Optoelectronic semiconductor chip

Abstract

Optoelectronic semiconductor chip (1), comprising: - a semiconductor layer sequence (2) comprising a first semiconductor region (3) of a first conductor type, a second semiconductor region (5) of a second conductor type and an active zone (4) arranged between the first (3) and the second semiconductor region (5), - a support substrate (10) wherein the semiconductor layer sequence (2) has a first main surface (11) facing the support substrate (10) and an opposite second main surface (12), - a first electrical contact layer (7) and a second electrical contact layer (8) which are arranged at least partially between the support substrate (10) and the first main surface (11) of the semiconductor layer sequence (2), wherein the second electrical contact layer (8) is led through a breakthrough (18) in the first semiconductor region (3) and the active zone (4) into the second semiconductor region (5), - an electrically insulating layer (9) that electrically insulates the first electrical contact layer (7) and the second electrical contact layer (8) from each other, - a mirror layer (6) arranged between the semiconductor layer sequence (2) and the support substrate (10), wherein the semiconductor layer sequence (2) has a projection over the mirror layer (6) on all side faces (21), and - a transparent encapsulation layer (13) which covers side surfaces (21) of the semiconductor layer sequence (2) and side surfaces (16) of the mirror layer (6) and which completely covers side surfaces (19) of the electrically insulating layer (9) which face the side surfaces (15) of the semiconductor chip (1).

Description

[0001] The invention relates to an optoelectronic semiconductor chip.

[0002] From publication WO 2009 / 106069 A1, an optoelectronic semiconductor chip is known in which a first and a second electrical contact layer are arranged between the semiconductor layer sequence and the substrate. The first and second electrical contact layers are isolated from each other by an electrically insulating layer. In such a semiconductor chip, a mirror layer can be adjacent to the semiconductor layer sequence on a side facing the substrate in order to redirect the radiation emitted from the active zone towards the substrate to a radiation coupling surface opposite the substrate.

[0003] With such a semiconductor chip, there is a risk that moisture from the edges of the semiconductor chip will be transported through the electrically insulating layer into the area of ​​the mirror layer, which would result in degradation of the mirror layer and thus a reduction in radiation yield.

[0004] The publication DE 10 2009 033 686 A1 relates to an optoelectronic semiconductor component in which a sequence of semiconductor layers is attached to a substrate.

[0005] In the publication DE 10 2008 011 848 A1, an optoelectronic semiconductor body is described in which the semiconductor body has a trench that cuts through the active layer of the semiconductor layer sequence to subdivide the active layer.

[0006] The invention is based on the objective of providing an improved optoelectronic semiconductor chip in which the mirror layer is effectively protected against the ingress of moisture and at the same time efficient electrical contacting of the semiconductor chip is achieved with relatively low manufacturing effort.

[0007] This problem is solved by an optoelectronic semiconductor chip with the features of claim 1. Advantageous embodiments and further developments of the invention are the subject of the dependent claims.

[0008] According to one embodiment, the optoelectronic semiconductor chip comprises a sequence of semiconductor layers, which has a first semiconductor region of a first conductor type, a second semiconductor region of a second conductor type and an active zone arranged between the first and the second semiconductor region.

[0009] Furthermore, the optoelectronic semiconductor chip comprises a substrate, wherein the semiconductor layer sequence has a first main surface facing the substrate and a second main surface opposite it. A first electrical contact layer and a second electrical contact layer are arranged, at least partially, between the substrate and the first main surface of the semiconductor layer sequence, the second electrical contact layer being led into the second semiconductor region through a breakthrough in the first semiconductor region and the active zone. The first and second electrical contact layers are isolated from each other by an electrically insulating layer.

[0010] A reflective layer is arranged between the semiconductor layer sequence and the substrate. The reflective layer can, in particular, border the semiconductor layer sequence at its first main surface. Advantageously, the reflective layer reflects radiation emitted from the active zone towards the substrate to the second main surface of the semiconductor layer sequence, which serves as the radiation output surface. The reflective layer borders, in particular, portions of the first electrical contact layer and portions of the electrically insulating layer, with the interface of the reflective layer facing the substrate being covered by the first electrical contact layer.

[0011] The optoelectronic semiconductor chip comprises a transparent encapsulation layer that covers the side faces of the semiconductor layer sequence and the side faces of the mirror layer. Furthermore, the transparent encapsulation layer also covers side faces of the electrically insulating layer that face the side faces of the semiconductor chip.

[0012] Because the transparent encapsulation layer covers the side surfaces of the semiconductor layer sequence and the mirror layer, the mirror layer is protected from moisture ingress. This protective effect of the transparent encapsulation layer is further enhanced by the fact that the transparent encapsulation layer also covers the side surfaces of the electrically insulating layer facing the semiconductor chip. In this way, moisture is prevented from penetrating the electrically insulating layer and thus reduces the risk of moisture spreading through the insulating layer to the mirror layer.

[0013] Preferably, the electrically insulating layer does not border on any environmental medium of the optoelectronic semiconductor chip. This advantageously ensures that moisture cannot penetrate the electrically insulating layer from the outside and spread within the layer system of the semiconductor chip.

[0014] The transparent encapsulation layer preferably contains or consists of an aluminum oxide such as Al2O3 or a silicon oxide such as SiO2.

[0015] The transparent encapsulation layer is particularly preferably an AlD layer, i.e., a layer produced by atomic layer deposition (ALD). In a further advantageous embodiment, the transparent encapsulation layer comprises a spin-on glass. An ALD layer or a spin-on glass is advantageously characterized by a low defect density and offers good protection against moisture ingress. Furthermore, applying the transparent encapsulation layer using ALD or as a spin-on glass has the advantage that the transparent encapsulation layer can be introduced into small gaps.

[0016] It is particularly advantageous if the reflective layer has a smaller lateral extent than the semiconductor layer sequence, and if portions of the transparent encapsulation layer extend beneath the semiconductor layer sequence. This provides particularly good protection of the reflective layer against oxidation and / or moisture ingress. The semiconductor layer sequence has a projection over the reflective layer on all its sides. Advantageously, a gap borders the sides of the reflective layer, formed between the semiconductor layer sequence and a layer sequence deposited on the substrate. This gap is advantageously filled by the transparent encapsulation layer.

[0017] In a preferred embodiment, the second main surface of the semiconductor chip, which serves in particular as a radiation emission surface, is covered by the transparent encapsulation layer.

[0018] The semiconductor layer sequence is preferably completely covered, i.e. including the side faces, by the transparent encapsulation layer.

[0019] In an advantageous embodiment, the semiconductor layer sequence has a mesa structure, wherein the first and the second electrical contact layers extend into areas of the semiconductor chip arranged laterally next to the mesa structure.

[0020] The transparent encapsulation layer preferably has an opening next to the mesa structure in which a connection contact for the first electrical contact layer is arranged. In this case, the connection contact is advantageously arranged next to the semiconductor layer sequence, so that, in particular, a second main surface of the semiconductor layer sequence, which acts as a radiation emission surface, is free of connection contacts. This has the advantage that the radiation emission surface is not shaded by the connection contact, thus increasing the efficiency of the semiconductor chip. The connection contact is preferably arranged off-center in the semiconductor chip, particularly in a corner of the semiconductor chip.

[0021] The first electrical contact layer advantageously serves both to electrically contact the semiconductor chip and to protect the mirror layer from corrosion. In particular, at least part of the interface of the mirror layer facing the substrate is covered by the first electrical contact layer.

[0022] The first electrical contact layer preferably contains or consists of gold, titanium, chromium, platinum, titanium nitride, titanium tungsten nitride, or nickel. These materials are advantageously characterized by good electrical conductivity and their suitability as a diffusion barrier. The first electrical contact layer can have several sublayers, each preferably containing at least one of these materials.

[0023] The reflective layer preferably contains or consists of silver, aluminum, or a silver or aluminum alloy. Silver and aluminum are characterized by high reflectivity in the visible spectral range. Furthermore, these materials have good electrical conductivity and form a metal-semiconductor contact with low contact resistance. This is advantageous because the reflective layer is advantageously adjacent to the semiconductor layer sequence, thus electrically connecting the first semiconductor layer to the first electrical contact layer.

[0024] The second electrical contact layer, like the mirror layer, preferably contains or consists of silver, aluminum, or a silver-aluminum alloy. High reflectivity in the visible spectral range and good electrical conductivity are advantageous for the second electrical contact layer, since it also borders, at least partially, the semiconductor layer sequence and thus electrically contacts the second semiconductor region.

[0025] The electrically insulating layer, which isolates the first electrical contact layer and the second electrical contact layer from each other, preferably contains a silicon oxide, a silicon nitride, a silicon oxynitride or an aluminum oxide.

[0026] In a preferred embodiment, the first semiconductor region is a p-type semiconductor region and the second semiconductor region is an n-type semiconductor region. In this configuration, the mirror layer borders the p-type semiconductor region, and the second electrical contact layer extends into the n-type semiconductor region through the breakthrough. The p-type semiconductor region faces the substrate, and the n-type semiconductor region faces the second main surface of the semiconductor layer sequence, which serves as the radiation emission surface.

[0027] In a further advantageous embodiment, the semiconductor layer sequence of the optoelectronic semiconductor chip has no growth substrate. In this case, the semiconductor chip is a so-called thin-film LED chip, in which the growth substrate used for the epitaxial growth of the semiconductor layer sequence is removed after the semiconductor layer sequence is bonded to the substrate.

[0028] The semiconductor chip is preferably connected to the substrate by means of a solder layer. In particular, the semiconductor chip can be connected to the substrate on the side opposite the original growth substrate.

[0029] The invention is described below using an exemplary embodiment in connection with the Fig. 1 and Fig. 2 explained in more detail.

[0030] They show: Fig. 1 a schematic representation of a cross-section through an optoelectronic semiconductor chip according to an exemplary embodiment, and Fig. 2A to 2O a schematic representation of a process for producing the in Fig. 1. Optoelectronic semiconductor chips shown, using intermediate steps.

[0031] Identical or similarly functioning components are marked with the same reference symbols in the figures. The depicted components and their relative sizes are not to be considered to scale.

[0032] The in Fig. 1. An optoelectronic semiconductor chip 1, schematically depicted in cross-section, contains a sequence of semiconductor layers 2 comprising a first semiconductor region 3 of a first conductor type and a second semiconductor region 5 of a second conductor type. Preferably, the first semiconductor region 3 is a p-type semiconductor region and the second semiconductor region 5 is an n-type semiconductor region. An active zone 4 is arranged between the first semiconductor region 3 and the second semiconductor region 5.

[0033] The active zone 4 of the optoelectronic semiconductor chip 1 can, in particular, be an active zone suitable for emitting radiation. In this case, the optoelectronic semiconductor chip 1 is a light-emitting diode, especially an LED. Alternatively, it would also be conceivable that the active zone 4 is a radiation-detecting layer, in which case the optoelectronic semiconductor chip 1 is a detector element. The active zone 4 can, for example, be configured as a pn junction, a double heterostructure, a single quantum well structure, or a multiple quantum well structure.

[0034] The semiconductor layer sequence 2 of the semiconductor chip 1 is preferably based on a III-V compound semiconductor material, in particular on an arsenide, nitride, or phosphide compound semiconductor material. For example, the semiconductor layer sequence 2 can be in x Al y Ga 1-x-y N, In x Al y Ga1-x-y P or In x Al y Ga 1-x-y A S , each with 0 ≤ x ≤ 1, 0 ≤ y ≤ 1, and x + y ≤ 1. The III-V compound semiconductor material does not necessarily have to have a mathematically exact composition according to one of the formulas above. Rather, it can contain one or more dopants as well as additional components that do not substantially alter the physical properties of the material. For the sake of simplicity, however, the formulas above only include the essential components of the crystal lattice, even though these may be partially replaced by small amounts of other substances.

[0035] The semiconductor chip 1 is connected to a support substrate 10 by a connection layer 21, which may in particular be a solder layer made of a metal or a metal alloy.

[0036] For electrical contact, the semiconductor chip 1 has a first electrical contact layer 7 and a second electrical contact layer 8. The first electrical contact layer 7 is electrically connected to the first semiconductor area 3, and the second electrical contact layer 8 is electrically connected to the second semiconductor area 5.

[0037] Both the first electrical contact layer 7 and the second electrical contact layer 8 are arranged, at least partially, between a first main surface 11 of the semiconductor layer sequence 2 facing the support substrate 10 and the support substrate 10. The first electrical contact layer 7 and the second electrical contact layer 8 are electrically isolated from each other by means of an electrically insulating layer 9. The electrically insulating layer 9 preferably contains or consists of a silicon oxide, a silicon nitride, a silicon oxynitride, or an aluminum oxide. Alternatively, the electrically insulating layer 9 can also contain other oxides or nitrides.

[0038] The second main surface 12 of the semiconductor layer sequence 2, opposite the support substrate 10, serves as the radiation extraction surface of the optoelectronic semiconductor chip 1 and is advantageously free of electrical contact layers. To improve radiation extraction, the second main surface 12 can be provided with an extraction structure 23 or a roughened surface.

[0039] To improve the radiation efficiency of the optoelectronic semiconductor chip 1, a reflective layer 6 is arranged between the semiconductor layer sequence 2 and the substrate 10. The reflective layer 6 is located downstream of the first semiconductor region 3 on the side facing the substrate 10 and can, in particular, adjoin the first main surface 11 of the semiconductor layer sequence 2. It is also possible that an intermediate layer, for example a thin adhesion promoter layer, is arranged between the first semiconductor region 3 and the reflective layer 6. The reflective layer 6 contains, in particular, silver, aluminum, or a metal alloy with silver or aluminum. These materials are characterized by high reflectivity in the visible spectral range and good electrical conductivity. The reflective layer 6 has, on the one hand, the function of reflecting radiation emitted from the active zone 4 towards the substrate 10 to the radiation output coupling surface 12.Furthermore, the mirror layer 6 also serves for the electrical contacting of the first semiconductor region 3. In particular, the mirror layer 6 borders the first electrical contact layer 7 on the side facing the support substrate 10 and is thus electrically connected to the first electrical contact layer 7.

[0040] The first electrical contact layer 7 preferably covers the interface of the mirror layer facing the support substrate 10. The first electrical contact layer 7 preferably contains or consists of gold, titanium, chromium, platinum, titanium nitride, titanium tungsten nitride, or nickel. These materials are characterized by being electrically conductive and chemically inert. In this way, the mirror layer 6 is advantageously protected from corrosion in the areas where it is covered by the first electrical contact layer 7.

[0041] The second electrical contact layer 8 is electrically connected to the second semiconductor region 5 via a breakdown 18 that extends through the first semiconductor region 3 and the active zone 4. In the region of the breakdown 18, the active zone 4, the first semiconductor region 3, the mirror layer 6, and the first electrical contact layer 7 are insulated from the second electrical contact layer 8 by means of the electrically insulating layer 9 or passivated regions 20 of the semiconductor layer sequence 2.

[0042] The second electrical contact layer 8 advantageously functions not only as a contact layer but also as a reflective layer in the areas where it directly borders the semiconductor layer sequence 2, reflecting radiation towards the second main surface 12 of the semiconductor layer sequence 2, which serves as the radiation emission surface. The second electrical contact layer 8 therefore advantageously comprises a metal or a metal alloy with high reflectivity, in particular silver, aluminum, or an alloy containing silver or aluminum.

[0043] In the semiconductor chip 1, the side surfaces 21 of the semiconductor layer sequence 2 and the side surfaces 16 of the reflective layer 6 are covered by an electrically insulating, transparent encapsulation layer 13. The encapsulation layer 13 serves, firstly, to protect the reflective layer 6 from corrosion. In particular, the encapsulation layer 13 protects the reflective layer 6 from oxidation and the ingress of moisture. The side surfaces 16 of the reflective layer 6 are preferably completely surrounded by the encapsulation layer 13, so that the reflective layer 6 does not directly adjoin the surrounding medium at any point.

[0044] The transparent encapsulation layer 13 also covers the side surfaces 17 of the first contact layer 7 and the side surfaces 19 of the electrically insulating layer 9 facing the side surfaces 15 of the semiconductor chip 1. In this way, in particular, the ingress of moisture into the electrically insulating layer 9 is prevented. Preferably, the electrically insulating layer 9 does not border on any surrounding medium of the semiconductor chip 1.

[0045] The transparent encapsulation layer 13 is preferably an aluminum oxide layer, in particular an Al₂O₃ layer, or a silicon oxide layer, in particular a SiO₂ layer. The transparent encapsulation layer is advantageously deposited by atomic layer deposition (ALD) or as spin-on glass. Such a silicon oxide layer deposited by ALD or as spin-on glass advantageously exhibits high resistance to corrosion and moisture penetration.

[0046] In a particularly preferred embodiment, the mirror layer 6 has a smaller lateral extent than the semiconductor layer sequence 2, such that portions of the transparent encapsulation layer 13 extend beneath the semiconductor layer sequence 2. In this embodiment, the side surfaces 16 of the mirror layer 6 are advantageously spaced apart from the side surfaces 21 of the semiconductor layer sequence 2. The distance between the side surfaces 21 of the semiconductor layer sequence 2 and the side surfaces 16 of the mirror layer 6 is preferably between 0.5 µm and 5 µm, and particularly preferably about 3 µm. In this way, the mirror layer 6 is protected particularly effectively. In particular, by producing the transparent encapsulation layer 13 using atomic layer deposition, it is possible to deposit the transparent encapsulation layer 13 in such a way that it fills the space between the semiconductor layer sequence 2 and the mirror layer 6.

[0047] The transparent encapsulation layer 13 advantageously also covers the side surfaces 21 and the second main surface 12 of the semiconductor layer sequence 2, which serves as the radiation emission surface. The semiconductor layer sequence 2 is thus advantageously completely covered by the transparent encapsulation layer 13. Any fine cracks that may be present on the surfaces of the semiconductor layer sequence 2 can be advantageously closed by the transparent encapsulation layer 13. The complete encapsulation of the semiconductor layer sequence 2 is therefore advantageous for the long-term stability of the semiconductor chip.

[0048] The semiconductor layer sequence 2 has a mesa structure, wherein the first electrical contact layer 7 and the second electrical contact layer 8 extend laterally adjacent to the mesa structure. The transparent encapsulation layer 13 has an opening next to the mesa structure in which a connection contact 14 is arranged, which is connected to the first electrical contact layer. The connection contact 14 can, in particular, be a bond pad provided for connecting a bond wire.

[0049] The connecting contact 14 is preferably arranged outside the center of the semiconductor chip 1, in particular in the area of ​​a corner of the semiconductor chip 1.

[0050] When viewing the semiconductor chip 1 from above, only the second electrical contact layer 8 is advantageously visible through the transparent encapsulation layer 13, in addition to the mesa-structured semiconductor layer sequence 2. This second electrical contact layer 8 advantageously contains a highly reflective metal such as Ag or Al. Only in a small area around the terminal contact 14 are parts of the first electrical contact layer 7 visible, which may contain a less reflective material such as platinum.

[0051] The second electrical contact layer 8 can be electrically connected from the outside, for example, via the back side of the semiconductor chip 1, in particular via an electrically conductive substrate 10 and the solder layer 21. A barrier layer 22 can be arranged between the solder layer 21 and the second electrical contact layer 8, which in particular prevents diffusion of components from the solder layer 21 into the second electrical contact layer 8 and vice versa.

[0052] In the following Fig. Sections 2A to 2O describe an exemplary embodiment of a method for manufacturing the optoelectronic semiconductor chip. The advantageous configurations of individual components of the optoelectronic semiconductor chip described above apply equally to the method described below, and vice versa.

[0053] At the in Fig. In the intermediate step of the process shown in Figure 2A, the semiconductor layer sequence 2, comprising the first semiconductor region 3, the active zone 4, and the second semiconductor region 5, is grown onto a growth substrate 24. The growth is preferably epitaxial, in particular using MOVPE. The semiconductor layer sequence 2 can, for example, contain nitride compound semiconductor materials, and the growth substrate 24 can be a sapphire substrate. The first semiconductor region 3 is preferably a p-type semiconductor region, and the second semiconductor region 5 is preferably an n-type semiconductor region.

[0054] At the in Fig. In the process step shown in Figure 2B, an oxide layer 25, for example a silicon oxide layer, was applied to the second semiconductor region 5. The oxide layer 25 serves to protect the first semiconductor region 3 during subsequent photolithography and etching processes.

[0055] At the in Fig. In the intermediate step shown in Figure 2C, the oxide layer was structured, for example, photolithographically. Furthermore, the mirror layer 6 and the first electrical contact layer 7 were applied and lifted off from the areas still covered with the oxide layer 25 using a lift-off technique. Advantageously, the mirror layer 6 and the first electrical contact layer are structured in the same process step. The mirror layer 6 contains, in particular, silver, aluminum, or a metal alloy with silver or aluminum. The first electrical contact layer 7 covers the surface of the mirror layer 6 and thus establishes the electrical connection to the first semiconductor region 3 and also serves as an encapsulation for the material of the mirror layer 6. The first electrical contact layer 7 can, in particular, contain or consist of gold, titanium, chromium, platinum, titanium nitride, titanium tungsten nitride, or nickel.It is also possible that the first electrical contact layer 7 comprises several sublayers. For example, the first electrical contact layer 7 can have a Ti / Pt / Au / Cr layer sequence.

[0056] At the in Fig. In the 2D depicted process step, the previously applied oxide layer has been removed, for example by etching with buffered hydrofluoric acid (BOE - Buffered Oxide Etch).

[0057] At the in Fig. In the intermediate step shown in Figure 2E, the p-doped semiconductor region 3 has been passivated in regions 20 located between and outside the regions of the semiconductor layer sequence 2 covered by the mirror layer 6 and the first electrical contact layer 7. The passivated regions 20 can be generated, for example, by bombarding the p-doped semiconductor material 3 with argon ions. Preferably, the passivated regions 20 extend into the active layer 4, so that the pn junction is interrupted by the electrically insulating passivated regions 20. Alternatively, instead of passivating the regions 20, it is also possible to remove them by sputtering.

[0058] The structure produced in this way was used in the Fig. In the intermediate step shown in 2F, an electrically insulating layer 9 is applied. The electrically insulating layer 9 can, in particular, be a silicon oxide or a silicon nitride layer.

[0059] At the in Fig. In the intermediate step shown in Figure 2G, a breakthrough 18 was created in the electrically insulating layer 9 and the semiconductor layer sequence 2. The breakthrough 18 is created, for example, by photolithography and reactive ion etching. The breakthrough 18 extends through the passivated regions 20 of the first semiconductor region 3 and the active layer 4 into the second semiconductor region 5.

[0060] At the in Fig. In the intermediate step shown in Figure 2H, the entire previously produced layer structure was covered with the second electrical contact layer 8. The second electrical contact layer 8 preferably contains silver, aluminum, or an alloy with silver or aluminum. The second electrical contact layer 8 serves to electrically contact the second semiconductor region 5, which can in particular be an n-type semiconductor region. The second electrical contact layer 8 extends through the opening 18 into the second semiconductor region 5.

[0061] At the in Fig. In the intermediate step shown in Figure 2I, the semiconductor chip is connected to a support substrate 10 on a side facing away from the growth substrate 24 by means of a solder layer 21. Before connecting the support substrate 10 to the semiconductor chip, a barrier layer 22 is preferably applied to the second electrical contact layer 8 to protect the second electrical contact layer 8, which preferably contains silver or aluminum, from diffusion of components of the solder layer 21. The solder layer 21 can, in particular, contain AuSn. The barrier layer 22 can, for example, contain TiWN.

[0062] The support substrate 10 is preferably an electrically conductive substrate, for example a doped semiconductor wafer made of silicon or germanium. Alternatively, the support substrate 10 can also be formed by an electroplated metal layer.

[0063] At the in Fig. In the intermediate step shown in Figure 2J, the growth substrate 24 has been detached from the semiconductor chip. The semiconductor chip is shown rotated 180° compared to the previous figures, as the support substrate 10, opposite the original growth substrate, now serves as the sole support for the semiconductor chip. The growth substrate, in particular a sapphire substrate, can be detached from the semiconductor layer sequence 2, for example, by means of a laser lift-off process.

[0064] The main area 12 of the semiconductor layer sequence 2, from which the growth substrate 24 was detached, was in the Fig. The intermediate step shown in 2K is provided with an output coupling structure 23, for example by etching with KOH. This is advantageous because the second main surface 12 of the semiconductor layer sequence 2 serves as a radiation output coupling surface in the finished optoelectronic semiconductor chip.

[0065] At the in Fig. In the intermediate step shown in Figure 2L, the semiconductor layer sequence 2 was provided with a mesa structure. For this purpose, the semiconductor layer sequence 2 was completely ablated in the edge regions of the semiconductor chip to produce a semiconductor layer sequence 2 with a desired shape and size. The structuring is preferably carried out photolithographically, using, for example, H3PO4 as the etching agent and SiO2 as the mask.

[0066] In particular, the semiconductor layer sequence 2 was ablated such that, in addition to the semiconductor layer sequence 2, a portion of the mirror layer 6 and the electrically insulating layer 9 were exposed. The semiconductor layer sequence 2, provided with the mesa structure, can have inclined side faces 21. The first electrical contact layer 7 and the second electrical contact layer 8 extend into areas of the semiconductor chip located laterally adjacent to the mesa structure.

[0067] At the in Fig. In the process step shown in Figure 2M, a portion of the mirror layer 6 was removed using an etchant suitable for selectively etching the mirror layer 6. The semiconductor layer sequence 2 and the electrically insulating layer 9 act as an etching mask. The semiconductor layer sequence is advantageously undercut during the etching process, creating a gap between the semiconductor layer sequence 2 and the first electrical contact layer 7. The mirror layer 6 thus has a smaller lateral extent than the adjacent semiconductor layer sequence 2. In particular, the side faces 16 of the mirror layer 6 are spaced apart from the side faces 21 of the semiconductor layer sequence 2. This space is preferably between 0.5 µm and 5 µm.

[0068] At the in Fig. In the intermediate step shown in Figure 2N, the areas of the electrically insulating layer 9 not covered by the first electrical contact layer 7 were removed. This can be done, for example, by etching with buffered hydrofluoric acid. In this way, it is ensured, in particular, that the electrically insulating layer 9 no longer extends to the side surfaces 15 of the semiconductor chip. The etching process exposes the side surfaces 17 of the first electrical contact layer 7 that were previously covered by the electrically insulating layer 9. Furthermore, exposed side surfaces 19 of the electrically insulating layer 9 are created below the first electrical contact layer 7. The first electrical contact layer 7 is preferably partially undercut, so that the side surfaces 19 of the electrically insulating layer 9 are laterally spaced from the side surfaces 17 of the first electrical contact layer 7.

[0069] The layered structure produced in this way is used in the Fig. In the intermediate step shown in Figure 20, an electrically insulating transparent encapsulation layer 13 is applied. The transparent encapsulation layer 13 preferably contains or consists of Al₂O₃ or SiO₂. The transparent encapsulation layer 13 is preferably produced at least partially by atomic layer deposition (ALD). Alternatively, the transparent encapsulation layer 13 can be applied at least partially as spin-on glass. These layer deposition methods advantageously allow the deposition of particularly pure and dense layers. Furthermore, these methods have the advantage that layer deposition is also possible in comparatively small spaces. In particular, the transparent encapsulation layer 13 is deposited in such a way that it completely fills the spaces adjacent to the side surfaces 16 of the mirror layer 6 and the side surfaces 19 of the electrically insulating layer 9.

[0070] It is possible to first apply a first sublayer of the transparent encapsulation layer 13 by means of atomic layer deposition or as spin-on glass to fill the cavities created in the layer structure. The first sublayer produced in this way can subsequently be reinforced by a second sublayer applied, for example, by CVD.

[0071] The transparent encapsulation layer 13 advantageously covers the semiconductor layer sequence 2 completely, i.e., both the side surfaces 21 and the second main surface 12, which serves as the radiation emission surface. It has been found that the transparent encapsulation layer 13 can close any fine cracks that may be present on the surfaces of the semiconductor layer sequence 2, thus reducing the risk of corrosion or moisture ingress.

[0072] To the in Fig. To complete the optoelectronic semiconductor chip 1 shown in Figure 1, an opening is subsequently created in the transparent encapsulation layer 13 next to the mesa-structured semiconductor layer sequence 2, in which the first electrical contact layer 7 is exposed. The opening is produced, for example, by photolithography and reactive ion etching. A connection contact 14 is applied in this opening. The connection contact 14 can, for example, contain gold and / or platinum. The connection contact 14 can, in particular, be a bond pad provided for connecting a bond wire. The connection contact 14 is preferably arranged off-center in the semiconductor chip 1, especially in the region of a corner of the semiconductor chip 1.A further electrical connection for the semiconductor chip 1 can be provided on the back of the preferably electrically conductive support substrate 10 in order to electrically connect the second electrical contact layer 8.

[0073] In this way, the in Fig. Figure 1 illustrates an embodiment of an optoelectronic semiconductor chip 1. The manufacturing process is characterized in particular by the fact that only four photolithography steps are required, so that the manufacturing effort is relatively low despite the complex encapsulation of the semiconductor chip.

Claims

[1] Optoelectronic semiconductor chip (1), comprising: - a semiconductor layer sequence (2) comprising a first semiconductor region (3) of a first conductor type, a second semiconductor region (5) of a second conductor type and an active zone (4) arranged between the first (3) and the second semiconductor region (5), - a support substrate (10) wherein the semiconductor layer sequence (2) has a first main surface (11) facing the support substrate (10) and an opposite second main surface (12), - a first electrical contact layer (7) and a second electrical contact layer (8) which are arranged at least partially between the support substrate (10) and the first main surface (11) of the semiconductor layer sequence (2), wherein the second electrical contact layer (8) is led through a breakthrough (18) in the first semiconductor region (3) and the active zone (4) into the second semiconductor region (5), - an electrically insulating layer (9) that electrically insulates the first electrical contact layer (7) and the second electrical contact layer (8) from each other, - a mirror layer (6) arranged between the semiconductor layer sequence (2) and the support substrate (10), wherein the semiconductor layer sequence (2) has a projection over the mirror layer (6) on all side faces (21), and - a transparent encapsulation layer (13) which covers side surfaces (21) of the semiconductor layer sequence (2) and side surfaces (16) of the mirror layer (6) and which completely covers side surfaces (19) of the electrically insulating layer (9) which face the side surfaces (15) of the semiconductor chip (1). [2] Optoelectronic semiconductor chip according to claim 1, wherein the electrically insulating layer (9) does not border on any surrounding medium of the optoelectronic semiconductor chip (1). [3] Optoelectronic semiconductor chip according to any of the preceding claims, wherein the transparent encapsulation layer (13) contains or consists of an aluminium oxide or a silicon oxide. [4] Optoelectronic semiconductor chip according to one of the preceding claims, wherein the transparent encapsulation layer (13) comprises an ALD layer. [5] Optoelectronic semiconductor chip according to one of the preceding claims, wherein the transparent encapsulation layer (13) comprises a spin-on glass. [6] Optoelectronic semiconductor chip according to one of the preceding claims, wherein the mirror layer (6) has a smaller lateral extent than the semiconductor layer sequence (2), and partial regions of the transparent encapsulation layer (13) extend below the semiconductor layer sequence (2). [7] Optoelectronic semiconductor chip according to one of the preceding claims, wherein the second main surface (12) is covered by the transparent encapsulation layer (13). [8] Optoelectronic semiconductor chip according to one of the preceding claims, wherein the side surfaces (21) and the second main surface (12) of the semiconductor layer sequence (2) serving as a radiation emission surface are completely covered by the transparent encapsulation layer (13). [9] Optoelectronic semiconductor chip according to one of the preceding claims, wherein the semiconductor layer sequence (2) has a mesa structure and the first (7) and second electrical contact layer (8) extend into areas arranged laterally next to the mesa structure. [10] Optoelectronic semiconductor chip according to claim 9, wherein the transparent encapsulation layer (13) has an opening next to the mesa structure in which a connection contact (14) for the first electrical contact layer (7) is arranged. [11] Optoelectronic semiconductor chip according to claim 10, wherein the connection contact (14) is arranged outside the center of the semiconductor chip (1). [12] Optoelectronic semiconductor chip according to any of the preceding claims, wherein the first electrical contact layer (7) contains gold, titanium, chromium, platinum, titanium nitride, titanium tungsten nitride or nickel. [13] Optoelectronic semiconductor chip according to any of the preceding claims, wherein the mirror layer (6) contains silver, aluminium or a silver or aluminium alloy. [14] Optoelectronic semiconductor chip according to any of the preceding claims, wherein the second electrical contact layer (8) contains silver, aluminium or a silver or aluminium alloy. [15] Optoelectronic semiconductor chip according to any of the preceding claims, wherein the electrically insulating layer (9) contains a silicon oxide, a silicon nitride, a silicon oxynitride or an aluminum oxide.

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