Fully automatic high-speed microlens interferometer

CN309925507SActive Publication Date: 2026-04-17CHONGQING FUNA TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
CHONGQING FUNA TECH CO LTD
Filing Date
2025-10-16
Publication Date
2026-04-17

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Abstract

1. Name of the product in this design: Fully Automatic High-Speed ​​Microlens Interferometer. 2. Applications of this design: for non-contact measurement and reconstruction of three-dimensional terrain features; for optical precision inspection of micro / nano structures, geometrically critical dimensions, roughness, and surface rings. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: 3D view 1.
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