Mounting aid for gas shower head

Abstract

The application relates to an installation auxiliary jig of a gas shower head, which comprises a first connecting part and a second connecting part for fixing a gas shower head and a cooling disc respectively, the first connecting part comprises a first main body, at least three first limiting pieces and at least three installation positioning holes, the first main body is a hollow structure with an internal space, the installation positioning holes are arranged on the inner wall of the first main body at intervals, when the gas shower head is arranged in the internal space, the first limiting pieces pass through the first main body and are detachably connected to the gas shower head; the second connecting part comprises a second main body, a back plate, second limiting pieces and auxiliary installation pieces, the second main body and the back plate are connected through a shaft and are arranged in parallel, the at least three second limiting pieces pass through the back plate and the second main body and are detachably connected to the cooling disc, the number and distribution mode of the auxiliary installation pieces are the same as those of the installation positioning holes, the auxiliary installation pieces pass through the back plate and the second main body and are inserted into the installation positioning holes. The application is used for installing the gas shower head on the cooling disc.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to an auxiliary fixture for installing a gas spray head. Background Technology

[0002] In typical semiconductor etching equipment (such as TEL SCCM etching machines), the upper gas spray head (U / E) presents challenges during maintenance and replacement, including difficulties in disassembly and easy misalignment during installation. The main reason for disassembly difficulty is the tight adhesion between the upper gas spray head and the cooling plate under prolonged high-temperature conditions, making separation difficult. The main reason for misalignment is that the positioning hole of the upper gas spray head is larger than the connecting pin on the cooling plate, resulting in a significant range of misalignment during installation. These issues can affect the stability of semiconductor process technology, leading to poor uniformity (U%) of the etching return line (Not Good, NG). Furthermore, rework and reinstallation not only waste time and manpower but also pose a risk of component damage. Utility Model Content

[0003] Therefore, it is necessary to provide an auxiliary fixture for installing gas spray heads to improve the alignment accuracy between the gas spray heads and the cooling plate, while also increasing installation efficiency.

[0004] This application provides an auxiliary fixture for installing a gas spray head, used to assist in installing the gas spray head onto a cooling plate, including:

[0005] The first connecting part, used to fix the gas spray head, includes a first body, at least three first limiting members and at least three mounting positioning holes. The first body is a hollow structure with an internal space. The mounting positioning holes are spaced apart on the inner wall of the first body. When the gas spray head is disposed in the internal space, the first limiting members pass through the first body and are detachably connected to the gas spray head.

[0006] The second connecting part, used to fix the cooling plate, includes a second main body, a back plate, a second limiting member, and an auxiliary mounting member. The second main body and the back plate are connected by a shaft and arranged parallel to each other. At least three of the second limiting members pass through the back plate and the second main body and are detachably connected to the cooling plate. The number and distribution of the auxiliary mounting members are the same as those of the mounting positioning holes. The auxiliary mounting members pass through the back plate and the second main body and are inserted into the mounting positioning holes.

[0007] In one embodiment, the first body includes either a ring structure or a cylindrical structure.

[0008] In one embodiment, a first auxiliary positioning hole is provided on the side wall of the gas spray head, and the size of the first auxiliary positioning hole matches the size of the first limiting member.

[0009] In one embodiment, the first limiting member has a stepped structure on the side near the gas spray head, the gas spray head is disposed on the stepped structure, and the lower surface edge of the gas spray head near the stepped structure abuts against the stepped surface of the stepped structure.

[0010] In one embodiment, the second body and the back plate have the same shape, and the shape of the second body includes any one of rectangle, circle, I-shape, X-shape, and triangle.

[0011] In one embodiment, the shaft is rotatably connected to the geometric center of the second body, the shaft includes a threaded rod, and the geometric center of the back plate is provided with a threaded hole that mates with the shaft, thereby adjusting the distance between the back plate and the second body by rotating the shaft.

[0012] In one embodiment, the auxiliary mounting component includes a threaded rod, and both the second body and the back plate are provided with threaded holes that mate with the auxiliary mounting component.

[0013] In one embodiment, the first surface of the cooling plate is provided with a second auxiliary positioning hole, and the number and distribution of the second auxiliary positioning hole are the same as the number and distribution of the second limiting member.

[0014] In one embodiment, the second limiting member includes a threaded rod, and both the second body and the back plate are provided with through holes that cooperate with the second limiting member.

[0015] In one embodiment, the second surface of the cooling plate is provided with at least three positioning protrusions, and the upper surface of the gas spray head is provided with at least three positioning grooves, wherein the orthographic projection of all the positioning protrusions toward the gas spray head falls within the orthographic projection of all the positioning grooves toward the gas spray head.

[0016] An unexpected benefit of this application is that by providing an auxiliary installation fixture for the gas spray head, the gas spray head is fixed using a first connecting part, and the cooling plate is fixed using a second connecting part. The gas spray head is then installed onto the cooling plate by aligning and connecting the first and second connecting parts. This effectively standardizes the gas spray head installation process, reduces the impact of human error on the installation effect, minimizes component damage, and improves the stability, success rate, and installation efficiency of the gas spray head's loading and unloading. This, in turn, helps improve the efficiency of deep maintenance of etching equipment, reduces the time required for etching equipment maintenance, and ultimately contributes to improving the stability and production efficiency of the etching equipment's process flow. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of an auxiliary fixture for installing a gas spray head according to one embodiment of this application.

[0019] Figure 2 This is a schematic diagram of the structure of the first connecting part in the installation auxiliary fixture for the gas spray head provided in one embodiment of this application.

[0020] Figure 3 This is a schematic diagram of the structure of the gas spray head installation auxiliary fixture provided in one embodiment of this application, where a step structure is provided on one side of the first limiting member.

[0021] Figure 4 This is a cross-sectional structural diagram of a gas spray head installation auxiliary fixture provided in one embodiment of this application, in which a stepped structure is provided on one side of the first limiting member.

[0022] Figure 5 This is a schematic diagram of the structure of the second connecting part in the installation auxiliary fixture for the gas spray head provided in one embodiment of this application.

[0023] Figure 6 This is a schematic diagram of the structure of the gas spray head installation auxiliary fixture provided in one embodiment of this application when the first connecting part and the second connecting part are connected.

[0024] The reference numerals in the drawings include: 100-installation auxiliary fixture; 110-first connecting part; 111-first main body; 111a-internal space; 112-first limiting member; 112a-step structure; 113-installation positioning hole; 120-second connecting part; 121-second main body; 122-back plate; 123-second limiting member; 123a-limiting part; 124-auxiliary mounting part; 124a-protrusion; 125-shaft; A-gas spray head; a1-first auxiliary positioning hole; a2-positioning groove; B-cooling plate; b1-second auxiliary positioning hole; b2-positioning protrusion. Detailed Implementation

[0025] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings, which illustrate embodiments of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this application will be thorough and complete.

[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0027] It should be understood that when an element or layer is referred to as "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" other elements or layers, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc., may be used to describe various elements, parts, regions, layers, doping types, and / or portions, these elements, parts, regions, layers, doping types, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, part, region, layer, doping type, or portion from another element, part, region, layer, doping type, or portion. Therefore, without departing from the teachings of this application, the first element, component, region, layer, doping type, or portion discussed below may be represented as a second element, component, region, layer, or portion; for example, the first doping type may be referred to as the second doping type, and similarly, the second doping type may be referred to as the first doping type; the first doping type and the second doping type are different doping types, for example, the first doping type may be P-type and the second doping type may be N-type, or the first doping type may be N-type and the second doping type may be P-type.

[0028] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, the element or feature described as “below,” “under,” or “below” will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both above and below orientations. Furthermore, the device may also include other orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptive terms used herein will be interpreted accordingly.

[0029] When used herein, the singular forms of “a,” “an,” and “ / the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising / including” or “having,” etc., specify the presence of the stated features, wholes, steps, operations, components, parts, or combinations thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof. Meanwhile, in this specification, the term “and / or” includes any and all combinations of the associated listed items.

[0030] Figure 1 This is a schematic diagram of the installation auxiliary fixture for a gas spray head provided in one embodiment of this application. (See also...) Figure 1One embodiment of this application provides a gas spray head mounting auxiliary fixture 100 for assisting in mounting a gas spray head A (UE) onto a cooling plate B. The mounting auxiliary fixture 100 includes a first connecting portion 110 and a second connecting portion 120. The first connecting portion 110 is used to fix the gas spray head A and includes a first body 111, at least three first limiting members 112, and at least three mounting positioning holes 113. The first body 111 is a hollow structure with an internal space 111a. The mounting positioning holes 113 are spaced apart on the inner wall of the first body 111. When the gas spray head A is positioned in the internal space 111a, the first limiting members 112 pass through the first body 111 and are detachably mounted. Connected to the gas spray head A; the second connecting part 120 is used to fix the cooling plate B, including the second body 121, the back plate 122, the second limiting member 123 and the auxiliary mounting member 124. The second body 121 and the back plate 122 are connected by a shaft 125 and are arranged parallel to each other. At least three second limiting members 123 penetrate the back plate 122 and the second body 121 and are detachably connected to the cooling plate B. The auxiliary mounting member 124 has the same number and distribution as the mounting positioning hole 113. The auxiliary mounting member 124 penetrates the back plate 122 and the second body 121 and is inserted into the mounting positioning hole 113.

[0031] It should be noted that by connecting the gas spray head to the first connecting part and the cooling plate to the second connecting part, and by inserting the auxiliary mounting part into the mounting positioning hole to connect the first connecting part and the second connecting part, the gas spray head fixed on the first connecting part and the cooling plate fixed on the second connecting part are aligned with each other, thereby assisting in the installation of the gas spray head onto the cooling plate, improving installation efficiency and accuracy.

[0032] The gas spray head installation auxiliary fixture described above uses a first connecting part to fix the gas spray head and a second connecting part to fix the cooling plate. The gas spray head is then installed onto the cooling plate by aligning and connecting the first and second connecting parts. This effectively standardizes the gas spray head installation process, reduces the impact of human error on the installation effect, minimizes component damage, and improves the stability, success rate, and installation efficiency of the gas spray head's loading and unloading. This, in turn, helps improve the deep maintenance efficiency of the etching machine, reduces the maintenance time required for the etching machine, and ultimately contributes to improving the stability and production efficiency of the etching machine's process flow.

[0033] See Figure 2In one embodiment, the first body 111 includes either an annular structure or a cylindrical structure. It should be noted that since both the gas spray head and the cooling plate are circular, the first body 111 is preferably an annular structure that mates with the gas spray head, thereby reducing the volume of the first body 111 while ensuring that the gas spray head can be disposed within the internal space 111a of the first body 111. In other embodiments of this application, the specific structure of the first body can be adjusted according to the shape of the gas spray head and actual process requirements, and this application does not impose any limitations on this.

[0034] See Figure 1 and Figure 2 In one embodiment, a first auxiliary positioning hole a1 is provided on the side wall of the gas spray head A. The size of the first auxiliary positioning hole a1 matches the size of the first limiting member 112 to ensure that the first limiting member 112 can be inserted into the first auxiliary positioning hole a1, thereby detachably fixing the gas spray head A into the first connecting portion 110. It should be noted that the number and distribution of the first auxiliary positioning holes a1 in the gas spray head A correspond to the number of the first limiting members 112 and the distribution direction of the first limiting members 112 on the first body 111. Optionally, multiple auxiliary positioning holes a1 are evenly distributed on the side wall of the gas spray head A.

[0035] See Figure 3 and Figure 4 In one embodiment, the first limiting member 112 has a stepped structure 112a on the side near the gas spray head A. The gas spray head A is disposed on the stepped structure 112a, and the lower surface edge of the gas spray head A near the stepped structure 112a abuts against the stepped surface of the stepped structure 112a. In this case, the sidewall of the gas spray head A can be disposed in the first connecting part 110 without the first auxiliary positioning hole, so as to achieve a fixed connection between the first connecting part 110 and the gas spray head A without changing the original structure of the gas spray head A.

[0036] In other embodiments of this application, the first limiting member and the gas spray head can also be fixed by other commonly used connection methods. For example, a clamping member can be provided on the side of the first limiting member near the gas spray head to clamp the gas spray head, or a suction cup can be provided on the side of the first limiting member near the gas spray head to adsorb and fix the gas spray head. Those skilled in the art can select a suitable fixing method according to actual needs, and this application does not limit it.

[0037] Continue reading Figure 1In one embodiment, a plurality of mounting and positioning holes 113 are evenly disposed on the inner wall of the first body 111. In other embodiments of this application, the mounting and positioning holes may also be disposed on the outer wall of the first body, or, when the thickness of the first body is sufficiently thick, the mounting and positioning holes may also be formed on the first body. Those skilled in the art can make adjustments according to actual needs, and this application does not impose any limitations on this. Optionally, the mounting and positioning holes are threaded holes.

[0038] See Figure 5 In one embodiment, the second body 121 and the back plate 122 have the same shape, both being I-shaped structures. In other embodiments of this application, the shapes of the second body and the back plate may also include any one of rectangular, circular, X-shaped, triangular, or other common geometric shapes, and the shapes of the second body and the back plate may be different, as long as the second body and the back plate are arranged parallel to each other. This application does not impose any restrictions on this.

[0039] Continue reading Figure 1 and Figure 5 In one embodiment, the shaft 125 is rotatably connected to the geometric center of the second body 121. The shaft 125 includes a threaded rod, and the geometric center of the back plate 122 is provided with a threaded hole that mates with the shaft 125. The distance between the back plate 122 and the second body 121 can be adjusted by rotating the shaft 125. In other embodiments of this application, the shaft can also be configured as a telescopic rod, and the distance between the back plate and the second body can be adjusted by telescopically extending the shaft. Those skilled in the art can also achieve the distance adjustment between the back plate and the second body through other methods. This application does not limit this.

[0040] See Figure 1 and Figure 5 In one embodiment, the second limiting member 123 includes a threaded rod. Both the second body 121 and the back plate 122 are provided with through holes (not shown in the figure) that mate with the second limiting member 123. The cooling tray B is provided with a threaded hole that mates with the second limiting member 123, ensuring that the second limiting member 123 is detachably connected to the cooling tray B. It should be noted that a limiting portion 123a is provided on the side of the second limiting member 123 away from the cooling tray B, ensuring that the top end of the second limiting member 123 can abut against the upper surface of the back plate 122. As the distance between the back plate 122 and the second body 121 increases, the second limiting member 123 also rises relative to the second body 121 as the back plate moves, thereby causing the cooling tray B, to which the bottom end of the second limiting member 123 is connected, to move in a direction closer to the second body 121.

[0041] In other embodiments of this application, the second body and the back plate may also be provided with threaded holes that cooperate with the second limiting member, or the specific structure of the second limiting member may be adjusted according to actual needs to detachably fix the cooling plate to the second body. This application does not limit this.

[0042] Continue reading Figure 1 and Figure 5 In one embodiment, the first surface of the cooling plate B is provided with a second auxiliary positioning hole b1, and the number and distribution of the second auxiliary positioning holes b1 are the same as the number and distribution of the second limiting member 123, so as to realize the connection between the second limiting member 123 and the cooling plate B.

[0043] See Figure 1 and Figure 5 In one embodiment, the auxiliary mounting member 124 includes a threaded rod. Both the second body 121 and the back plate 122 are provided with threaded holes or through holes that mate with the auxiliary mounting member 124, allowing the auxiliary mounting member 124 to pass through the second body 121 and the back plate 122 and connect to the mounting positioning hole 113, thereby achieving the connection between the first connecting portion 110 and the second connecting portion 120. Optionally, the number and distribution of the auxiliary mounting members 124 correspond to the number and distribution of the mounting positioning holes 113 to ensure smooth connection between the first connecting portion 110 and the second connecting portion 120. Optionally, a protrusion 124a is provided at the end of the auxiliary mounting member 124 away from the mounting positioning hole 113 to prevent the back plate 122 and the second body 121 from dislodging from the side of the auxiliary mounting member 124 away from the mounting positioning hole 113.

[0044] See Figure 1 and Figure 6 In one embodiment, the second surface of the cooling plate B is provided with at least three positioning protrusions b2, and the upper surface of the gas spray head A is provided with at least three positioning grooves a2. This is done when the gas spray head A is fixed to the first connecting part 110, the cooling plate B is fixed to the second connecting part 120, and the first connecting part 110 and the second connecting part 120 are connected (i.e....). Figure 6 As shown in the diagram, the orthographic projection of all the positioning protrusions b2 toward the gas spray head A falls within the orthographic projection of all the positioning grooves a2 toward the gas spray head, ensuring that the gas spray head A can be aligned with the cooling plate B, thereby ensuring that the gas spray head A can be smoothly installed on the cooling plate B.

[0045] For example, the process of installing a gas spray head onto a cooling plate using the auxiliary mounting fixture for the gas spray head provided in one embodiment of this application includes: (Refer to...) Figure 1Gas spray head A is placed in the internal space 111a of the first main body 111. The first limiting member 112 passes through the first main body 111 and is inserted into the first auxiliary positioning hole a1 of the gas spray head A, thereby fixing the gas spray head A to the first connecting part 110. Next, cooling plate B is placed on the side of the second main body 121 away from the back plate 122. The second limiting member 123 passes through the back plate 122 and the second main body 121 and is connected to the second auxiliary positioning hole b1 of the cooling plate B, thereby fixing the cooling plate B to the second connecting part 120.

[0046] At this time, the distance between the back plate 122 and the second body 121 can be adjusted by adjusting the shaft 125. As the back plate 122 moves away from the second body 121, the back plate 122 drives the second limiting member 123 and the cooling plate B connected to the second limiting member 123 to move together, thereby shortening the distance between the cooling plate B and the second body 121 until the distance between the second body 121 and the cooling plate B is less than the length of the auxiliary mounting member 124. This ensures that the first connecting part 110 and the second connecting part 120 will not scrape against at least one of the cooling plate B or the gas spray head A during the subsequent connection process, thereby avoiding damage to the cooling plate B and the gas spray head A during the installation process.

[0047] Then refer to Figure 6 The auxiliary mounting part 124 of the second connecting part 120 is connected to the mounting positioning hole 113 of the first connecting part 110, so that the positioning protrusion b2 of the cooling plate B is vertically aligned with the positioning groove a2 of the gas spray head A; then, the distance between the back plate 122 and the second body 121 is shortened by rotating the shaft 125, which drives the cooling plate B to move in the direction closer to the gas spray head A until the positioning protrusion b2 is inserted into the positioning groove a2, so that the gas spray head A is accurately and efficiently installed on the cooling plate B.

[0048] An unexpected benefit of this application is that by providing an auxiliary installation fixture for the gas spray head, the gas spray head is fixed using a first connecting part, and the cooling plate is fixed using a second connecting part. The gas spray head is then installed onto the cooling plate by aligning and connecting the first and second connecting parts. This effectively standardizes the gas spray head installation process, reduces the impact of human error on the installation effect, minimizes component damage, and improves the stability, success rate, and installation efficiency of the gas spray head's loading and unloading. This, in turn, helps improve the efficiency of deep maintenance of etching equipment, reduces the time required for etching equipment maintenance, and ultimately contributes to improving the stability and production efficiency of the etching equipment's process flow.

[0049] In the description of this specification, the references to terms such as "some embodiments," "other embodiments," "ideal embodiments," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example that are included in at least one embodiment or example of this application. In this specification, the illustrative descriptions of the above terms do not necessarily refer to the same embodiments or examples.

[0050] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features of the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0051] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A gas spray head installation auxiliary fixture, used to assist in installing the gas spray head onto a cooling plate, characterized in that, include: The first connecting part, used to fix the gas spray head, includes a first body, at least three first limiting members and at least three mounting positioning holes. The first body is a hollow structure with an internal space. The mounting positioning holes are spaced apart on the inner wall of the first body. When the gas spray head is disposed in the internal space, the first limiting members pass through the first body and are detachably connected to the gas spray head. The second connecting part, used to fix the cooling plate, includes a second main body, a back plate, a second limiting member, and an auxiliary mounting member. The second main body and the back plate are connected by a shaft and arranged parallel to each other. At least three of the second limiting members pass through the back plate and the second main body and are detachably connected to the cooling plate. The number and distribution of the auxiliary mounting members are the same as those of the mounting positioning holes. The auxiliary mounting members pass through the back plate and the second main body and are inserted into the mounting positioning holes.

2. The auxiliary fixture for installing the gas spray head according to claim 1, characterized in that, The first main body includes either a ring structure or a cylindrical structure.

3. The auxiliary fixture for installing the gas spray head according to claim 1, characterized in that, The side wall of the gas spray head is provided with a first auxiliary positioning hole, the size of which matches the size of the first limiting member.

4. The auxiliary fixture for installing the gas spray head according to claim 1, characterized in that, The first limiting member has a stepped structure on the side near the gas spray head, the gas spray head is disposed on the stepped structure, and the lower surface edge of the gas spray head near the stepped structure abuts against the stepped surface of the stepped structure.

5. The auxiliary fixture for installing the gas spray head according to claim 1, characterized in that, The second body and the back plate have the same shape, and the shape of the second body includes any one of rectangle, circle, I-shape, X-shape and triangle.

6. The auxiliary fixture for installing the gas spray head according to claim 1, characterized in that, The shaft is rotatably connected to the geometric center of the second body. The shaft includes a threaded rod. The geometric center of the back plate is provided with a threaded hole that mates with the shaft. The distance between the back plate and the second body can be adjusted by rotating the shaft.

7. The auxiliary fixture for installing the gas spray head according to claim 1, characterized in that, The auxiliary mounting component includes a threaded rod, and both the second main body and the back plate are provided with threaded holes that mate with the auxiliary mounting component.

8. The auxiliary fixture for installing the gas spray head according to claim 1, characterized in that, The first surface of the cooling plate is provided with a second auxiliary positioning hole, and the number and distribution of the second auxiliary positioning hole are the same as the number and distribution of the second limiting member.

9. The auxiliary fixture for installing the gas spray head according to claim 1 or 8, characterized in that, The second limiting member includes a threaded rod, and both the second body and the back plate are provided with through holes that cooperate with the second limiting member.

10. The auxiliary fixture for installing the gas spray head according to claim 9, characterized in that, The second surface of the cooling plate is provided with at least three positioning protrusions, and the upper surface of the gas spray head is provided with at least three positioning grooves. The orthographic projection of all the positioning protrusions toward the gas spray head falls within the orthographic projection of all the positioning grooves toward the gas spray head.

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