Chemical liquid flow calibration sampling device and electroless plating equipment

Abstract

The utility model relates to the technical field of semiconductor manufacturing, provide a kind of chemical liquid flow calibration sampling device and chemical plating equipment.Chemical liquid flow calibration sampling device includes: liquid injection pipe, sampling tube and passage switching device;The liquid injection pipe is used to transport chemical liquid, and the outlet end of the liquid injection pipe is used to communicate with the inner cavity of chemical tank;The inlet end of the sampling tube is communicated with the liquid injection pipe, and the outlet end of the sampling tube is located outside the chemical tank;The passage switching device is used to switch the flow direction of chemical liquid in the liquid injection pipe, so that chemical liquid flows out along the outlet end of the liquid injection pipe or flows out along the outlet end of the sampling tube.The above-mentioned device can simplify the sampling process of chemical liquid, improve the calculation efficiency of flow deviation, and also reduce the risk of operation and the risk of chemical liquid contamination.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a chemical liquid flow calibration and sampling device and a chemical plating equipment. Background Technology

[0002] Chemical plating (CPL) is a metal deposition process that occurs through a controlled redox reaction catalyzed by a metal. Compared to electroplating, chemical plating offers advantages such as uniform coating, smaller pinholes, no need for DC power supply, ability to deposit on non-conductive surfaces, and certain unique properties. Furthermore, due to its lower wastewater discharge, less environmental pollution, and lower cost, chemical plating is widely used in the semiconductor industry and is gradually becoming an environmentally friendly surface treatment process.

[0003] For example, in semiconductors, electroless gold plating on PCBs (printed circuit boards) is a crucial coating process. This process deposits a thin, flat, and dense nickel-gold alloy layer on the surface of the PCB's pads and vias (PTHs). This gold layer primarily serves to prevent copper oxidation, provide good solderability, and reduce contact resistance, making it a key factor in ensuring product reliability. Electroless gold plating is an autocatalytic reaction that does not require external current. It deposits metal on a catalytically active surface (usually a pre-plated nickel layer) through chemical displacement. The reaction is carried out in a high-temperature bath (typically operating between 85°C and 95°C) to achieve a reasonable deposition rate and good plating quality.

[0004] In the electroless plating process, the product needs to be immersed in a chemical solution. The concentration of the chemical solution directly affects the performance parameters of the electroless plating. As the reaction proceeds, the effective components of the chemical solution are gradually consumed. To ensure consistent coating results, a precise amount of chemical solution needs to be added to the reaction tank.

[0005] Current methods for adding chemical solutions typically involve manually calibrating the dosage before preparing the gold bath, and then automatically adding the corresponding solution according to a set flow rate during production using a metering pump. However, with prolonged operation, flow rate deviations may occur, necessitating manual removal of the injection tube from the equipment. This requires sampling and measurement using a measuring cup to calculate the flow rate deviation and facilitate pump calibration. This sampling process is complex, inefficient, and poses safety hazards due to working at height. Furthermore, the injection tube needs to be removed from the equipment during sampling, increasing the risk of contamination as the outlet end is exposed to external elements.

[0006] Therefore, this utility model provides a chemical liquid flow calibration sampling device and a chemical plating equipment to simplify the chemical liquid sampling process, improve the calculation efficiency of flow deviation, and at the same time reduce operational risks and the risk of chemical liquid contamination. Utility Model Content

[0007] The purpose of this invention is to provide a chemical liquid flow calibration sampling device and a chemical plating equipment to simplify the chemical liquid sampling process, improve the calculation efficiency of flow deviation, and reduce operational risks and the risk of chemical liquid contamination.

[0008] This utility model provides a chemical liquid flow rate calibration sampling device, including: a liquid injection tube, a sampling tube, and a channel switching device;

[0009] The injection pipe is used to transport the chemical liquid, and the outlet end of the injection pipe is used to communicate with the inner cavity of the chemical tank.

[0010] The inlet end of the sampling tube is connected to the injection tube, and the outlet end of the sampling tube is located outside the chemical tank.

[0011] The flow path switching device is used to switch the flow direction of the chemical liquid in the injection tube, so that the chemical liquid flows out along the outlet end of the injection tube or along the outlet end of the sampling tube.

[0012] Optionally, the chemical liquid flow calibration sampling device further includes a metering container, the inner cavity of which is connected to the injection tube. The pathway switching device is also used to close the outlet end of the injection tube and allow the liquid in the injection tube to flow into the metering container, which is used to measure the amount of liquid in it.

[0013] Optionally, the injection tube includes a first tube and a second tube, the outlet end of the first tube is connected to the inner cavity of the metering container, the inlet end of the second tube is connected to the inner cavity of the metering container, and the sampling tube is connected to the second tube.

[0014] Optionally, the inlet end of the second pipeline is connected to the bottom of the inner cavity of the metering container.

[0015] Optionally, the outlet end of the first pipeline is connected to the top of the inner cavity of the metering container.

[0016] Optionally, the measuring container is provided with a scale, and the measuring container is made of a light-transmitting material.

[0017] Optionally, the pathway switching device includes a three-way valve;

[0018] The injection tube also includes a third pipeline;

[0019] The inlet of the three-way valve is connected to the outlet of the second pipeline, one outlet of the three-way valve is connected to the inlet of the sampling tube, the other outlet of the three-way valve is connected to the inlet of the third pipeline, and the outlet of the third pipeline is connected to the chemical tank.

[0020] Optionally, the pathway switching device includes a valve, which is disposed in the second pipeline to control the on / off state of the second pipeline.

[0021] This utility model also provides an electroless plating equipment, including a chemical tank and a liquid injection pump, as well as the above-mentioned chemical liquid flow rate calibration and sampling device;

[0022] The outlet end of the injection pipe is connected to the inner cavity of the chemical tank, and the inlet end of the injection pipe is connected to the outlet end of the injection pump.

[0023] Optionally, the electroless plating equipment further includes a circulation pump;

[0024] The chemical tank includes a first storage tank and a second storage tank, and the outlet end of the injection pipe is connected to the inner cavity of the first storage tank.

[0025] The inlet end of the circulation pump is connected to the inner cavity of the first liquid storage tank, and the outlet end of the circulation pump is connected to the inner cavity of the second liquid storage tank.

[0026] The second liquid storage tank is provided with an overflow port that communicates with its inner cavity, and the overflow port is connected to the inner cavity of the first liquid storage tank.

[0027] With this configuration, the aforementioned chemical liquid flow calibration sampling device uses a flow path switching device to switch the liquid flow direction of the injection tube. During normal electroless plating, the chemical liquid is switched so that it flows out through the outlet of the injection tube and then into the chemical tank, forming a coating on the product surface. When sampling is required, the chemical liquid is switched so that it flows out through the outlet of the sampling tube, facilitating manual sampling with a measuring cup to calculate the flow deviation of the injection pump. The flexible arrangement of the sampling tube and flow path switching device allows them to be placed near the ground for easy operation, simplifying the sampling process, improving sampling efficiency, and avoiding the safety hazards of working at height. Furthermore, during sampling, the injection tube does not need to be removed from the chemical tank, and the outlet of the injection tube will not come into contact with the outside environment, protecting the chemical liquid from external contamination. Attached Figure Description

[0028] Figure 1 This is a partial structural schematic diagram of a chemical plating apparatus according to an embodiment of the present invention.

[0029] In the attached diagram:

[0030] 10 - Injection tube; 11 - First line; 12 - Second line; 13 - Third line;

[0031] 20 - Sampling tube;

[0032] 30 - Path switching device; 31 - Three-way valve; 32 - Valve;

[0033] 40 - Measuring containers;

[0034] 50 - Chemical tank; 51 - First storage tank; 52 - Second storage tank;

[0035] 60 - Injection pump;

[0036] 70 - Delivery pipe;

[0037] 80-Liquid storage cylinder;

[0038] 90 - Toggle button;

[0039] 100 - Sampling container. Detailed Implementation

[0040] The chemical liquid flow calibration and sampling device and electroless plating equipment proposed in this utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.

[0041] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the terms “at least two” or “more than” are generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. Furthermore, the terms "installed," "connected," and "attached," as used in this utility model, and the term "set" on one element from another, should be interpreted broadly. They generally only indicate a connection, coupling, cooperation, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. They should not be construed as indicating or implying a spatial positional relationship between the two elements, meaning one element can be located inside, outside, above, below, or to one side of the other element, unless otherwise explicitly stated. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances. Additionally, directional terms such as above, below, up, down, upward, downward, left, and right are used relative to exemplary embodiments as shown in the figures, with upward or up direction pointing towards the top of the corresponding figure, and downward or down direction pointing towards the bottom of the corresponding figure.

[0042] This embodiment provides an electroless plating apparatus, including a chemical liquid flow rate calibration and sampling device, a chemical tank 50, and a liquid injection pump 60.

[0043] The chemical liquid flow calibration sampling device includes an injection tube 10, a sampling tube 20, a channel switching device 30, and a metering container 40.

[0044] The injection pipe 10 is used to transport chemical liquid, wherein the inlet end of the injection pipe 10 is connected to the outlet end of the injection pump 60, and the outlet end of the injection pipe 10 is connected to the inner cavity of the chemical tank 50.

[0045] The injection pump 60 can be a pump with adjustable flow rate, for example, by adjusting the stroke or frequency to achieve precise flow control. The injection pump 60 can be an existing metering pump, such as a plunger type, mechanical diaphragm type, or hydraulic diaphragm type metering pump, for example, purchasing an existing KM type metering pump.

[0046] like Figure 1 As shown, the inlet of the injection pump 60 is connected to the storage tank 80 through the delivery pipe 70. The injection pump 60 is used to draw the medicine stored in the storage tank 80 into the injection pipe 10 and inject it into the chemical tank 50 through the injection pipe 10.

[0047] The inlet end of the sampling tube 20 is connected to the injection tube 10, and the outlet end of the sampling tube 20 is located outside the chemical tank 50 for convenient sampling. Preferably, the outlet end of the sampling tube 20 extends to a position close to the ground to facilitate manual sampling through a measuring cup, thus avoiding the safety hazards caused by climbing during manual sampling.

[0048] The flow path switching device 30 is used to switch the flow direction of the chemical liquid in the injection tube 10, so that the chemical liquid flows out along the outlet end of the injection tube 10 or along the outlet end of the sampling tube 20. The flow path switching device 30 can be installed close to the ground for easy manual control to change the flow direction of the chemical liquid, thereby facilitating manual sampling. Alternatively, the flow path switching device 30 can be remotely controlled to switch the flow direction of the chemical liquid, avoiding the safety hazards associated with working at heights during manual sampling.

[0049] The aforementioned chemical liquid flow calibration sampling device uses a flow path switching device 30 to switch the liquid flow direction of the injection tube 10. During normal chemical plating, the chemical liquid is switched so that it flows out through the outlet of the injection tube 10 and then into the chemical tank 50, forming a coating on the product surface. When sampling is required, the chemical liquid is switched so that it flows out through the outlet of the sampling tube 20, facilitating manual sampling with a measuring cup to calculate the flow deviation of the injection pump 60. The flexible arrangement of the sampling tube 20 and the flow path switching device 30 allows them to be placed near the ground for easy operation, simplifying the sampling process, improving sampling efficiency, and avoiding the safety hazards of working at height. Furthermore, during sampling, the injection tube 10 does not need to be removed from the chemical tank 50, and its outlet will not come into contact with the outside environment, protecting the chemical liquid from external contamination.

[0050] The aforementioned chemical liquid flow calibration and sampling device has a simple structure and low improvement cost. This chemical liquid flow calibration and sampling device is suitable for almost all chemical tanks that require quantitative addition of chemical liquids, which facilitates the measurement of the amount added before bath preparation and the monitoring of the amount added during the production process, reducing the safety risks of personnel entering the machine and the risk of chemical liquid contamination.

[0051] Please continue to refer to this. Figure 1 As shown, the inner cavity of the metering container 40 is connected to the injection tube 10. The channel switching device 30 is also used to close the outlet end of the injection tube 10 and allow the liquid medicine in the injection tube 10 to flow into the metering container 40. The metering container 40 is used to measure the amount of liquid medicine located therein.

[0052] Specifically, the flow direction of the liquid medicine is first switched by the flow switching device 30, causing the liquid medicine to flow towards the outlet end of the injection pipe 10. Then, the outlet end of the injection pipe 10 is closed by the flow switching device 30, forcing the liquid medicine in the injection pipe 10 to flow into the metering container 40. The metering container 40 measures the stored liquid medicine, and the flow rate in the injection pipe 10 is estimated by timing, thereby estimating the flow rate of the injection pump 60. If the estimated flow rate deviation is large, the flow direction of the liquid medicine is switched by the flow switching device 30, causing the liquid medicine to flow through the sampling tube 20 for sampling, and the flow rate deviation is further calculated more accurately.

[0053] Please continue to refer to this. Figure 1 As shown, the injection tube 10 includes a first tube 11, a second tube 12, and a third tube 13.

[0054] The outlet end of the first pipeline 11 is connected to the inner cavity of the metering container 40, and the inlet end of the first pipeline 11 is connected to the outlet end of the injection pump 60.

[0055] The inlet end of the second pipeline 12 is connected to the inner cavity of the metering container 40, and the sampling tube 20 is connected to the outlet end of the second pipeline 12.

[0056] In addition, the path switching device 30 includes a three-way valve 31;

[0057] The inlet of the three-way valve 31 is connected to the outlet of the second pipeline 12, one outlet of the three-way valve 31 is connected to the inlet of the sampling tube 20, and the other outlet of the three-way valve 31 is connected to the inlet of the third pipeline 13. The outlet of the third pipeline 13 is connected to the chemical tank 50. The outlet of the third pipeline 13 is the outlet of the injection tube 10.

[0058] In this embodiment, the three-way valve 31 refers to a valve device with three ports (one inlet and two outlets). For example, the three-way valve 31 can be a three-way ball valve. Depending on the structure, three-way ball valves can be divided into T-type, L-type, and Y-type. A T-type three-way ball valve connects and disconnects three orthogonal pipes, serving as a diversion and merging mechanism. An L-type three-way ball valve can only connect two orthogonal pipes and cannot simultaneously maintain the connection of a third pipe; it only serves a distribution function. A Y-type three-way ball valve can be designed with 120° and 135° diversion ports for medium switching. In this embodiment, the three-way valve 31 can be a readily available Q-type three-way ball valve. The specific structure and connection method of the three-way valve 31 are existing technologies and will not be described further here.

[0059] In other alternative embodiments, the three-way valve 31 can be an electric three-way ball valve. In this case, an external switching button 90 can be connected to control the operation of the three-way valve 31. The switching button 90 can be flexibly set in a position that is convenient for manual operation. The specific position of the three-way valve 31 is not specifically set here.

[0060] Combination Figure 1 As shown, the three-way valve 31 is located above the chemical tank 50. The three-way valve 31 is connected to a switching button 90, which allows for manual control of the three-way valve 31 to switch the direction of the liquid flow.

[0061] In other alternative embodiments, the three-way valve 31 can be a manual valve. In this case, the three-way valve 31 can be positioned near the ground, with the second pipeline 12 extending downwards accordingly. Similarly, the third pipeline 13 can extend upwards from the position of the three-way valve 31, reaching into the inner cavity of the chemical tank 50 from above. Of course, the third pipeline 13 can also connect to the bottom of the chemical tank 50 and communicate with its inner cavity.

[0062] In this embodiment, a third pipeline 13 is configured to facilitate communication with the inner cavity of the chemical tank 50. In other alternative embodiments, the third pipeline 13 may not be configured, in which case the outlet end of the three-way valve 31 is directly connected to the inner cavity of the chemical tank 50.

[0063] Furthermore, the channel switching device 30 also includes a valve 32, which is disposed in the second pipeline 12 to control the opening and closing of the second pipeline 12.

[0064] Valve 32 can be a ball valve, butterfly valve, or gate valve. Existing valves can be purchased for valve 32, as they are existing technology and will not be described further here.

[0065] Combination Figure 1 As shown, Figure 1 Valve 32 is located above chemical tank 50. Valve 32 can be an electric valve with an external control button. The control button can be flexibly arranged for easy manual control.

[0066] In other alternative embodiments, valve 32 can be a manual valve. In this case, valve 32 can be positioned close to the ground, and the second pipeline 12 can be adapted to extend downwards. Similarly, the positions of the third pipeline 13 and the three-way valve 31 can be adapted to adjust.

[0067] In this embodiment, the pathway switching device 30 includes a three-way valve 31 and a valve 32. In other alternative embodiments, the pathway switching device 30 may only include a three-way valve 31, in which case the three-way valve 31 should have the function of closing its inlet end, for example, a T-type three-way ball valve. When collecting the drug solution through the metering container 40, the inlet end of the three-way valve 31 is closed by the valve core of the three-way valve 31, and the outlet end of the third pipeline 13 and the outlet end of the sampling tube 20 are naturally closed. In other alternative embodiments, the pathway switching device 30 may use other types of valves, and the type of valve can be selected based on actual usage requirements.

[0068] Please continue to refer to this. Figure 1 As shown, in this embodiment, the metering container 40 has a cylindrical structure, and the inlet end of the second pipe 12 is connected to the bottom of the inner cavity of the metering container 40. The outlet end of the first pipe 11 is connected to the top of the inner cavity of the metering container 40. This ensures that the liquid medicine in the metering container 40 can be completely discharged through the second pipe 12, preventing liquid medicine residue.

[0069] The measuring container 40 is equipped with graduations and is made of a light-transmitting material, meaning that the material inside the measuring container 40 can be observed with the naked eye. The measuring container 40 can be made of quartz or other corrosion-resistant transparent plastic materials, and the light transmittance of the measuring container 40 can be selected based on actual observation requirements. The graduations and the light-transmitting material of the measuring container 40 facilitate manual observation of the liquid inside the measuring container 40, thereby allowing for a rough estimation of the flow rate deviation of the injection pump 60.

[0070] In other alternative embodiments, the shape of the measuring container 40 may be a cuboid or other shape, and the specific shape of the measuring container 40 may be adjusted based on actual needs.

[0071] In other alternative embodiments, the positions where the first conduit 11 and the second conduit 12 connect to the metering container 40 can be flexibly configured based on actual needs. For example, the first conduit 11 can be connected to the middle position of the metering container 40.

[0072] In this embodiment, valve 32 is installed in the middle of the second pipeline 12. In other alternative embodiments, valve 32 can be installed near the bottom of the metering container 40 in the second pipeline 12 to ensure that the opening at the bottom of the metering container 40 can be closed. This ensures that all the liquid medicine enters the metering container 40 after closure, facilitating the measurement of the liquid medicine and the estimation of the flow rate.

[0073] In other alternative embodiments, to prevent excessive air pressure inside the metering container 40 when valve 32 is closed, a vent can be provided on the metering container 40. The vent is equipped with a one-way valve, which allows the gas inside the metering container 40 to be discharged outward in one direction, so as to ensure the air pressure balance inside the metering container 40 and ensure that the medicine can be injected normally into the metering container 40 through the first pipeline 11 when valve 32 is closed.

[0074] In this embodiment, the configuration of the metering container 40 facilitates a rough estimation of the flow rate deviation of the injection pump 60. In other alternative embodiments, the metering container 40 may be omitted, in which case the flow rate deviation can be accurately calculated by periodic sampling.

[0075] Please continue to refer to this. Figure 1 As shown, the chemical tank 50 includes a first storage tank 51 and a second storage tank 52. The first storage tank 51 and the second storage tank 52 are formed in the inner cavity of the chemical tank 50 by being separated by a vertical plate.

[0076] The outlet end of the injection pipe 10 is connected to the inner cavity of the first liquid storage tank 51.

[0077] A circulation pump (not shown in the figure) can be installed outside the chemical tank 50. The inlet of the circulation pump is connected to the inner cavity of the first storage tank 51 via a pipe (for example, connected to the bottom of the inner cavity of the first storage tank 51), and the outlet of the circulation pump is connected to the inner cavity of the second storage tank 52. The circulation pump can then inject fresh medicine solution from the first storage tank 51 into the second storage tank 52.

[0078] The second storage tank 52 is provided with an overflow port communicating with its inner cavity. The overflow port can be located, for example, on the side wall of the second storage tank 52 near its top. The overflow port communicates with the inner cavity of the first storage tank 51. When the liquid level in the second storage tank 52 is higher than the overflow port, the liquid in the second storage tank 52 flows through the overflow port into the first storage tank 51 to mix with the fresh liquid. This method helps ensure uniform mixing of the old and new liquids and simultaneously achieves recycling.

[0079] In this embodiment, the first liquid storage tank 51 and the second liquid storage tank 52 are adjacent to each other and are separated by a partition to form two tanks. In other alternative embodiments, the first liquid storage tank 51 and the second liquid storage tank 52 can be two independent entities to ensure flexibility in their arrangement.

[0080] Combination Figure 1 As shown, in this embodiment, a sampling container 100 is configured at the outlet end of the sampling tube 20 for sampling. Sampling is performed manually by holding the sampling container 100, which can be, for example, a conventional measuring cup. In other alternative embodiments, the sampling container 100 can be configured as a specific container made of a light-transmitting material. The sampling container 100 can have three graduations: a standard graduation and warning graduations located above and below the standard graduation. The solution volume corresponding to the standard graduation is the amount of medicine per unit time (e.g., one minute or tens of seconds). During sampling, the sampling time can be set to the aforementioned unit time. If the flow rate of the injection pump 60 is within the acceptable range, the amount of medication sampled by the sampling container 100 per unit time corresponds to the standard scale. If the flow rate deviation of the injection pump 60 is within the threshold range (inclusive of both endpoints of the threshold range), the amount of medication sampled by the sampling container 100 per unit time is between the two warning scales, and the flow rate of the injection pump 60 also meets the requirements. If the flow rate deviation of the injection pump 60 exceeds the threshold range, the amount of medication sampled by the sampling container 100 per unit time is outside the two warning scales, indicating that the flow rate deviation of the injection pump 60 is too large and flow rate calibration of the injection pump 60 is required. Through the above configuration of the sampling container 100, the flow rate deviation of the injection pump 60 can be directly obtained during the sampling process, allowing for a quick determination of whether the injection pump 60 needs flow rate calibration.

[0081] In other alternative embodiments, a liquid level sensor and a timer can be configured inside the sampling container 100. The liquid level sensor detects the liquid level and calculates the volume of the sampled liquid. The timer is used to time the sampling process, uploading the sampled liquid volume and sampling time to the controller. The controller then calculates the flow rate of the injection pump 60 to determine its relationship with the standard flow rate, thereby determining whether flow rate calibration of the injection pump 60 is necessary. Furthermore, the sampling container 100 can be configured with a drain port connected to a drain pipe for convenient waste liquid discharge.

[0082] In addition, the electroless plating equipment also includes a material transfer and processing system, a chemical solution management system, and a control system. The material transfer and processing system includes a carrying device, a conveying mechanism, and a robotic arm. The chemical solution management system includes a circulating filtration system and a temperature control system. The control system is based on a programmable logic controller (PLC) and is integrated with a human-machine interface touchscreen. Operators can set, modify, and store all process parameters (product conveying speed, chemical solution temperature, chemical solution addition amount, etc.) on the screen and monitor the equipment status in real time. The electroless plating equipment of this application differs from existing electroless plating equipment in that the aforementioned chemical solution flow calibration and sampling device is different; the remaining structure is consistent with existing electroless plating equipment and will not be described further here.

[0083] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0084] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A chemical liquid flow rate calibration and sampling device, characterized in that, include: Injection tubing, sampling tubing, and pathway switching device; The injection pipe is used to transport the chemical liquid, and the outlet end of the injection pipe is used to communicate with the inner cavity of the chemical tank. The inlet end of the sampling tube is connected to the injection tube, and the outlet end of the sampling tube is located outside the chemical tank. The flow path switching device is used to switch the flow direction of the chemical liquid in the injection tube, so that the chemical liquid flows out along the outlet end of the injection tube or along the outlet end of the sampling tube.

2. The chemical liquid flow rate calibration and sampling device as described in claim 1, characterized in that, The chemical liquid flow calibration sampling device also includes a metering container, the inner cavity of which is connected to the injection tube. The pathway switching device is also used to close the outlet end of the injection tube and allow the liquid in the injection tube to flow into the metering container, which is used to measure the amount of liquid in it.

3. The chemical liquid flow rate calibration and sampling device as described in claim 2, characterized in that, The injection tube includes a first tube and a second tube. The outlet end of the first tube is connected to the inner cavity of the metering container, and the inlet end of the second tube is connected to the inner cavity of the metering container. The sampling tube is connected to the second tube.

4. The chemical liquid flow rate calibration and sampling device as described in claim 3, characterized in that, The inlet end of the second pipeline is connected to the bottom of the inner cavity of the metering container.

5. The chemical liquid flow rate calibration and sampling device as described in claim 3, characterized in that, The outlet end of the first pipeline is connected to the top of the inner cavity of the metering container.

6. The chemical liquid flow rate calibration and sampling device as described in claim 3, characterized in that, The measuring container is provided with graduations and is made of a light-transmitting material.

7. The chemical liquid flow rate calibration and sampling device as described in claim 3, characterized in that, The pathway switching device includes a three-way valve; The injection tube also includes a third pipeline; The inlet of the three-way valve is connected to the outlet of the second pipeline, one outlet of the three-way valve is connected to the inlet of the sampling tube, the other outlet of the three-way valve is connected to the inlet of the third pipeline, and the outlet of the third pipeline is connected to the chemical tank.

8. The chemical liquid flow rate calibration and sampling device as described in claim 3, characterized in that, The pathway switching device includes a valve, which is installed in the second pipeline to control the opening and closing of the second pipeline.

9. A chemical plating apparatus, characterized in that, Includes a chemical tank and a liquid injection pump, as well as a chemical liquid flow rate calibration and sampling device as described in any one of claims 1 to 8; The outlet end of the injection pipe is connected to the inner cavity of the chemical tank, and the inlet end of the injection pipe is connected to the outlet end of the injection pump.

10. The chemical plating equipment as described in claim 9, characterized in that, The electroless plating equipment also includes a circulating pump; The chemical tank includes a first storage tank and a second storage tank, and the outlet end of the injection pipe is connected to the inner cavity of the first storage tank. The inlet end of the circulation pump is connected to the inner cavity of the first liquid storage tank, and the outlet end of the circulation pump is connected to the inner cavity of the second liquid storage tank. The second liquid storage tank is provided with an overflow port that communicates with its inner cavity, and the overflow port is connected to the inner cavity of the first liquid storage tank.

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