Semiconductor wafer and base heater
CN310071388SActive Publication Date: 2026-07-03NUFLARE TECH INC
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- NUFLARE TECH INC
- Filing Date
- 2025-12-12
- Publication Date
- 2026-07-03
Smart Images
Figure 000001_ABST
Abstract
1. Name of the product in this design: Heater for semiconductor wafer and base. 2. Intended use of this design: as a heater for heating wafers and the substrate holding the wafers in a semiconductor manufacturing apparatus. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: 3D view 1.
Need to check novelty before this filing date? Find Prior Art