Tail gas treatment system and solar cell manufacturing production line

Abstract

The application relates to a tail gas treatment system and a solar cell manufacturing production line. The tail gas treatment system comprises a combustion device, a dust collecting device, a first-stage washing device and a second-stage washing device which are sequentially arranged and communicated along the flow direction of the tail gas. The combustion device is used for burning silane in the tail gas and generating silicon dioxide. The dust collecting device is used for collecting the silicon dioxide. The first-stage washing device and the second-stage washing device are used for removing ammonia in the tail gas in stages. The tail gas treatment system and the solar cell manufacturing production line can reduce environmental protection problems.

Description

Technical Field

[0001] This application relates to the field of solar cell manufacturing technology, specifically to an exhaust gas treatment system and a solar cell manufacturing production line. Background Technology

[0002] During the production of solar cells, a coating process is required. The exhaust gas generated during this coating process needs to be treated by an exhaust gas treatment system before being released into the atmosphere to reduce air pollution. However, even after treatment using traditional methods, a certain concentration of ammonia may still be present in the exhaust gas released into the atmosphere, making the environmental problem even more serious. Utility Model Content

[0003] Therefore, it is necessary to provide an exhaust gas treatment system and a solar cell manufacturing production line that can reduce environmental problems in response to the above issues.

[0004] An exhaust gas treatment system includes a combustion device, a dust collection device, a primary scrubbing device, and a secondary scrubbing device arranged sequentially and connected along the flow direction of the exhaust gas. The combustion device is used to burn silane in the exhaust gas to generate silicon dioxide. The dust collection device is used to collect silicon dioxide. The primary scrubbing device and the secondary scrubbing device are used to remove ammonia from the exhaust gas in stages.

[0005] In some embodiments, both the primary washing device and the secondary washing device include a washing body, a liquid storage container, multiple filling layers, multiple sprayers, and multiple pump bodies.

[0006] The washing unit has a washing chamber, and the filling layer and the sprayer are both located in the washing chamber. All the filling layers are arranged sequentially at intervals along the flow direction of the exhaust gas. Each sprayer corresponds to a filling layer and is used to spray the corresponding filling layer. The liquid storage container and the pump body are both located outside the washing chamber, and each pump body corresponds to a sprayer. The pump body is connected between the liquid storage container and the corresponding sprayer. The liquid storage container is used to store a liquid that can react with ammonia.

[0007] In some embodiments, the sprayer is positioned downstream of the corresponding filler layer.

[0008] In some embodiments, the sprayer includes a spray pipe and a plurality of spray heads. The spray pipe is connected to the corresponding pump body, and all the spray heads are arranged at intervals along the length of the spray pipe and are connected to the spray pipe.

[0009] In some embodiments, the washing body has mounting holes, each corresponding to a spray pipe. The spray pipe passes through the corresponding mounting hole and extends partially out of the washing chamber and communicates with the corresponding pump body. A sealing ring is provided in the mounting hole to seal the hole wall and the outer wall of the spray pipe.

[0010] In some embodiments, the sealing ring has a central hole that extends through it along its axial direction, and the sealing ring has a mounting end face that is arranged along its axial direction and faces the washing chamber, and an annular groove is formed on the mounting end face, the annular groove being arranged circumferentially around the central hole;

[0011] The spray pipe includes a pipe body, a first annular plate, and a second annular plate. The pipe body passes through the central hole and partially extends out of the washing chamber. The first annular plate is fitted over the pipe body and is used to close the opening of the annular groove. The second annular plate is arranged around the circumference of the first annular plate and inserted into the annular groove.

[0012] In some embodiments, the washing body is a polypropylene component.

[0013] In some embodiments, a demisting device is further included, which is disposed downstream of the secondary scrubbing device along the flow direction of the exhaust gas and is connected to the secondary scrubbing device.

[0014] In some embodiments, an exhaust device is further included, which is disposed downstream of the demister along the flow direction of the exhaust gas and is in communication with the demister.

[0015] A solar cell manufacturing production line, the solar cell manufacturing production line including an exhaust gas treatment system as described in any of the above embodiments.

[0016] Compared with the prior art, this application has the following beneficial effects:

[0017] The aforementioned exhaust gas treatment system and solar cell manufacturing production line, by incorporating a combustion device, dust collection device, primary scrubbing device, and secondary scrubbing device within the exhaust gas treatment system, can remove silane and perform multi-stage treatment of ammonia while maintaining the same number of devices. This results in very low levels of both silane and ammonia in the exhaust gas emitted into the atmosphere. This not only maintains low-cost manufacturing of the exhaust gas treatment system and solar cell manufacturing production line but also provides superior exhaust gas treatment performance, thus benefiting environmental protection. Attached Figure Description

[0018] Figure 1 This is a layout diagram of an exhaust gas treatment system in one embodiment of this application;

[0019] Figure 2 This is a front cross-sectional view of a primary or secondary washing device in one embodiment of this application;

[0020] Figure 3 This is a schematic diagram of the structure of the spray pipe in one embodiment of this application;

[0021] Figure 4 This is a schematic diagram of the sealing ring structure in one embodiment of this application.

[0022] Icon labels:

[0023] 100. Exhaust gas treatment system;

[0024] 10. Combustion device; 20. Dust collection device; 30. Primary washing device; 40. Secondary washing device; 50. Demisting device; 60. Exhaust device;

[0025] 31. Washing unit; 32. Filler layer; 33. Liquid storage container; 34. Sprayer; 35. Pump body; 36. Sealing ring; 37. First pipe; 38. Second pipe;

[0026] 311. Washing chamber; 341. Spray pipe; 3411. Pipe body; 3422. First annular plate; 3423. Second annular plate; 342. Spray head; 361. Center hole; 362. Mounting end face; 363. Annular groove. Detailed Implementation

[0027] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0028] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0029] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0030] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0031] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0032] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0033] During the production of solar cells, a coating process is required. The exhaust gas generated during this coating process needs to be treated by an exhaust gas treatment system before being released into the atmosphere to reduce air pollution. However, even after treatment using traditional methods, a certain concentration of ammonia may still be present in the exhaust gas released into the atmosphere, making the environmental problem even more serious.

[0034] Please see Figure 1To alleviate the above problems, this application provides an exhaust gas treatment system 100. The exhaust gas treatment system 100 includes a combustion device 10, a dust collection device 20, a primary scrubbing device 30, and a secondary scrubbing device 40 arranged and connected in sequence along the flow direction of the exhaust gas. The combustion device 10 is used to burn silane in the exhaust gas to generate silicon dioxide. The dust collection device 20 is used to collect silicon dioxide. The primary scrubbing device 30 and the secondary scrubbing device 40 are used to remove ammonia in the exhaust gas in stages.

[0035] In the exhaust gas treatment system 100, the flow direction of the exhaust gas is as follows: Figure 1 As shown by arrows a, b, c, d, and e.

[0036] As an example, the combustion device 10 can be a silane combustion cylinder, a silane combustion tower, or other devices, and the dust collection device 20 can be a pulse bag filter, an electrostatic precipitator, a wet scrubber, etc. The combustion device 10 and the dust collection device 20 can be selected according to actual needs, so no limitation is made here.

[0037] The exhaust gas mainly contains silane and ammonia. The silane in the exhaust gas burns in the combustion device 10 to form silicon dioxide. Silicon dioxide typically exists mainly in powder form. After combustion in the combustion device 10, the exhaust gas carrying the silicon dioxide powder flows to the dust collection device 20, which filters and collects the silicon dioxide powder. Next, the exhaust gas flows into the primary scrubbing device 30, where the ammonia in the exhaust gas reacts with the chemical solution. The exhaust gas output from the primary scrubbing device 30 still contains a certain proportion of ammonia. Afterward, the exhaust gas enters the secondary scrubbing device 40, where the ammonia continues to react with the chemical solution. After being scrubbed by the secondary scrubbing device 40, the ammonia in the exhaust gas is almost completely removed, resulting in a very low concentration of ammonia, minimal air pollution, and a more environmentally friendly process.

[0038] In this application, by incorporating a combustion device 10, a dust collection device 20, a primary scrubbing device 30, and a secondary scrubbing device 40 into the exhaust gas treatment system 100, while maintaining the same number of devices, both silane and ammonia can be removed through multi-stage treatment, resulting in very low levels of silane and ammonia in the exhaust gas emitted into the atmosphere. This not only maintains the low-cost manufacturing of the exhaust gas treatment system 100 but also provides superior exhaust gas treatment performance, which is beneficial to environmental protection.

[0039] It is worth mentioning that silane and ammonia have different ignition points. Silane will spontaneously combust in air, while ammonia has a higher ignition point. Therefore, the combustion device 10 is set to room temperature. When the exhaust gas passes through the combustion device 10, the silane in the exhaust gas burns to generate silicon dioxide, while the ammonia remains in the exhaust gas.

[0040] In addition, to ensure that the exhaust gas can flow sequentially through the combustion device 10, the dust collection device 20, the primary scrubbing device 30 and the secondary scrubbing device 40, the exhaust gas treatment system 100 can also be equipped with a power unit. The power unit can be located upstream of the combustion device 10, or between the combustion device 10 and the dust collection device 20, or between the dust collection device 20 and the primary scrubbing device 30, or between the primary scrubbing device 30 and the secondary scrubbing device 40, etc. The power unit is used to guide the flow of exhaust gas.

[0041] Preferably, the power unit is located downstream of the dust collection device 20 to reduce the impact of silica powder on the power unit and help extend the service life of the power unit.

[0042] The power unit can be a vacuum pump or other devices, which can be set according to requirements.

[0043] Preferably, the primary washing device 30 and the secondary washing device 40 have the same structure to reduce the design difficulty of the exhaust gas treatment system 100.

[0044] Please see Figure 1 and Figure 2 In some embodiments, both the primary washing device 30 and the secondary washing device 40 include a washing body 31, a liquid storage container 33, multiple filling layers 32, multiple sprayers 34, and multiple pumps 35. The washing body 31 has a washing chamber 311. The filling layers 32 and the sprayers 34 are all located in the washing chamber 311. All filling layers 32 are arranged sequentially at intervals along the flow direction of the exhaust gas (the flow direction of the exhaust gas in the washing chamber 311 is shown by arrows m1, m2, m3, and m4). Each sprayer 34 corresponds to a filling layer 32 and is used to spray the corresponding filling layer 32. The liquid storage container 33 and the pumps 35 are located outside the washing chamber 311. Each pump 35 corresponds to a sprayer 34 and is connected between the liquid storage container 33 and the corresponding sprayer 34. The liquid storage container 33 is used to store a liquid that can react with ammonia.

[0045] The washing chamber 311 of the washing body 31 provides a space for washing ammonia gas. The liquid storage container 33 is used to hold a chemical solution that can react with ammonia gas. Generally, this chemical solution is corrosive; therefore, the liquid storage container 33 should be made of a material resistant to chemical corrosion. As an example, the chemical solution may be, but is not limited to, an organic acid catalyst such as p-toluenesulfonic acid.

[0046] The packing layer 32 can typically use fillers such as Pall rings or Raschig rings. The packing layer 32 has a porous structure and a large specific surface area, providing a large contact area with the gas and liquid. The packing layer 32 fills a portion of the space in the scrubbing chamber 311 and absorbs the chemical solution, allowing the exhaust gas to have a large contact area with the chemical solution as it passes through the packing layer 32. This enables the ammonia in the exhaust gas to react fully with the chemical solution, thereby achieving a better removal effect of ammonia from the exhaust gas.

[0047] Multiple packing layers 32 are arranged sequentially and at intervals along the flow direction of the exhaust gas. All packing layers 32 work together to wash the ammonia in the exhaust gas multiple times, thereby achieving a better effect of removing ammonia from the exhaust gas.

[0048] The orientation of the sprayer 34 and the corresponding filling layer 32 can be set according to requirements. For example, the sprayer 34 can be positioned upstream or downstream of the corresponding filling layer 32 in the direction of exhaust gas flow.

[0049] Each pump body 35 corresponds to a sprayer 34. The pump body 35 is connected between the liquid storage container 33 and the corresponding sprayer 34. The sprayer 34 is used to spray the corresponding filling layer 32. Specifically, both the primary washing device 30 and the secondary washing device 40 also include multiple first pipes 37 and multiple second pipes 38. Each first pipe 37 and second pipe 38 corresponds to a pump body 35. The first pipe 37 is connected between the corresponding pump body 35 and the sprayer 34, and the second pipe 38 is connected between the corresponding pump body 35 and the liquid storage container 33.

[0050] Under the action of the pump body 35, the liquid medicine stored in the storage container 33 is output and sprayed out through each sprayer 34, so that each packing layer 32 can be fully wetted with the liquid medicine. In this way, as the exhaust gas flows through each packing layer 32, the ammonia gas in the exhaust gas can fully react with the liquid medicine in each packing layer 32.

[0051] As an example, the washing body 31 is also provided with a return port, which is connected to the liquid storage container 33 through a pipe. In this case, the liquid is controlled by the pump body 35 to circulate in the liquid storage container 33 and the washing chamber 311 to achieve the reuse of the liquid and to allow the filling layer 32 to be soaked in the liquid.

[0052] As an example, both the first and second washing containers also include a drain pipe and a drain valve. The drain pipe is connected to the storage container 33, and the drain valve is installed on the drain pipe. The liquid circulates within the washing chamber 311 and the storage container 33. When the reaction reaches a certain point and the concentration of the products generated by the reaction with ammonia in the liquid is too high, the liquid becomes waste liquid. At this time, opening the drain valve will discharge the liquid from the storage container.

[0053] In this embodiment, by designing the washing body 31, the liquid storage container 33, multiple filling layers 32, multiple sprayers 34 and multiple pumps 35 in combination, the liquid can fully react with the ammonia in the exhaust gas and achieve a better effect in removing ammonia from the exhaust gas.

[0054] In some embodiments, the sprayer 34 is positioned downstream of the corresponding filling layer 32. During actual operation, the spray nozzle of the sprayer 34 is directed towards the corresponding filling layer 32, spraying the chemical solution onto it. Since the sprayer 34 is positioned downstream of the filling layer 32, it effectively sprays the chemical solution upstream, while the exhaust gas flows downstream. Therefore, the sprayed chemical solution and the exhaust gas collide, resulting in a longer flow time for the exhaust gas within the scrubbing chamber 311. Furthermore, during this collision process, the exhaust gas and the chemical solution can fully contact each other, thereby further improving the removal efficiency of ammonia from the exhaust gas.

[0055] Please continue reading. Figure 2 In some embodiments, the sprayer 34 includes a spray pipe 341 and multiple spray heads 342. The spray pipe 341 is connected to a corresponding pump body 35, and all spray heads 342 are arranged sequentially at intervals along the length of the spray pipe 341 and are connected to the spray pipe 341. In actual operation, the pump body 35 is started, and the liquid medicine in the storage container 33 is sprayed out through the pump body 35, the spray pipe 341, and the spray heads 342 arranged on the spray pipe 341. By arranging multiple spray heads 342 on the same spray pipe 341, and with multiple spray heads 342 corresponding to multiple areas of the same filling layer 32, the liquid medicine can be sprayed on multiple areas of the same filling layer 32 when sprayed out by multiple spray heads 342, so that the filling layer 32 can be fully wetted with liquid medicine.

[0056] Please see Figures 2 to 4 In some embodiments, the washing body 31 is provided with mounting holes, which correspond one-to-one with the spray pipes 341. The spray pipes 341 pass through the corresponding mounting holes and partially extend out of the washing chamber 311 and communicate with the corresponding pump body 35. A sealing ring 36 is provided in the mounting hole, which is used to seal the hole wall of the mounting hole and the outer pipe wall of the spray pipe 341.

[0057] The spray pipe 341 extends beyond the mounting hole, facilitating connection and communication between the spray pipe 341 and the pump body 35. The sealing ring 36 seals the gap between the wall of the mounting hole and the outer wall of the spray pipe 341, reducing the risk of exhaust gas leakage.

[0058] In some embodiments, the sealing ring 36 has a central hole 361 extending through it along its axial direction, and a mounting end face 362 extending along its axial direction and facing the washing chamber 311. An annular groove 363 is formed on the mounting end face 362, and the annular groove 363 is circumferentially arranged around the central hole 361. The spray pipe 341 includes a pipe body 3411, a first annular plate 3422, and a second annular plate 3423. The pipe body 3411 passes through the central hole 361 and partially extends out of the washing chamber 311, connecting and communicating with the pump body 35. The first annular plate 3422 is fitted over the pipe body 3411 and is used to close the opening of the annular groove 363. The second annular plate 3423 is circumferentially arranged around the first annular plate 3422 and inserted into the annular groove 363. This design further increases the tightness of the fit between the spray pipe 341 and the sealing ring 36, thereby reducing the risk of exhaust gas leakage through the gap between the spray pipe 341 and the sealing ring 36.

[0059] In some embodiments, the washing body 31 is a polypropylene component. Polypropylene has better corrosion resistance, thereby reducing the risk of the washing body 31 being corroded by the chemical solution and extending the service life of the primary washing device 30 and the secondary washing device 40.

[0060] Please see Figure 1 In some embodiments, the exhaust gas treatment system 100 further includes a demister 50, which is disposed downstream of the secondary scrubbing device 40 along the flow direction of the exhaust gas and is connected to the secondary scrubbing device 40.

[0061] As an example, the demisting device 50 can be a wet electrostatic precipitator, an activated carbon adsorption precipitator, etc., and the specific type can be selected according to the requirements.

[0062] The exhaust gas flowing through the primary scrubbing device 30 and the secondary scrubbing device 40 contains a large amount of water vapor. If demisting is not performed, the water vapor in the exhaust gas discharged into the atmosphere by the secondary scrubbing device 40 will easily atomize into droplets and drip down, causing water to accumulate in the area below the exhaust port of the secondary scrubbing device 40 in the workshop environment where the exhaust gas treatment system 100 is located, making it easy for workers to slip.

[0063] By installing the demisting device 50, the water vapor content in the exhaust gas can be reduced to prevent the exhaust gas from atomizing and forming water accumulation at the exhaust port of the secondary washing device 40, thus reducing the risk of workers slipping and falling.

[0064] In some embodiments, the exhaust gas treatment system 100 further includes an exhaust device 60, which is disposed downstream of the demister 50 along the flow direction of the exhaust gas and is in communication with the demister 50.

[0065] As an example, the exhaust device 60 may include a chimney and a fan. The chimney is connected to the exhaust port of the demister 50, and the fan is installed inside the chimney to guide the treated exhaust gas into the atmosphere.

[0066] This application also provides a solar cell manufacturing production line, which includes the exhaust gas treatment system 100 as described in any of the above embodiments. The solar cell manufacturing production line of this application has the effects of any of the above embodiments, and therefore will not be described again here.

[0067] The aforementioned exhaust gas treatment system 100 and solar cell manufacturing production line, by incorporating a combustion device 10, a dust collection device 20, a primary scrubbing device 30, and a secondary scrubbing device 40 within the exhaust gas treatment system 100, can remove silane and perform multi-stage treatment of ammonia while maintaining a constant number of devices. This results in very low levels of both silane and ammonia in the exhaust gas emitted into the atmosphere. This not only maintains the low-cost manufacturing of the exhaust gas treatment system 100 but also provides superior exhaust gas treatment performance, thus benefiting environmental protection.

[0068] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0069] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. An exhaust gas treatment system, characterized in that, The exhaust gas treatment system includes a combustion device (10), a dust collection device (20), a primary scrubbing device (30), and a secondary scrubbing device (40) arranged and connected in sequence along the flow direction of the exhaust gas. The combustion device (10) is used to burn silane in the exhaust gas and generate silicon dioxide. The dust collection device (20) is used to collect silicon dioxide. The primary scrubbing device (30) and the secondary scrubbing device (40) are used to remove ammonia from the exhaust gas in stages. Both the primary washing device (30) and the secondary washing device (40) include a washing body (31), a liquid storage container (33), multiple filling layers (32), multiple sprayers (34) and multiple pump bodies (35). The washing body (31) has a washing chamber (311), the filling layer (32) and the sprayer (34) are both located in the washing chamber (311), and all the filling layers (32) are arranged sequentially at intervals along the flow direction of the exhaust gas. The sprayer (34) corresponds to the filling layer (32) one by one. The sprayer (34) is used to spray the corresponding filling layer (32). The liquid storage container (33) and the pump body (35) are both located outside the washing chamber (311), and the pump body (35) corresponds to the sprayer (34) one by one. The pump body (35) is connected between the liquid storage container (33) and the corresponding sprayer (34). The liquid storage container (33) is used to store the liquid that can react with ammonia. The sprayer (34) includes a spray pipe (341) and multiple spray heads (342). The spray pipe (341) is connected to the corresponding pump body (35). All the spray heads (342) are arranged at intervals along the length of the spray pipe (341) and are connected to the spray pipe (341). The washing body (31) has mounting holes, which correspond one-to-one with the spray pipes (341). The spray pipes (341) pass through the corresponding mounting holes and extend out of the washing chamber (311) and communicate with the corresponding pump body (35). A sealing ring (36) is provided in the mounting hole. The sealing ring (36) is used to seal the hole wall of the mounting hole and the outer pipe wall of the spray pipe (341). The sealing ring (36) has a central hole (361) that extends through it along its axial direction, and the sealing ring (36) has a mounting end face (362) that extends along its axial direction and faces the washing chamber (311). An annular groove (363) is provided on the mounting end face (362), and the annular groove (363) is arranged circumferentially around the central hole (361). The spray pipe (341) includes a pipe body (3411), a first annular plate (3422) and a second annular plate (3423). The pipe body (3411) passes through the central hole (361) and extends partially out of the washing chamber (311). The first annular plate (3422) is sleeved on the outside of the pipe body (3411) and is used to close the opening of the annular groove (363). The second annular plate (3423) is arranged around the first annular plate (3422) and inserted into the annular groove (363).

2. The exhaust gas treatment system according to claim 1, characterized in that, The sprayer (34) is located downstream of the corresponding filling layer (32).

3. The exhaust gas treatment system according to claim 1, characterized in that, The washing body (31) is a polypropylene component.

4. The exhaust gas treatment system according to claim 1, characterized in that, It also includes a demisting device (50), which is located downstream of the secondary scrubbing device (40) along the flow direction of the exhaust gas and is connected to the secondary scrubbing device (40).

5. The exhaust gas treatment system according to claim 4, characterized in that, It also includes an exhaust device (60), which is located downstream of the demister (50) along the flow direction of the exhaust gas and is connected to the demister (50).

6. A solar cell manufacturing production line, characterized in that, The solar cell manufacturing production line includes an exhaust gas treatment system as described in any one of claims 1 to 5.

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