combination flame detector (infrared / ultraviolet)

CN309692353SActive Publication Date: 2025-12-23JICAI YUANXIN (JIAXING) SEMICONDUCTOR TECHNOLOGY CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202530323079.0
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Filing Date
2025-06-06
Publication Date
2025-12-23
Estimated Expiration
2040-06-06

Smart Images

  • Figure 000007_ABST
    Figure 000007_ABST
Patent Text Reader

Abstract

1. The name of the design product: composite flame detector (infrared / ultraviolet). 2. The use of the design product: used in semiconductor equipment such as atomic layer deposition (ALD) and wet cleaning, by detecting the special wavelength of ultraviolet and infrared radiation emitted by the flame, and identifying the flickering frequency of the flame characteristics, to detect the flame. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: perspective view.
Need to check novelty before this filing date? Find Prior Art