Outer edge portion of gas injection device nozzle

CN309850447SActive Publication Date: 2026-03-17JUSUNG ENG
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Filing Date
2025-07-29
Publication Date
2026-03-17

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Abstract

1. Name of the product in this design: Outer edge of the nozzle of a gas injection device. 2. Application of this design: The overall design is used to spray substrate processing gases during processes such as vapor deposition, etching, and cleaning to manufacture semiconductors, displays, solar cells, etc. The partial design is used to form the nozzle shape of the gas jetting device. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: a 3D model. 5. Other situations requiring explanation: This design is a partial design, and the part indicated by solid lines is the part for which protection is sought.
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