A valve manifold, a sample injection device and a detector

Abstract

The application provides a valve island, a sample injection device and a detector. The valve island comprises a base, a ventilation structure and an electromagnetic valve. The base is internally provided with a communication pipeline. The base is provided with a first air hole. The first air hole is communicated with the communication pipeline. The ventilation structure is detachably arranged on the base. The ventilation structure is provided with an adjusting hole. The adjusting hole has opposite first and second ends. The first end of the adjusting hole is communicated with the first air hole. The electromagnetic valve is arranged on the base. The electromagnetic valve is communicated with the second end of the adjusting hole. The adjusting hole is used to control the flow of the gas from the first air hole into the electromagnetic valve through the diameter of the adjusting hole. The application can improve the versatility of the base of the valve island and reduce the use cost.

Description

Technical Field

[0001] This application relates to the field of pneumatic component technology, and in particular to a valve island, a sample injection device, and a detector. Background Technology

[0002] A valve island is a pneumatic-electric integrated control component composed of multiple electrically controlled valves. The base of the valve island typically has connecting pipes inside and multiple air holes. By placing solenoid valves on the base and connecting them to these air holes, the air paths of multiple solenoid valves can be connected, achieving air path integration. This solves the problems of traditional decentralized solenoid valve wiring, where solenoid valves are connected separately via air pipes, resulting in cumbersome wiring, messy piping, numerous leak points, short air pipe lifespan, inefficient control, and difficult maintenance.

[0003] Different testing standards have different flow rate requirements, thus requiring corresponding air holes of different diameters. However, the diameter of the air holes in the current base is fixed. When the flow rate requirements of different testing standards change, different bases need to be replaced. The poor versatility of the valve island base leads to high operating costs. Utility Model Content

[0004] This utility model discloses a valve island, a sample injection device, and a detector, which can improve the versatility of the base and reduce the cost of use.

[0005] To achieve the above objectives, in a first aspect, this application provides a valve island, comprising:

[0006] A base, wherein the interior of the base is provided with a connecting pipe, and the base is provided with a first air hole, the first air hole being connected to the connecting pipe;

[0007] A ventilation structure, detachably mounted on the base, the ventilation structure having an adjustment hole having a first end and a second end opposite to each other, the first end of the adjustment hole being connected to a first air hole; and a solenoid valve, mounted on the base, the solenoid valve being connected to the second end of the adjustment hole;

[0008] The regulating orifice is used to control the flow rate of gas entering the solenoid valve from the first air orifice by means of its own diameter.

[0009] As an optional implementation, the base is provided with a first mounting groove, the first mounting groove is connected to the first air hole, and the first air hole is located between the first mounting groove and the connecting pipe, and the ventilation structure is detachably provided in the first mounting groove.

[0010] As an optional implementation, the ventilation structure includes a fixed base and a capillary tube. The fixed base is disposed in the first mounting groove and has a through mounting hole. The capillary tube is disposed in the mounting hole and has the adjustment hole.

[0011] As an optional implementation, the mounting hole has guide surfaces at both ends, and the guide surfaces are inclined relative to the axial direction of the mounting hole.

[0012] As an optional implementation, the mounting base has a first filling groove and a second filling groove on both sides that communicate with the mounting hole, and the first filling groove and the second filling groove are used to fill adhesive.

[0013] As an optional implementation, the bottom surface of the first mounting groove is provided with a second mounting groove, the second mounting groove is located on the outer periphery of the first air hole, the valve island also includes a sealing element, the sealing element is disposed in the second mounting groove, and the fixing seat is disposed on the side of the sealing element away from the bottom surface of the first mounting groove.

[0014] As an optional implementation, the valve island further includes a pressure block, which is disposed in the first mounting groove and located between the venting structure and the solenoid valve. The pressure block is provided with a second air hole, which is connected to the second end of the adjusting hole and to the solenoid valve.

[0015] As an optional implementation, the diameter of the regulating hole is smaller than the diameter of the first air hole.

[0016] Secondly, this application provides a sample injection device, which includes a valve island as described in the first aspect above.

[0017] Thirdly, this application provides a detector, which includes the sample introduction device as described in the second aspect above.

[0018] Compared with the prior art, the valve island provided in this application has the following main advantages:

[0019] The valve island's base is equipped with connecting pipes, enabling communication between components connected to these pipes (such as solenoid valves and sensors). A venting structure is incorporated, with one end of its regulating orifice connected to a first vent, and the other end connected to the solenoid valve. This allows the solenoid valve to connect to the connecting pipes via the regulating orifice and the first vent, controlling the flow rate of gas entering the solenoid valve from the first vent. Furthermore, since the venting structure is detachably mounted on the base, different testing standards require different gas flow rates. Only the venting structure needs to be replaced to adjust the diameter of its regulating orifice to meet the required flow rate, eliminating the need to replace the entire base. This improves the base's versatility and reduces the valve island's operating cost. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a three-dimensional structural schematic diagram of the valve island disclosed in the first aspect of the embodiments of this application;

[0022] Figure 2 yes Figure 1 Sectional view in the AA direction;

[0023] Figure 3 yes Figure 2 An enlarged view of the S-section;

[0024] Figure 4 This is a three-dimensional structural schematic diagram of the ventilation structure disclosed in the first aspect of the embodiments of this application;

[0025] Figure 5 This is a three-dimensional structural schematic diagram of the ventilation structure disclosed in the first aspect of the embodiments of this application from another perspective;

[0026] Figure 6 This is a three-dimensional structural diagram of the pressing block disclosed in the first aspect of the embodiments of this application;

[0027] Figure 7 This is a three-dimensional structural diagram of the base disclosed in the first aspect of the embodiments of this application;

[0028] Figure 8 This is a simplified structural diagram of the detector disclosed in the third aspect of the embodiments of this application.

[0029] icon:

[0030] 1. Valve island;

[0031] 10. Base; 100. Connecting pipe; 101. First air hole; 102. First mounting slot; 103. Second mounting slot;

[0032] 11. Ventilation structure; 110. Fixing base; 1100. Mounting hole; 1101. Guide surface; 1102. First filling groove; 1103. Second filling groove; 111. Capillary tube; 1110. Adjustment hole; 1110a. First end; 1110b. Second end;

[0033] 12. Solenoid valve;

[0034] 13. Sealing components;

[0035] 14. Pressing block; 140. Second air hole; 141. Connecting groove;

[0036] 2. Sample introduction device;

[0037] 3. Detector. Detailed Implementation

[0038] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0039] The technical solution of this utility model will be further described below with reference to the embodiments and accompanying drawings.

[0040] Please refer to the following: Figures 1 to 3 The first aspect of this utility model provides a valve island 1, which includes a base 10, a venting structure 11, and a solenoid valve 12. The base 10 has a connecting pipe 100 inside and a first vent 101 on the base 10, which is connected to the connecting pipe 100. The venting structure 11 is detachably disposed on the base 10 and has an adjusting hole 1110. The adjusting hole 1110 has a first end 1110a and a second end 1110b opposite to each other. The first end 1110a of the adjusting hole 1110 is connected to the first vent 101. The solenoid valve 12 is disposed on the base 10 and is connected to the second end 1110b of the adjusting hole 1110. The adjusting hole 1110 is used to control the flow rate of gas entering the solenoid valve 12 from the first vent 101 by its own diameter.

[0041] The first aspect of the present invention provides a valve island 1, the base 10 of the valve island 1 is provided with a connecting pipe 100, which enables the components (such as solenoid valve 12, sensor, etc.) connected to the connecting pipe 100 to communicate with each other. By providing a ventilation structure 11, the first end 1110a of the regulating hole 1110 of the ventilation structure 11 is connected to the first air hole 101, and the second end 1110b of the regulating hole 1110 is connected to the solenoid valve 12, so that the solenoid valve 12 can be connected to the connecting pipe 100 through the regulating hole 1110 and the first air hole 101. The regulating hole 1110 can control the flow rate of the gas introduced into the solenoid valve 12 from the first air hole 101. Furthermore, since the ventilation structure 11 is detachably mounted on the base 10, when different test standards have different requirements for gas flow rate, only different ventilation structures 11 need to be replaced so that the diameter of the adjustment hole 1110 of the ventilation structure 11 meets the flow rate requirement. This eliminates the need to replace the entire base 10, thereby improving the versatility of the base 10 and reducing the operating cost of the valve island 1.

[0042] Optionally, the number of solenoid valves 12 can be one or more (e.g., two, three or four, etc.), which can be selected according to the actual situation, and is not specifically limited in this embodiment.

[0043] In some embodiments, the base 10 is provided with a first mounting groove 102, which communicates with a first vent 101, and the first vent 101 is located between the first mounting groove 102 and the connecting pipe 100. The venting structure 11 is detachably disposed within the first mounting groove 102. It is understood that the solenoid valve 12 can be detachably disposed on the base 10 to facilitate replacement of the venting structure 11.

[0044] By providing a first mounting groove 102 on the base 10 that communicates with the first air hole 101, the first mounting groove 102 can accommodate and protect the ventilation structure 11. The ventilation structure 11 located in the first mounting groove 102 can still communicate with the connecting pipe 100 through the first air hole 101. Furthermore, after the solenoid valve 12 is installed on the base 10, the solenoid valve 12 will seal the opening of the first mounting groove 102 to prevent the ventilation structure 11 from falling off the base 10 and to provide a certain degree of protection for the ventilation structure 11.

[0045] Optionally, the ventilation structure 11 can be a single component, such as a block structure or column structure with an adjustment hole 1110. The ventilation structure 11 can also be multiple components, such as a fixed base 110 and an air pipe with an adjustment hole 1110. The specific components can be selected according to the actual situation, and are not specifically limited in this embodiment.

[0046] In some embodiments, the ventilation structure 11 includes a fixed seat 110 and a capillary tube 111. The fixed seat 110 is disposed in the first mounting groove 102 and has a through mounting hole 1100. The capillary tube 111 is disposed in the mounting hole 1100 and has an adjustment hole 1110.

[0047] By setting a fixing base 110, the fixing base 110 can be installed in the first mounting groove 102, and the mounting hole 1100 opened on the fixing base 110 can be used to install a capillary tube 111. The capillary tube 111 has an adjustment hole 1110, that is, the diameter of the adjustment hole 1110 of the capillary tube 111 can adjust the flow rate of the gas entering the solenoid valve 12 from the first air hole 101. Therefore, by selecting capillary tubes 111 with different inner diameters, the flow rate of the gas entering the solenoid valve 12 from the first air hole 101 can be adjusted. In addition, by setting the capillary tube 111, the diameter of the adjustment hole 1110 of the capillary tube 111 is small, which can achieve high-precision small flow control, so that the valve island 1 can meet the high-precision requirements of equipment such as detectors.

[0048] In some embodiments, guide surfaces 1101 are provided at both ends of the mounting hole 1100, and the guide surfaces 1101 are inclined relative to the axial direction of the mounting hole 1100.

[0049] By providing guide surfaces 1101 at both ends of the mounting hole 1100, the capillary tube 111 can be guided into the mounting hole 1100, which facilitates the installation of the capillary tube 111 on the fixed base 110.

[0050] Optionally, the guide surface 1101 can be a plane or a curved surface (such as an arc surface), and the specific choice can be made according to the actual situation. In this embodiment, no specific limitation is made.

[0051] In some embodiments, the mounting base 110 has a first filling groove 1102 and a second filling groove 1103 on both sides that communicate with the mounting hole 1100. The first filling groove 1102 and the second filling groove 1103 are used to fill adhesive.

[0052] By providing a first filling groove 1102 and a second filling groove 1103 on both sides of the fixing base 110, the first filling groove 1102 and the second filling groove 1103 can contain adhesive, so that the capillary tube 111 is fixed to the fixing base 110, ensuring the structural stability of the ventilation structure 11, and the adhesive can seal the gap between the capillary tube 111 and the wall of the mounting hole 1100, preventing gas from leaking from the gap between the capillary tube 111 and the wall of the mounting hole 1100.

[0053] Optionally, the adhesive may be a silicone sealant, a polyurethane sealant, or an epoxy sealant, etc., and the specific choice can be made according to the actual situation. In this embodiment, no specific limitation is made.

[0054] Please refer to the following: Figure 3 and Figure 7 In some embodiments, the bottom surface of the first mounting groove 102 is provided with a second mounting groove 103, the second mounting groove 103 is located on the outer periphery of the first air hole 101, the valve island 1 also includes a sealing element 13, the sealing element 13 is provided in the second mounting groove 103, and the fixing seat 110 is provided on the side of the sealing element 13 away from the bottom surface of the first mounting groove 102.

[0055] By setting a sealing element 13, which is located in the second mounting groove 103, and since the second mounting groove 103 is arranged around the outer periphery of the first air port, the sealing element 13 can seal the outer periphery of the first air port, that is, seal the gap between the fixing seat 110 and the bottom surface of the first mounting groove 102, and prevent the gas output from the first air port from leaking through the gap between the capillary tube 111 and the wall of the mounting hole 1100.

[0056] Optionally, the seal 13 may be a rubber ring or a component consisting of a rubber ring and a metal retaining ring, etc. The specific choice can be made according to the actual situation, and no specific limitation is made in this embodiment.

[0057] In some embodiments, the valve island 1 further includes a pressure block 14, which is disposed in the first mounting groove 102 and located between the venting structure 11 and the solenoid valve 12. The pressure block 14 has a second air hole 140, which is connected to the second end 1110b of the adjusting hole 1110 and to the solenoid valve 12. Specifically, when the venting structure 11 includes a fixing seat 110, the pressure block 14 is pressed against the fixing seat 110.

[0058] By setting the pressure block 14, which is placed in the first mounting groove 102, the pressure block 14 can press down on the ventilation structure 11, ensuring that the ventilation structure 11 is fixed in the first mounting groove 102. At the same time, the pressure block 14 can press the seal 13 between the ventilation structure 11 and the bottom surface of the first mounting groove 102, improving the sealing effect of the seal 13.

[0059] In some embodiments, the pressure block 14 is further provided with a connecting groove 141, which connects to the second air hole 140 and to the solenoid valve 12. Since the second air hole 140 and the air hole on the solenoid valve 12 are not necessarily aligned, the connecting groove 141 is used to connect the second air hole 140 to the solenoid valve 12.

[0060] In some embodiments, the diameter of the regulating orifice 1110 is smaller than the diameter of the first vent 101. By making the diameter of the regulating orifice 1110 smaller than the diameter of the first vent 101, it can be ensured that the flow rate of the gas introduced into the solenoid valve 12 is determined by the regulating orifice 1110, thus ensuring that the regulating orifice 1110 can achieve the effect of regulating the flow rate.

[0061] Please see Figure 8 The second aspect of this utility model provides a sample injection device 2, which includes a valve island 1 as described in the first aspect of the above embodiments.

[0062] The sample injection device 2 provided in the second aspect of the present invention is equipped with a valve island 1 provided in the first aspect of the present invention. The base 10 of the valve island 1 is provided with a connecting pipe 100, which enables the components (such as solenoid valve 12, sensor, etc.) connected to the connecting pipe 100 to communicate with each other. By providing a ventilation structure 11, the first end 1110a of the adjustment hole 1110 of the ventilation structure 11 is connected to the first air hole 101, and the second end 1110b of the adjustment hole 1110 is connected to the solenoid valve 12. Thus, the solenoid valve 12 is connected to the connecting pipe 100 through the adjustment hole 1110 and the first air hole 101. The adjustment hole 1110 can control the flow rate of the gas introduced into the solenoid valve 12 from the first air hole 101. Furthermore, since the ventilation structure 11 is detachably mounted on the base 10, when different test standards have different requirements for gas flow rate, only different ventilation structures 11 need to be replaced so that the diameter of the adjustment hole 1110 of the ventilation structure 11 meets the flow rate requirement. There is no need to replace the entire base 10, which improves the versatility of the base 10 and reduces the cost of using the valve island 1. Therefore, it also improves the versatility of the injection device 2 and the cost of using the injection device 2.

[0063] It is understood that the sample introduction device 2 in this application refers to a device that delivers a gas sample to a subsequent processing device according to the required requirements (controlling flow rate, pressure, etc.).

[0064] Optionally, the sample introduction device 2 of this application may include, but is not limited to, a sample introduction device 2 for a detector (such as a mass spectrometer, a gas tightness detector, a gas analyzer, etc.) or a sample introduction device 2 for a production and processing equipment (such as a semiconductor deposition equipment, a metal heat treatment furnace, etc.). The specific device can be selected according to the actual situation, and no specific limitation is made in this embodiment.

[0065] The third aspect of this utility model provides a detector 3, which includes a sample injection device 2 as described in the second aspect of the above embodiments.

[0066] The detector 3 provided in the third aspect of the present invention is equipped with the sample injection device 2 provided in the second aspect of the present invention. The sample injection device 2 is equipped with the valve island 1 of the first aspect of the present invention. The base 10 of the valve island 1 is provided with a connecting pipe 100, which enables the components (such as solenoid valve 12, sensor, etc.) connected to the connecting pipe 100 to communicate with each other. By providing a ventilation structure 11, the first end 1110a of the adjustment hole 1110 of the ventilation structure 11 is connected to the first air hole 101, and the second end 1110b of the adjustment hole 1110 is connected to the solenoid valve 12. Thus, the solenoid valve 12 is connected to the connecting pipe 100 through the adjustment hole 1110 and the first air hole 101. The adjustment hole 1110 can control the flow rate of the gas introduced into the solenoid valve 12 from the first air hole 101. Furthermore, since the ventilation structure 11 is detachably mounted on the base 10, when different test standards have different requirements for gas flow rate, only different ventilation structures 11 need to be replaced so that the diameter of the adjustment hole 1110 of the ventilation structure 11 meets the flow rate requirement. There is no need to replace the entire base 10, which improves the versatility of the base 10 and reduces the cost of using the valve island 1. Therefore, it also improves the versatility of the detector 3 and the cost of using the sample injection device 2.

[0067] Optionally, the detector 3 in this application may include, but is not limited to, a mass spectrometer 3, an airtightness detector 3, or a gas analyzer, etc. The specific selection can be made according to the actual situation, and no specific limitation is made in this embodiment.

[0068] The valve island, injection device, and detector disclosed in the embodiments of this utility model have been described in detail above. Specific examples have been used to illustrate the principle and implementation of this utility model. The description of the above embodiments is only for the purpose of helping to understand the valve island, injection device, and detector of this utility model and its core ideas. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this utility model. Therefore, the content of this specification should not be construed as a limitation of this utility model.

Claims

1. A valve island, characterized in that, include: A base, wherein the interior of the base is provided with a connecting pipe, and the base is provided with a first air hole, the first air hole being connected to the connecting pipe; A ventilation structure is detachably mounted on the base. The ventilation structure is provided with an adjustment hole, which has a first end and a second end opposite to each other. The first end of the adjustment hole is connected to the first air hole. as well as A solenoid valve is disposed on the base and connected to the second end of the adjustment hole; The regulating orifice is used to control the flow rate of gas entering the solenoid valve from the first air orifice by means of its own diameter.

2. The valve island according to claim 1, characterized in that, The base is provided with a first mounting groove, which is connected to the first air hole, and the first air hole is located between the first mounting groove and the connecting pipe. The ventilation structure is detachably provided in the first mounting groove.

3. The valve island according to claim 2, characterized in that, The ventilation structure includes a fixed base and a capillary tube. The fixed base is disposed in the first mounting groove and has a through mounting hole. The capillary tube is disposed in the mounting hole and has the adjustment hole.

4. The valve island according to claim 3, characterized in that, The mounting hole has guide surfaces at both ends, and the guide surfaces are inclined relative to the axial direction of the mounting hole.

5. The valve island according to claim 3, characterized in that, The mounting base has a first filling groove and a second filling groove on both sides that communicate with the mounting hole. The first filling groove and the second filling groove are used to fill adhesive.

6. The valve island according to claim 3, characterized in that, The bottom surface of the first mounting groove is provided with a second mounting groove, which is located on the outer periphery of the first air hole. The valve island also includes a sealing element, which is disposed in the second mounting groove. The fixing seat is disposed on the side of the sealing element away from the bottom surface of the first mounting groove.

7. The valve island according to claim 2, characterized in that, The valve island also includes a pressure block, which is disposed in the first mounting groove and located between the venting structure and the solenoid valve. The pressure block is provided with a second air hole, which is connected to the second end of the adjusting hole and to the solenoid valve.

8. The valve island according to any one of claims 1-7, characterized in that, The diameter of the regulating hole is smaller than the diameter of the first air hole.

9. A sample introduction device, characterized in that, The injection device includes a valve island as described in any one of claims 1-8.

10. A detector, characterized in that, The detector includes the sample introduction device as described in claim 9.

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