Dual-purpose sample stage with auxiliary positioning function

Abstract

The application discloses a dual-purpose sample stage with an auxiliary positioning function, which comprises a base, the base is formed with a platform and a groove, the platform is suitable for carrying a planar sample, and the groove is suitable for placing a cross-section sample; wherein the platform is formed with multiple partitions, each partition is suitable for carrying a planar sample, and each partition is provided with a positioning indicating piece; at least one positioning assembly is arranged in the groove, the positioning assembly is suitable for fixing the cross-section sample, and the groove is also provided with a positioning indicating piece. The application can realize loading of the planar sample and the cross-section sample, and further realize synchronous observation or testing of the planar sample and the cross-section sample; meanwhile, the planar sample or the cross-section sample can be accurately positioned, which is helpful to keeping the repeatability and consistency of a sample observation point.

Description

Technical Field

[0001] This application relates to the field of scanning electron microscope sample stage technology, and in particular to a dual-purpose sample stage with auxiliary positioning function. Background Technology

[0002] Scanning electron microscopy (SEM) achieves nanometer-resolution imaging through the interaction of an electron beam with the sample. In materials science and life sciences, SEM is widely used as an indispensable research tool for analyzing the microstructure of metallic materials, detecting surface defects in ceramics, observing the phase states of polymers, analyzing mineral components, and characterizing the microstructure of food.

[0003] Currently, scanning electron microscope (SEM) sample stages have relatively simple structures and limited functions. Planar and cross-sectional sample stages are separate and lack effective integration. In practice, due to the significant height difference between planar and cross-sectional samples, traditional stages cannot achieve coplanar testing, forcing researchers to use batch sample introduction methods, leading to reduced equipment efficiency. Secondly, existing sample stages often lack precise positioning markers, making it difficult to accurately reproduce previous observation points during multiple observations, thus affecting the reproducibility of experimental data. Utility Model Content

[0004] This application aims to address at least one of the technical problems existing in the prior art. To this end, one objective of this application is to propose a dual-purpose sample stage with auxiliary positioning function, aiming to solve the technical problems of existing sample stages having limited functionality and inaccurate positioning.

[0005] This application proposes a dual-purpose sample stage with auxiliary positioning function. The sample stage includes a base, the base having a platform and a groove. The platform is suitable for supporting a planar sample, and the groove is suitable for placing a cross-sectional sample. The platform has multiple partitions, each partition being suitable for supporting a planar sample, and each partition being provided with a positioning indicator. At least one positioning component is provided in the groove, the positioning component being suitable for fixing the cross-sectional sample, and the groove is also provided with a positioning indicator.

[0006] According to the sample stage of this application, it is possible to load planar samples and cross-sectional samples, and further realize the simultaneous observation or testing of planar samples and cross-sectional samples; at the same time, it can accurately position planar samples or cross-sectional samples, which helps to maintain the repeatability and consistency of sample observation points and facilitates the observation or testing process.

[0007] According to some embodiments of this application, the positioning component includes elastic clips, which are configured to be at least two, with the two elastic clips disposed opposite each other on the inner wall of the groove to be suitable for clamping the cross-sectional sample.

[0008] According to some embodiments of this application, the bottom of the substrate is provided with at least two inserts, which are adapted to be connected with an external structure to limit the position of the sample stage.

[0009] According to some embodiments of this application, the positioning indicator is constructed as a scale line.

[0010] According to some embodiments of this application, the positioning component further includes a movable base plate, which is movably disposed in the groove in the vertical direction and is suitable for bearing the cross-sectional sample.

[0011] According to some embodiments of this application, the positioning component further includes an adjustment component, which is connected to the movable base plate and the bottom wall of the groove. The adjustment component is adapted to adjust the distance between the movable base plate and the bottom wall of the groove to adjust the fixed position of the cross-sectional sample.

[0012] According to some embodiments of this application, a limiting element is provided on the platform, which is adapted to restrict the position of the planar sample.

[0013] According to some embodiments of this application, an anti-slip portion is formed on the platform.

[0014] According to some embodiments of this application, the positioning components are constructed as multiple sets, and the multiple sets of positioning components are spaced apart along a first direction.

[0015] According to some embodiments of this application, the substrate is made of a metal alloy material.

[0016] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0017] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of the sample stage according to Embodiment 1 of this application; Figure 2 This is a structural cross-sectional view of the sample stage according to Embodiment 1 of this application; Figure 3 This is a schematic diagram of the sample stage according to Embodiment 2 of this application; Figure 4 This is a cross-sectional view of the sample stage according to Embodiment 2 of this application; Figure 5 This is a schematic diagram of the platform partitioning of the sample stage according to some embodiments of this application.

[0018] Figure label: Base 1; Platform 2; Groove 3; Elastic clamp 4; Insert rod 5; Movable base plate 6; Adjustment component 7. Detailed Implementation

[0019] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0020] The following is for reference. Figures 1-5 This application describes a dual-purpose sample stage with auxiliary positioning function according to an embodiment of the present application.

[0021] This application proposes a dual-purpose sample stage with auxiliary positioning function. The sample stage includes a base 1, the base 1 having a platform 2 and a groove 3. The platform 2 is suitable for supporting a planar sample, and the groove 3 is suitable for placing a cross-sectional sample. The platform 2 has multiple partitions, each partition being suitable for supporting a planar sample, and each partition being provided with a positioning indicator. At least one positioning component is provided in the groove 3, the positioning component being suitable for fixing the cross-sectional sample, and the groove 3 is also provided with a positioning indicator.

[0022] According to the dual-purpose sample stage of this application, platform 2 is suitable for supporting planar samples, and groove 3 is suitable for placing cross-sectional samples. This application can achieve dual-purpose use for planar and cross-sectional samples, enabling simultaneous testing of planar and cross-sectional samples when using a scanning electron microscope. Furthermore, platform 2 is divided into multiple partitions. By setting these partitions and combining them with positioning indicators, it can support multiple planar samples and facilitate precise positioning of the planar samples for observation or testing. Simultaneously, it ensures the repeatability and consistency of sample observation points when multiple planar samples are placed. The positioning components within groove 3 enable stable loading of cross-sectional samples. Combined with positioning indicators, this allows for precise positioning of the cross-sectional samples for observation or testing, while maintaining the repeatability and consistency of sample observation points.

[0023] The dual-purpose sample stage of this application enables the loading of planar and cross-sectional samples, and further allows for simultaneous observation or testing of planar and cross-sectional samples in a coplanar manner. Simultaneously, it allows for precise positioning of planar or cross-sectional samples, helping to maintain the repeatability and consistency of sample observation points and facilitating the observation or testing process. This application solves the problems of simultaneous analysis of planar and cross-sectional samples and poor reproducibility of observation points in existing technologies, improving detection efficiency and repeatability, and enhancing the accuracy of sample analysis results.

[0024] In some embodiments, the base 1 has a length of 60 mm, a width of 60 mm, and a height of 10 mm; a portion of the base 1 forms the aforementioned platform 2, and a portion forms the aforementioned groove 3. The groove 3 has a length of 60 mm, a width of 20 mm, and a depth of 10 mm. Figure 1-5 As shown, in some embodiments, the platform 2 is constructed as two, which are disposed on both sides of the groove 3. Each platform 2 forms 8 partitions, and the two platforms 2 form a total of 16 partitions A to P. Each partition is 15 mm long and 5 mm wide.

[0025] According to some embodiments of this application, the positioning component includes elastic clips 4, which are configured as at least two, with the two elastic clips 4 disposed opposite each other on the inner wall of the groove 3 to accommodate the cross-sectional sample. In this embodiment, the clamping and fixing of the cross-sectional sample is achieved by setting the elastic clips 4; the elastic clips 4 have high adaptability and can accommodate cross-sectional samples of different sizes and shapes; at the same time, they can make the loading operation of the cross-sectional sample simple and efficient.

[0026] Furthermore, one end of the elastic clip 4 is fixedly connected to the inner wall of the groove 3 by a fastener to press the two ends of the sample and facilitate sample positioning; the elastic clip 4 can be constructed as a flat plate or as a curved shape; the end of the elastic clip 4 away from the fastener 6 is provided with a raised structure to facilitate lifting the elastic clip 4 to complete the clamping and pressing operation.

[0027] According to some embodiments of this application, at least two insertion rods 5 are provided at the bottom of the substrate 1. The insertion rods 5 are adapted to connect with an external structure to limit the position of the sample stage. In this embodiment, by setting the insertion rods 5 to achieve the assembly connection between the substrate 1 and the external structure, it is possible to ensure that the angle and position of the sample stage remain consistent each time, which facilitates the reproduction of observation points. Here, the external structure mainly refers to the sample base of the scanning electron microscope. When observing the sample with the scanning electron microscope, the sample stage needs to be installed on the sample base. The insertion rods 5 in this embodiment can play a role in connection and limitation. The insertion rods 5 are constructed in at least two parts, which can improve the stability of the structural connection while ensuring the assembly angle of the sample stage.

[0028] In some embodiments, the length of the insertion rod 5 is 7 mm, and the distance between the two insertion rods 5 is 18 mm.

[0029] In some embodiments, the insertion rod 5 may be integrally formed with the base 1 or fixedly installed on the bottom of the base 1.

[0030] In some embodiments, the connection length between the insertion rod 5 and the substrate 1 is adjustable, so that the connection distance between the substrate 1 and the external structure is adjustable, thereby improving the adaptability of the sample stage.

[0031] Furthermore, the insertion rod 5 can be connected to the sample base of the scanning electron microscope via fasteners to improve the stability of the sample stage installation. The fasteners can be constructed as threaded parts; in some embodiments, the sample base has a threaded hole, into which the insertion rod 5 extends and is fixedly connected by threaded fasteners.

[0032] According to some embodiments of this application, the positioning indicator is constructed as scale lines. In this embodiment, the positioning indicator is constructed as scale lines, which can be directly machined and displayed on the surface of platform 2. The structure is simple and clear, and it can provide a direct reference for sample placement and positioning. The scale lines can be constructed as a coordinate axis system to facilitate sample positioning in multiple directions.

[0033] Furthermore, each partition can be set with independent scale lines to facilitate the individual positioning of the planar samples placed in each partition, thereby improving the reproducibility of sample observation points.

[0034] According to some embodiments of this application, the positioning component further includes a movable base plate 6, which is movably disposed within the groove 3 in the vertical direction. The movable base plate 6 is suitable for supporting the cross-sectional sample. Figure 3 , 4 As shown, in this embodiment, the movable base plate 6 can support the cross-sectional sample. The movable base plate 6 is movable in the vertical direction to accommodate cross-sectional samples of different sizes. By adjusting the position of the movable base plate 6 in the vertical direction, the observation distance of the cross-sectional sample can be adjusted to facilitate observation and testing.

[0035] According to some embodiments of this application, the positioning component further includes an adjustment component 7, which connects the movable base plate 6 and the bottom wall of the groove 3. The adjustment component 7 is adapted to adjust the distance between the movable base plate 6 and the bottom wall of the groove 3 to adjust the fixed position of the cross-sectional sample. Figure 3 , 4 As shown, in this embodiment, the position of the movable base plate 6 is adjusted by setting the adjustment component 7. Specifically, the adjustment component 7 can be constructed as an independent telescopic bracket, or it can be constructed with the movable base plate 6 as a lead screw and slider assembly, etc.

[0036] According to some embodiments of this application, a limiting member is provided on platform 2, which is adapted to restrict the position of the planar sample. In this embodiment, locking the position of the planar sample by the limiting member can improve the stability of the sample during the observation process. Specifically, the limiting member can be constructed as conductive tape, and the planar sample is pasted onto the surface of platform 2 by the conductive tape during observation.

[0037] According to some embodiments of this application, an anti-slip portion is formed on the platform 2. In this embodiment, the anti-slip portion can improve the stability of the planar sample placement and prevent slippage. Specifically, the anti-slip portion can be constructed as anti-slip textures, etc.

[0038] According to some embodiments of this application, the positioning components are constructed as multiple sets, and the multiple sets of positioning components are spaced apart along a first direction. In this embodiment, such as Figure 1-5As shown, the first direction is the extending direction of the groove 3; by setting multiple positioning components in the groove 3, multiple cross-sectional samples can be supported simultaneously; each positioning component can be independently designed or adjusted to support cross-sectional samples of different sizes simultaneously. Furthermore, multiple partitions can also be set in the groove 3.

[0039] According to some embodiments of this application, the substrate 1 is made of a metal alloy material. In this embodiment, the substrate 1 is made of a metal alloy material, which can achieve good conductivity and meet the observation requirements of scanning electron microscopy. Specifically, the substrate 1 can be made of aluminum alloy material.

[0040] In practical application, the sample stage of this application can be used to mark the coordinate values ​​of the observation points during scanning electron microscope observation using the coordinate system built into the scanning electron microscope. When observing again, the insertion rod 5 is used to ensure that the position of the sample stage is consistent. Then, the observation points are roughly located by using the partitions set by the platform 2 and / or the groove 3. Finally, the sample position is further locked according to the coordinate values ​​provided by the scale lines, so as to achieve accurate positioning of the observation points.

[0041] In the description of this application, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0042] In the description of this application, "first feature" and "second feature" may include one or more of the features.

[0043] In the description of this application, "multiple" means two or more.

[0044] In the description of this application, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or the first and second features being in contact through another feature between them.

[0045] In the description of this application, the terms "above," "over," and "on top" for the first feature and the second feature include the first feature being directly above or diagonally above the second feature, or simply indicate that the first feature is at a higher horizontal level than the second feature.

[0046] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0047] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A dual-purpose sample stage with auxiliary positioning function, characterized in that, include: A substrate having a platform and a groove, the platform being adapted to support a planar sample and the groove being adapted to hold a cross-sectional sample; wherein... The platform is divided into multiple partitions, each partition being adapted to hold the planar sample, and each partition being provided with a positioning indicator. At least one positioning component is provided in the groove, the positioning component is adapted to fix the cross-sectional sample, and a positioning indicator is also provided in the groove.

2. The dual-purpose sample stage with auxiliary positioning function according to claim 1, characterized in that, The positioning component includes: The elastic clips are configured in the form of at least two clips, which are disposed opposite to each other on the inner wall of the groove to be suitable for clamping the cross-sectional sample.

3. The dual-purpose sample stage with auxiliary positioning function according to claim 1, characterized in that, The bottom of the substrate is provided with at least two insert rods, which are adapted to be connected with an external structure to limit the position of the sample stage.

4. The dual-purpose sample stage with auxiliary positioning function according to claim 1, characterized in that, The positioning indicator is constructed as a scale line.

5. The dual-purpose sample stage with auxiliary positioning function according to claim 2, characterized in that, The positioning component also includes: A movable base plate is movably disposed within the groove in the vertical direction, and the movable base plate is adapted to support the cross-sectional sample.

6. The dual-purpose sample stage with auxiliary positioning function according to claim 5, characterized in that, The positioning component also includes: An adjustment component is provided, which connects the movable base plate and the bottom wall of the groove. The adjustment component is adapted to adjust the distance between the movable base plate and the bottom wall of the groove, so as to adjust the fixed position of the cross-sectional sample.

7. The dual-purpose sample stage with auxiliary positioning function according to claim 1, characterized in that, The platform is provided with a limiting element, which is adapted to restrict the position of the planar sample.

8. The dual-purpose sample stage with auxiliary positioning function according to claim 1, characterized in that, The platform has anti-slip features.

9. The dual-purpose sample stage with auxiliary positioning function according to claim 1, characterized in that, The positioning components are constructed in multiple groups, and the multiple groups of positioning components are spaced apart along the first direction.

10. The dual-purpose sample stage with auxiliary positioning function according to claim 1, characterized in that, The substrate is made of a metal alloy material.

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