Outer edge portion of gas injection device nozzle

Abstract

1. Name of the designed product: gas injection device nozzle outer edge portion. 2. Use of the designed product: the overall designed product is used for injecting gas for substrate processing when performing evaporation process, etching process, cleaning process, etc. to manufacture semiconductors, displays, solar cells, etc. The partial designed product is used for forming the nozzle shape of the gas injection device. 3. Design points of the designed product: in shape. 4. Picture or photo best showing the design points: perspective view. 5. Other circumstances or information: the present design is a partial design, and the part indicated by solid line is the part to be protected.

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