A cryopump heating regeneration device
Patent Information
- Application Number
- CN202522303152.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-30
- Publication Date
- 2026-10-09
- Estimated Expiration
- 2035-10-30
AI Technical Summary
[0005]尽管上述方法可实现杂质脱附，但目前的内置加热元件因接触面积有限，易导致泵体局部过热，而远离热源部位加热不足，造成吸附剂再生程度差异；外部热风枪或红外加热受泵体几何形状限制，由于受热不均匀，从而影响再生效果，以及影响部件的使用寿命
[0016]本实用新型提供的低温泵加热再生装置，包括低温泵、氮气供给组件和加热器，所述氮气供给组件通过输送管路与所述低温泵连接，所述加热器设置于所述输送管路上，所述加热器上设有温控组件，所述输送管路上安装有减压阀、流量计和电磁控制阀门，本实用新型结构简单，设计合理，通过采用具有温控组件的加热器，为加热再生过程中提供温度反馈，确保加热效果和再生效率，同时配合输送管路上减压阀、流量计和电磁控制阀门的设置，可以实现稳定的加热再生。
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Figure CN224835269U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of cryogenic pump technology, and more specifically, to a cryogenic pump heating and regeneration device. Background Technology
[0002] Cryogenic pumps require periodic regeneration during operation to restore their adsorption and condensation performance, ensuring long-term stable operation and high efficiency. Currently, the mainstream regeneration method for cryogenic pumps is thermal desorption, which uses heat energy input to promote the desorption and vaporization of adsorbed impurities. Specific implementation methods include:
[0003] Built-in electric heating: Electric heating wires or heating plates are directly attached to the inside of the pump body to heat the adsorbent layer through heat conduction;
[0004] External heat source heating: Heat is radiated from the outside of the pump body using devices such as hot air guns and infrared heaters, or high-temperature nitrogen gas (100-200℃) is introduced for convective heat exchange.
[0005] Although the above methods can achieve impurity desorption, the current built-in heating elements are prone to local overheating of the pump body due to the limited contact area, while the parts far from the heat source are not heated enough, resulting in differences in the degree of adsorbent regeneration. External hot air guns or infrared heating are limited by the geometry of the pump body, and uneven heating affects the regeneration effect and the service life of the components.
[0006] Therefore, this application aims to provide a cryogenic pump heating and regeneration device to better solve the above-mentioned technical problems. Summary of the Invention
[0007] The purpose of this application is to provide a cryogenic pump heating and regeneration device that can solve the technical problem of cryogenic pump heating and regeneration.
[0008] This application provides a cryogenic pump heating and regeneration device, including a cryogenic pump, a nitrogen supply component, and a heater. The nitrogen supply component is connected to the cryogenic pump through a delivery pipeline. The heater is disposed on the delivery pipeline and is equipped with a temperature control component. A pressure reducing valve, a flow meter, and an electromagnetic control valve are installed on the delivery pipeline.
[0009] Furthermore, the heater consists of a shell, a heating module, a fluid guiding assembly, and a connecting flange. The heater is cylindrical in shape, and both ends of the heater are connected to the delivery pipeline through the connecting flange.
[0010] Furthermore, the heating module is configured as a flexible electric heating film surrounding the inner wall of the outer casing.
[0011] Furthermore, the thickness of the flexible electric heating film is set to 0.5-1mm, and the surface of the flexible electric heating film is provided with a thermally conductive silicone grease layer.
[0012] Furthermore, the fluid guiding assembly includes an inlet honeycomb guide plate and an outlet guide vane.
[0013] Furthermore, the guide vanes are distributed at a 15° angle to the axial direction.
[0014] Furthermore, the temperature control component includes multiple temperature sensors and a PID controller, with the multiple temperature sensors being equidistantly distributed along the heater axis.
[0015] The beneficial effects of this utility model are:
[0016] The cryogenic pump heating and regeneration device provided by this utility model includes a cryogenic pump, a nitrogen supply component, and a heater. The nitrogen supply component is connected to the cryogenic pump through a delivery pipeline. The heater is disposed on the delivery pipeline and is equipped with a temperature control component. A pressure reducing valve, a flow meter, and an electromagnetic control valve are installed on the delivery pipeline. This utility model has a simple structure and reasonable design. By using a heater with a temperature control component, temperature feedback is provided during the heating and regeneration process to ensure heating effect and regeneration efficiency. At the same time, the installation of a pressure reducing valve, a flow meter, and an electromagnetic control valve on the delivery pipeline can achieve stable heating and regeneration. Attached Figure Description
[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0018] Figure 1 These are schematic diagrams of the structure in some embodiments of this utility model;
[0019] Figure 2 This is a cross-sectional schematic diagram of the heater in some embodiments of this utility model.
[0020] The reference numerals in the attached figures are as follows:
[0021] 1. Cryogenic pump; 2. Nitrogen supply assembly; 3. Heater; 31. Housing; 32. Heating module; 33. Fluid guiding assembly; 34. Connecting flange; 4. Delivery pipeline; 5. Pressure reducing valve; 6. Flow meter; 7. Electromagnetic control valve. Detailed Implementation
[0022] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0023] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.
[0024] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0025] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0026] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0027] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0028] See Figures 1-2As shown, the cryogenic pump 1 heating and regeneration device described in this embodiment includes a cryogenic pump 1, a nitrogen supply component 2, and a heater 3. The nitrogen supply component 2 is connected to the cryogenic pump 1 through a delivery pipeline 4. The heater 3 is disposed on the delivery pipeline 4 and is equipped with a temperature control component. A pressure reducing valve 5, a flow meter 6, and an electromagnetic control valve 7 are installed on the delivery pipeline 4.
[0029] This embodiment has a simple structure and reasonable design. By using a heater 3 with temperature control components, temperature feedback is provided during the heating and regeneration process to ensure heating effect and regeneration efficiency. At the same time, with the setting of pressure reducing valve 5, flow meter 6 and electromagnetic control valve 7 on the delivery pipeline 4, sufficient flow and stable pressure can be achieved during the heating and regeneration process, thereby achieving efficient heating and regeneration.
[0030] In some embodiments, the heater 3 is composed of a housing 31, a heating module 32, a fluid guiding assembly 33 and a connecting flange 34. The heater 3 is cylindrical in shape, and both ends of the heater 3 are connected to the delivery pipeline 4 through the connecting flange 34.
[0031] This embodiment shows the structural configuration of the heater 3. By setting the connecting flange 34, the heater 3 can be quickly disassembled and assembled with the pipeline. By setting the fluid guiding component 33 and the overall cylindrical shape, the gas flow distribution can be ensured to be uniform, thereby achieving better heating and regeneration.
[0032] Based on the above embodiments, the heating module 32 is configured as a flexible electric heating film surrounding the inner wall of the outer shell 31.
[0033] Specifically, the thickness of the flexible electric heating film is set to 0.5-1mm, and the surface of the flexible electric heating film is provided with a thermally conductive silicone grease layer.
[0034] In this embodiment, by directly attaching the flexible electric heating film to the inner wall of the outer shell 31, thermal resistance can be reduced, thereby achieving efficient and uniform heating.
[0035] Based on the above embodiments, the fluid guiding assembly 33 includes an inlet honeycomb guide plate and an outlet guide plate.
[0036] Specifically, the guide vanes are distributed at a 15° angle to the axial direction.
[0037] In this embodiment, the inlet honeycomb guide plate increases the contact area between the gas and the heating film, enhances convective heat transfer, and achieves more efficient heating; the outlet guide plate eliminates outlet turbulence, ensuring that the gas enters the cryogenic pump 1 at a stable flow rate and avoiding impact damage to the pump body.
[0038] Based on the above embodiments, the temperature control component includes multiple temperature sensors and a PID controller, with the multiple temperature sensors being equidistantly distributed along the axial direction of the heater 3.
[0039] In this embodiment, the equidistantly distributed temperature sensors can provide real-time feedback on the temperature field inside the heater 3, avoiding temperature blind spots. At the same time, in conjunction with the PID controller, the heating power can be quickly adjusted to achieve better heating and regeneration.
[0040] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. A cryogenic pump heating and regeneration device, characterized in that: It includes a cryogenic pump, a nitrogen supply assembly, and a heater. The nitrogen supply assembly is connected to the cryogenic pump via a delivery pipeline. The heater is located on the delivery pipeline and is equipped with a temperature control assembly. A pressure reducing valve, a flow meter, and an electromagnetic control valve are installed on the delivery pipeline.
2. The cryogenic pump heating and regeneration device according to claim 1, characterized in that: The heater consists of a shell, a heating module, a fluid guiding assembly, and a connecting flange. The heater is cylindrical in shape, and both ends of the heater are connected to the delivery pipeline through the connecting flange.
3. The cryogenic pump heating and regeneration device according to claim 2, characterized in that: The heating module is configured as a flexible electric heating film surrounding the inner wall of the outer shell.
4. The cryogenic pump heating and regeneration device according to claim 3, characterized in that: The thickness of the flexible electric heating film is set to 0.5-1mm, and the surface of the flexible electric heating film is provided with a thermally conductive silicone grease layer.
5. The cryogenic pump heating and regeneration device according to claim 2, characterized in that: The fluid guiding assembly includes an inlet honeycomb guide plate and an outlet guide vane.
6. The cryogenic pump heating and regeneration device according to claim 5, characterized in that: The guide vanes are distributed at a 15° angle to the axial direction.
7. The cryogenic pump heating and regeneration device according to claim 2, characterized in that: The temperature control component includes multiple temperature sensors and a PID controller, with the multiple temperature sensors being equidistantly distributed along the heater axis.