Low temperature plate portion of a vacuum pump component

Abstract

1. Name of the designed product: cryopanel part of vacuum pump component. 2. Use of the designed product: cryosurface for condensing and adsorbing gas in a cryopump. 3. Design points of the designed product: in shape. 4. Picture or photo best indicating the design points: design 1 perspective view. 5. Design 1 is designated as the basic design. 6. Other circumstances needing explanation: the design of the cryopanel part of vacuum pump component is claimed, wherein the solid line part is the claimed part and the dotted line part is not claimed.

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