Valve and valve assembly

Abstract

Valve (2) with a valve housing (4), comprising a housing cover (6), a housing base (10) and an intermediate housing (8) arranged between the housing cover (6) and the housing base (10), wherein the valve housing (4) encloses a valve chamber (12) comprising a flow chamber (24) and an actuating chamber (26), wherein the valve housing (4) has at least one valve opening (14) leading from the flow chamber (24) into the actuating chamber (26), and wherein within the actuating chamber (26) at least one actuating element (16) movable between a closed position for closing the valve opening (14) and an open position for releasing the valve opening (14), which has a valve element at a first end and is connected at a second end to the valve housing (4) and / or a base plate, a wire- or strip-shaped SMA element (18) made of a shape memory alloy for actuating the actuating element (16) in the opening direction and a printed circuit board (22) are arranged, wherein the SMA element (18) is fixed to the actuating element (16) with a central section (18c) and is electrically connected to the circuit board (22) with its ends (18a, 18b) for the purpose of supplying current, wherein the SMA element (18) is bent in a U-shape in the central section (18c) or consists of two sections which are arranged in a U-shape without a U-bend, wherein the flow chamber (24) and the actuating chamber (26) are separated from each other by a partition (28) having the valve opening (14) in such a way that a fluid flowing through the valve (2) when the actuating element (16) is actuated is directed through the flow chamber (24), wherein a first area (24a) of the flow chamber (24) and a second area (24b) of the flow chamber (24) are connected to each other via the valve opening (14) and / or a connecting channel (24c), wherein the valve opening (14) and / or the connecting channel (24c) is closed in the closed position of the actuating element (16) and is released in the open position of the actuating element (16), wherein the first area (24a) of the flow chamber (24) is connected or connectable to an air supply unit for supplying air into the flow chamber (24) and wherein the second area (24b) of the flow chamber (24) is connected or connectable to a media storage unit and wherein the second area (24b) of the flow chamber (24) is connected or connectable to the atmosphere via an opening (32) for releasing air from the flow chamber (24), wherein within the second area (24b) of the flow chamber (24) an actuator (58) with a first end section and a second end section is arranged, which is rotatably mounted with the second end section on the valve housing (4) and is coupled in the area of ​​the first end section to the actuating element (16) in the area of ​​the first end of the actuating element (16) such that the opening (32) to the atmosphere is released when the actuating element (16) is in the closed position and the opening (32) is closed when the actuating element (16) is in the release position.

Description

[0001] The invention relates to a valve with a valve housing that encloses a valve chamber and has at least one valve opening. For actuating such a valve, an actuating element is arranged within the valve chamber, which is movable between a closed position for closing the valve opening and an open position for releasing the valve opening. The invention further relates to a valve arrangement with multiple valves.

[0002] The movement of the actuator between the open and closed positions can be achieved using shape memory alloys (SMAs), for example, in the form of wires. These alloys can exist in two different crystal structures depending on their temperature. At room temperature, they have a martensitic structure with a body-centered tetragonal lattice, which transforms into an austenitic structure with a face-centered cubic lattice at a transformation temperature of approximately 100°C. A wire made of such a shape memory alloy therefore has the property that, due to the lattice transformation from a martensitic to an austenitic structure, it shortens when heated above the transformation temperature.

[0003] To heat the SMA element, it is usually subjected to an electric current, which causes it to shorten and thus allow the actuator to move.

[0004] From DE 10 2005 060 217 A1, for example, a valve with a valve housing enclosing a pressure chamber is known, wherein a plunger for opening and closing a valve opening is arranged within the pressure chamber. The plunger is actuated to open the valve opening by an SMA element, which is electrically connected to a circuit board arranged within the valve housing in order to be energized. The SMA element is arranged within the pressure chamber and is therefore directly exposed to the volume flow of the valve, i.e., the air flowing in or out of the pressure chamber through the valve openings. The SMA element extends on both sides of the plunger, so that it has a V-shape.

[0005] DE 10 2016 219 342 A1 discloses a pneumatic valve comprising a valve housing in which an air chamber with one or more air connections is provided, wherein each air connection of at least some of the air connections can be opened and closed by means of a movable valve flap. The valve flap is mechanically coupled to a shape memory alloy (SMA) element, wherein the SMA element deforms upon application of an electric heating current, thereby causing a predetermined movement of the valve flap to open or close the respective air connection.

[0006] DE 10 2017 204 662 B3 also discloses a pneumatic valve. In addition to the first valve flap, the disclosed valve has a second valve flap connected to it, so that a valve flap formed from the first and second valve flaps has three switching positions.

[0007] The US 2018 / 0 038 514 A1 reveals another SMA valve.

[0008] Such a valve or valve assembly can be used to fill media reservoirs, e.g., fluid bladders, especially air bladders or air cushions, in the area of ​​automotive seats. Known valves with only one actuator can be used either to fill or empty the bladder. They are not individually suitable for maintaining pressure in the bladder. For this purpose, a combination of two valves is necessary with the known valves. Furthermore, the known valves are quite large.

[0009] It is therefore an object of the invention to provide a valve and a valve arrangement which is improved with regard to the aforementioned disadvantages.

[0010] The object of the invention is achieved by a valve with a valve housing comprising a housing cover, a housing base and an intermediate housing arranged between the housing cover and the housing base, wherein the valve housing encloses a valve chamber comprising a flow chamber and an actuating chamber, wherein the valve housing has at least one valve opening leading from the flow chamber into the actuating chamber, and wherein within the actuating chamber at least one actuating element movable between a closed position for closing the valve opening and an open position for releasing the valve opening, which has a valve element at a first end and is connected at a second end to the valve housing and / or a base plate, a wire- or strip-shaped SMA element made of a shape memory alloy for actuating the actuating element in the opening direction and a printed circuit board are arranged.wherein the SMA element is fixed to the actuator with a central section and is electrically connected to the circuit board at its ends for current supply, wherein the SMA element is bent in a U-shape in the central section, or consists of two sections which are arranged substantially parallel to each other, wherein the flow chamber and the actuating chamber are separated from each other by a partition wall having the valve opening, such that a fluid flowing through the valve when the actuating element is actuated is guided through the flow chamber, wherein a first region of the flow chamber and a second region of the flow chamber are connected to each other via the valve opening and / or a connecting channel, wherein the valve opening and / or the connecting channel is closed in the closed position of the actuating element and released in the open position of the actuating element, wherein the first area of ​​the flow chamber is connected or connectable to an air supply unit for supplying air into the flow chamber, and wherein the second area of ​​the flow chamber is connected or connectable to a media storage unit, and wherein the second area of ​​the flow chamber is connected or connectable to the atmosphere via an opening for releasing air from the flow chamber, wherein within the second area of ​​the flow chamber an actuator with a first end section and a second end section is arranged, which is rotatably mounted with the second end section on the valve housing and is coupled in the area of ​​the first end section to the actuating element in the area of ​​the first end of the actuating element, such that the opening to the atmosphere is released when the actuating element is in the closed position and the opening is closed when the actuating element is in the release position.

[0011] The SMA element can therefore either be U-shaped with a U-bend or consist of two sections that essentially correspond to a U-shape without a U-bend. In the latter case, the middle section refers to a third and fourth end section, which in a U-shape would be connected to the U-bend.

[0012] To secure the SMA element, projections can be provided, particularly in the first section of the actuating element, around which the SMA element extends, or to which the third and fourth end sections are attached. In this embodiment, a first check valve is provided in or at the valve opening, which, in the open position of the actuating element, prevents fluid from flowing back from the second area of ​​the flow chamber through the valve opening into the first area of ​​the flow chamber.

[0013] In a further embodiment, the actuator comprises a switching finger at an end section facing the actuating element, and the first check valve is formed by a sealing element arranged on the switching finger and a valve seat arranged in the partition wall.

[0014] Advantageously, the sealing element is a plate-shaped element or a lip seal. Preferably, the sealing element is made of metal, plastic, or elastomer.

[0015] In its design, the second area of ​​the flow chamber has an opening to the atmosphere.

[0016] In a further embodiment, the partition separating the flow chamber and the actuation chamber is formed by the intermediate housing.

[0017] It is advantageous for the actuating element and the actuator to be arranged linearly, i.e., not at an angle to each other.

[0018] The actuating element can be designed as a bending spring which is rotationally fixed to the base plate, or the actuating element can be a lever element made of a bend-resistant material which is pivotably connected to the base plate, wherein the deflection is limited by a spring, in particular a coil spring.

[0019] Advantageously, the actuating element is reset by means of spring force, in particular by a leaf or coil spring, the leaf or coil spring being preferably arranged between the actuating element and a valve base.

[0020] The second problem is solved by the valve arrangement according to the invention with several valves, in particular each designed according to one of the preceding claims, wherein the valve housings enclosing the valve chamber of a valve, in particular the intermediate housings and / or housing covers and / or housing bottoms, and / or circuit boards are formed in one piece.

[0021] Advantageously, the multiple valves have a common pressure connection which opens into the valve chamber, in particular into the flow chamber, particularly preferably into the first region of the flow chambers of the valves or a region comprising the first regions of the flow chambers, or is connected to the valve chamber, in particular the flow chamber, particularly preferably into the first region of the flow chambers or the region via at least one air duct, and wherein each valve has a separate opening for connection to the atmosphere, which opens in particular into the second region of the flow chamber.

[0022] In this embodiment, the valve chambers of the multiple valves are separated from the receiving chamber for the electronic contacting of the printed circuit board by a partition wall, wherein the partition wall is in particular formed integrally with the intermediate housing, wherein the partition walls have a through-opening for the printed circuit board which is pneumatically sealed in the assembly state.

[0023] In a further embodiment, guiding elements are arranged in an air duct leading from the air supply unit to the flow chamber(s) in such a way that a fluid flowing into and / or through the flow chambers exhibits a laminar flow.

[0024] The invention is further explained below with regard to its features and advantages by means of a description of exemplary embodiments and with reference to the accompanying drawings. These show a schematic diagram of the principle: Fig. 1 Sectional view of a valve, Fig. 2A a sectional view of an actuator according to a first embodiment in the closed position, Fig. 2B a sectional view of an actuator according to a second embodiment, Fig. 2C a sectional view of an actuator according to a third embodiment, Fig. 2D a sectional view of an actuator according to a fourth embodiment, Fig. 3 a valve arrangement

[0025] Fig. Figure 1 shows a sectional view of a valve 2 according to the invention. The valve 2 is received in a valve housing 4. The valve housing 4 comprises a housing cover 6 and a housing base 10 and an intermediate housing 8 received therein.

[0026] The valve housing 4 encloses a valve chamber 12 into which a valve opening 14 opens. Within the valve chamber 12, an actuating element 16 is arranged, movable in a direction B between a closed position for closing the valve opening 14 and an open position for releasing the valve opening 14. A wire-shaped SMA element 18 made of a shape-memory alloy serves to actuate the actuating element 16 in an opening direction or stroke direction H. The SMA element 18 is held by a central section 18c on the actuating element 16, specifically at its first end section 16a. The SMA element 18 is arranged in a U-shape. For energizing, the SMA element 18 is electrically connected at its ends 18a and 18b to a circuit board 22, which is also arranged within the valve chamber 12.

[0027] The valve chamber 12 is divided into a flow chamber 24 and an actuation chamber 26, which are separated from each other by a partition 28, so that when the actuator 16 is actuated, the fluid flowing through the valve 2 or the valve chamber 12 flows only through the flow chamber 24. The flow chamber 24 is formed by the intermediate housing 8 and is closed at the bottom by the housing base 10. The actuation chamber 26 is also formed by the intermediate housing 8 and is closed at the top by the housing cover 6, thus reducing the number of components required.The actuating element 16 and the components required for actuating the actuating element 16, namely the SMA element 18, the return element 20 (which is either formed integrally with the actuating element 16 or, as in the second, third, and fourth embodiments, is formed by a separate spring), and the circuit board 22, are arranged within the actuating chamber 26. Uneven cooling of the SMA element 18 is prevented by the targeted guidance of the fluid flow and the provision of side walls 16e of the actuating element 16. The partition 28 is formed integrally with or molded onto the intermediate housing 8. The flow chamber 24 has a first region 24a and a second region 24b, which are connected to each other via a connecting channel 24c. This channel is closed when the actuating element 16 is in a closed position and opened when the actuating element 16 is in an open position.

[0028] To supply air to the valve chamber 12, more precisely to the flow chamber 24, its first section 24a is connected to an air supply unit or a pneumatic pump, or a - in Fig. One non-visible pressure connection, which is or will be connected to the pneumatic pump via a supply line, opens directly or indirectly into the first section 24a of the flow chamber 24. By opening the valve opening 14, the supplied air can flow from the first section 24a into the second section 24b via the connecting channel 24c or the valve chamber 12 and through the valve opening 14. The connecting channel 24c forms the actuation area, in particular also by an underside of the actuating element 16 and the sealing element 42. The valve 2 serves in particular to fill a media reservoir (not shown), for example, an air cushion of a vehicle seat with contour adjustment. For this purpose, the valve chamber 12, more precisely the flow chamber 24 or its second section 24b, is fluidically connected to a consumer connection 30.The consumer connection 30 opens into the second area 24b, so that the media storage unit can be connected to the valve 2 by means of hoses. In the illustrated embodiment, both the pressure connection and the consumer connection 30 are formed integrally with the intermediate housing 8 and do not protrude from it beyond an outer enclosing surface of the housing.

[0029] To keep the valve opening 14 in the closed position - as in Fig. As shown in Figure 1, to ensure reliable sealing, a first sealing element 42 is arranged on the end section 16a facing the valve opening 14. This sealing element closes the valve opening 14 and interacts with a sealing seat surrounding the valve opening 14. The sealing element 42 advantageously extends through a through-hole 19.

[0030] To control valve 2 and to supply current to the SMA element 18 in order to shorten it and thus actuate the actuator 16, the ends 18a, 18b are electrically connected to the circuit board 22 by means of a crimp connector 44. The ends 18a, 18b of the SMA element 18 are each fixed in a receptacle 46 of the crimp connector 44 and are thus indirectly contacted with the circuit board 22 via the crimp connectors 44. The crimp connectors 44 project laterally beyond the circuit board 22 perpendicular to the direction of movement B. Furthermore, the crimp connectors 44 extend in the stroke direction H from a top surface 22a of the circuit board 22 and parallel to this surface towards the housing base 8.The crimp connector 44 has in particular a rounded surface over which the ends 18a, 18b of the SMA elements 18 are deflected by an angle, preferably 90°, so that they are the section of the SMA elements which are received in the receptacle 46, perpendicular to a central section 18c of the SMA element 18.

[0031] The in Fig. The valve 2 shown in Figure 1 has a further valve opening, namely an opening 32, which connects the valve chamber 12 to the atmosphere to allow air to flow out of the valve chamber 12. An actuator 58 is arranged within the valve chamber 12, or within the flow chamber 24. This actuator is rotatably mounted on the valve housing 4 and is operatively connected to the actuating element 16. The actuator 58 has a second sealing element 60 on a section facing the opening 32 for closing the opening 32. At an end section facing the actuating element 16, the actuator 58 includes a switching finger 62, which is in contact with the actuating element 16 or rests against its first sealing element 42.When the actuator 16 is actuated and the valve opening 14 is opened, the switching finger 62 is also moved in the stroke direction by a return element 64, in this case a leaf spring, and the actuator 58 is thus rotated about its pivot point, so that the opening 32 is closed by the second sealing element 60. When the SMA element 18 is no longer energized and the actuator 16 is thus moved in the return direction R by the return element 20, the switching finger 62 is also moved in the return direction R by the actuator 16 or its first sealing element 42. This causes the second sealing element 60 to open the opening 32. The opening 32 to the atmosphere is therefore open when the actuator 16 is in the closed position and closed when the actuator 16 is in the open position. The first check valve 70 is also located in the second area 24b of the flow chamber 24.The first check valve 70 is designed to allow fluid to flow from a first region 24a of the flow chamber 24 through the valve opening 14 into the second region 24b of the flow chamber 24. Conversely, backflow from the second region of the flow chamber 24c through the valve opening 14 is prevented by the first check valve 70.

[0032] The third sealing element 72 is designed as a circular disc, preferably made of metal or elastomer. In the closed position of the check valve 70, the sealing element 72 rests on the valve seat 74, such that fluid flowing from the side of the valve seat 74 towards the valve opening 14 presses the sealing element 72 onto the valve seat 74. Conversely, fluid flowing from the side of the valve opening 14 pushes the third sealing element 72 away from the valve seat 74, thus opening the check valve 70 for this flow direction. The sealing element 72 can be movably mounted on the switching finger 62 or fixed in place.

[0033] When the actuator 16 is actuated and the valve opening 14 is opened, the switching finger 62 is also moved in the stroke direction by a return element 64, in this case a leaf spring, and the actuator 58 is thus rotated about its pivot point, so that the opening 32 is closed by the second sealing element 60. When the SMA element 18 is no longer energized and the actuator 16 is thus moved in the return direction R by the return element 20, the switching finger 62 is also moved in the return direction R by the actuator 16 or its sealing element 38. This, and the V-shaped pivot point 66 of the actuator 58, causes the second sealing element 60 to open the opening 32.The opening 32 to the atmosphere is thus open when the actuator 16 is in the closed position and closed when the actuator 16 is in the release position, ensuring that the second area 24b of the flow chamber 24 of the valve chamber 12, or a media reservoir, is always vented when the valve 2 is not actuated. The actuating chamber 26 is also connected to the first area 24a of the flow chamber 24 and, via that, to the pump. Such a valve is used, for example, in a vehicle seat with a massage function, where one or more air cushions are cyclically inflated and deflated.

[0034] Fig. Figure 2A shows a sectional view of an actuator according to a first embodiment. The actuator comprises an actuating element 16, which is arranged on and connected to a base plate 17. The actuating element 16 is connected to the base plate 17 over its entire surface in the second end section 16b.

[0035] The actuating element 16 has a first end section 16a and a second end section 16b. A central section 16c of the actuating element 16 extends between the two end sections 16a and 16b. In this central section, the actuating element 16 is bent in a stepped manner and includes an elastic section 16d. The elastic section 16d is located above the base plate 17. The elastic section 16d and the base plate 17 are arranged relative to each other in such a way that the elastic section 16d can bend. Bending of the elastic section 16d is limited by a stop of the actuating element 16 in a stop area 16f of the actuating element 16. By bending the elastic section 16d and mounting it on the base plate 17, a preload can be achieved.

[0036] In the first end section 16a of the actuating element 16, a sealing element 42 is arranged for closing and opening a valve opening 14. The first end section 16a of the actuating element 16 has a through-hole 19, e.g. a bore, in which the sealing element 42 is positively engaged.

[0037] The first end section 16a of the actuating element 16 also has side walls 16e which extend perpendicularly around the first end section of the actuating element 16a.

[0038] The base plate 17 has connectors 17a for connecting a printed circuit board 22. The printed circuit board 22 is positioned on the opposite side of the actuator 16 using the connectors 17a. The connectors 17a are designed as press-fit pins. A top surface 22a of the printed circuit board 22 thus faces the SMA element 18 and a bottom surface 22b faces the base plate 17.

[0039] A clamp is arranged on a side facing away from the first end section 16a of the actuating element 16, which encompasses a crimp connector 44. The crimp connector has a receptacle 46. An SMA element 18 is held at a first end 18a and a second end 18b by means of two parallel crimp connectors 44. The SMA element 18 extends from the crimp connector 44 in a U-shape to the first end section 16a of the actuating element. The SMA element is connected to the first end section 16a by a central section 18c of the SMA element 18 in such a way that a shortening of the SMA element 18 causes a stroke of the actuating element 16 from a closed position, cf. Fig. 2A, causes it to be in an open position.

[0040] Fig. Figure 2B shows a sectional view of an actuator in a second embodiment. In this embodiment, the actuating element 16 is rigidly designed. The base plate 17 and the actuating element 16 are connected to each other at a second end section 16b of the actuating element 16 via a hinge 23a, which is, for example, designed as a foil hinge. The position of the hinge 23a on the base plate 17 can be located below or adjacent to the circuit board 22. If the position of the hinge 23a is adjacent to the circuit board 22, the actuating element 16 expediently has only one angle. To return the actuating element 16 to a closed position, a return element 20 is provided in the illustrated embodiment as a leaf spring, the leaf spring pressing against a lower surface 22b of the circuit board. The return element 20 can be integrally formed with the actuating element 16.In this embodiment, the SMA element 18 is expediently connected to a first end 18a with a first contact in the area of ​​the crimp connector 44 and to a second end 18b with a second contact in the area of ​​the crimp connector 44. Fig. Figure 2C shows a third embodiment of the actuator. In this third embodiment, the return element 20 is replaced by a return element 21. The return element 21 is designed as a coil spring, which expediently acts against a valve housing wall. Alternative positions or spring designs are possible for resetting the actuator.

[0041] Fig. Figure 2D shows a sectional view of an actuator in a fourth embodiment. The fourth embodiment differs from the second and third embodiments in that the actuating element 16 is connected to the base plate via a bearing 23b in a second end section 16b. The bearing 23b can be configured, in particular, as an angle or a notch in which the second end section 16b of the actuating element is received. As in the second embodiment, the length of the second end section 16b of the actuating element 16, and thus the position of the bearing 23b along the base plate 17, can be configured differently. In the fourth embodiment, either a return element 20 or a return element 21 is provided.

[0042] Fig.Figure 3 shows a valve arrangement 100. A plurality of actuators 116 are arranged side by side with an intermediate housing. The openings 132 are arranged in a vent channel 176, so that the venting can be combined into a common vent channel. Sound attenuation can be integrated into such a vent channel. By providing only one opening to the atmosphere at the end of the vent channel, the ingress of dirt and / or moisture can be significantly reduced. Reference symbol list 2 valve 4 Valve housings 6 Housing covers 8 intermediate housings 10 Case bottom 12 Valve chamber 14 Valve opening 16 Actuator 16a first end section of the actuating element 16b second end section of the actuator 18 SMA elements 18a first end of the SMA element 18b second end of the SMA element 18c middle section of the SMA element 20 Return element (coil spring) 21 Return element 22 Circuit board 22a Top side of the circuit board 22b Underside of the circuit board 24 flow chamber 24a first area of ​​the flow chamber 24b second area of ​​the flow chamber 24c connection channel 26 Activity Chamber 28 Partition wall 30 Consumer connection 32 Opening 42 first sealing element 44 crimp connectors 46. ​​Mounting the crimp connector 58 Actuator 60 second sealing element 62 shift fingers 63 lead 64 Return element 70 first check valve 72 third sealing element 73 through hole 74 Valve seat 100 valve arrangement 106 Case covers 108 intermediate housings 110 Case base 116 Actuator 132 openings 176 Ventilation duct B Direction of movement of the actuating element H Lifting direction R Return direction

Claims

[1] Valve (2) with a valve housing (4), comprising a housing cover (6), a housing base (10) and an intermediate housing (8) arranged between the housing cover (6) and the housing base (10), wherein the valve housing (4) encloses a valve chamber (12) comprising a flow chamber (24) and an actuating chamber (26), wherein the valve housing (4) has at least one valve opening (14) leading from the flow chamber (24) into the actuating chamber (26), and wherein within the actuating chamber (26) at least one actuating element (16) movable between a closed position for closing the valve opening (14) and an open position for releasing the valve opening (14), which has a valve element at a first end and is connected at a second end to the valve housing (4) and / or a base plate, a wire- or strip-shaped SMA element (18) made of a shape memory alloy for actuating the actuating element (16) in the opening direction and a printed circuit board (22) are arranged, wherein the SMA element (18) is fixed to the actuating element (16) with a central section (18c) and is electrically connected to the circuit board (22) with its ends (18a, 18b) for the purpose of supplying current, wherein the SMA element (18) is bent in a U-shape in the central section (18c) or consists of two sections which are arranged in a U-shape without a U-bend, wherein the flow chamber (24) and the actuating chamber (26) are separated from each other by a partition (28) having the valve opening (14) in such a way that a fluid flowing through the valve (2) when the actuating element (16) is actuated is directed through the flow chamber (24), wherein a first area (24a) of the flow chamber (24) and a second area (24b) of the flow chamber (24) are connected to each other via the valve opening (14) and / or a connecting channel (24c), wherein the valve opening (14) and / or the connecting channel (24c) is closed in the closed position of the actuating element (16) and is released in the open position of the actuating element (16), wherein the first area (24a) of the flow chamber (24) is connected or connectable to an air supply unit for supplying air into the flow chamber (24) and wherein the second area (24b) of the flow chamber (24) is connected or connectable to a media storage unit and wherein the second area (24b) of the flow chamber (24) is connected or connectable to the atmosphere via an opening (32) for releasing air from the flow chamber (24), wherein within the second area (24b) of the flow chamber (24) an actuator (58) with a first end section and a second end section is arranged, which is rotatably mounted with the second end section on the valve housing (4) and is coupled in the area of ​​the first end section to the actuating element (16) in the area of ​​the first end of the actuating element (16) such that the opening (32) to the atmosphere is released when the actuating element (16) is in the closed position and the opening (32) is closed when the actuating element (16) is in the release position. [2] Valve (2) according to claim 1, wherein a first check valve (70) is provided in or on the valve opening (14), which, in the open position of the actuating element (16), prevents a backflow of fluid from the second area (24b) of the flow chamber (24) via the valve opening (14) into the first area (24a) of the flow chamber (24). [3] Valve (2) according to claim 2, wherein the actuator (58) comprises a switching finger (62) at an end section facing the actuating element (16), and the first check valve (70) is formed by a sealing element (72) arranged on the switching finger (62) and a valve seat (74) arranged in the partition (28). [4] Valve (2) according to claim 3, wherein the sealing element (72) is a plate-shaped element or a lip seal. [5] Valve (2) according to claim 3 or 4, wherein the sealing element (72) is made of metal, plastic or elastomer. [6] Valve (2) according to one of the preceding claims, wherein the second region of the flow chamber has an opening (32) to the atmosphere. [7] Valve (2) according to one of the preceding claims, wherein the partition (28) separating the flow chamber (24) and the actuating chamber (26) is formed by the intermediate housing (8). [8] Valve (2) according to one of the preceding claims, wherein actuating element (16) and actuating member (58) are arranged linearly. [9] Valve (2) according to one of the preceding claims, wherein the actuating element is designed as a bending spring which is rotationally fixed to the base plate or the actuating element is a lever element made of a bend-resistant material which is pivotably connected to the base plate. [10] Valve (2) according to one of the preceding claims, wherein the actuator (58) is reset by means of spring force, in particular by a leaf or coil spring (64), wherein the leaf or coil spring (64) is preferably arranged between the actuator (58) and a valve base (10). [11] Valve arrangement (100) with several valves (2) each designed according to one of the preceding claims, wherein the valve housings (4) enclosing the valve chamber (12) of a valve (2), in particular the intermediate housings and / or housing covers and / or housing bottoms, and / or circuit boards are formed in one piece. [12] Valve arrangement (100) according to claim 11, wherein the multiple valves (2) have a common pressure connection which opens into the valve space (12), in particular into the flow chamber (24), particularly preferably into the first region of the flow chambers (24) of the valves (2) or into a region comprising the first regions (24a) of the flow chambers (24), or is connected to the valve space (12), in particular the flow chamber (24), particularly preferably to the first region (24a) of the flow chambers (24) or to the region via at least one air duct (176), and wherein each valve (2) has a separate opening (32) for connecting to the atmosphere, which opens in particular into the second region (24b) of the flow chamber (24). [13] Valve arrangement (100) according to claim 11 or 12, wherein in an air duct (176) leading from the air supply unit to the flow chamber(s) (24) guide elements are arranged such that a fluid flowing into and / or through the flow chamber(s) (24) has a laminar flow.

Images