Wheel axle with gas deflector

Abstract

1. Name of the designed product: wheel axle with gas deflector. 2. Use of the designed product: The designed product is used for deflecting and / or guiding a gas or fluid flowing onto it in a semiconductor processing apparatus. 3. Design features of the designed product: lie in the shape, pattern and combination thereof of the product. 4. Picture or photograph best indicating the design features: Fig. 1 is a perspective view. 5. Other circumstances requiring explanation Other explanation: The tangents indicated in thin solid lines are not actual visible linear features, but only refer to a smooth transition between two surfaces; the applicant reserves the right to completely delete the tangents from any drawing containing them and to create additional views based on this.

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