vibration isolation module (high stiffness)
CN309838715SActive Publication Date: 2026-03-10THE IT ELECTRONICS ELEVENTH DESIGN & RES INST SCI & TECHNOLOGICAL ENG
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-01
- Publication Date
- 2026-03-10
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Figure 000007_ABST
Abstract
1. Name of the designed product: vibration isolation module (high rigidity). 2. Use of the designed product: combined granite support steel frame high rigidity vibration isolation module for placing a photolithography machine. 3. Design points of the designed product: in shape. 4. Picture or photo best indicating the design points: perspective view.
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