Small size low particle valve

Abstract

The utility model discloses a small size low particle valve, including casing and drive assembly. The casing is by flange, casing mainboard, casing lateral plate and long method flange constitute, and drive assembly includes valve core, cylinder, bellows, connecting rod, piston, bellows protection shell etc. The bellows is installed upside down, and connecting rod passes through guide bush and is connected with valve core, and the particle produced by connecting rod friction is limited in the inside of bellows and cylinder, avoids into valve cavity. The piston is single -sided closed thin -walled long circular cylinder structure, and the inside contains bellows protection shell, to save installation space. The cylinder has sealing area and non - sealed area, and the non - sealed area can add position detection part. The double -layer sealing structure is used between valve core and flange, forms independent closed space, and ensures low particle characteristic. The utility model discloses the valve in guaranteeing low particle performance, effectively shortens the overall length.

Description

Technical Field

[0001] This utility model relates to the field of vacuum valves, and in particular to a small-sized low-particle valve. Background Technology

[0002] Vacuum valves are components used in vacuum systems to change the direction of airflow, regulate the flow rate, and disconnect or connect pipelines. Existing vacuum valves are widely used in semiconductor equipment, scientific research, and scientific instruments. With the increasing demands for cleanliness in semiconductor processes and high-vacuum environments, vacuum valves need to possess characteristics such as high temperature resistance, radiation resistance, low particle content, and small installation space.

[0003] However, existing vacuum valves typically employ transmission structures such as hinges, rollers, balls, and springs. These structures are prone to generating particles during metal-to-metal contact, leading to internal contamination of the valve cavity and making it difficult to meet low-particle requirements. Furthermore, most existing cylinders are independently mounted outside the valve body, requiring connecting parts between them and the bellows. This results in a relatively large overall valve body length, insufficient structural compactness, and unsuitability for applications with limited installation space. Therefore, existing vacuum valves still suffer from significant particulate contamination and a large overall size, necessitating urgent improvement. Utility Model Content

[0004] The purpose of this invention is to provide a small-sized low-particle valve to achieve effective particle isolation, reduce internal contamination of the valve body, and shorten the overall structural length to meet the needs of applications with limited installation space.

[0005] This utility model is achieved by the following technical solution: a small-sized low-particle valve, characterized in that it includes a housing and a drive assembly, the drive assembly including a valve core, a cylinder, a bellows, a piston and a connecting rod that cooperates with it, the bellows is disposed inside the housing and connected to the connecting rod, and the piston is used to drive the valve core to move, so as to realize the opening and closing of the valve.

[0006] Furthermore, the bellows adopts an inverted installation structure, with its upper end fixed in the bellows seat and its lower end connected to the connecting rod. The connecting rod passes through the guide sleeve and drives the valve core to move. The particles generated by the friction between the connecting rod and the guide sleeve are confined inside the bellows and cylinder.

[0007] Furthermore, the bellows is coaxially provided with a bellows protective shell for supporting and connecting the bellows.

[0008] Furthermore, the piston is a single-sided closed thin-walled long cylindrical structure, which can accommodate a bellows protective shell, thereby saving installation space for the cylinder connecting plate and shortening the overall length of the valve body.

[0009] Furthermore, the cylinder is provided with a through hole and a countersunk hole for air passages, which are used to drive the piston to move upward and downward, respectively. The cylinder diameter is D1 and the piston diameter is D2, with a diameter difference between them, so as to form a sufficiently large pressure differential area under the action of gas.

[0010] Furthermore, the upper part of the cylinder is a sealed area, and the lower part is a non-sealed area. The area between seal one and seal two is the sealed area, and the area below seal one is the non-sealed area. The piston maintains airtightness in the sealed area, and a magnetic ring or mechanical indicator can be installed in the non-sealed area.

[0011] Furthermore, a double-layer sealing structure is adopted between the valve core and flange A. Flange A has a sealing surface one and a sealing surface two. The valve core is provided with corresponding sealing profile one and sealing profile two, which fit together to form a closed space when the valve is closed.

[0012] Furthermore, the base of the drive assembly is connected to the upper end cover by a column, which is embedded inside the cylinder to enhance the stability and impact resistance of the drive assembly.

[0013] The small-sized low-particle valve described in this utility model has the following beneficial effects: The bellows employs an inverted installation structure, effectively preventing friction particles from the connecting rod from entering the valve cavity, thus significantly reducing particle contamination. Simultaneously, the double-layer sealing structure between the valve core and the flange creates an independent closed space when the valve is closed, further preventing particle entry. The piston is designed as a single-sided closed, thin-walled, long cylindrical piston, capable of accommodating the bellows protective shell. Compared to traditional cylinder structures, this saves space occupied by the cylinder and bellows connection, significantly shortening the overall valve body length. The upper part of the cylinder is a sealed area, while the lower part is a non-sealed area. Components such as magnetic rings and mechanical indicators can be flexibly installed in the non-sealed area for valve status detection and display. The base of the drive assembly is connected to the upper end cover via a column embedded inside the cylinder, improving the stability and impact resistance of the drive assembly and extending the valve's service life. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. The drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of a small-sized low-particle valve in the closed state. Figure 2 A schematic diagram of the open state of a small-sized low-particle valve; Figure 3 An exploded view of the shaft side of a small-sized low-particle valve; Figure 4 This is a schematic diagram of the air path for the drive component; Figure 5 This is a schematic diagram of the driving components; Figure 6 This is a schematic diagram of the flange sealing surface; Figure 7 This is a schematic diagram of the valve core seal profile; In the diagram: 1. Housing; 1-1. Flange A; 1-1-1. Sealing Surface 1; 1-1-2. Sealing Surface 2; 1-2. Flange B; 1-3. Housing Main Plate; 1-4. Housing Side Plate; 1-5. Long Flange; 2. Drive Assembly; 2-1. Valve Core; 2-1-1. Sealing Profile 1; 2-1-2. Sealing Profile 2; 2-2. Cylinder; 2-2-1. Through Hole; 2-2-2. Countersunk Air Passage; 2-3. Bellows; 2- 4. Guide sleeve; 2-5. Connecting rod; 2-6. Bellows seat; 2-7. Piston; 2-7-1. Magnetic ring; 2-7-2. Mechanical indicator; 2-8. Upper end cover; 2-9. Base; 2-10. Column; 2-11. Seal 1; 2-12. Seal 2; 2-13. Seal 3; 2-14. Guide ring; 2-15. Seal 4; 2-16. Seal 5; 2-17. Bellows protective shell; 3. Sealing ring. Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0017] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention. Example

[0018] like Figure 1 As shown, this embodiment provides a small-sized low-particle valve, including a housing 1 and a drive assembly 2.

[0019] The housing 1 is composed of flange A1-1, flange B1-2, main housing plate 1-3, side housing plate 1-4, and long flange 1-5. Flange A1-1 and flange B1-2 are located at both ends of the valve body and are used to connect to the vacuum pipeline. The main housing plate 1-3 and side housing plate 1-4 are used to form the overall structure of the valve body and provide rigid support. The long flange 1-5 is used to seal with the base 2-9 of the drive assembly 2, and a sealing ring 3 is provided between the two.

[0020] The drive assembly 2 includes a valve core 2-1, a cylinder 2-2, a bellows 2-3, a guide sleeve 2-4, a connecting rod 2-5, a bellows seat 2-6, a piston 2-7, an upper end cap 2-8, a base 2-9, a column 2-10, a first seal 2-11, a second seal 2-12, a third seal 2-13, a guide ring 2-14, a fourth seal 2-15, a fifth seal 2-16, and a bellows protective shell 2-17. The bellows 2-3 is installed inverted, with its upper end fixed in the bellows seat 2-6 and its lower end connected to the connecting rod 2-5. The connecting rod passes through the guide sleeve 2-4, driving the valve core 2-1 to move up and down. The particles generated by the friction between the connecting rod 2-5 and the guide sleeve 2-4 are confined inside the bellows 2-3 and the cylinder 2-2. The bellows 2-3 is supported and connected by the bellows protective shell 2-17. The upper end of the bellows protective shell 2-17 is connected to the bellows seat 2-6 and the lower end is connected to the base 2-9.

[0021] The base 2-9 and the upper cover 2-8 are fixedly connected by a column 2-10. The column is embedded in the cylinder 2-2, forming a stable frame structure for the drive assembly 2, which can withstand long-term pneumatic drive impact. The seal 2-13 is located between the base 2-9 and the long flange 1-5 to ensure the sealing between the drive assembly 2 and the housing 1.

[0022] The cylinder 2-2 has a through hole 2-2-1 on its side for inputting gas to push the piston 2-7 upward. It also has a countersunk hole and its corresponding gas passage 2-2-2 for pushing the piston downward. The cylinder 2-2 has a diameter of D1, and the piston 2-7 has a diameter of D2. There is a diameter difference D1-D2 between the cylinder 2-2 and the piston 2-7, thus creating a sufficiently large pressure differential area under the action of gas, achieving effective driving of the piston 2-7. A guide ring 2-14 is arranged between the cylinder 2-2 and the piston 2-7 to guide the piston 2-7 and ensure its linear reciprocating motion.

[0023] The upper part of cylinder 2-2 is a sealed area, and the lower part is a non-sealed area. Specifically, the area between seal 2-11 and seal 2-12 is the sealed area, while the area below seal 2-11 is the non-sealed area. Piston 2-7 maintains airtightness within the sealed area, while components such as a magnetic ring 2-7-1 and a mechanical indicator 2-7-2 can be installed in the non-sealed area for position detection or status display. Piston 2-7 is a single-sided closed, thin-walled, long cylindrical structure that can accommodate a bellows protective shell 2-17. Compared to traditional cylinder structures, this saves installation space for the cylinder connecting plate and significantly shortens the overall length of the valve body.

[0024] A double-layer sealing structure is used between valve core 2-1 and flange A1-1. Flange A1-1 has sealing surface 1-1-1 and sealing surface 1-1-2, and valve core 2-1 has corresponding sealing profiles 2-1-1 and 2-1-2. In the closed state, the two fit together to form a closed space. Because valve core 2-1 is in direct contact with the sealing surface of flange A1-1, and particles generated during the movement of the connecting rod cannot enter the valve body, low-particle characteristics are ensured.

[0025] With the above structure, the vacuum valve provided in this embodiment effectively shortens the overall length and reduces the installation space requirement while ensuring low particle performance. It is suitable for semiconductor equipment, scientific research devices and other vacuum systems with strict requirements for low particle and miniaturization.

[0026] The above embodiments describe the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Modifications and variations made by those skilled in the art without departing from the spirit and scope of this utility model should be protected within the scope of the appended claims.

Claims

1. A small-sized low-particle valve, characterized in that, The device includes a housing (1) and a drive assembly (2). The drive assembly (2) includes a valve core (2-1), a cylinder (2-2), a bellows (2-3), a piston (2-7), and a connecting rod (2-5) that cooperates with it. The bellows (2-3) is disposed inside the housing (1) and connected to the connecting rod (2-5). The piston (2-7) is used to drive the valve core (2-1) to move, so as to realize the opening and closing of the valve.

2. The small-sized low-particle valve according to claim 1, characterized in that, The bellows (2-3) adopts an inverted installation structure. Its upper end is fixed in the bellows seat (2-6), and its lower end is connected to the connecting rod (2-5). The connecting rod (2-5) passes through the guide sleeve (2-4) and drives the valve core (2-1) to move. The particles generated by the friction between the connecting rod (2-5) and the guide sleeve (2-4) are confined inside the bellows (2-3) and the cylinder (2-2).

3. A small-sized low-particle valve according to claim 2, characterized in that, The bellows (2-3) is coaxially provided with a bellows protective shell (2-17) for supporting and connecting the bellows (2-3).

4. A small-sized low-particle valve according to claim 1, characterized in that, The piston (2-7) is a thin-walled long cylindrical structure with one side closed, which can accommodate the bellows protective shell (2-17) inside, thereby saving the installation space of the cylinder connecting plate and shortening the overall length of the valve body.

5. A small-sized low-particle valve according to claim 1, characterized in that, The cylinder (2-2) is provided with a through hole (2-2-1) and a countersunk hole air passage (2-2-2), which are used to drive the piston (2-7) to move up and down respectively. The cylinder (2-2) has a diameter of D1 and the piston (2-7) has a diameter of D2, with a diameter difference (D1-D2) between them, so as to form a sufficiently large pressure differential area under the action of gas.

6. A small-sized low-particle valve according to claim 1, characterized in that, The upper part of the cylinder (2-2) is a sealed area, and the lower part is a non-sealed area. The area between the first seal (2-11) and the second seal (2-12) is a sealed area, and the area below the first seal (2-11) is a non-sealed area. The piston (2-7) maintains airtightness in the sealed area, and a magnetic ring (2-7-1) or a mechanical indicator (2-7-2) can be installed in the non-sealed area.

7. A small-sized low-particle valve according to claim 1, characterized in that, The valve core (2-1) and flange A (1-1) adopt a double-layer sealing structure. The flange A (1-1) has a sealing surface one (1-1-1) and a sealing surface two (1-1-2). The valve core (2-1) is provided with corresponding sealing profile one (2-1-1) and sealing profile two (2-1-2). When the valve is closed, they fit together to form a closed space.

8. A small-sized low-particle valve according to claim 1, characterized in that, The base (2-9) of the drive assembly (2) is connected to the upper end cover (2-8) by a column (2-10), which is embedded inside the cylinder (2-2) to enhance the stability and impact resistance of the drive assembly (2).

Images