Electrodes for electrostatic chucks

Abstract

1. The name of the product of this design: Electrode for electrostatic chuck. 2. Purpose of the product with this design: The product with this design is used as an electrostatic chuck on semiconductor manufacturing equipment, which is used to fix wafers in the semiconductor manufacturing process. 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the key points of the design: main view. 5. The rear view does not contain design features and is not visible during normal use, so the rear view is omitted. 6. Others: This design is a partial design. The dotted lines shown in the views are for explanation purposes only and do not constitute the design content for which protection is requested. According to the embodiment in the figure, a plurality of electrodes (eg, six electrodes) are shown on the electrostatic chuck. The plurality of electrodes each have a spiral shape such that each electrode surrounds a center. The cross-sections of the plurality of electrodes and the connecting pins are the design contents claimed in the present application and are depicted in black. However, this application does not claim protection for the color black. The electrodes can be wound in a clockwise or counterclockwise direction.

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