-shaped surface of the second wedge block 53. A synchronization groove 432 for limiting the synchronization bar 531 is formed on the wedge-shaped surface of the first wedge block 431. A spring 6 is provided on the side of the trigger plate 51 near the mounting flange 41. As the silicon rod is inserted, its end contacts and presses inward against the trigger plate 51, causing the trigger plate 51 to... The compression spring 6 simultaneously drives the L-shaped claw 52 to move inward along the clamping axis. At this time, the second wedge block 53 on the L-shaped claw 52 pushes the first wedge block 431, causing the movable claw 43 to move along the slide groove 9 towards the silicon rod under the limiting action of the slide bar 8, thereby clamping and fixing the single crystal silicon rod. After processing, the tailstock 3 drives the ejector pin 7 to release the single crystal silicon rod. At this time, the spring 6 resets and pushes the trigger plate 51, driving the L-shaped claw 52 to return to its original position. The L-shaped claw 52 slides along the synchronization groove 432 through the synchronization bar 531 on the second wedge block 53, pulling the movable claw 43 away from the silicon rod, thereby achieving automatic release. This eliminates the need for manual tightening or loosening of the claw, reduces manual intervention and loading / unloading time, and improves the continuity of batch processing.

[0028] The work process is as follows:

[0029] S1: As Figure 2 and Figure 3 As shown, during use, one end of the single crystal silicon rod is inserted between the three fixed clamps 42 under the chamfered guide at the opening of the fixed clamp 42. During this process, the ball bearings 421 on the fixed clamps 42 can effectively reduce the insertion resistance and reduce the wear on the surface of the silicon rod.

[0030] S2: As Figures 3 to 5 As shown, as the silicon rod is inserted, its end contacts and presses inward against the trigger plate 51, causing the trigger plate 51 to compress the spring 6, and at the same time driving the L-shaped claw 52 to move inward along the clamping axis.

[0031] S3: As Figures 4 to 6 As shown, at this time, the second wedge block 53 on the L-shaped claw 52 pushes the first wedge block 431, so that the movable claw 43 moves along the slide groove 9 towards the silicon rod under the limiting action of the slide bar 8, thereby achieving the clamping and fixing of the single crystal silicon rod.

[0032] S4: As Figure 1 and Figure 2 As shown, after clamping, keeping the silicon rod in the same position, the tailstock 3 drives the ejector pin 7 to press against the other end of the silicon rod, restricting its lateral displacement, while maintaining the clamping state of the movable jaw 43. Subsequently, the headstock 2 drives the mounting flange 41 to rotate, causing the silicon rod to rotate synchronously, and the grinding disc of the grinding machine 1 processes the outer circle of the silicon rod;

[0033] S5: As Figure 1 , Figure 4 and Figure 7 As shown, after processing is completed, the tailstock 3 drives the ejector pin 7 to release the single crystal silicon rod. At this time, the spring 6 resets and pushes the trigger plate 51 to drive the L-shaped claw 52 back to its original position. The L-shaped claw 52 slides along the synchronous groove 432 through the synchronous bar 531 on the second wedge block 53, pulling the movable gripper 43 away from the silicon rod to achieve automatic release and facilitate quick removal of the silicon rod.

[0034] S6: As Figure 2 As shown, through the above operations, the movable gripper 43 automatically clamps when the silicon rod is inserted and automatically releases after processing, eliminating the need for manual tightening or loosening of the gripper, reducing manual intervention and loading / unloading time, and improving the continuity of batch processing.

[0035] In this application, the grinding machine 1, headstock 2, and tailstock 3 are known technologies in this field, and therefore their specific structures and working principles are not described in detail.

[0036] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A single-crystal silicon rod outer diameter processing equipment, characterized in that: The equipment includes a grinding machine (1), which is provided with a headstock (2) for driving the rotation of a single crystal silicon rod and a tailstock (3) for clamping the free end of the single crystal silicon rod. The output end of the headstock (2) is provided with a clamping assembly (4) for limiting and clamping the single crystal silicon rod and a triggering assembly (5) for controlling the clamping assembly (4) to clamp the single crystal silicon rod under pressure. The tailstock (3) is fixedly installed with a pin (7) at the position corresponding to the axis of the clamping assembly (4).

2. The single-crystal silicon rod outer diameter processing equipment according to claim 1, characterized in that: The clamping assembly (4) includes a mounting flange (41) fixedly installed at the output end of the head frame (2). Three fixed clamps (42) are fixedly provided on the side of the mounting flange (41) away from the head frame (2). The three fixed clamps (42) are arranged in a circumferential array. A movable clamp (43) is slidably installed between two adjacent fixed clamps (42) in the radial direction.

3. The single-crystal silicon rod outer diameter processing equipment according to claim 2, characterized in that: The trigger assembly (5) includes a trigger plate (51) that is slidably mounted on the inner side of the three fixed grippers (42) along the axial direction. The trigger plate (51) is fixedly provided with an L-shaped claw (52) at the position corresponding to each of the movable grippers (43). A plurality of first wedge blocks (431) are fixedly provided on the back side of the movable grippers (43). A second wedge block (53) is fixedly provided at the position corresponding to each of the first wedge blocks (431) of the L-shaped claw (52).

4. The single-crystal silicon rod outer diameter processing equipment according to claim 2, characterized in that: The fixed gripper (42) is arc-shaped and has a chamfer at the opening. Multiple balls (421) are evenly installed on the side of the fixed gripper (42) facing the clamping axis.

5. The single-crystal silicon rod outer diameter processing equipment according to claim 2, characterized in that: Both sides of the fixed gripper (42) are fixedly provided with slide bars (8), and the movable gripper (43) is provided with a slide groove (9) corresponding to the position of the slide bar (8).

6. The single-crystal silicon rod outer diameter processing equipment according to claim 3, characterized in that: The second wedge block (53) has a timing bar (531) fixedly provided on its wedge surface, and the first wedge block (431) has a timing groove (432) for limiting the timing bar (531) on its wedge surface.

7. The single-crystal silicon rod outer diameter processing equipment according to claim 3, characterized in that: A spring (6) is provided on the side of the trigger plate (51) near the mounting flange (41).

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