A probe card for a semiconductor chip testing system

Abstract

The utility model relates to probe fixture technical field, concretely discloses a kind of probe fixture suitable for semiconductor chip testing system, including cylinder, the cylinder top end rotationally arranged gear disc one, the gear disc one top surface rotationally arranged knob, the cylinder side edge fixedly installed symmetric box, gear rod is rotationally arranged on the box, the gear rod top end is fixedly installed gear disc two, the gear disc two is respectively engaged with gear disc one meshing transmission connection, worm and worm wheel are rotationally arranged in the box, the gear rod rotation shaft end and worm rotation shaft end fixedly installed, the worm and worm wheel meshing transmission connection, the cylinder is set to hollow, symmetric screw rod is rotationally arranged in the cylinder, the screw rod rotation shaft end is respectively fixedly installed with worm wheel rotation shaft end, the probe fixture suitable for semiconductor chip testing system, can simply fix different size probe, significantly improve device applicability, save time and effort, and practicality is strong.

Description

Technical Field

[0001] This utility model belongs to the field of probe fixture technology, and in particular relates to a probe fixture suitable for semiconductor chip testing systems. Background Technology

[0002] The probes of a semiconductor chip testing system are precision components used to directly contact chip pins or solder balls to transmit electrical signals. They possess micron-level precision and excellent electrical performance. The fixtures, on the other hand, are devices that fix and support the probes, ensuring stable contact between the probes and the chip during testing. They also connect to the testing equipment to achieve signal transmission. Together, they ensure the accuracy and reliability of chip testing.

[0003] Traditional probe holders are cumbersome and complex to fix, often requiring technicians to use various auxiliary tools and spend a lot of time on fine adjustments. The operation is time-consuming and labor-intensive, so improvements are needed. To this end, a probe holder suitable for semiconductor chip testing systems is proposed. Utility Model Content

[0004] The purpose of this invention is to provide a probe holder suitable for semiconductor chip testing systems, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a probe holder suitable for a semiconductor chip testing system, comprising a cylindrical body, a geared disk I rotatably mounted at the top of the cylindrical body, a knob rotatably mounted on the top surface of the geared disk I, symmetrical boxes fixedly mounted on the side of the cylindrical body, vertical rods rotatably mounted on each box, a geared disk II fixedly mounted at the top of each vertical rod, the geared disk II being meshed and driven by the geared disk I, a worm and a worm wheel rotatably mounted inside the box, the shaft ends of the vertical rods being fixedly mounted to the shaft ends of the worm, the worm and the worm wheel being meshed and driven by the worm wheel, the cylindrical body being hollow, a symmetrical lead screw rotatably mounted inside the cylindrical body, the shaft ends of the lead screw being fixedly mounted to the shaft ends of the worm wheel, a symmetrical movable plate slidably mounted inside the cylindrical body, the movable plates being threadedly connected to the lead screw, evenly distributed and symmetrical connecting rods slidably mounted inside the cylindrical body, the ends of the connecting rods being fixedly mounted to the movable plates, and symmetrical arc strips mounted inside the cylindrical body, the arc strips being respectively mounted at the ends of the connecting rods.

[0006] As a further description of the above solution: by setting up the cylinder, gear plate one, knob, box, vertical rod, gear plate two, worm, worm wheel, lead screw, movable plate, connecting rod, and the coordinated operation between the arc strip, probes of different sizes can be easily fixed, significantly improving the applicability of the device, saving time and effort, and making it highly practical.

[0007] Preferably, the surface of the arc strip is covered with a pad strip, and the pad strip is made of rubber.

[0008] As a further description of the above solution: the surface of the arc strip is covered with a rubber pad, which not only improves the stability when holding the probe, but also protects the sides of the probe.

[0009] Preferably, each end of the connecting rod is provided with a socket, and the side of the arc strip is fixedly equipped with evenly distributed plug rods, the size of which is adapted to the size of the socket.

[0010] As a further description of the above solution: the insertion port and insertion rod are provided to facilitate easy disassembly and assembly of the arc strip, thereby facilitating the replacement of arc strips of different models and improving the applicability of the device.

[0011] Preferably, a damping mechanism is provided between the insertion rod and the insertion port.

[0012] As a further description of the above solution: a damping mechanism is provided between the insertion rod and the socket, which can improve the stability of the arc strip after it is installed and fixed.

[0013] Preferably, the toothed disc and the top side of the cylinder are provided with damping.

[0014] As a further description of the above scheme: the toothed disc and the top side of the cylinder are equipped with damping, which can improve the stability of the arc strip in holding the probe.

[0015] Preferably, a support plate is fixed to the side of the cylinder, and the vertical rod is rotatably mounted on the support plate.

[0016] As a further description of the above solution: setting up a support plate can improve the stability of the vertical rod when it rotates.

[0017] Preferably, the arc strips are provided in at least two symmetrical sets.

[0018] As a further description of the above scheme: the arc strips are provided with at least two sets of relatively symmetrical ones, which can further improve the stability of the arc strips in holding the probe.

[0019] In summary, compared with the prior art, the beneficial effects of this utility model are: by setting up the cylinder, gear plate one, knob, box, vertical rod, gear plate two, worm, worm wheel, lead screw, movable plate, connecting rod, and the coordinated operation between the arc strip, probes of different sizes can be easily fixed, significantly improving the applicability of the device, saving time and effort, and making it highly practical. Attached Figure Description

[0020] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0021] Figure 2 This is a bottom view of the structure of this utility model;

[0022] Figure 3 This is a side sectional view of the box body of this utility model;

[0023] Figure 4 This is a structural diagram of the movable plate, connecting rod, and arc strip of this utility model;

[0024] Figure 5 This is a side sectional view of the connecting rod of this utility model.

[0025] Legend:

[0026] 1. Cylinder body; 2. Gear plate one; 3. Knob; 4. Box body; 5. Vertical rod; 6. Gear plate two; 7. Worm gear; 8. Worm wheel; 9. Lead screw; 10. Movable plate; 11. Connecting rod; 12. Arc strip; 13. Socket; 14. Insert rod; 15. Support plate. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0028] Please see Figure 1-5 This utility model provides a technical solution:

[0029] A probe holder suitable for a semiconductor chip testing system includes a cylindrical body 1. A geared disc 2 is rotatably mounted on the top of the cylindrical body 1, and a knob 3 is rotatably mounted on the top surface of the geared disc 2. A symmetrical box 4 is fixedly mounted on the side of the cylindrical body 1. Vertical rods 5 are rotatably mounted on each box 4, and geared discs 6 are fixedly mounted on the top of each vertical rod 5. The geared discs 6 are respectively meshed and connected to the geared disc 2. A worm gear 7 and a worm wheel 8 rotatably rotate inside the box 4. The shaft ends of the vertical rods 5 and worm gear 7 are fixedly mounted to each other. The worm gear 7 and worm wheel 8 mesh... The cylinder 1 is hollow and has a symmetrical lead screw 9 rotatably mounted inside it. The shaft ends of the lead screw 9 are fixedly installed to the shaft ends of the worm gear 8. A symmetrical movable plate 10 is slidably mounted inside the cylinder 1 and is threadedly connected to the lead screw 9. A uniformly distributed and symmetrical connecting rod 11 is slidably mounted inside the cylinder 1 and is fixedly installed to the movable plate 10 at its ends. A symmetrical arc strip 12 is provided inside the cylinder 1 and is located at the ends of the connecting rod 11.

[0030] When clamping probes suitable for semiconductor chip testing systems, the operator inserts the probe into the cylinder 1, positioning the probe tube between multiple sets of arc strips 12. The operator then rotates the knob 3 at the top of the cylinder 1. The rotation of knob 3 causes the gear disc 2 to rotate at the top of the cylinder 1. Since gear disc 2 is meshed with gear disc 6 at the top of the vertical rod 5, the rotation of gear disc 2 drives the two sets of gear disc 6 to rotate synchronously. The rotation of the two sets of gear disc 6 drives the vertical rod 5, which is fixedly mounted to it, to rotate on the housing 4. The rotation of the vertical rod 5 further... The worm 7 connected to its shaft end rotates, and the worm 7 meshes with the worm wheel 8 for transmission. The rotation of the worm 7 causes the worm wheel 8 to rotate inside the housing 4. The shaft end of the worm wheel 8 is fixedly installed with the lead screw 9. The rotation of the worm wheel 8 causes the lead screw 9 to rotate inside the cylinder 1. When the lead screw 9 rotates, the movable plate 10 threadedly connected to the lead screw 9 slides inside the cylinder 1. The sliding of the movable plate 10 causes the connecting rod 11 fixedly installed with it to slide inside the cylinder 1. The arc strip 12 at the end of the connecting rod 11 moves and moves closer to each other to simply fix the probe.

[0031] After fixing, the entire device is fixedly installed on the testing equipment through the cylinder 1;

[0032] This probe holder, suitable for semiconductor chip testing systems, can easily fix probes of different sizes, significantly improving the applicability of the device, saving time and effort, and is highly practical.

[0033] A padding strip is laid on the surface of the arc strip 12, and the padding strip is made of rubber.

[0034] When the arc strip 12 clamps the probe, the surface of the arc strip 12 is covered with a rubber pad. The rubber has good elasticity and friction. When the arc strip 12 approaches and contacts the probe, the pad can fit tightly against the probe surface, increasing the friction between the two and improving the stability of clamping the probe. At the same time, the rubber material is relatively soft, which can prevent the arc strip 12 from causing hard damage to the side of the probe, thus playing a protective role.

[0035] Each end of the connecting rod 11 is provided with a socket 13, and the arc strip 12 is fixedly installed with evenly distributed plug rods 14, the size of which is adapted to the size of the socket 13;

[0036] When the arc strip 12 needs to be replaced to adapt to different models of probes, the operator can directly pull the plug 14 out of the socket 13 to disassemble the arc strip 12. When installing a new arc strip 12, simply align the plug 14 on the new arc strip 12 with the socket 13 at the end of the connecting rod 11 and insert it. This makes it easy to disassemble and assemble the arc strip 12, and facilitates the replacement of different models of arc strip 12, effectively improving the applicability of the device.

[0037] A damper is provided between the insertion rod 14 and the socket 13;

[0038] A damper is provided between the insertion rod 14 and the socket 13. When the insertion rod 14 is inserted into the socket 13, the damper will generate a certain resistance. After the arc strip 12 is installed and fixed, the damper can prevent the insertion rod 14 from shaking or displacing freely in the socket 13. Even when the clamp is subjected to a certain vibration or external force, it can ensure that the arc strip 12 is stably installed at the end of the connecting rod 11, thereby improving the stability of the arc strip 12 after installation and fixation.

[0039] Damping is provided on the top side of the gear disc 2 and the cylinder 1;

[0040] The toothed disc 2 and the top side of the cylinder 1 are equipped with damping. When the toothed disc 2 rotates to the appropriate position so that the arc strip 12 clamps the probe, the damping will generate a force to prevent the toothed disc 2 from continuing to rotate. Even if it is subjected to some slight external force interference later, the toothed disc 2 will not easily rotate, thereby ensuring the stability of the position of a series of components associated with the toothed disc 2, and ultimately improving the stability of the arc strip 12 clamping the probe.

[0041] A support plate 15 is fixed to the side of the cylinder 1, and the vertical rod 5 is rotatably mounted on the support plate 15.

[0042] A support plate 15 is fixed on the side of the cylinder 1, and the vertical rod 5 is rotatably mounted on the support plate 15. During the rotation of the vertical rod 5, the support plate 15 can provide additional support force for the vertical rod 5, making the vertical rod 5 more stable during rotation and less prone to shaking or deviation, thereby improving the stability of the vertical rod 5 during rotation and ensuring that the related transmission structure can work normally and stably.

[0043] At least two sets of symmetrical arc bars 12 are provided;

[0044] When the probe is clamped, at least two symmetrical sets of arc strips 12 can apply force to the probe from multiple directions. The multiple sets of arc strips 12 work together to more comprehensively fit the probe surface compared to a single set of arc strips 12, so that the probe can be subjected to stable clamping force in all directions. This further improves the stability of the arc strips 12 clamping the probe, ensuring that the probe will not be displaced during the test and guaranteeing the accuracy of the test.

[0045] Working principle:

[0046] When clamping probes suitable for semiconductor chip testing systems, the operator inserts the probe into the cylinder 1, positioning the probe tube between multiple sets of arc strips 12. The operator then rotates the knob 3 at the top of the cylinder 1. The rotation of knob 3 causes the gear disc 2 to rotate at the top of the cylinder 1. Since gear disc 2 is meshed with gear disc 6 at the top of the vertical rod 5, the rotation of gear disc 2 drives the two sets of gear disc 6 to rotate synchronously. The rotation of the two sets of gear disc 6 drives the vertical rod 5, which is fixedly mounted to it, to rotate on the housing 4. The rotation of the vertical rod 5 further... The worm 7 connected to its shaft end rotates, and the worm 7 meshes with the worm wheel 8 for transmission. The rotation of the worm 7 causes the worm wheel 8 to rotate inside the housing 4. The shaft end of the worm wheel 8 is fixedly installed with the lead screw 9. The rotation of the worm wheel 8 causes the lead screw 9 to rotate inside the cylinder 1. When the lead screw 9 rotates, the movable plate 10 threadedly connected to the lead screw 9 slides inside the cylinder 1. The sliding of the movable plate 10 causes the connecting rod 11 fixedly installed with it to slide inside the cylinder 1. The arc strip 12 at the end of the connecting rod 11 moves and moves closer to each other to simply fix the probe.

[0047] After fixing, the entire device is fixedly installed on the testing equipment through the cylinder 1;

[0048] This probe holder, suitable for semiconductor chip testing systems, can easily fix probes of different sizes, significantly improving the applicability of the device, saving time and effort, and is highly practical.

[0049] in,

[0050] When the arc strip 12 clamps the probe, the surface of the arc strip 12 is covered with a rubber pad. The rubber has good elasticity and friction. When the arc strip 12 approaches and contacts the probe, the pad can fit tightly against the probe surface, increasing the friction between the two and improving the stability of clamping the probe. At the same time, the rubber material is relatively soft, which can prevent the arc strip 12 from causing hard damage to the side of the probe, thus playing a protective role.

[0051] When the arc strip 12 needs to be replaced to adapt to different models of probes, the operator can directly pull the plug 14 out of the socket 13 to disassemble the arc strip 12. When installing a new arc strip 12, simply align the plug 14 on the new arc strip 12 with the socket 13 at the end of the connecting rod 11 and insert it. This makes it easy to disassemble and assemble the arc strip 12, and facilitates the replacement of different models of arc strip 12, effectively improving the applicability of the device.

[0052] A damper is provided between the insertion rod 14 and the socket 13. When the insertion rod 14 is inserted into the socket 13, the damper will generate a certain resistance. After the arc strip 12 is installed and fixed, the damper can prevent the insertion rod 14 from shaking or displacing freely in the socket 13. Even when the clamp is subjected to a certain vibration or external force, it can ensure that the arc strip 12 is stably installed at the end of the connecting rod 11, thereby improving the stability of the arc strip 12 after installation and fixation.

[0053] The toothed disc 2 and the top side of the cylinder 1 are equipped with damping. When the toothed disc 2 rotates to the appropriate position so that the arc strip 12 clamps the probe, the damping will generate a force to prevent the toothed disc 2 from continuing to rotate. Even if it is subjected to some slight external force interference later, the toothed disc 2 will not easily rotate, thereby ensuring the stability of the position of a series of components associated with the toothed disc 2, and ultimately improving the stability of the arc strip 12 clamping the probe.

[0054] A support plate 15 is fixed on the side of the cylinder 1, and the vertical rod 5 is rotatably mounted on the support plate 15. During the rotation of the vertical rod 5, the support plate 15 can provide additional support force for the vertical rod 5, making the vertical rod 5 more stable when rotating and less prone to shaking or deviation, thereby improving the stability of the vertical rod 5 when rotating and ensuring that the related transmission structure can work normally and stably.

[0055] When the probe is clamped, at least two symmetrical sets of arc strips 12 can apply force to the probe from multiple directions. The multiple sets of arc strips 12 work together to more comprehensively fit the probe surface compared to a single set of arc strips 12, so that the probe can be subjected to stable clamping force in all directions. This further improves the stability of the arc strips 12 clamping the probe, ensuring that the probe will not be displaced during the test and guaranteeing the accuracy of the test.

[0056] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A probe holder suitable for a semiconductor chip testing system, comprising a cylindrical body (1), characterized in that, A gear disc (2) is rotatably mounted on the top of the cylinder (1), and a knob (3) is rotatably mounted on the top surface of the gear disc (2). A symmetrical box (4) is fixedly mounted on the side of the cylinder (1). Vertical rods (5) are rotatably mounted on each box (4), and a gear disc (6) is fixedly mounted on the top of each vertical rod (5). The gear discs (6) are meshed and connected to the gear discs (2). A worm (7) and a worm wheel (8) rotate inside the box (4). The shaft end of the vertical rod (5) is fixedly mounted to the shaft end of the worm (7). The worm (7) and the worm wheel (8) are meshed and connected. 1) The cylinder (1) is hollow. A symmetrical lead screw (9) is rotatably arranged inside the cylinder (1). The shaft ends of the lead screw (9) are fixedly installed with the shaft ends of the worm gear (8). A symmetrical movable plate (10) is slidably arranged inside the cylinder (1). The movable plate (10) is threadedly connected to the lead screw (9). A uniformly distributed and symmetrical connecting rod (11) is slidably arranged inside the cylinder (1). The ends of the connecting rod (11) are fixedly installed with the movable plate (10). A symmetrical arc strip (12) is arranged inside the cylinder (1). The arc strip (12) is arranged at the ends of the connecting rod (11).

2. The probe holder for a semiconductor chip testing system according to claim 1, characterized in that, The surface of the arc strip (12) is covered with a pad strip, which is made of rubber.

3. A probe holder suitable for a semiconductor chip testing system according to claim 1, characterized in that, The ends of the connecting rods (11) are provided with sockets (13), and the sides of the arc strips (12) are fixedly equipped with evenly distributed plugs (14), the size of the plugs (14) being adapted to the size of the sockets (13).

4. A probe holder suitable for a semiconductor chip testing system according to claim 3, characterized in that, A damping mechanism is provided between the insertion rod (14) and the insertion port (13).

5. A probe holder suitable for a semiconductor chip testing system according to claim 1, characterized in that, The toothed disc (2) and the top side of the cylinder (1) are provided with damping.

6. A probe holder suitable for a semiconductor chip testing system according to claim 1, characterized in that, The cylinder (1) is fixed with a support plate (15) on its side, and the vertical rod (5) is rotatably mounted on the support plate (15).

7. A probe holder suitable for a semiconductor chip testing system according to claim 1, characterized in that, The arc strip (12) is provided in at least two symmetrical sets.

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