Safety protection device for vertical diffusion furnace

Abstract

The utility model discloses a vertical diffusion furnace safety device relates to vertical diffusion furnace protection technical field, including the furnace body, the surface hinged of furnace body has the furnace door, the surface of furnace body and be located the above and below of furnace door with and all fixedly connected with end suction head, the surface of furnace body and be located the right side fixedly connected with left suction head of furnace door, the front surface of end suction head with the side of left suction head all fixedly connected with first air blower, one the one end fixedly connected with total pipe of first air blower, this vertical diffusion furnace safety device, can be taken in from the door hole of furnace door opening place's up and down and left and right direction and exhaust gas's suction and discharge through being provided with two end suction heads, first air blower and side suction head, can effectively reduce the probability that exhaust gas disperses to go out through four sides ring suction.

Description

Technical Field

[0001] This utility model relates to the field of vertical diffusion furnace protection technology, specifically a safety protection device for a vertical diffusion furnace. Background Technology

[0002] Vertical diffusion furnaces are devices used for modifying semiconductor materials and are an indispensable part of the semiconductor industry. They feature uniform heating, high efficiency and energy saving, and precise control. Safety protection devices for vertical diffusion furnaces are a crucial component, guiding high-temperature exhaust gases to prevent them from spreading and harming workers. According to a vertical diffusion furnace safety protection device with application number CN222069326U, while guiding high-temperature exhaust gases and facilitating their purification to prevent environmental pollution, the device is environmentally friendly. However, because the exhaust frame draws in exhaust gases from above, some gases escape from below due to the distance between the exhaust frame and the furnace door. Utility Model Content

[0003] To address the shortcomings of existing technologies, this utility model provides a safety protection device for a vertical diffusion furnace, which solves the problems mentioned in the background section.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a safety protection device for a vertical diffusion furnace, comprising a furnace body, a furnace door hinged to the surface of the furnace body, end suction heads fixedly connected to the surface of the furnace body above and below the furnace door, a left suction head fixedly connected to the surface of the furnace body on the right side of the furnace door, a first induced draft fan fixedly connected to the front surface of the end suction head and the side of the left suction head, one end of one first induced draft fan fixedly connected to a main pipe, and one end of the other two first induced draft fans fixedly connected to first pipes, one end of each first pipe extending into the main pipe, an electric telescopic rod fixedly connected to one side of the furnace body, a side suction head fixedly connected to the telescopic end of the electric telescopic rod, the side suction head being located on the left side of the furnace door, a second pipe fixedly connected to one side of the side suction head, a second induced draft fan fixedly connected to one end of the second pipe, and a flexible hose fixedly connected to one end of the second induced draft fan.

[0005] Preferably, a guide rail is fixedly connected to one side of the furnace body, both above and below the electric telescopic rod. A guide post is slidably connected inside the guide rail. A pull rope sensor is fixedly connected to one side of the inner cavity of the guide rail. The pull rope end of the pull rope sensor is fixedly connected to one end of the guide post. One end of the guide post extends to the outside of the guide rail and is fixedly connected to one side of the side suction head. The pull rope sensor is a pull rope displacement sensor DSS-M.

[0006] Preferably, an adsorption tube is fixedly connected to one side of the furnace body and the main pipe. An activated carbon filling cylinder is inserted into one end of each adsorption tube. One end of each activated carbon filling cylinder extends to the outside of the adsorption tube and is fixedly connected to a fixing tube. One end of each fixing tube is fixedly connected to an external threaded sealing sleeve.

[0007] Preferably, one end of each adsorption tube is provided with an internal thread groove, and an external thread sealing sleeve is threadedly connected inside each internal thread groove. One end of each external thread sealing sleeve extends to the outside of the internal thread groove and is fixedly connected to one end of the fixed tube. The activated carbon filling cylinder is filled with a certain amount of activated carbon.

[0008] Preferably, a controller is fixedly connected to one side of the furnace body. The second induced draft fan and the two first induced draft fans are all composed of motors and fan blades. The motors are installed on the brackets inside the second and first induced draft fans. Then, several first induced draft fans are fixedly connected to the outside of the output end of the motor. The output end of the motor drives the fan blades to rotate, generating suction to draw in and transport the exhaust gas.

[0009] Preferably, a controller is fixedly connected to one side of the furnace body.

[0010] This utility model provides a safety protection device for a vertical diffusion furnace, which has the following beneficial effects: 1. The safety protection device of this vertical diffusion furnace, by setting two end suction heads, a first induced draft fan and a side suction head, can draw in and discharge waste gas from the top, bottom and left and right directions of the door opening at the furnace door. Through four-sided suction, the probability of waste gas escaping can be effectively reduced.

[0011] 2. The safety protection device of this vertical diffusion furnace is equipped with guide rails, electric telescopic rods and side suction heads. When smoke extraction is needed, the side suction heads are extended to extract waste gas, and when smoke extraction is not needed, the side suction heads are retracted to the initial position. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a side view of the structure of this utility model; Figure 3 This is a schematic diagram of the structure of the second induced draft fan of this utility model; Figure 4 This is a schematic diagram of the internal structure of the adsorption tube of this utility model; Figure 5 This is a schematic diagram of the internal structure of the guide rail of this utility model.

[0013] In the diagram: 1. Furnace body; 2. Furnace door; 3. End suction head; 4. First induced draft fan; 5. First pipe; 6. Main pipe; 7. Electric telescopic rod; 8. Side suction head; 9. Second induced draft fan; 10. Second pipe; 11. Flexible hose; 12. Guide rail; 13. Guide column; 14. Pull rope sensor; 15. Adsorption tube; 16. Activated carbon filling cylinder; 17. Internal threaded groove; 18. External threaded sealing sleeve; 19. Fixed tube; 20. Controller; 21. Left suction head. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0015] Please see Figures 1 to 5 This utility model provides a technical solution: a safety protection device for a vertical diffusion furnace, including a furnace body 1, a furnace door 2 hinged to the surface of the furnace body 1, end suction heads 3 fixedly connected to the surface of the furnace body 1 above and below the furnace door 2, a left suction head 21 fixedly connected to the surface of the furnace body 1 on the right side of the furnace door 2, a first induced draft fan 4 fixedly connected to the front surface of the end suction head 3 and the side of the left suction head 21, a main pipe 6 fixedly connected to one end of one first induced draft fan 4, and a first pipe 5 fixedly connected to one end of the other two first induced draft fans 4, with one end of the first pipe 5 extending into the main pipe 6, an electric telescopic rod 7 fixedly connected to one side of the furnace body 1, a side suction head 8 fixedly connected to the telescopic end of the electric telescopic rod 7, the side suction head 8 being located on the left side of the furnace door 2, a second pipe 10 fixedly connected to one side of the side suction head 8, a second induced draft fan 9 fixedly connected to one end of the second pipe 10, and a flexible hose 11 fixedly connected to one end of the second induced draft fan 9.

[0016] A guide rail 12 is fixedly connected to one side of the furnace body 1, both above and below the electric telescopic rod 7. A guide post 13 is slidably connected inside the guide rail 12. A pull rope sensor 14 is fixedly connected to one side of the inner cavity of the guide rail 12. The pull rope end of the pull rope sensor 14 is fixedly connected to one end of the guide post 13. One end of the guide post 13 extends to the outside of the guide rail 12 and is fixedly connected to one side of the side suction head 8. The movement of the side suction head 8 drives the guide post 13 to slide inside the guide rail 12, thus supporting and guiding the side suction head 8.

[0017] An adsorption tube 15 is fixedly connected to one side of the furnace body 1 and the main pipe 6. An activated carbon filling cylinder 16 is inserted into one end of each adsorption tube 15. One end of each activated carbon filling cylinder 16 extends to the outside of the adsorption tube 15 and is fixedly connected to a fixing tube 19. One end of each fixing tube 19 is fixedly connected to an external threaded sealing sleeve 18. A sealing ring installed inside the external threaded sealing sleeve 18 and between the inner wall of the internal threaded groove 17 ensures the seal between the fixing tube 19 and the adsorption tube 15.

[0018] Each adsorption tube 15 has an internal threaded groove 17 at one end, and an external threaded sealing sleeve 18 is threadedly connected inside the internal threaded groove 17. One end of the external threaded sealing sleeve 18 extends to the outside of the internal threaded groove 17 and is fixedly connected to one end of the fixing tube 19. The activated carbon filling cylinder 16 is filled with a certain amount of activated carbon. When the activated carbon filling cylinder 16 needs to be replaced, the user screws the fixing tube 19, causing the fixing tube 19 to drive the external threaded sealing sleeve 18 out of the internal threaded groove 17. Then, the activated carbon filling cylinder 16 is taken out from the adsorption tube 15, and a new activated carbon filling cylinder 16 is inserted into one end of the adsorption tube 15. One end of the external threaded sealing sleeve 18 is screwed into the internal threaded groove 17 to limit and fix the position of the fixing tube 19 and the activated carbon filling cylinder 16.

[0019] A controller 20 is fixedly connected to one side of the furnace body 1. The second induced draft fan 9 and the two first induced draft fans 4 are all composed of motors and fan blades. The motors are installed on the brackets inside the second induced draft fan 9 and the first induced draft fans 4. Then, several first induced draft fans 4 are fixedly connected to the outside of the output end of the motor. The output end of the motor drives the fan blades to rotate, generating suction to draw in and transport the exhaust gas.

[0020] A controller 20 is fixedly connected to one side of the furnace body 1. The controller 20 is used to install a control program to drive the device to work.

[0021] In summary, the safety protection device for this vertical diffusion furnace operates as follows: When the furnace door 2 is opened, the controller 20, according to a preset control program, manipulates the telescopic end of the electric telescopic rod 7 to move the side suction head 8 to the front of the furnace door 2. The first induced draft fan 4 is then activated, causing the motor inside the fan 4 to drive the fan blades on the outer side of the output shaft to rotate. This allows the two end suction heads 3 and the left suction head 21 to draw exhaust gas from the upper and lower sides and the right side of the furnace door 2, respectively. The exhaust gas is then discharged through the first pipe 5 into the main pipe 6, and then into the adsorption pipe 15, where it is filled with activated carbon. The cylinder 16 adsorbs the exhaust gas and discharges it through one end of the fixed pipe 19. The motor inside the second induced draft fan 9 drives the fan blades on the outside of the output shaft to rotate, so that the side suction head 8 draws in the exhaust gas from the left side of the furnace door 2. Then, it enters another adsorption pipe 15 through the second pipe 10, the second induced draft fan 9 and the hose 11. The exhaust gas is adsorbed by the activated carbon filling cylinder 16 and discharged through one end of the fixed pipe 19. When the furnace door 2 is closed, the extension end of the electric telescopic rod 7 drives the side suction head 8 to reset and move, so that the hose 11 is folded and the side suction head 8 is moved to the initial position.

[0022] All standard parts used in this application can be purchased from the market, and can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment all adopt conventional models in the prior art. The installation methods between equipment are also the same as conventional installation methods in the prior art. For example, the two ends of the shaft-shaped parts are connected by bearings, the connection position of the valve component is provided with anti-leakage rubber strips, the outside of the threaded rod or screw is provided with dust cover, and the equipment can be driven by either built-in battery or external power supply. The control method is automatic control by a controller. The control circuit of the controller can be implemented by simple programming by those skilled in the art and is common knowledge in the field. Since this utility model is mainly used to protect mechanical devices, this utility model will not explain the control method and circuit connection in detail. The external controller mentioned in the specification can play a control role for the electrical components mentioned in this article, and the external controller is a conventional known device.

[0023] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A safety protection device for a vertical diffusion furnace, comprising a furnace body (1), characterized in that: A furnace door (2) is hinged to the surface of the furnace body (1). An end suction head (3) is fixedly connected to the surface of the furnace body (1) above and below the furnace door (2). A left suction head (21) is fixedly connected to the surface of the furnace body (1) on the right side of the furnace door (2). A first induced draft fan (4) is fixedly connected to the front surface of the end suction head (3) and the side of the left suction head (21). One end of one of the first induced draft fans (4) is fixedly connected to a main pipe (6), and one end of the other two first induced draft fans (4) is fixedly connected to... The first pipe (5) has one end extending into the main pipe (6). An electric telescopic rod (7) is fixedly connected to one side of the furnace body (1). A side suction head (8) is fixedly connected to the telescopic end of the electric telescopic rod (7). The side suction head (8) is located on the left side of the furnace door (2). A second pipe (10) is fixedly connected to one side of the side suction head (8). A second induced draft fan (9) is fixedly connected to one end of the second pipe (10). A hose (11) is fixedly connected to one end of the second induced draft fan (9).

2. The safety protection device for a vertical diffusion furnace according to claim 1, characterized in that: A guide rail (12) is fixedly connected to one side of the furnace body (1) and above and below the electric telescopic rod (7). A guide post (13) is slidably connected inside the guide rail (12). A pull rope sensor (14) is fixedly connected to one side of the inner cavity of the guide rail (12). The pull rope end of the pull rope sensor (14) is fixedly connected to one end of the guide post (13). One end of the guide post (13) extends to the outside of the guide rail (12) and is fixedly connected to one side of the side suction head (8).

3. The safety protection device for a vertical diffusion furnace according to claim 1, characterized in that: The furnace body (1) and the main pipe (6) are both fixedly connected to one side of an adsorption tube (15). An activated carbon filling cylinder (16) is inserted into one end of each adsorption tube (15). One end of each activated carbon filling cylinder (16) extends to the outside of the adsorption tube (15) and is fixedly connected to a fixing tube (19). One end of each fixing tube (19) is fixedly connected to an external threaded sealing sleeve (18).

4. The safety protection device for a vertical diffusion furnace according to claim 3, characterized in that: One end of each adsorption tube (15) is provided with an internal thread groove (17), and an external thread sealing sleeve (18) is threaded inside each internal thread groove (17). One end of each external thread sealing sleeve (18) extends to the outside of the internal thread groove (17) and is fixedly connected to one end of the fixed tube (19). The activated carbon filling cylinder (16) is filled with a number of activated carbons.

5. The safety protection device for a vertical diffusion furnace according to claim 1, characterized in that: A controller (20) is fixedly connected to one side of the furnace body (1). The second induced draft fan (9) and the two first induced draft fans (4) are all composed of motors and fan blades. The motors are installed on the brackets inside the second induced draft fan (9) and the first induced draft fans (4). Then, several first induced draft fans (4) are fixedly connected to the outside of the output end of the motor. The output end of the motor drives the fan blades to rotate, generating suction to draw and transport the exhaust gas.

6. The safety protection device for a vertical diffusion furnace according to claim 1, characterized in that: A controller (20) is fixedly connected to one side of the furnace body (1).

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