Height adjustment assembly, levelling device

Abstract

The utility model application relates to height adjustment subassembly, leveling device belongs to heightening and leveling technical field, height adjustment subassembly is used for adjusting the height of being supported spare relative to reference spare, include: the supported spare, the reference spare, intermediate piece, intermediate piece has outer thread, the inner thread that is formed with outer thread cooperation is formed on the supported spare, the axial position of supported spare on intermediate piece is adjusted through the relative rotation of intermediate piece with the supported spare, wherein, intermediate piece is detachably connected to reference spare, to fix intermediate piece on reference spare after adjustment is completed. The utility model application's height adjustment subassembly simple structure can maintain heightening accuracy.

Description

Technical Field

[0001] This utility model application relates to the field of height adjustment and leveling technology, and in particular to height adjustment components and leveling devices in semiconductor manufacturing equipment. Background Technology

[0002] In precision equipment, especially semiconductor manufacturing equipment, many components require precise positioning adjustments to ensure overall equipment performance and process stability. For example, some plate-shaped components, such as the backsplash plate in the processing chamber, need precise height and flatness adjustments relative to a reference component of the equipment, such as the base plate—this is known as leveling. This leveling is typically achieved by setting multiple support points between the supported component and the reference component. By independently adjusting the height of each support point, the orientation of the supported component can be changed to achieve a preset horizontal state.

[0003] In existing technologies, there are many ways to adjust the height of a single support point. One common method is to use an adjusting screw. For example, a threaded hole is made in the supported component, and the adjusting screw is screwed into it, with the end of the screw directly abutting against the surface of the reference component. By rotating the adjusting screw, changing the depth to which it is screwed into the threaded hole, the height of that point can be adjusted.

[0004] However, this simple structure has some shortcomings. In this structure, the supported component is only supported on the reference component by the end of the adjusting screw; the support relationship between the two is a point contact or surface contact, rather than a rigid fixed connection. When the equipment vibrates or is subjected to external loads during operation, the position of the adjusting screw may loosen or shift, causing changes in the adjusted height and flatness, affecting the long-term stability of the equipment. To achieve a stable connection, additional fasteners are often needed to lock the supported component and the reference component near the adjustment point, which complicates the overall structure, and the stress generated during the locking process may also affect the leveling accuracy. Therefore, the existing technology needs a height adjustment component with a simple structure that can easily achieve height adjustment and provide a stable and reliable fixed connection after adjustment. Utility Model Content

[0005] The purpose of this utility model application is to provide a height adjustment component and a leveling device, in order to partially or completely solve the technical problems of complex structure and changes in adjusted height and flatness in existing height adjustment components. The height adjustment component of this utility model application has a simple structure and can maintain adjustment accuracy. To achieve the above objective, this utility model application provides the following technical solution: In a first aspect, a height adjustment assembly is provided for adjusting the height of a supported member relative to a reference member, characterized in that it comprises: The supported member; The reference component; An intermediate component has an external thread, and the supported component has an internal thread that mates with the external thread. The axial position of the supported component on the intermediate component is adjusted by the relative rotation of the intermediate component and the supported component. The intermediate component is detachably connected to the reference component so that the intermediate component can be fixed to the reference component after adjustment.

[0006] In one or more embodiments of this utility model application, a fastener is also included. The intermediate part has a through hole extending through its axial direction. The fastener passes through the through hole and connects to the reference part to press and fix the intermediate part to the reference part.

[0007] In one or more embodiments of this utility model application, the end face of the intermediate member away from the reference member is provided with an anti-rotation structure for cooperating with the adjustment tool, so as to allow the intermediate member to be rotated by the adjustment tool.

[0008] In one or more embodiments of this utility model application, a protective cover is further included. The protective cover is detachably installed on the intermediate part and / or the supported part to cover the threaded connection between the intermediate part and the supported part.

[0009] In one or more embodiments of this utility model application, a first anti-rotation part is provided on the end face of the intermediate part away from the reference part, and a second anti-rotation part is provided on the protective cover to cooperate with the first anti-rotation part; The first anti-rotation part can engage with the second anti-rotation part to restrict the relative rotation between the protective cover and the intermediate part, so that the intermediate part can be rotated by rotating the protective cover.

[0010] In one or more embodiments of this utility model application, the first anti-rotation part is a groove formed on the end face of the intermediate part, and the second anti-rotation part is a protrusion formed on the inner side or outer side of the top surface of the protective cover and can be inserted into the groove.

[0011] In one or more embodiments of this utility model application, an upwardly protruding annular sidewall is formed on the supported member around the opening of the internal thread; the protective cover has a body, and after the protective cover is installed, the body surrounds the annular sidewall from the outer edge.

[0012] In one or more embodiments of this utility model application, the through hole is a stepped hole, and the head of the fastener is accommodated in the stepped hole.

[0013] In one or more embodiments of this utility model application, a locking nut is further included. The locking nut is threaded onto the external thread of the intermediate part and is used to abut against the supported part after adjustment to lock the relative position of the intermediate part and the supported part.

[0014] In one or more embodiments of this utility model application, a stop structure is provided on the contact surface between the intermediate component and the reference component. The stop structure is used to prevent the intermediate component from rotating relative to the reference component during the process of the intermediate component being fastened to the reference component.

[0015] In one or more embodiments of this utility model application, the stop structure includes: surface undulation features that are respectively disposed on the contact surface of the intermediate member and the contact surface of the reference member and engage with each other; or, a non-circular contour formed on the contact surface of the intermediate member and a recessed portion formed on the contact surface of the reference member that matches the shape of the non-circular contour.

[0016] In a second aspect, a leveling device includes: a supported member; a reference member; at least three support points for supporting the supported member, wherein the at least three support points are not collinearly arranged on the supported member, and the at least three support points are disposed between the supported member and the reference member; wherein at least two of the support points form a height adjustment component as described in any of the first aspects.

[0017] In one or more embodiments of this utility model application, the number of height adjustment components is N-1 or N, where N is the number of support points and N is a positive integer.

[0018] In summary, compared with the prior art, this utility model application has the following beneficial technical effects: The height adjustment is achieved through the threaded engagement between the intermediate component and the supported component, requiring only simple relative rotation to complete the operation, thus improving the convenience and efficiency of adjustment. In addition, the detachable connection design facilitates the quick installation, disassembly, or replacement of the intermediate component and the reference component without compromising structural integrity, thereby enhancing the maintainability and versatility of the height adjustment component. Furthermore, the height adjustment component is secured in place by a fixing mechanism after adjustment, resulting in a simple overall structure that is easy to manufacture and possesses excellent practicality. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the height adjustment component of this utility model application; Figure 2 This is a partial structural schematic diagram of the height adjustment component of this utility model application; Figure 3 This is a schematic diagram of the structure of the protective cover and intermediate component in this utility model application. Figure 4 This is a cross-sectional structural schematic diagram of the height adjustment component of this utility model application; Detailed Implementation

[0020] The technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0021] In the description of this utility model application, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model application.

[0022] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model application, "a plurality of" means two or more, unless otherwise explicitly specified.

[0023] In this utility model application, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, an integral molding, or an integrated unit; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model application according to the specific circumstances.

[0024] To make the purpose, technical solution, and advantages of this utility model application clearer, the technical solutions in the embodiments of this utility model application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model application, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model application without creative effort are within the scope of protection of this utility model application.

[0025] Firstly, such as Figures 1 to 4 As shown, a height adjustment assembly is used to adjust the height of a supported member 90 relative to a reference member 80, comprising: the supported member 90; and the reference member 80. The intermediate part 30 has an external thread, and the supported member 90 has an internal thread that mates with the external thread. The axial position of the supported member 90 on the intermediate part 30 is adjusted by the relative rotation of the intermediate part 30 and the supported member 90. The intermediate component 30 is detachably connected to the reference component 80 so that the intermediate component 30 can be fixed to the reference component 80 after adjustment.

[0026] In one or more embodiments of this utility model application, the supported member 90 is a plate-shaped member or a support member. The plate-shaped member is a back spray plate, which is used for mounting a wafer backside cleaning assembly. The wafer backside cleaning assembly is used for wafer backside cleaning and includes cleaning nozzles.

[0027] In this utility model application, the detachable connection of the intermediate component 30 to the reference component 80 can at least be understood as follows: the intermediate component 30 is connected to the reference component 80 through a non-permanent fixing method, such as through a separable and assemblable connection structure like bolts, screws, clips, pins, magnetic attraction, or plugs. This allows for easy separation of the intermediate component 30 from the reference component 80 without compromising the structural integrity of the intermediate component 30, the reference component 80, or other related components, and reassembly or fixing as needed. This detachable connection design facilitates the installation, removal, or replacement of the intermediate component 30 during height adjustment, while ensuring that the intermediate component 30 is reliably fixed to the reference component 80 through a fastening or locking mechanism after adjustment, thereby maintaining the overall stability and functionality of the height adjustment assembly.

[0028] In this utility model application, the height adjustment component uses the principle of mechanical thread transmission to convert helical motion into linear displacement to achieve precise height adjustment. The height adjustment of the supported part 90 relative to the reference part 80 is achieved through threaded engagement and detachable connection mechanism. The intermediate part 30 is detachably connected to the reference part 80. Specifically; In the initial state, the intermediate part 30 and the reference part 80 are separated or loose, facilitating adjustment. Subsequently, the internal thread of the supported part 90 is screwed into the external thread of the intermediate part 30. By rotating the supported part 90 or the intermediate part 30, relative rotation between them is achieved, thereby changing the relative position of the supported part 90 along the axial direction of the intermediate part 30. For example, the adjustment process of relative rotation is as follows: when the supported part 90 and the intermediate part 30 rotate clockwise or counterclockwise relative to each other, the thread engagement drives the supported part 90 to move upward or downward until the desired height is reached. After adjustment, the intermediate part 30 is firmly fixed to the reference part 80 by tightening the detachable connection between the intermediate part 30 and the reference part 80 (e.g., tightening bolts), ensuring the stability of the entire height adjustment assembly in the working state.

[0029] In the height adjustment assembly of this utility model application, firstly, continuous and precise height adjustment is achieved through the threaded engagement between the intermediate part 30 and the supported part 90, which can be completed with simple relative rotation, improving the convenience and efficiency of adjustment; secondly, the detachable connection design facilitates the quick installation, disassembly, or replacement of the intermediate part 30 and the reference part 80 without compromising structural integrity, thus improving the maintainability and versatility of the height adjustment assembly; furthermore, after adjustment, the height adjustment assembly ensures position locking through a connection and fixing mechanism, resulting in a simple overall structure that is easy to manufacture and has good practicality.

[0030] In one or more embodiments of this utility model application, a fastener 40 is further included. The intermediate part 30 has a through hole 301 extending through its axial direction. The fastener 40 passes through the through hole 301 and is connected to the reference part 80 to press and fix the intermediate part 30 to the reference part 80.

[0031] In some embodiments of this utility model application, the intermediate part 30 is axially formed with a through hole 301. The diameter of the through hole 301 is designed to allow the fastener 40 (e.g., bolt or screw) to pass through axially freely without interference or friction, thereby ensuring smooth operation of the fastener 40 during insertion and tightening. The diameter of the through hole 301 can be set to be slightly larger than the diameter of the fastener 40 according to the standard size of the fastener 40 (e.g., M4 to M10 bolt) to achieve convenient penetration.

[0032] In some embodiments of this utility model application, the fastener 40 is a bolt, such as an M6 or M8 standard bolt. The axial through hole 301 of the intermediate part 30 can be designed as a circular hole, usually slightly larger than the major diameter of the threaded portion of the fastener, thereby avoiding the transmission of torque to the intermediate part due to friction between the fastener and the through hole 301. A corresponding internal threaded hole 801 or a pre-embedded nut is provided on the reference part 80. After the bolt passes through the through hole, it is screwed into the internal thread of the reference part 80 to achieve clamping and fixing. Alternatively, the reference part has a through hole, and clamping and fixing are achieved by screwing a nut on the other side of the reference part onto the threaded end of the bolt.

[0033] In some embodiments of this utility model application, the fastener 40 includes a bolt and a matching washer. The through hole is a straight through hole that passes through the intermediate part 30. The bolt passes through the through hole and is screwed into the threaded hole 801 of the reference part 80. The washer is placed between the top of the intermediate part 30 and the bolt head.

[0034] In this utility model application, the intermediate part 30 can be loosely connected or separated from the reference part 80 in advance to facilitate the relative rotation adjustment of the height with the supported part 90. After the height of the supported part 90 is adjusted, the fastener 40 is inserted into the through hole from the upper end of the intermediate part 30, and after passing through the through hole 301 throughout the entire axial direction, it is connected to the reference part 80 (for example, screwed into the internal thread hole 801 of the reference part 80). As the fastener 40 is gradually tightened, the head of the fastener 40 applies downward pressure to the upper surface of the intermediate part 30, and at the same time, the fixed connection between the tail of the fastener 40 and the reference part 80 generates a reaction force, forming an axial pressing effect, firmly pressing the intermediate part 30 onto the surface of the reference part 80, and preventing the intermediate part 30 from loosening or shifting.

[0035] In one or more embodiments of this utility model application, the end face of the intermediate member 30 away from the reference member 80 is provided with an anti-rotation structure for cooperating with the adjustment tool, so as to allow the intermediate member 30 to be rotated by the adjustment tool.

[0036] In some embodiments of this utility model application, the end face of the intermediate member 30 away from the reference member 80 can be understood or meant to be: along the height direction of the height adjustment assembly, the upper end face or upper surface of the intermediate member 30 is formed on or disposed on the anti-rotation structure. The anti-rotation structure can provide a mating point with an adjustment tool (e.g., a wrench, screwdriver, or special screwdriver), facilitating the application of torque by the adjustment tool to drive the intermediate member 30 to rotate.

[0037] In some embodiments of this utility model application, the anti-rotation structure is a groove. The groove is recessed into the interior of the intermediate part 30 from the upper end surface. After the adjustment tool (such as a wrench) is inserted into the groove, the intermediate part 30 can be rotated.

[0038] In some embodiments of this utility model application, the anti-rotation structure is a boss, which protrudes upward from the upper end of the intermediate part 30 and moves away from the intermediate part 30. After the adjustment tool (such as a socket wrench) is fitted with the boss, the intermediate part 30 is rotated.

[0039] In this utility model application, when an operator applies a rotational torque to the adjusting tool, the rotational torque is transmitted to the intermediate member 30 through an anti-rotation structure, driving the intermediate member 30 to rotate around its axis. Since the external thread of the intermediate member 30 engages with the internal thread of the supported member 90, this rotation is converted into a linear axial displacement of the supported member 90, achieving precise height adjustment of the supported member 90. For example, clockwise rotation raises the height of the supported member 90, while counterclockwise rotation lowers it. After the height of the supported member 90 is adjusted, the intermediate member 30 can be fixed with fasteners 40. This allows for simple manual operation or with auxiliary tools, improving the practicality of the height adjustment component.

[0040] In one or more embodiments of this utility model application, a protective cover 50 is further included. The protective cover 50 is detachably installed on the intermediate member 30 and / or the supported member 90 to cover the threaded connection between the intermediate member 30 and the supported member 90.

[0041] In some embodiments of this utility model application, the protective cover 50 includes a cylindrical structure or a cap-shaped structure. The inner diameter of the protective cover 50 is slightly larger than the outer diameter of the intermediate member 30 or the supported member 90. When the protective cover 50 is installed, it is inserted downwards into the intermediate member 30 or the supported member 90 to cover the threaded joint of the intermediate member 30 and the supported member 90. The material of the protective cover 50 includes plastic or metal, etc., and this utility model application does not limit it.

[0042] In this utility model application, after the height of the supported member 90 of the height adjustment component is adjusted, the protective cover 50 is installed on the intermediate member 30 and / or the supported member 90 in a detachable manner (e.g., by plugging in) to ensure that at least the threaded mating area is covered. The protective cover 50 can isolate the external environment and prevent dust, moisture, foreign objects or corrosive substances from entering the threaded mating area, preventing thread corrosion and jamming, thereby maintaining the smoothness and reliability of the threaded transmission. When adjusting the height of the supported member 90 again, the protective cover 50 can be removed first, and the intermediate member 30 can be operated again with the adjustment tool and the anti-rotation structure.

[0043] In one or more embodiments of this utility model application, a first anti-rotation part is provided on the end face of the intermediate member 30 away from the reference member 80, and a second anti-rotation part is provided on the protective cover 50 to cooperate with the first anti-rotation part; the first anti-rotation part can engage with the second anti-rotation part to restrict the relative rotation between the protective cover 50 and the intermediate member 30, so that the intermediate member 30 can be rotated by rotating the protective cover 50.

[0044] In this utility model application, the intermediate member 30 is provided with a first anti-rotation part, and the protective cover 50 is provided with a second anti-rotation part that cooperates with the first anti-rotation part. The intermediate member 30 and the protective cover 50 are aligned so that the first anti-rotation part and the second anti-rotation part are engaged. The engagement restricts the relative rotation between the protective cover 50 and the intermediate member 30 through geometric matching (e.g., concave-convex structure, polygonal interlocking, etc.). That is, when the protective cover 50 is subjected to external torque, the first anti-rotation part and the second anti-rotation part engage, preventing the protective cover 50 and the intermediate member 30 from rotating independently and thus causing relative rotation. At the same time, the rotation of the protective cover 50 can directly drive the intermediate member 30 to rotate synchronously through the engagement connection. The intermediate member 30 converts the rotation into axial displacement through the threaded engagement with the supported member 90, thereby adjusting the height of the supported member 90 relative to the reference member 80. After the adjustment is completed, the fastener 40 passes through the through hole 301 of the intermediate member 30, connects with the reference member 80, and presses the intermediate member 30 to firmly fix it on the reference member 80. Thus, through the mutual engagement of the first anti-rotation part and the second anti-rotation part, the intermediate part 30 and the protective cover 50 can rotate synchronously, simplifying the operation steps for adjusting the height of the supported part 90, and making it suitable for manual or tool-assisted adjustment scenarios.

[0045] In one or more embodiments of this utility model application, the first anti-rotation part is a groove 31 formed on the end face of the intermediate member, and the second anti-rotation part is a protrusion formed on the inner or outer side of the top surface of the protective cover 50 and capable of being inserted into the groove 31. Conversely, equivalently, the groove and the protrusion can also be provided on the protective cover and the intermediate member, respectively.

[0046] In one embodiment of this utility model application, the second anti-rotation portion is a protrusion formed on the inner side of the top surface of the protective cover and matching the shape of the groove. When installing the protective cover 50, it is aligned with the end face of the intermediate member 30 away from the reference member 80, so that the protrusion (i.e., the second anti-rotation portion) on the inner side of the top surface of the protective cover 50 is inserted into or embedded in the groove 31 (i.e., the first anti-rotation portion) opened on the end face of the intermediate member 30.

[0047] In one embodiment of this utility model application, such as Figures 2 to 4As shown, the second anti-rotation portion is a protrusion 52 formed on the outer side of the top surface of the protective cover and matching the shape of the groove. When installing the protective cover 50, the protective cover 50 is inverted and aligned with the end face of the intermediate member 30 away from the reference member 80, so that the protrusion (i.e., the second anti-rotation portion) on the outer side of the top surface of the protective cover 50 is inserted into or embedded in the groove 31 (i.e., the first anti-rotation portion) opened on the end face of the intermediate member 30.

[0048] In this utility model application, because the shapes of the protrusion and the groove match, they form a geometrically interlocking structure, which restricts the independent circumferential rotation of the protective cover 50 relative to the intermediate member 30. That is, when an external torque is applied to the protective cover 50, the side wall of the protrusion and the inner wall of the groove form an interlocking connection, allowing the operator to directly rotate the protective cover 50. The protective cover 50 can act as an operating handle. The torque is transmitted to the intermediate member 30 through the engaging protrusion and groove, driving the intermediate member 30 to rotate synchronously around its axis. At this time, the external thread of the intermediate member 30 engages with the internal thread of the supported member 90, converting the rotational motion into axial linear displacement, thereby achieving precise height adjustment of the supported member 90 relative to the reference member 80. After adjustment, the protective cover 50 can be maintained in its installed state to provide continuous protection, or it can be removed as needed. The non-permanent nature of the interlocking structure also allows for easy separation.

[0049] In one or more embodiments of this utility model application, the supported member 90 has an upwardly protruding annular sidewall 91 integrally formed around the opening of the internal thread; the protective cover has a body 51, and after the protective cover 50 is installed, the body 51 surrounds the annular sidewall 91 from the outer edge.

[0050] In this utility model application, the supported member 90 has an internal thread opening 901, and an upwardly protruding annular sidewall 91 is integrally formed at the internal thread opening. The annular sidewall 91 surrounds the internal thread opening 901 to form a raised protective boundary. The integral forming of the annular sidewall 91 and the supported member 90 can be achieved by injection molding or die casting processes to ensure that the structure of the sidewall 91 and the supported member 90 is completely integrated.

[0051] In this utility model application, when the protective cover 50 is installed, its body 51 (usually a cylindrical or skirted structure) is aligned with the annular sidewall 91 from above, and is pressed down or screwed in by a detachable method (such as plugging or fitting), so that the outer edge of the body 51 completely surrounds the outer periphery of the sidewall 91, forming a closed interface that prevents external dust, moisture, foreign objects or contaminants from entering the internal thread area. At the same time, the upward protrusion of the annular sidewall 91 can isolate the threaded mating area from lateral environmental erosion, achieving a waterproof and dustproof effect and ensuring the long-term reliability of the threaded mating.

[0052] In one or more embodiments of this utility model application, the through hole 301 is a stepped hole, and the head of the fastener 40 is accommodated in the stepped hole.

[0053] In this utility model application, the fastener 40 includes a head and a shank. The through hole 301 is designed as a stepped hole to accommodate the head of the fastener 40, achieving concealed connection of the fastener 40 and smoothing of the surface of the height adjustment component. Specifically, the axially penetrating channel of the intermediate member 30 is divided into an upper large-diameter section (accommodating the head of the fastener 40) and a lower small-diameter section (passing through the shank of the fastener 40). The diameter of the upper large-diameter section is slightly larger than the size of the head of the fastener 40 (such as a bolt or screw), and the diameter of the lower small-diameter section is slightly larger than the diameter of the shank of the fastener 40. This hierarchical design allows the fastener 40 to be inserted from the top of the intermediate member 30 during installation, with the head naturally falling into the upper large-diameter section, while the shank extends through the lower small-diameter section to the connection point (such as a threaded hole) of the reference member 80. As the fastener 40 is tightened or pressed in, the head is completely accommodated in the upper part of the stepped hole, preventing the head from protruding from the end face of the intermediate member 30, thus creating a countersunk effect.

[0054] Although the overall connection method of the height adjustment component is very stable, the applicant also discovered a technical problem of the height of the supported component 90 changing during the overall connection process. Sometimes, even after the supported component 90 is initially adjusted to the required height, and the fastener 40 completely and securely connects the intermediate component 30 and the reference component 80, the actual state of the supported component 90 will randomly change in height position, resulting in a positional discrepancy with the initial height position of the supported component 90. This reduces the height adjustment accuracy of the supported component 90, leading to the need for repeated height adjustments of the supported component 90 multiple times.

[0055] Generally, the reduced height adjustment accuracy of the supported component 90 is often thought to be due to deformation of the intermediate component 30 under pressure, causing a change in the height position of the supported component 90. However, after careful investigation, the applicant found that the actual reason was not so. The fundamental reason for the reduced height adjustment accuracy of the supported component 90 is that the fastener 40 achieves a complete and secure connection between the intermediate component 30 and the reference component 80 by pressing the intermediate component 30. However, during the fastening process, as the fastener 40 begins to generate pre-tightening force, the end face of the fastener 40 contacts the end face of the intermediate component 30 and exerts force on the intermediate component 30. Positive pressure is applied, but at this point the connection between the intermediate part 30 and the reference part 80 is not completely completed. The fastener 40 still needs to be further tightened by the screw. During the process of further tightening the fastener 40 by the screw, the intermediate part 30 is driven by the screw rotation of the fastener 40 to rotate slightly, causing relative rotation between the intermediate part 30 and the supported part 90. This causes the height position of the supported part 90 to change, thereby changing the height of the supported part 90 that has already been adjusted, reducing the height adjustment accuracy of the supported part 90, and making it difficult to meet the high height adjustment accuracy requirements of the supported part 90.

[0056] In one or more embodiments of this utility model application, a locking nut is further included. The locking nut is threaded onto the external thread of the intermediate member 30 and is used to abut against the supported member 90 after adjustment to lock the relative position of the intermediate member 30 and the supported member 90.

[0057] In this utility model application, an anti-loosening nut is provided on the intermediate component 30 to secure it. The anti-loosening nut can fasten the intermediate component 30 and the supported component 90. After the height of the supported component 90 is adjusted, the anti-loosening nut is used to lock the intermediate component 30 and the supported component 90, restricting the relative rotation of the intermediate component 30 and the supported component 90 and fixing their axial positional relationship. The anti-loosening nut and the supported component are screwed together onto the external thread surface of the intermediate component. When the supported component is adjusted to the preset height of the intermediate component, the anti-loosening nut is rotated to abut against the supported component, achieving the anti-loosening effect.

[0058] After the locknut is tightened, fastener 40 is passed through the through hole 301 of intermediate part 30 and connected to reference part 80, and gradually tightened to achieve a complete and secure connection between intermediate part 30 and reference part 80. At this time, because the locknut has pre-locked intermediate part 30 and supported part 90, the torque that may be generated during the tightening of fastener 40 will not cause intermediate part 30 to rotate, thereby avoiding changes in the height of supported part 90 and ensuring that the position after height adjustment will not shift due to the tightening operation of fastener 40, thus guaranteeing the height adjustment accuracy of supported part 90.

[0059] In one or more embodiments of this utility model application, a stop structure is provided on the contact surface between the intermediate part 30 and the reference part 80. The stop structure is used to prevent the intermediate part 30 from rotating relative to the reference part 80 during the process of the intermediate part 30 being fastened to the reference part 80.

[0060] In this utility model application, the intermediate part 30 and the reference part 80 can be anti-rotationally engaged. The contact area between the intermediate part 30 and the reference part 80 forms a stop structure to prevent relative rotation between the intermediate part 30 and the reference part 80 during the fastening connection of the fastener 40. Furthermore, during the tightening process of the fastener 40, when the fastener 40 is subjected to axial preload, the meshing surface of the stop structure generates frictional resistance, preventing the intermediate part 30 from rotating with the rotation of the fastener 40. This avoids changes in the height of the supported part 90, ensuring that the position after height adjustment does not shift due to the tightening operation of the fastener 40, and also ensuring the height adjustment accuracy of the supported part 90.

[0061] In one or more embodiments of this utility model application, the stop structure includes: surface undulation features that are respectively disposed on the contact surface of the intermediate member 30 and the contact surface of the reference member 80 and engage with each other; or, a non-circular contour formed on the contact surface of the intermediate member 30, and a recess formed on the contact surface of the reference member 80 that matches the shape of the non-circular contour.

[0062] In one embodiment of this utility model application, the stop structure includes interlocking surface undulations, such as sawtooth, wave-shaped, or gear-shaped undulations, respectively disposed on the contact surfaces of the intermediate member 30 and the reference member 80. The intermediate member 30 can be placed on the reference member 80 so that the undulations on the two contact surfaces are aligned and engaged, forming a multi-point or line contact engagement interface. When the fastener 40 is tightened to apply axial pressure, the friction and resistance between the undulations increase, preventing the intermediate member 30 from rotating circumferentially relative to the reference member 80.

[0063] In another embodiment of this utility model application, the stop structure includes: a non-circular contour (such as a polygonal outline such as a triangle, quadrilateral, or hexagon) on the contact surface of the intermediate member 30 engaging with a matching recess on the contact surface of the reference member 80. During installation, the non-circular contour is embedded in the recess, forming a shape limit, ensuring that the intermediate member 30 cannot rotate freely, and preventing the intermediate member 30 from rotating circumferentially relative to the reference member 80.

[0064] In this utility model application, during the process of fastener 40 being spirally tightened and connected, when fastener 40 generates pre-tightening force, it may drive intermediate part 30 to rotate through friction. However, the engagement or fitting of the stop structure will generate reverse torque, resisting or preventing relative rotation between intermediate part 30 and reference part 80, ensuring that the height position of the supported part 90 after height adjustment is not affected by the tightening operation of fastener 40 and thus maintaining the height of the supported part 90 after adjustment.

[0065] In a second aspect, a leveling device includes: a supported member; a reference member; at least three support points for supporting the supported member, wherein the at least three support points are not collinearly arranged on the supported member, and the at least three support points are disposed between the supported member and the reference member; wherein at least two of the support points form a height adjustment component as described in any of the first aspects.

[0066] In this utility model application, the core structure of the leveling device includes: at least two height adjustment components, and at least three support points between the supported member and the reference member. The projection positions of these support points on the surface of the supported member are non-collinearly arranged (e.g., triangular or rectangular distribution), forming a stable planar support system. According to the plane theorem, at least three non-collinear points can uniquely determine a plane. The three non-collinear design avoids the risk of tipping or instability caused by single support or collinear support.

[0067] The support points are located between the supported component and the reference component, and bear the load transmission function. At least two of the support points form the height adjustment component structure (including intermediate component, threaded engagement, detachable connection, etc.) as described in any of the first aspects. The remaining support points can be fixed or (alternatively) also form the height adjustment component structure as described in any of the first aspects.

[0068] In this utility model application, during the leveling process of the supported member 90, the height of the corresponding support point is independently changed by adjusting the relative rotation between the intermediate members of at least two height adjustment components and the supported member. Specifically, for each height adjustment component, rotating the intermediate member 30 drives the supported member 90 to move axially, thereby achieving local height adjustment of the supported member 90, and finally the supported member 90 reaches a horizontal state.

[0069] In one or more embodiments of this utility model application, the number of height adjustment components is N-1 or N, where N is the number of support points and N is a positive integer.

[0070] In one embodiment of this utility model application, N is a positive integer, N≥3, N is 3, 4, 5, 6, etc., and this utility model application does not limit it.

[0071] In one embodiment of this utility model application, when the number of height adjustment components is N, all support points are adjustable, allowing each support point to be adjusted independently. By adjusting the relative rotation between the intermediate component and the supported component one by one or synchronously, the overall height and level of the supported component 90 can be adjusted.

[0072] In one embodiment of this utility model application, when the number of height adjustment components is N-1, one support point can be used as a fixed reference point (without adjustment function), and the remaining N-1 support points can be independently adjusted in height by the height adjustment components, which reduces the adjustment complexity in leveling and also realizes the overall height and level adjustment of the supported member 90.

[0073] The technical features of the above embodiments can be combined in any way. In order to make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification. Those skilled in the art will understand that the steps, measures, and schemes in the various operations, methods, and processes discussed in this utility model application can be alternated, modified, combined, or deleted; furthermore, other steps, measures, and schemes in the various operations, methods, and processes discussed in this utility model application can also be alternated, modified, rearranged, decomposed, combined, or deleted; furthermore, the steps, measures, and schemes in the prior art that are similar to those disclosed in this utility model application can also be alternated, modified, rearranged, decomposed, combined, or deleted. The above-described embodiments are merely examples of several implementation methods of the present disclosure, and their descriptions are relatively specific and detailed. However, they should not be construed as limiting the scope of the patent for the present disclosure. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present disclosure, and these all fall within the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be determined by the appended claims.

Claims

1. A height adjustment assembly for adjusting the height of a supported member relative to a reference member, characterized in that, include: The supported member; The reference component; An intermediate component having an external thread, and an internal thread formed on the supported component that mates with the external thread, wherein the axial position of the supported component on the intermediate component is adjusted by the relative rotation of the intermediate component and the supported component. The intermediate component is detachably connected to the reference component so that the intermediate component can be fixed to the reference component after adjustment.

2. The height adjustment component according to claim 1, characterized in that, It also includes a fastener, wherein the intermediate part has a through hole extending through its axial direction, and the fastener passes through the through hole and connects to the reference part to press and fix the intermediate part to the reference part.

3. The height adjustment component according to claim 2, characterized in that, The end face of the intermediate member away from the reference member is provided with an anti-rotation structure for cooperating with the adjustment tool, so as to allow the intermediate member to be rotated by the adjustment tool.

4. The height adjustment assembly according to claim 1, characterized in that, It also includes a protective cover, which is detachably mounted on the intermediate member and / or the supported member to cover the threaded connection between the intermediate member and the supported member.

5. The height adjustment assembly according to claim 4, characterized in that, The intermediate component has a first anti-rotation part on its end face away from the reference component, and the protective cover has a second anti-rotation part that cooperates with the first anti-rotation part. The first anti-rotation part can engage with the second anti-rotation part to restrict the relative rotation between the protective cover and the intermediate part, so that the intermediate part can be rotated by rotating the protective cover.

6. The height adjustment assembly according to claim 5, characterized in that, The first anti-rotation part is a groove formed on the end face of the intermediate part, and the second anti-rotation part is a protrusion formed on the inner side or outer side of the top surface of the protective cover and can be inserted into the groove.

7. The height adjustment assembly according to claim 4, characterized in that, The supported member has an upwardly protruding annular sidewall formed around the opening of the internal thread; the protective cover has a body that surrounds the annular sidewall from the outer edge after the protective cover is installed.

8. The height adjustment assembly according to claim 2, characterized in that, The through hole is a stepped hole, and the head of the fastener is accommodated in the stepped hole.

9. The height adjustment assembly according to claim 1, characterized in that, It also includes a lock nut, which is threaded onto the external thread of the intermediate part and is used to abut against the supported part after adjustment to lock the relative position of the intermediate part and the supported part.

10. The height adjustment assembly according to claim 1, characterized in that, A stop structure is provided on the contact surface between the intermediate part and the reference part. The stop structure is used to prevent the intermediate part from rotating relative to the reference part during the process of the intermediate part being fastened to the reference part.

11. The height adjustment assembly according to claim 10, characterized in that, The stop structure includes: surface undulation features that are respectively disposed on the contact surface of the intermediate member and the contact surface of the reference member and engage with each other; or, a non-circular contour formed on the contact surface of the intermediate member and a recess formed on the contact surface of the reference member that matches the shape of the non-circular contour.

12. A leveling device, characterized in that, include: Supported component; Reference component; At least three support points for supporting the supported member, the at least three support points being non-collinearly arranged on the supported member, and the at least three support points being disposed between the supported member and the reference member; wherein at least two of the support points form a height adjustment component as described in any one of claims 1-11; Preferably, the number of height adjustment components is N-1 or N, where N is the number of support points and N is a positive integer.

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