Fully automatic high-speed microlens interferometer
CN309925507SActive Publication Date: 2026-04-17CHONGQING FUNA TECH CO LTD
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- CHONGQING FUNA TECH CO LTD
- Filing Date
- 2025-10-16
- Publication Date
- 2026-04-17
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Figure 000007_ABST
Abstract
1. Name of the product in this design: Fully Automatic High-Speed Microlens Interferometer. 2. Applications of this design: for non-contact measurement and reconstruction of three-dimensional terrain features; for optical precision inspection of micro / nano structures, geometrically critical dimensions, roughness, and surface rings. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: 3D view 1.
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