MOCVD reaction cavity facilitating airtight detection

Abstract

The utility model discloses a kind of MOCVD reaction cavities of airtight detection convenience, cavity bottom is provided with bottom plate, cavity cover is cooperated with cavity top end, cavity cover one side is provided with airtight detection hole, first manual valve is arranged at cavity cover outside surface in airtight detection hole, first manual valve outer end is connected with three-way joint, pressure gauge is connected on three-way joint upper end, the side wall of cavity cover is respectively provided with gas inlet and gas outlet, second manual valve is connected with the outer end of gas inlet and gas outlet, the utility model structure is reasonable, cavity cover outside is located in airtight detection hole and provided with first manual valve, first manual valve is connected pressure gauge by three-way joint, gas inlet and gas outlet are all provided with second manual valve, when carrying out airtightness detection, close second manual valve, open first manual valve, and airtightness detection equipment can be used to carry out airtightness detection to MOCVD reaction cavity, and great improvement is achieved in convenience.

Description

Technical Field

[0001] This utility model relates to the field of MOCVD reaction chamber airtightness testing technology, specifically to an MOCVD reaction chamber that facilitates airtightness testing. Background Technology

[0002] MOCVD stands for Metal-Organic Chemical Vapor Deposition. The MOCVD reaction chamber is the core component of this technology, primarily used for atomically precise thin film growth of semiconductor materials. It contains a stage to support the heating components and substrate. During operation, trimethylgallium is typically used as the gallium source, ammonia as the ammonia source, and a mixed gas, including nitrogen, is used as the carrier gas to carry the reactants into the reaction chamber. At high temperatures, the reactants are thoroughly mixed, and a chemical reaction occurs inside, forming gallium nitride (GaN). The GaN thin film is then deposited on the semiconductor surface.

[0003] To ensure that the MOCVD reaction chamber does not leak, an airtightness test is generally required at the factory. However, after long-term use, if an airtightness test is required, the chamber must be disassembled and moved to a specialized testing workshop, which is inconvenient. Therefore, there is an urgent need for an improved technology to solve this problem in the existing technology. Summary of the Invention

[0004] The purpose of this invention is to provide an MOCVD reaction chamber that facilitates airtightness testing, in order to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a convenient MOCVD reaction chamber for airtightness testing, comprising a chamber body and a chamber cover. A base plate is provided at the bottom of the chamber body. A first folding plate is provided around the outer periphery of the upper surface of the chamber body, and the first folding plate has several positioning holes. The chamber cover is movably disposed above the chamber body and engages with the upper surface of the chamber body. A second folding plate is provided around the outer periphery of the lower surface of the chamber cover, and several positioning rods are provided on the lower surface of the second folding plate. The bottom of each positioning rod is tapered, and each positioning rod corresponds to and is inserted into a positioning hole. An airtightness testing hole is provided on one side of the chamber cover. A first manual valve is provided on the outer surface of the chamber cover at the airtightness testing hole. A tee connector is connected to the outer end of the first manual valve, and a pressure gauge is connected to the upper end of the tee connector. A gas inlet and a gas outlet are respectively provided on the side wall of the chamber cover, and a second manual valve is connected to the outer ends of both the gas inlet and the gas outlet.

[0006] Preferably, the present invention provides an MOCVD reaction chamber for convenient airtightness testing, wherein a hydraulic cylinder connecting seat is provided on the upper surface of the chamber cover.

[0007] Preferably, the present invention provides an MOCVD reaction chamber for convenient airtightness testing, wherein at least two upper annular grooves are formed on the upper surface of the chamber, an upper sealing ring is provided in the upper annular groove, and the lower surface of the chamber cover is tightly fitted with the upper sealing ring.

[0008] Preferably, the present invention provides an MOCVD reaction chamber for convenient airtightness testing, wherein at least two lower annular grooves are formed on the lower surface of the chamber, a lower sealing ring is provided in the lower annular groove, and the upper surface of the base plate is tightly fitted with the lower sealing ring.

[0009] Preferably, the present invention provides an MOCVD reaction chamber for convenient airtightness testing, wherein the outer end of the three-way connector is provided with an air pump connection connector.

[0010] Compared with the prior art, the beneficial effects of this utility model are: (1) A first manual valve is installed on the outside of the chamber cover at the air tightness test hole. The first manual valve is connected to the pressure gauge through a three-way connector. A second manual valve is installed at both the gas inlet and the gas outlet. When performing an air tightness test, the second manual valve is closed and the first manual valve is opened so that the air tightness test equipment can be used to perform an air tightness test on the MOCVD reaction chamber, which greatly improves the convenience.

[0011] (2) The cavity cover is positioned and matched with the positioning holes of the cavity body by several positioning rods, thereby ensuring the sealing of the entire reaction cavity after the cavity cover is closed. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a top view of the cavity structure. Figure 3 This is a schematic diagram of the cavity structure viewed from below.

[0013] In the diagram: 1. Cavity; 2. Cavity cover; 3. Base plate; 4. First folding plate; 5. Positioning hole; 6. Second folding plate; 7. Positioning rod; 8. Air tightness test hole; 9. First manual valve; 10. T-connector; 11. Pressure gauge; 12. Gas inlet; 13. Gas outlet; 14. Second manual valve; 15. Hydraulic cylinder connecting seat; 16. Upper annular groove; 17. Lower annular groove; 18. Upper sealing ring; 19. Lower sealing ring; 20. Air pump connecting connector. Detailed Implementation

[0014] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model. It should be noted that in the description of this utility model, the terms "inner", "outer", "upper", "lower", "both sides", "one end", "the other end", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0015] Please see Figure 1-3 This utility model provides a technical solution: a convenient MOCVD reaction chamber for airtightness testing, including a chamber body 1 and a chamber cover 2. A base plate 3 is provided at the bottom of the chamber body 1. A first folding plate 4 is provided around the upper surface of the chamber body 1, and the first folding plate 4 has several positioning holes 5. The chamber cover 2 is movably positioned above the chamber body 1 and engages with the upper surface of the chamber body 1. A hydraulic cylinder connecting seat 15 is provided on the upper surface of the chamber cover 2 to connect with a hydraulic cylinder, thereby enabling the chamber cover 2 to rise and fall. A second folding plate 6 is provided around the lower surface of the chamber cover 2, and several positioning rods 7 are provided on the lower surface of the second folding plate 6. The bottom of the positioning rods 7 is... The cone-shaped positioning rod 7 corresponds to the positioning hole 5 and is inserted into each other. An airtightness detection hole 8 is provided on one side of the cavity cover 2. A first manual valve 9 is provided on the outer surface of the cavity cover 2 at the airtightness detection hole 8. A three-way connector 10 is connected to the outer end of the first manual valve 9. A pressure gauge 11 is connected to the upper end of the three-way connector 10. An air pump connection connector 20 is provided on the outer end of the three-way connector 10 to connect with the air pump, thereby filling the reaction chamber with gas. A gas inlet 12 and a gas outlet 13 are respectively provided on the side wall of the cavity cover 2. A second manual valve 14 is connected to the outer end of both the gas inlet 12 and the gas outlet 13. At least two upper annular grooves 16 are provided on the upper surface of the cavity 1. An upper sealing ring 18 is provided in the upper annular groove 16. The lower surface of the cavity cover 2 is tightly fitted with the upper sealing ring 18 to ensure the sealing performance when the cavity cover 2 is pressed on the upper surface of the cavity 1 and to prevent air leakage. At least two lower annular grooves 17 are provided on the lower surface of the cavity 1. A lower sealing ring 19 is provided in the lower annular groove 17. The upper surface of the base plate 3 is in close contact with the lower sealing ring 19 to ensure the sealing at the connection between the lower surface of the cavity 1 and the base plate 3.

[0016] Installation method and operating principle: Install the first manual valve 9 at the airtightness detection hole 8 of the chamber cover 2, and then connect the tee connector 10 to the outer end of the first manual valve 9. At the same time, connect the bypass port of the tee connector 10 to the pressure gauge 11. Install the second manual valve 14 at the outer ends of the gas inlet 12 and the gas outlet 13. Before use, connect the chamber cover 2 to the piston rod of the hydraulic cylinder through the hydraulic cylinder connecting seat 15 to realize the lifting and lowering of the chamber cover 2. The gas inlet 12 and the gas outlet 13 are respectively connected to the mixed gas pipeline through the second manual valve 14. The base and heating plate are installed inside the chamber 1. During use, place the substrate into the graphite plate and place the graphite plate on the heating plate, so that the chamber cover 2 is lowered and each positioning rod 7 is inserted into the corresponding positioning hole 5. Then, trimethylgallium, ammonia, and nitrogen are introduced into the reaction chamber through the gas inlet 12 and deposited. During use, the first manual valve 9 is in the closed state. When performing periodic airtightness tests, close the second manual valve 14, open the first manual valve 9, lower the chamber cover 2 and tightly connect it to the top of the chamber 1. Connect the air filling connector of the airtightness testing equipment to the air pump connection connector 20 at the outer end of the tee connector 10, and fill the chamber 1 with air. At this time, the pressure gauge 11 displays the pressure. Maintain the pressure for a certain period of time and check whether the value of the pressure gauge 11 decreases, thereby determining whether the MOCVD reaction chamber is leaking. This utility model has a reasonable structure. The first manual valve 9 is set on the outside of the chamber cover 2 at the airtightness testing hole 8. The first manual valve 9 is connected to the pressure gauge 11 through the tee connector 10. The gas inlet 12 and the gas outlet 13 are both equipped with second manual valves 14. When performing airtightness tests, close the second manual valve 14 and open the first manual valve 9 to perform airtightness tests on the MOCVD reaction chamber through the airtightness testing equipment, which greatly improves convenience. The chamber cover 2 is positioned and matched with the positioning holes 5 of the chamber 1 by several positioning rods 7, thereby ensuring the airtightness of the entire reaction chamber after the chamber cover 2 is closed.

[0017] Any aspects of this utility model not described in detail are well-known technologies to those skilled in the art.

[0018] Finally, it should be noted that the above specific embodiments are only used to illustrate the technical solution of this utility model and not to limit it. Although this utility model has been described in detail with reference to the embodiments, those skilled in the art should understand that modifications and equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications and substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A convenient MOCVD reaction chamber for airtightness testing, characterized in that: Includes a cavity (1) and a cavity cover (2). The bottom of the cavity (1) is provided with a base plate (3). The outer periphery of the upper surface of the cavity (1) is provided with a first folding plate (4). The first folding plate (4) is provided with a plurality of positioning holes (5). The cavity cover (2) is movably disposed above the cavity (1) and cooperates with the upper surface of the cavity (1). The outer periphery of the lower surface of the cavity cover (2) is provided with a second folding plate (6). The lower surface of the second folding plate (6) is provided with a plurality of positioning rods (7). The bottom of the positioning rods (7) is conical. The positioning rods (7) and the positioning holes (5) 5) One-to-one correspondence and mutual insertion, the cavity cover (2) is provided with an airtightness detection hole (8) on one side, the outer surface of the cavity cover (2) is provided with a first manual valve (9) located at the airtightness detection hole (8), the outer end of the first manual valve (9) is connected to a three-way connector (10), the upper end of the three-way connector (10) is connected to a pressure gauge (11), the side wall of the cavity cover (2) is provided with a gas inlet (12) and a gas outlet (13), and the outer ends of the gas inlet (12) and the gas outlet (13) are both connected to a second manual valve (14).

2. The MOCVD reaction cavity convenient for gas tightness detection according to claim 1, characterized in that: The upper surface of the cavity cover (2) is provided with a hydraulic cylinder connecting seat (15).

3. The MOCVD reaction cavity convenient for gas tightness detection according to claim 1, characterized in that: The cavity (1) has at least two upper annular grooves (16) on its upper surface, and an upper sealing ring (18) is provided in the upper annular groove (16). The lower surface of the cavity cover (2) is in close contact with the upper sealing ring (18).

4. The MOCVD reaction cavity convenient for gas tightness detection according to claim 1, characterized in that: The lower surface of the cavity (1) is provided with at least two lower annular grooves (17), and a lower sealing ring (19) is provided in the lower annular groove (17). The upper surface of the base plate (3) is in close contact with the lower sealing ring (19).

5. The MOCVD reaction chamber for convenient airtightness testing according to claim 1, characterized in that: The outer end of the tee connector (10) is provided with an air pump connection connector (20).

Images