Circulating conveyor transport wheel, substrate carrier and process

Abstract

Circulating conveyor transport wheel (100), comprising: • a frame (102) on which the circulating conveyor transport wheel (100) can be rotatably mounted; • a plurality of coupling devices (104) arranged on an outer circumference of the frame (102) and each of which coupling devices has two superimposed positive locking contours (104f) for positive locking coupling of a substrate carrier (400), • wherein the plurality of coupling devices (104) comprises a pair (302) of coupling devices (104) whose positive locking contours are arranged offset from each other along the circumference and have a smaller distance from each other along the circumference than from the positive locking contours of the plurality of coupling devices (104) which are immediately adjacent to the pair (302).

Description

[0001] Various embodiments relate to a circulating conveyor transport wheel, a substrate carrier and a method.

[0002] In general, a substrate, such as a glass substrate, a metal substrate, and / or a polymer substrate, can be treated (processed), for example, coated, so that its chemical and / or physical properties can be modified. Various coating processes can be used to coat a substrate. For example, a vacuum coating system can be used to deposit one or more layers onto a substrate or multiple substrates using chemical and / or physical vapor deposition.

[0003] In principle, the substrate can be processed lying down or standing upright.

[0004] If the system needs to be particularly space-saving, a conventional vertical system uses a vertically oriented system, for example, a drum, to transport an upright substrate in a circular motion. The substrate cyclically passes through the same areas of the vertical system, where, for example, a coating process can take place. Such a vertical system is particularly space-saving because the drum, as the transport component, can be positioned in a very small space, and the processing components are arranged around it. However, a vertical system requires the drum to be loaded with a group of substrates, which is time-consuming, and then unloaded again after processing, which results in an interruption of operation.

[0005] If, however, a high throughput is required, a so-called in-line system is conventionally used, in which a stream of substrates is continuously transported through the entire in-line system, so that the loading and unloading processes take place simultaneously with the processing. For example, a coating process is carried out in one or more sections of the in-line system while the substrate is being transported through it. Reference is made to WO 2003 / 100 124 A1, DE 200 10 791 U1, DE 198 07 032 A1, and WO 2003 / 100 119 A1.

[0006] According to various embodiments, it has been clearly demonstrated that the concept of the in-line system, i.e., the sequential transport of a stream of substrates, can be combined with the concept of the vertical system, i.e., the cyclical transport of a group of substrates. This achieves a higher substrate throughput.

[0007] According to various embodiments, a circulating conveyor wheel, a substrate carrier, and a process are provided, enabling high throughput in a space-saving manner. Components and a process for a vertical system are clearly presented, allowing loading and unloading to occur simultaneously with processing in a very small space.

[0008] According to various embodiments, a circulating conveyor transport wheel can comprise: a frame on which the circulating conveyor transport wheel can be rotatably mounted; a plurality of coupling devices which are arranged on an outer circumference of the frame and of which each of the coupling devices has two positive-locking contours for positive-locking coupling of a substrate carrier, wherein the plurality of coupling devices comprises a pair of coupling devices whose positive-locking contours have a smaller distance from each other along the circumference than from the positive-locking contours of the plurality of coupling devices which are immediately adjacent to the pair.

[0009] According to various embodiments, a substrate carrier can have: several links which are connected to each other (e.g. in pairs) by means of a hinge; two slides arranged on opposite sides of the substrate carrier for guiding the substrate carrier along the transport path; wherein at least one of the two slides has a drive rod.

[0010] According to various embodiments, a method may comprise: coupling the substrate carrier to a circulating conveyor transport wheel which is arranged in a vacuum; uncoupling the substrate carrier from the circulating conveyor transport wheel which is arranged in the vacuum, wherein the coupling and uncoupling begin on the same side of the substrate carrier.

[0011] They show Fig. 1 to 3 each a circulating conveyor transport wheel according to different embodiments in different views; Fig. 4 to 8 each show a substrate carrier according to different embodiments in different views; Fig. 9 to 16 each show a circulating conveyor according to different embodiments in different views; Fig. 17A to 17H each represent a conveying arrangement according to different embodiments in a schematic top view; Fig. 18 to 25 each show a vacuum arrangement according to different embodiments in different views; Fig. 26 a substrate carrier according to various embodiments in a schematic cross-sectional view; Fig. 27 a conveying arrangement according to various embodiments in a schematic cross-sectional view; Fig. 28 and Fig. 29 each a vacuum arrangement according to different embodiments in different views; Fig. 30 a circulating conveyor in a process according to various embodiments in a schematic top view; Fig. 31 a conveying arrangement in a process according to various embodiments in a schematic top view; Fig. 32 and Fig. 33 each a method according to different embodiments in a schematic flowchart.

[0012] The following detailed description refers to the accompanying drawings, which form part thereof and illustrate specific embodiments in which the invention can be implemented. In this context, directional terminology such as "top," "bottom," "front," "back," "anterior," "rear," etc., is used with reference to the orientation of the described figure(s). Since components of embodiments can be positioned in a number of different orientations, the directional terminology serves only for illustration and is in no way limiting. It is understood that other embodiments may be used and structural or logical modifications may be made without deviating from the scope of protection of the present invention.It is understood that the features of the various exemplary embodiments described herein can be combined with one another, unless specifically stated otherwise. The following detailed description is therefore not to be interpreted in a limiting sense, and the scope of protection of the present invention is defined by the appended claims.

[0013] Within the scope of this description, the terms "connected," "connected," and "coupled" are used to describe both direct and indirect connections (e.g., resistive and / or electrically conductive), direct or indirect connections, and direct or indirect coupling. In the figures, identical or similar elements are designated with identical reference numerals where appropriate.

[0014] Depending on the specific embodiment, the term "coupled" or "coupling" can be understood as a connection and / or interaction (e.g., mechanical, hydrostatic, thermal, and / or electrical), whether direct or indirect. Several elements can, for example, be coupled along an interaction chain, along which the interaction (e.g., a signal) can be transmitted. For instance, two coupled elements can exchange an interaction, such as a mechanical, hydrostatic, thermal, and / or electrical interaction. Depending on the specific embodiment, "coupled" can also be understood as a mechanical (e.g., physical) coupling, for example, by means of direct physical contact. A coupling can be configured to transmit a mechanical interaction (e.g., force, torque, vibration, etc.).Coupling can be understood here as the act of establishing the coupling. Uncoupling can be understood here as the act of releasing the coupling.

[0015] The coupling of two components can involve, for example, bringing them into physical contact. Furthermore, the coupling of the two components can involve reducing their combined total degrees of freedom, for example, by blocking relative motion (e.g., translation and / or rotation) between the components (e.g., along and / or against one or more directions). This blocking of relative motion (also referred to as a blocked degree of freedom) can be achieved, for example, by positively engaging the two components.

[0016] Decoupled components can, for example, involve separating and / or removing them. Coupled components can, for example, involve increasing their combined total degrees of freedom, e.g., by allowing relative motion (e.g., translation and / or rotation) between the components (e.g., along and / or against one or more directions).

[0017] A positive-locking coupling (also known as a positive-lock coupling) can be achieved by the interlocking of two components. For example, the positive lock can be designed so that the two components cannot separate from each other, even without or when power transmission is interrupted. In essence, the positive lock ensures that one component obstructs the movement of the other, thus blocking their relative movement. To interlock, the two components have matching positive-lock contours (also referred to as a pair of positive-lock contours) that are designed for interlocking. For example, the positive-lock contours can correspond to each other, e.g., in contour size and / or profile.

[0018] If the pair of positive-locking contours has two coaxial cylindrical surfaces, the positive lock can block relative movement in all directions of the surface perpendicular to the cylinder axis. An example is a pin inserted into a hole that can be removed again. If the hole is blind, preventing the pin from falling through, a one-sided positive lock (also called a unidirectional positive lock) occurs in the axial direction. If the outer cylindrical surface is divided in half along the axial direction (i.e., along a surface containing the axial direction) and one of the halves is removed, the positive lock can block relative movement on both sides along a direction (also called a two-sided positive lock) that lies within the surface of the division, and on one side along a direction that lies perpendicular to the surface of the division.

[0019] A pin-shaped positive locking contour can also be provided by means of a rivet, a bolt, and / or a screw. The following refers, among other things, to a bolt for providing a positive locking contour. The description can also apply analogously to other bodies that provide the positive locking contour.

[0020] According to various embodiments, the positive-locking coupling can provide at least a two-sided positive lock (also referred to as bidirectional positive lock) (i.e., blocking relative movement along and opposite to the same first direction) and optionally at least an additional one-sided positive lock (i.e., blocking relative movement along a different second direction). Uncoupling can, in turn, release the relative movement. Where the blocking or releasing of multiple directions is referred to herein, these directions may be perpendicular to one another.

[0021] Control can be understood as the intentional influencing of a system. The current state of the system (also called the actual state) can be changed according to a specification (also called the target state). Regulation can be understood as control, but with the additional benefit of counteracting changes in the system's state caused by disturbances. Visually, control can have a forward-directed control path and thus implement a sequential control system that converts an input variable (e.g., the specification) into an output variable. However, the control path can also be part of a control loop, thus implementing a regulation system. In contrast to purely forward-directed sequential control, regulation involves a continuous influence of the output variable on the input variable, which is effected by the control loop (feedback).In other words, control can be used as an alternative or additional to control, or alternatively, regulation can be used in addition to control. The state of the system (also called the operating point) can be represented by one or more controlled variables, whose actual value represents the current state of the system and whose setpoint (also called the reference value) represents the desired state of the system. In control, the current state of the system (e.g., determined based on a measurement and / or by means of a sensor) is compared with the desired state of the system, and the one or more controlled variables are influenced by a corresponding manipulated variable (using an actuator) in such a way that the deviation of the actual state from the desired state of the system is minimized.

[0022] A sensor can be part of a measurement chain, which includes a corresponding infrastructure (e.g., a processor, storage medium, and / or bus system, or similar components). The measurement chain can be configured to control the sensor, process its measured value as input, and then provide an electrical signal as output that represents the current state of the input value at the time of measurement. The measurement chain can be implemented, for example, using a control device (e.g., a programmable logic controller - PLC).

[0023] The term "control device" can be understood as any type of logic-implementing entity that may, for example, have circuitry and / or a processor capable of executing software stored in a memory medium, firmware, or a combination thereof, and issuing instructions based on that software. The control device may be configured, for example, using code segments (e.g., software) to control the operation of a system (e.g., its operating point), such as a machine or plant, or at least its kinematic chain. The control device may, for example, be a programmable logic controller (PLC) or be derived from one.

[0024] The term "processor" can be understood as any type of entity that allows the processing of data or signals. The data or signals can, for example, be processed according to at least one (i.e., one or more than one) specific function performed by the processor. A processor can be an analog circuit, a digital circuit, a mixed-signal circuit, a logic circuit, a microprocessor, a central processing unit (CPU), a graphics processing unit (GPU), a digital signal processor (DSP), a programmable logic gate array (FPGA), an integrated circuit, or any combination thereof.Any other type of implementation of the respective functions, which are described in more detail below, can also be understood as a processor or logic circuit, for example, virtual processors (or a virtual machine) or a multitude of decentralized processors that are interconnected via a network, arbitrarily geographically distributed, and / or have arbitrary contributions to the implementation of the respective functions (e.g., workload distribution among the processors). The same generally applies to any differently implemented logic for implementing the respective functions. It is understood that one or more of the process steps described in detail herein can be executed (e.g., realized) by a processor through one or more specific functions executed by the processor.

[0025] The term "actuator" (also referred to as actuator) can be understood as a component designed to influence a mechanism or process in response to a control signal. The actuator can translate instructions issued by the control device (the so-called actuation) into mechanical movements or changes in physical quantities such as pressure or temperature. For example, an electromechanical converter can be configured to convert electrical energy into mechanical energy (e.g., through movement) in response to a control signal.

[0026] By means of a substrate carrier described herein, one or more substrates can be held and transported (e.g., per link). The substrate can have a width ranging from approximately 50 cm (centimeters) to approximately 500 cm, or a width greater than approximately 500 cm. According to various embodiments, the substrate can comprise or be formed from at least one of the following: a ceramic, a glass, a semiconductor (e.g., amorphous, polycrystalline, or monocrystalline semiconductor, such as silicon), a metal, and / or a polymer (e.g., plastic). For example, the substrate can be a plastic film, a wafer (a semiconductor substrate), a metal foil, a metal sheet, or a glass plate, and may optionally be coated.

[0027] According to various embodiments, processing (also referred to as treatment) of a substrate can include at least one of the following: cleaning the substrate, coating the substrate, irradiating (e.g. by means of light, UV light, particles, electrons, ions, etc.) the substrate, modifying the surface of the substrate, heating the substrate, etching the substrate, and glowing the substrate.

[0028] A coating material with which the substrate can be coated may comprise or be formed from at least one of the following materials: a metal; a transition metal; an oxide (e.g., a metal oxide or a transition metal oxide); a dielectric; a polymer (e.g., a carbon-based polymer or a silicon-based polymer); an oxynitride; a nitride; a carbide; a ceramic; a metalloid (e.g., carbon); a perovskite; a glass or glass-like material (e.g., a sulfide glass); a semiconductor; a semiconductor oxide; a semi-organic material; and / or an organic material.

[0029] Within the scope of this description, a metal (also referred to as a metallic material) can contain (or be formed from) at least one metallic element (i.e., one or more metallic elements), for example, at least one element from the following group of elements: copper (Cu), iron (Fe), titanium (Ti), nickel (Ni), silver (Ag), chromium (Cr), platinum (Pt), gold (Au), magnesium (Mg), aluminum (Al), zirconium (Zr), tantalum (Ta), molybdenum (Mo), tungsten (W), vanadium (V), barium (Ba), indium (In), calcium (Ca), hafnium (Hf), samarium (Sm), silver (Ag), and / or lithium (Li). Furthermore, a metal can contain or be formed from a metallic compound (e.g., an intermetallic compound or an alloy), for example, a compound of at least two metallic elements (e.g., from the group of elements), such as bronze or brass, or, for example, a compound of at least one metallic element (e.g.,from the group of elements) and at least one non-metallic element (e.g., carbon), such as steel. Optionally, the metal may contain alloying elements (whose mass fraction is less than 10%, e.g., individually or in total), e.g., chromium, silicon, molybdenum, nickel, vanadium, carbon, manganese, phosphorus, sulfur, tin, zinc.

[0030] In this context, a gear can be understood as any essentially round body that has a multitude of drive teeth arranged along its circumference. The gear may, for example, be a toothed disc, a spur gear, a pinion gear, or a ring gear. A toothed section can be provided by the gear, such as a pinion gear. A pinion gear is a special case of cycloidal gearing where the rolling circle and pitch circle are equal. The toothing can be straight (i.e., parallel to the axis), helical (helical gearing), or curved. The size of the toothing is determined by the module (also called the pitch). The mating gear or rack can have toothing of the same module as the gear.

[0031] If two components are offset from each other along a path or direction, this can be understood as meaning that the two components, projected onto a surface perpendicular to the path or direction, are arranged side by side or only partially overlapping (not coincident). For example, the two components may be spaced apart along a direction perpendicular to the path or direction.

[0032] Fig. Figure 1 illustrates a circulating conveyor transport wheel 100 according to various embodiments in a schematic perspective view.

[0033] The circulating conveyor wheel 100 has a frame 102 on which the circulating conveyor wheel can be rotatably mounted, and a plurality of coupling devices 104 which are arranged on an outer circumference 102u of the frame 102. The corresponding axis of rotation 151 can be parallel to the direction 105. In operation of the circulating conveyor wheel 100, the direction 105 can, for example, be opposite to a direction of gravity, i.e., along a vertical (also referred to as the vertical direction).

[0034] The plurality of coupling devices 104 can, for example, have at least 4 coupling devices 104, e.g. at least 6 coupling devices 104, e.g. at least 8 coupling devices 104, e.g. at least 10 coupling devices 104, e.g. at least 16 coupling devices 104, e.g. at least 20 coupling devices 104, e.g. at least 26 coupling devices 104.

[0035] The height 201h (extent along the axis of rotation 151 of the circulating conveyor wheel 100) of the circulating conveyor wheel 100 can be in a range from approximately 0.5 m to approximately 2 m (meters), e.g., in a range from approximately 1 m to approximately 1.5 m. Alternatively or additionally, the diameter 201d (extent transverse to the axis of rotation 151 of the circulating conveyor wheel 100) of the circulating conveyor wheel 100 can be in a range from approximately 1 m to approximately 5 m (meters), e.g., in a range from approximately 2 m to approximately 3 m.

[0036] Fig. Figure 2 illustrates a circulating conveyor wheel 100 according to various embodiments 200 in a schematic detail view of one of the coupling devices 104. Each of the coupling devices 104 can have one or more positive-locking contours 104f (also referred to as receiving points) for positive-locking coupling of a substrate carrier. In the illustrated example, the coupling device 104 can have a fork which has a (e.g., cylindrical) recess, the outer boundary of which provides the positive-locking contour 104f. The recess can, for example, provide a concave bulge as the positive-locking contour 104f. The recess can extend into the fork towards the interior of the circulating conveyor wheel 100, e.g., towards its axis of rotation.

[0037] The following refers, by way of example, to a coupling device 104 with a fork. The description can, of course, apply analogously to coupling devices 104 configured differently. For example, the coupling device 104 may have a bolt instead of, or in addition to, the fork. For example, the coupling device 104 may have a convex curve instead of, or in addition to, the concave curve. However, the positive locking contour 104f does not necessarily have to be curved. For example, the positive locking contour 104f may also be angled.

[0038] In the exemplary embodiments 200 illustrated here, the fork 104 can protrude from the frame 102 or from the circumference 102u of the frame 102. The circumference 102u of the frame 102 can be the circumference of a circle having the diameter of the frame 102. The circumference 202u of the circulating conveyor wheel 100 can accordingly be larger and be the circumference of a circle having the diameter 201d of the circulating conveyor wheel 100.

[0039] The positive locking contour 104f can optionally be configured such that a counter-coupling device of the substrate carrier (also referred to as the coupling device of the substrate carrier), when joined to the coupling device 104 of the circulating conveyor transport wheel, can be rotated relative to the positive locking contour 104f, thus providing a pivot joint. This facilitates the coupling and uncoupling of the substrate carrier, as will be described in more detail later.

[0040] The form-fitting contour 104f can, for example, be cylindrically curved. For instance, the recess can have the shape of a cylinder (or part thereof), such that the form-fitting contour 104f runs along its lateral surface. The cylinder can, for example, have a cylindrical axis along the axis of rotation 151. The cylinder can, for example, be a circular cylinder or have a base of a different shape.

[0041] Alternatively or additionally, the form-fit contour 104f can be provided, for example, by means of a surface of revolution or a segment thereof. The surface of revolution can be a surface created by rotating a planar curve around a straight line lying in the same plane. The straight line can be along the axis of rotation 151.

[0042] Fig. Figure 3 illustrates a circulating conveyor transport wheel 100 according to various embodiments 300 in a schematic side view or cross-sectional view. The plurality of coupling devices 104 can comprise several first coupling devices which (e.g., their positive-locking contours) are spatially separated from one another along the circumference (e.g., the circumference of a circle), i.e., have a distance 301d from one another. The direction of the circumference (e.g., the circumference of a circle) can be along one of the closed circular paths that lies in the area 101, 103. The directions 101, 103 can be transverse to the direction of gravity during operation of the circulating conveyor transport wheel 100, i.e., span a horizontal area.

[0043] In simpler terms, the distance can be measured along the circumference, that is, along a (e.g., circular) path that runs along the circumference and whose length corresponds to the circumference. Put another way, the distance can be the circumference projected onto the circumference or the path. The direction of the circumference then runs, for example, clockwise or counterclockwise and follows the path. In cylindrical coordinates (r, z, φ), the circumference or the path runs along a line where z = constant and r = constant. The distance then corresponds to the length of the circular arc b spanned between the form-fit contours (i.e., whose ends lie on the form-fit contours), where b = π·rφ ij / 180° is (in degrees). The angle φ ijThis then denotes the angle spanned between the i-th and j-th positive-locking contours. The distance between the positive-locking contours can also be zero, for example, if they are arranged directly above one another.

[0044] The circulating conveyor transport wheel 100 can have one or more than one pair of levels, each comprising two levels 114, 124 (referred to as a pair of levels). The two levels 114, 124 of each pair of levels 114, 124 and / or multiple pairs of levels 114, 124 can be arranged one above the other with respect to the axis of rotation 151, i.e., arranged one behind the other in the direction 105. For the sake of simplicity, the following refers to one of the pairs of levels. The description can also apply analogously to multiple pairs of levels.

[0045] The positive locking contours 104f of the several first coupling devices 104 can be arranged in a first plane 114 of the plane pair 114, 124.

[0046] The plurality of coupling devices 104 can comprise at least one (i.e., one or more than one) pair 302 coupling devices (also referred to as a coupling device pair 302), comprising a first coupling device of the plurality of first coupling devices and a second coupling device of the plurality of coupling devices 104. For example, the plurality of coupling devices 104 can comprise at least one (i.e., one or more than one) second coupling device whose positive-locking contour 104f is arranged in a second plane 124 of the plane pair 114, 124. In other words, with respect to the axis of rotation of the circulating conveyor transport wheel 100, the positive-locking contour 104f of the or every second coupling device 104 can be arranged in the second plane 124 of the plane pair 114, 124.

[0047] The positive locking contours of the pair 302 coupling devices can be arranged side by side (e.g., one above the other) with respect to the circumferential direction or, e.g., projected along the axis of rotation 151, overlap each other. More generally, the distance between the positive locking contours 104f of the pair 302 coupling devices, measured along the circumference, can be smaller than the distance 301d between the positive locking contours 104f of the first plane 114 of the plane pair 114, 124.

[0048] This ensures that the area of ​​the pair of 302 coupling devices has several positive-locking contours in different planes 114, 124, so that the facing sides of different substrate carriers (their so-called end faces) can be coupled as close together as possible. This ensures that the repeat of the substrate carriers is maintained as precisely as possible, so that they can be arranged in the most space-saving way. To illustrate, two different substrate carriers can be coupled using the pair of 302 coupling devices so that they lie against each other as seamlessly as possible.

[0049] Furthermore, the first and second coupling devices of the pair 302 coupling devices can be configured such that coupling and uncoupling can be carried out independently of each other using the first and second coupling devices. This allows the substrate carriers to be wound and unwound sequentially, for example, starting with one end of the substrate carrier and ending with the other. The first end of the substrate carrier can be opposite the second end of the substrate carrier.

[0050] Fig. Figure 4 illustrates a substrate carrier 400 according to various embodiments in a schematic side view (viewed perpendicular to the transport direction). The substrate carrier 400 can have several links 402 (also referred to as carrier links) which are connected to each other (e.g., in pairs) by means of a hinge 404. The hinge can be understood as the sum of all components that couple two immediately adjacent links 402 together in such a way that they can be rotated relative to each other. For example, the hinge can have several spatially separated hinge segments 404a, 404b, each of which couples the two immediately adjacent links 402 together. Each of the hinge segments 404a, 404b can, for example, have a hinge pin.

[0051] The links 402 can be arranged one behind the other along the transport direction 111 of the substrate carrier 400.

[0052] The substrate carrier 400 can furthermore have two opposing end faces 400a, 400b (also referred to as first end face and second end face). The first end face 400a can, for example, be the end face of a first carrier member 402 (also referred to as front carrier member 402) and the second end face 400b can, for example, be the end face of a second carrier member 402 (also referred to as rear carrier member 402).

[0053] For example, the substrate carrier 400 can have at least two elements 402, e.g., at least three elements 402, e.g., at least four elements 402. Alternatively or additionally, the substrate carrier 400 can have a maximum of seven elements 402, e.g., a maximum of five, e.g., a maximum of four, e.g., a maximum of three elements 402.

[0054] More generally, the substrate support 400 can have a number of g = 1 + n elements 402, where n is a natural number greater than zero. Accordingly, in addition to the general three translational degrees of freedom and three rotational degrees of freedom, the substrate support 400 can also have n degrees of freedom provided by means of the hinges.

[0055] Each hinge 404 allows two adjacent links 402 to be movably arranged relative to each other, which facilitates the winding of the substrate carrier 400 onto the circulating conveyor wheel 100 and the corresponding unwinding. The axis of rotation 404d of the hinge or hinges (also referred to as the hinge axis of rotation 404d) can, for example, run along direction 105 when the substrate carrier 400 is coupled to the circulating conveyor wheel 100.

[0056] Each of the links 402 can have a frame 408 (also referred to as a support frame 408) which can support one or more substrates. For example, three or more substrates can be supported by means of three links 402. For this purpose, each of the links 402 (e.g., for each substrate to be held) can have a substrate holding device on the support frame 408 for holding a substrate.

[0057] Furthermore, the substrate carrier 400 can have several coupling devices 414 (also referred to as counter-coupling devices 414). The multiple coupling devices can have at least one first counter-coupling device 414 and at least one second counter-coupling device 414 per link 402. For example, the multiple coupling devices can have a number k=1+g counter-coupling devices 414.

[0058] Each of the mating coupling devices 414 can have one or more positive locking contours corresponding to the positive locking contour 104f of the coupling devices 104. The corresponding positive locking contours can be configured for positive interlocking.

[0059] In the illustrated example, each of the counter-coupling devices 414 can have one or more bolts that can fit into the recess 104f of a fork 104. Each bolt (its outer boundary) provides a positive locking contour of the counter-coupling devices 414 (also referred to as the counter-positive locking contour). For example, a bolt can provide a convex bulge as a counter-positive locking contour. The bulge can be curved towards the interior of the circulating conveyor transport wheel 100, e.g., towards its axis of rotation.

[0060] The following refers, by way of example, to a mating coupling device 414 with one or more bolts. Each bolt can enable a fork-bolt connection with a fork of the coupling device 104. The description can, of course, apply analogously to a differently configured mating coupling device 414, e.g., a differently configured projection that provides the mating positive-locking contour. For example, the mating coupling devices 414 and the coupling device 104 can also enable a different positive-locking connection, e.g., a tongue-and-groove connection or a ball-head-recess connection.

[0061] In general, the counter-coupling device 414 can have a concave curvature as a counter-form-lock contour, either as an alternative or in addition to the convex curvature. However, the counter-form-lock contour does not necessarily have to be curved. For example, the counter-form-lock contour can also be angled.

[0062] Each of the counter-coupling devices 414 can be configured such that, when joined with the coupling device 104, it can be rotated relative to the coupling device 104, thus providing a swivel joint. This facilitates the coupling and uncoupling of the substrate carrier 400.

[0063] The mating form-lock contour can, for example, be cylindrically curved. For instance, the projection of the mating coupling devices 414 (e.g., the bolt) can have the shape of a cylinder (or part thereof), such that the mating form-lock contour runs along its lateral surface. The cylinder can, for example, have a cylindrical axis along the hinge axis of rotation. The cylinder can, for example, be a circular cylinder or have a differently shaped base.

[0064] Analogous to the multiple levels of the circulating conveyor wheel 100, the substrate carrier 400 can have several levels arranged one or more than one pair of levels above one another with respect to the hinge axis of rotation, each level having at least one of the multiple counter-positive locking contours. For example, two or more first counter-positive locking contours can be arranged in a first level of each pair of levels or configured to engage with the first coupling devices of the circulating conveyor wheel 100. For example, at least one second counter-positive locking contour can be arranged in a second level of each pair of levels or configured to engage with the at least one second coupling device of the circulating conveyor wheel 100.

[0065] In the embodiments described below, the bolts of the counter-coupling device 414 can be provided by means of the hinges 404, e.g., by means of the hinge bolts of the hinges 404 (then also referred to as hinge bolts), e.g., by means of the hinge bolts of the hinge segments 404a, 404b. This simplifies the design. The hinge bolt can, for example, be provided as a hinge pin (i.e., have a thickened end section).

[0066] The number and shape of the links 402 can be arranged such that a first extension of the substrate support 400 along the transport direction 111 (also referred to as length) is essentially equal to a second extension along direction 105 (i.e., transverse to the transport direction 111). In other words, these extensions can differ from each other by less than 20%. For example, the ratio of length to height (also referred to as aspect ratio) can be essentially 1 (i.e., in a range from approximately 0.8 to approximately 1.2). This reduces the risk of the substrate support 400 tilting (also referred to as the drawer effect).

[0067] For example, the length can be in a range from approximately 1 m (meter) to approximately 1.5 m, e.g. approximately 1.3 m.

[0068] According to embodiment 400, the coating window can be retained, as many links as possible (also called carrier links) can be inserted and removed at one time (which saves time), and / or fewer drive devices are required.

[0069] Fig. Figure 5 illustrates a substrate carrier 400 according to various embodiments 500 in a schematic side view.

[0070] The substrate carrier 400, e.g., each of the links 402, can have at least one or more slides 406 (also referred to as rail slides). For example, the substrate carrier 400 (e.g., each of the links 402) can have two slides 406 arranged on opposite sides (also referred to as the top and bottom) of the substrate carrier 400. The substrate carrier can be guided along the transport path by means of the slide(s) 406.

[0071] Each slide (e.g., per link) can have a pinion. A pinion is a machine element in drive technology, as will be described in more detail later. Visually, the pinion is a simplified form of a rack. In a pinion, the drive teeth of the rack are provided by means of pins. The following description refers specifically to the pinion. However, what is described for the pinion can also be applied analogously to a differently configured rack or a differently configured machine element with a multitude of drive teeth. The pinion enables a precise feed motion. The pinion allows for more precise transport of the substrate carrier, which facilitates the winding of the substrate carrier 400 onto the circulating conveyor wheel 100 and the corresponding unwinding from it.

[0072] Each carriage 406 (e.g., per link) can have a pair 410 rotatably mounted rollers (also referred to as a roller pair). The roller pair 410 can facilitate the coupling and / or uncoupling of the substrate carrier 400, as will be described in more detail later. For example, a roller pair 410 can be arranged between each of two support frames 408.

[0073] The position of the roller pairs 410 further facilitates the coupling and / or uncoupling of the substrate carrier 400, as the forces are maximized. For example, the axis of rotation of one roller of the roller pair 410 can be aligned with the axis of rotation of a hinge 404 (also referred to as the hinge axis of rotation). Alternatively or additionally, a gap can be arranged between the rollers of a roller pair 410, extending along the hinge axis of rotation between the two rollers.

[0074] If the substrate carrier 400 is set up for an aspect ratio greater than 1, the resulting increased length can make winding under process conditions difficult. Furthermore, using exactly one link chain that extends around the circulating conveyor wheel 100 would require very large lock chambers. A large number of short substrate carriers with an aspect ratio of less than 1 tend to jam and require a high number of lock cycles, which in turn is time-consuming. An aspect ratio of essentially 1 achieves the shortest possible loading and unloading times.

[0075] The substrate carrier 400 can be bent or folded using the hinges 404. Optionally, each hinge 404 can have a stop that limits the angle of the hinge (around which it can be rotated). This prevents the substrate carrier from folding unintentionally.

[0076] The hinges 404 can optionally provide the bolts of the counter-coupling devices 414 (hinge bolts) for coupling to the circulating conveyor wheel 100. The pin 702 of each hinge 404 can optionally have a bearing sleeve to minimize wear during coupling to and uncoupling from the circulating conveyor wheel 100. This allows the hinges to be used as a receptacle for the circulating conveyor wheel 100 (also referred to simply as the drum 100). The pivot point, guidance, and fixing along the same line prevent the generation of undesirable torques and thus prevent tilting.

[0077] Fig. Figure 6 illustrates a substrate carrier 400 according to various embodiments 600 in a schematic cross-sectional view (viewed in the direction of transport).

[0078] The drive rod 652 can, for example, have a rack with two side walls 516 (e.g., plates) that are drilled at regular intervals and connected by bolts inserted into the holes (e.g., welded or screwed in). A drive rod 652 can be visualized as a ladder. The teeth of a gear can engage between the bolts 502, thus forming a positive connection with the drive rod 652. When the gear is rotated, a translation can be transmitted to the drive rod 652.

[0079] The drive stock 652 can have a variety of bolts, each of which optionally has a swivel bearing. The swivel bearing can, for example, have a bolt shaft 504 (e.g., made of metal) on which a sleeve 506 (also referred to as a bearing sleeve) is mounted. The sleeve can, for example, be made of or formed from a plastic, or at least a material that is more elastic and / or softer than the bolt shaft 504.

[0080] For example, a bolt shaft 504 of the drive rod 652 can have one or more threads and be screwed into one of the side walls 516 or into a nut located behind it. Alternatively or additionally, a bolt shaft 504 can have a thickening (e.g., a head) that is larger than a through-opening in the side walls 516, so that it does not slip through the side wall.

[0081] The pivot bearing of the 652 drive shaft can, for example, be a plain bearing. This simplifies the design.

[0082] A gap 410s can be formed between the rollers of the roller pair 410, into which a switch can engage, as will be described in more detail later. The rollers of the roller pair 410 can be spaced apart from each other along a direction transverse to the transport direction 111 and / or transverse to the hinge pivot axis 404d.

[0083] The or each counter-coupling device 414 can have one or more bolts, each bolt optionally having a pivot bearing. The pivot bearing can, for example, have a bolt shaft 702 (e.g., made of metal) on which a sleeve 414h (also referred to as a bearing sleeve) is mounted. The sleeve 414h can, for example, be made of or formed from a plastic, or at least a material that is more elastic and / or softer than the bolt shaft 702. The bolt shaft 702 can be provided by means of a hinge pin. This simplifies the design.

[0084] The rotary bearing of the or any counter-coupling device 414 can, for example, be a plain bearing. This simplifies the design.

[0085] Fig. Figure 7 illustrates a schematic perspective view of the upper surface of a substrate carrier 400 according to various embodiments 700, which is shown with substrates 752 held in place. The rollers of a roller pair 410 can be arranged above a gap formed between two immediately adjacent frames 408.

[0086] On the front side of the substrate carrier 400, one or more than one second counter-coupling device 414 can be arranged, one of which an upper second counter-coupling device 414 is shown.

[0087] For example, every second or all of the counter-coupling devices 414 may be provided in the form of a clamp. A clamp may have an L-shaped connecting element which has a protruding bolt.

[0088] Alternatively, the or every second counter-coupling device 414 can be provided, for example, by means of a component of a hinge (for example, as a hinge pin) which has the pin 702 (also referred to as a hinge pin). This reduces the number of different components.

[0089] The bolt of the counter-coupling device 414 can be tapered. This simplifies coupling, for example, by means of a locking device (e.g., a coupling latch), as will be described in more detail later. For example, the side walls of the bolt can meet at an angle. The angle can be, for example, in a range of approximately 1° to approximately 10°, e.g., 3° ​​or less. This achieves self-locking. For example, the bolt of the counter-coupling device 414 can be projectile-shaped (e.g., having a point).

[0090] Fig. Figure 8 illustrates a schematic perspective view of the underside of a substrate carrier 400 according to various embodiments 800, analogous to embodiments 700, which is shown with substrates 752 held in place. One or more than one second counter-coupling device 414 can be arranged on the end face of the substrate carrier 400, one of which, a lower second counter-coupling device 414, is shown. The lower second counter-coupling device 414 can be configured analogously to that described with regard to embodiments 700.

[0091] The following refers to the substrate carrier 400 and / or the recirculating conveyor transport wheel 100 in the context of more complex assemblies, such as a recirculating conveyor, a conveying arrangement, or a vacuum arrangement. It should be understood that the substrate carrier 400 or the recirculating conveyor transport wheel 100 can also be provided separately, i.e., they do not necessarily have to be part of the more complex assembly, and / or can be provided or be provided arranged in a vacuum chamber. The same applies analogously to the recirculating conveyor and the conveying arrangement.

[0092] Fig. Figure 9 illustrates a circulating conveyor 900 according to various embodiments in a schematic perspective view. The circulating conveyor 900 can include the conveyor transport wheel 100 and a bearing arrangement (here hidden) which rotatably supports the conveyor transport wheel 100. Furthermore, the circulating conveyor 900 can include a drive device (e.g., a motor) configured to transmit rotation to the conveyor transport wheel 100.

[0093] The frame 102 can have one or more rings 904 and several spokes 906 per ring 904. Furthermore, the frame 102 can have a hub 902 connected to the spokes 906. This design reduces the weight. The hub 902 can be supported by or include a bearing arrangement. For example, the bearing arrangement can include or be formed from one or more pivot bearings (e.g., thrust bearings).

[0094] The circulating conveyor transport wheel 100 and the substrate carrier 400 can be arranged in such a way that several substrate carriers 400 fit one after the other on the circulating conveyor transport wheel 100, e.g. at least two substrate carriers 400, e.g. at least three substrate carriers 400, e.g. at least four substrate carriers 400, e.g. at least five substrate carriers 400, e.g. at least six substrate carriers 400, e.g. at least seven substrate carriers 400, e.g. at least eight substrate carriers 400.

[0095] For example, eight substrate carriers 400, each with three sections, can be used, achieving a good compromise between plant size and lock time.

[0096] Fig. Figure 10 illustrates a circulating conveyor 900 according to various embodiments 1000 in a schematic perspective view, where a portion of the circulating conveyor transport wheel 100 is unoccupied. A pair of coupling devices 302 can be arranged at the positions where a substrate carrier 400 begins and ends. In other words, the distance between adjacent pairs of coupling devices 302, measured along the circumference, can correspond to the length of the substrate carrier 400 (e.g., substantially correspond to its length).

[0097] For example, the circulating conveyor transport wheel 100 can have a pair of coupling devices 302 per substrate carrier 400. Alternatively or additionally, the circulating conveyor transport wheel 100 can have one of the equidistantly arranged first coupling devices 104 per link of the substrate carrier 400.

[0098] Fig. Figure 11 illustrates a circulating conveyor 900 according to various embodiments 1100 in a schematic perspective view. Each of the coupling devices 104 can have a locking device 1102. Generally speaking, each locking device 1102 can be changed between at least two states (also referred to as locking states) to lock or release the coupling with the substrate carriers 400 (i.e., the locking is formed and released). Once the coupling between a coupling device and the mating coupling device is locked, it cannot be easily released, e.g., without releasing the locking mechanism.

[0099] The locking device 1102 can, for example, have a bracket which is configured to engage the bolt of the mating coupling devices 414. In the following, a bracket is used as an example of a locking device 1102. The bracket can enable a bracket-bolt locking mechanism. The description above can, of course, apply analogously to a differently configured locking device 1102.

[0100] For example, the locking device 1102 can also include an electromagnet for magnetic locking or a coupling latch (e.g., a hook latch, a lock latch, a slant latch), a bolt, a pin, or the like. For example, the locking device 1102 can also be part of the substrate carrier.

[0101] A coupling latch can, for example, be configured such that the coupling locks automatically when (in response to) the coupling is established (i.e., coupling occurs), or when the coupling latch is located in a defined position, or at least exposed to a defined environment. A locking mechanism, as will be described in more detail later, can be used to establish and release the lock.

[0102] The bracket 1102 can, for example, be slidably mounted 1102r so that it can be moved between two positions. In a first position, the bracket 1102 can engage the bolt of the counter-coupling device 414. In a second position, the bracket 1102 can be arranged at a distance from the bolt of the counter-coupling device 414 (e.g., positioned above it) so that the bolt is released.

[0103] Fig. Figure 12 illustrates a circulating conveyor 900 according to various embodiments 1200 in a schematic perspective view. The circulating conveyor 900 can have one or more than one pair of levels 114, 124, of which a lower pair of levels is shown according to embodiments 1200.

[0104] The coupling device pair 302 can comprise two coupling devices 104 whose positive-locking contours 104f are arranged one above the other, e.g., one behind the other along direction 105 or side by side along the circumference. In other words, the positive-locking contours 104f of the coupling device pair 302 can overlap along direction 105, e.g., be congruent.

[0105] The coupling device pair 302 can have one of the first coupling devices 104, which has a positive locking contour 104f in the first plane 114 of the plane pair 114, 124 for each pair of planes 114, 124. The coupling device pair 302 can have a second coupling device 104 for each pair of planes 114, 124, which has a positive locking contour 104f in the second plane 124 of the plane pair 114, 124.

[0106] An additional coupling device 104 can be arranged at a distance from the coupling device pair 302, which has a positive locking contour 104f per plane pair 114, 124, which is arranged in the first plane 114 of the plane pair 114, 124.

[0107] Each of the coupling devices 104 can have a locking device 1102, which can be changed (e.g., repositioned) between two locking states. The locking devices 1102 are shown in the first locking state (i.e., the locking device is closed), in which a locking of the positively coupled substrate carrier 400 is achieved by placing the bracket of the locking device 1102 over the bolt of the second counter-coupling device 414.

[0108] In general, each of the coupling devices 104 can have a locking mechanism 1202 which is configured to move the locking device 1102 of the coupling device 104 from the first locking state to the second locking state (also referred to as open) or vice versa (also referred to as closed) (e.g., to shift it). The locking mechanism 1202 can, for example, have a linkage configured to transmit a translation to the bracket 1102.

[0109] The circulating conveyor 900 can also have a raised section (e.g., a ramp), as will be described in more detail later. The linkage 1202 can, for example, be brought into contact with the raised section by means of the rotary motion of the circulating conveyor's transport wheel, so that the linkage 1202 is displaced by the raised section and thus moved against its own weight. The weight force acting on the linkage 1202 during operation can cause translation in the opposite direction. The movement of the linkage can be transferred to the bracket, causing it to be moved vertically upwards or downwards.

[0110] The rod can optionally have a roller at its lower end. The roller facilitates sliding down the elevation.

[0111] The following refers, by way of example, to a locking mechanism 1202 with a linkage. The linkage can facilitate purely mechanical actuation of the locking device 1102, which simplifies the design and makes it less prone to failure. The description can, of course, apply analogously to a differently configured locking mechanism 1202. For example, the locking mechanism 1202 can also have one or more actuators configured to move the locking device 1102 of the coupling device 104 from the first state to the second state, or vice versa. Alternatively or additionally, the locking mechanism 1202 can have a gearbox that transmits a movement to the locking device 1102.

[0112] Fig. Figure 13 illustrates a circulating conveyor 900 according to various embodiments 1300 in a schematic perspective view. The circulating conveyor 900 can have one or more than one pair of levels 114, 124, of which, according to embodiments 1300, an upper pair of levels is shown. For example, the circulating conveyor 900 according to embodiments 1200 can have two pairs of levels 114, 124, each of which can have one or more positive-locking contours.

[0113] The coupling device pair 302 can have one of the first coupling devices 104, which has a positive locking contour 104f in the first plane 114 of the plane pair 114, 124 for each pair of planes 114, 124. The coupling device pair 302 can have a second coupling device 104 for each pair of planes 114, 124, which has a positive locking contour 104f in the second plane 124 of the plane pair 114, 124.

[0114] An additional coupling device 104 can be arranged at a distance from the coupling device pair 302, which has a positive locking contour 104f per plane pair 114, 124, which is arranged in the first plane 114 of the plane pair 114, 124.

[0115] Each of the coupling devices 104 can, for example, have two positive locking contours 104f, one of which is arranged in a first pair of planes and the other positive locking contour 104f in a second pair of planes (e.g., arranged one above the other). This stabilizes the substrate carrier better.

[0116] Each of the coupling devices 104 can have one locking device 1102 per pair of levels, as described above. For example, one locking device 1102 can be provided for each of the two positive-locking contours 104f of the coupling device 104. The two locking devices 1102 can be coupled by means of the same linkage, e.g., such that they are simultaneously changed between the first state and the second state.

[0117] For example, the first coupling device 104 of the coupling device pair 302 can have a lower positive locking contour 104f in the first plane 114 (cf. Fig. 12) of the lower pair of levels and have an additional first form-locking contour 104f in the additional first level 114 (cf. Fig. 13) of the upper plane pair. Furthermore, the second coupling device 104 of the coupling device pair 302 can have a second positive locking contour 104f in the second plane 124 (cf. Fig. 12) of the lower pair of planes and an additional second form-locking contour 104f in the additional second plane 124 (cf. Fig. 13) of the upper pair of levels.

[0118] Fig. Figure 14 illustrates a circulating conveyor 900 according to various embodiments 1400 in a schematic cutaway perspective view, wherein the locking device 1102 is brought into the first locking state (i.e. closed), so that a locking of the positively coupled substrate carrier is established.

[0119] Fig. Figure 15 illustrates a circulating conveyor 900 according to various embodiments 1500 in a schematic perspective view, wherein the locking device 1102 is in the second locking state (i.e. open) so that the locking of the positively coupled substrate carrier is released.

[0120] Fig. Figure 16 illustrates a circulating conveyor 900 according to various embodiments 1600 in a schematic grid view, with the locking device 1102 in the first locked position. The bracket of the locking device 1102 can, as shown in embodiments 1600, also have two square profiles 1606 (e.g., plates) and a bolt 1604 (also referred to as a crossbar) held therein (in which case also referred to as a slide). The crossbar can also be attached to only one or more than one square profile (also referred to as a slide).

[0121] The bolt of the mating coupling device 414 can be tapered. This simplifies coupling and / or locking, for example, because the shackle can be more easily slid over the bolt of the mating coupling device 414. For example, the side walls of the bolt 414 can meet at an angle 1602. The angle 1602 can be in a range of approximately 1° to approximately 10°, e.g., 3° ​​or less. An angle of approximately 10° or less achieves self-locking of the locking device 1102 and thus a secure connection. For example, the bolt of the mating coupling device 414 can be conical, at least in sections, e.g., optionally with a rounded tip.

[0122] Traditionally, the drum of a drum coating system (also known as a drum coater or box coater) is loaded with substrates either manually or, more laboriously, with robots. Manual loading incurs low primary costs but high secondary costs. For manual loading, the processing chamber must be ventilated, and subsequently, the cathodes must be re-sputtered (also known as re-sputtering). Robot technology, on the other hand, is complex, expensive, and slow.

[0123] Using the circulating conveyor wheel 100 described herein, a substrate carrier 400 can be coupled to and detached from the rotating circulating conveyor wheel 100 during the ongoing process (e.g., under high vacuum). The coupling and uncoupling process can take approximately one second. Furthermore, individual substrate carriers can be selectively uncoupled while one or more substrate carriers remain coupled to the drum 100. This allows, for example, the use of substrate dummies (e.g., placeholders in the shape of a substrate or a discarded substrate) that remain attached to the circulating conveyor wheel 100 and do not need to be removed. In other words, the entire circumference of the circulating conveyor wheel 100 does not always need to be filled with usable material; it can also be partially filled with placeholders.

[0124] The locking mechanism 1102, 1202 provided herein (comprising locking device 1102 and locking mechanism 1202) ensures that each substrate carrier 400 can be held securely and at rest against the circulating conveyor transport wheel. This stabilizes the arrangement, especially at higher rotational speeds when centrifugal forces become high.

[0125] The locking device 1102 with bracket provides a simplified and therefore safe and cost-effective design.

[0126] During operation, a substrate carrier 400 (also referred to as a carrier) is moved tangentially towards the circulating conveyor wheel 100. The peripheral speed of the circulating conveyor wheel 100 can correspond to the transport speed of the substrate carrier 400. The hinge pin 414 can be engaged by means of the fork (also referred to as the carrier receptacle) of the circulating conveyor wheel 100 (also referred to simply as the drum), thereby blocking 5 degrees of freedom. Only one radial translational degree of freedom remains open. This radial translational degree of freedom is blocked by moving the crossbar 1604 behind the hinge pin 414.

[0127] More generally speaking, in the first locking state more (e.g. all) degrees of freedom of the substrate carrier can be blocked than in the second locking state (in which, for example, at least one degree of freedom of the substrate carrier is free).

[0128] The locking device (for example, the slide) can be operated solely by gravity, thus eliminating the need for drives and sensors. The locking device (for example, the slide) can be a component of the drum 100 and move in a circular path as the drum rotates. The area where the substrate carrier is to be coupled or uncoupled (also referred to as the insertion point or discharge point) is fixed in the vacuum chamber, as will be described in more detail later.

[0129] This allows the slide to be pushed upwards during the opening process by means of a raised section (e.g., a cam disc). To close the slide, it is pushed downwards by gravity. The raised section (e.g., cam disc) falls away again after the discharge or insertion point, and the slide falls downwards.

[0130] Each of the coupling devices 104 can have two or more slides (or crossbars), e.g. one slide at the top and one slide at the bottom and / or at least one slide per positive locking contour. This ensures uniform closing, holding, and opening.

[0131] The locking mechanism 1202 can be guided by rollers, thus largely avoiding sliding friction. A pair of coupling devices 302 can be arranged at the separation points of the substrate carriers. This allows the carrier shells to be unlocked and the carriers to be safely separated from the drum (i.e., they can be coupled and uncoupled separately).

[0132] Holding and locking (also referred to as closing) by means of the gravity-based locking device is achieved through a simplified mechanism and makes it possible to do without drives, sensors, cables, bushings, etc.

[0133] Mounting the locking mechanism 1202 using rollers reduces abrasion and sliding friction.

[0134] Fig. 17A to Fig. Figure 17H ​​illustrates a conveying arrangement 1700 according to various embodiments 1700a to 1700h in a schematic top view, which includes a circulating conveyor 900 according to various embodiments and one or more linear conveyors 1702 (in other words, two linear conveyors 1702 are not necessarily required). As shown, various configurations can be provided to supply a transport path 711 for one or more substrate carriers to and / or from the circulating conveyor transport wheel 100.

[0135] For example, transport route 711 can cross over (see below). Fig. 17A or Fig. 17B). This allows more space for coating equipment, as more than half (e.g., approximately ¾) of the circulation space can be used for coating equipment, as described in more detail below.

[0136] The following refers to the conveying arrangement 1700 and / or the circulating conveyor 900 in the context of a vacuum arrangement. It should be understood that the conveying arrangement 1700 and / or the circulating conveyor 900 can also be provided separately, i.e., they do not necessarily have to be part of the vacuum arrangement.

[0137] Fig. Figure 18 illustrates a vacuum arrangement 1800 according to various embodiments in a schematic top view, which includes the conveying arrangement 1700 according to embodiment 1700b. The vacuum arrangement 1800 can further comprise one or more than one vacuum chamber 1802, 1804, 1806.

[0138] According to various embodiments, a vacuum chamber can be provided by means of a chamber housing in which one or more chambers can be provided. The chamber housing can, for example, be coupled to a pump system 804, e.g., a vacuum pump arrangement (e.g., gas-conducting), for providing a negative pressure or a vacuum (vacuum chamber housing) and be designed to be stable enough to withstand the effects of atmospheric pressure in the evacuated state. The pump arrangement (comprising at least one vacuum pump, e.g., a high-vacuum pump, e.g., a turbomolecular pump) can make it possible to pump out a portion of the gas from the interior of the processing chamber, e.g., from the processing space. Accordingly, one or more vacuum chambers can be provided in a chamber housing.

[0139] For example, the vacuum chamber housing or housings can be coupled to a pump system 804 (comprising at least one rough vacuum pump and optionally at least one high vacuum pump). The pump system 804 can be configured to extract a gas (e.g., the process gas) from the vacuum chamber housing, e.g., from the chamber or chambers provided therein, so that a vacuum (i.e., a pressure less than 0.3 bar) or less can be provided or made available within the vacuum chamber housing, e.g., a pressure in the range of approximately 1 mbar to approximately 10 -3 mbar (in other words fine vacuum) or less, e.g. a pressure in a range of approximately 10 -3 mbar to approximately 10 -7 mbar (in other words high vacuum) or less, e.g. a pressure less than high vacuum, e.g. less than about 10 -7mbar (in other words, ultra-high vacuum). The process pressure can be established from an equilibrium of process gas, which is supplied by means of a gas supply device and extracted by means of the pump system 804.

[0140] The vacuum arrangement 1800 can, for example, have a first vacuum chamber 1802 (also referred to as a processing chamber) in which the circulating conveyor wheel 100, a first linear conveyor 1702, and a second linear conveyor 1702 are arranged. The first linear conveyor 1702 and the second linear conveyor 1702 (e.g., their guide rails) can overlap, so that the transport path 711 runs diagonally. The first linear conveyor 1702 can provide a first section 711a of the transport path 711 (also referred to as the first transport section) towards the circulating conveyor wheel 100, and the second linear conveyor 1702 can provide a second section of the transport path 711 (also referred to as the second transport section) away from the circulating conveyor wheel 100 (indicated by arrows), or vice versa.

[0141] Between the first transport section 711a and the second transport section 711b, the transport path 711 can have a third section (also referred to as the third transport section 711c or processing section 711c) (viewed along the circumference of the circulating conveyor wheel 100). The third transport section 711c can, for example, have a curvature of approximately 270°. Processing, e.g., coating, of a substrate can take place along the processing section. For this purpose, one or more processing devices 1810 can be arranged in the interior space of the processing chamber 1802 (also referred to as the processing area) adjacent to the processing section 711c. In general, a processing device 1810 can be configured for processing (e.g., heating, coating, and / or chemically modifying, etc.) a substrate.For example, the processing device 1810 can be set up to coat the substrate with a coating material provided by the processing device 1810 (then also referred to as the coating device or coating material source).

[0142] The coating material source can be configured, according to various embodiments, for coating at least one substrate (i.e., one or more substrates), which is transported, for example, through the processing area. For instance, the coating material source can be configured to provide a gaseous coating material (material vapor) and / or a liquid coating material, which can be deposited, for example, onto the at least one substrate to form a layer. A coating material source can comprise at least one of the following: a sputtering device, a thermal evaporation device (e.g., a laser beam evaporator, an arc evaporator, an electron beam evaporator, and / or a thermal evaporator), a precursor gas source, or a liquid-phase atomizer. A sputtering device can be configured to atomize the coating material using a plasma.A thermal evaporation device can be configured to evaporate the coating material using thermal energy. Depending on the properties of the coating material, sublimation, i.e., the thermal conversion of a liquid state (liquid phase) to a gaseous state, can also occur, either as an alternative or in addition to thermal evaporation (i.e., the thermal conversion of a solid state (solid phase) to a gaseous state). In other words, the thermal evaporation device can also sublimate the coating material. A liquid-phase atomizer can be configured to apply a coating material from the liquid phase, e.g., a dye. The following description refers to a sputtering device as the coating device. However, the description can also apply analogously to a coating device configured differently.

[0143] For example, the coating material may contain or be composed of at least one of the following materials: a metal; a transition metal; an oxide (e.g., a metal oxide or a transition metal oxide); a dielectric; a polymer (e.g., a carbon-based polymer or a silicon-based polymer); an oxynitride; a nitride; a carbide; a ceramic; a metalloid (e.g., carbon); a perovskite; a glass or glass-like material (e.g., a sulfide glass); a semiconductor; a semiconductor oxide; a semi-organic material; and / or an organic material.

[0144] The vacuum arrangement 1800 can, for example, include a second vacuum chamber 1804 (also referred to as the first lock chamber or first lock), which can be arranged between a first lock valve 1816a and an additional first lock valve 1826b. The first lock valve 1816a can couple the first lock chamber with the processing chamber 1802. A linear conveyor can be arranged in the first lock chamber 1804, which continues the first transport section 711a.

[0145] The vacuum arrangement 1800 can, for example, include a third vacuum chamber 1806 (also referred to as a second lock chamber or second lock), which can be arranged between a second lock valve 1816b and an additional second lock valve 1826a. The second lock valve 1816b can couple the second lock chamber with the processing chamber 1802. A linear conveyor can be arranged in the second lock chamber 1806, which continues the second transport section 711b.

[0146] As described above, at least two linear conveyors can be present, which continue each other (i.e., provide a common section of the transport path 711), with a sluice valve arranged between the two linear conveyors. In this illustration, one of the two linear conveyors is arranged in the processing chamber 1802 and provides one of the two transport sections 711a, 711b, while the other of the two linear conveyors is arranged in the sluice chamber. This functional separation (also referred to as the throughput configuration) into two linear conveyors makes it easier to control them (e.g., their drive devices) independently, so that one substrate carrier remains stationary in the sluice chamber, while another substrate carrier in the processing chamber 1802 is transported to or from the circulating conveyor wheel 100.This makes it easier to transport a larger number of substrate carriers in a timed manner and to integrate them into the cycle time of the circulating conveyor transport wheel 100 (i.e., to synchronize the transport).

[0147] Alternatively, a linear conveyor can be used, which has two sections (also referred to as linear conveyor sections), with the airlock valve located between the two linear conveyor sections. Illustratively, one of the two linear conveyor sections is located in the processing chamber 1802 and provides one of the two transport sections 711a, 711b, while the other of the two linear conveyor sections is located in the airlock chamber. The functional unit (also referred to as the simplified configuration) of the two linear conveyor sections makes it easier to control them (e.g., their drive device) in a coupled manner, thus simplifying the control process. In this case, however, it may be necessary for no substrate carrier to be located in the airlock chamber if a substrate carrier is transported to or from the circulating conveyor wheel 100 in the processing chamber 1802.

[0148] The following section refers to the simplified configuration or the throughput configuration as examples. What is described for the linear conveyor sections can, of course, be applied analogously to correspondingly independently controllable linear conveyors that are used instead of the linear conveyor sections, and vice versa.

[0149] Fig. Figure 19 illustrates a vacuum arrangement 1800 according to various embodiments 1900 in a schematic top view, which includes the conveying arrangement 1700 according to embodiment 1700a, wherein the two linear conveyors 1702 are arranged one behind the other. For example, the first conveying section 711a and the second conveying section 711b can be adjacent to each other, e.g., at the point where they adjoin the circulating conveyor transport wheel 100 and the third conveying section 711c, respectively.

[0150] This allows the third transport section 711c, for example, to have a curvature of more than approximately 270°, e.g., approximately 360°. This also increases the distance along which processing can take place.

[0151] The following refers to the conveying arrangement 1700 according to embodiment 1700b. However, the description can also apply analogously to a differently configured conveying arrangement 1700.

[0152] Fig. Figure 20 illustrates a vacuum arrangement 1800 according to various embodiments 2000 in a schematic top view, which includes two conveying arrangements 1700 according to embodiment 1700b. This achieves a linking to a larger assembly, which has a greater number of processing devices and thus enables greater layer complexity and / or a higher throughput.

[0153] According to various embodiments, a drum 100 of a drum coating system (also called a drum coater) can be loaded with carriers that attach themselves to the wall (shell of the drum) without robots.

[0154] The carriers can be individually wound onto and unwound from the drum 100 without requiring ventilation of the processing chamber. The carriers can be fed in tangentially to the drum via a lock chamber 1804 or 1806. This can generally be done crosswise or in series.

[0155] Furthermore, cross-feeding the carriers saves time on entry and exit, thus increasing production time. Eliminating the intermediate step of chamber ventilation also eliminates the intermediate step of sputtering.

[0156] Fig. Figure 21 illustrates a vacuum arrangement 1800 according to various embodiments 2100 in a schematic top view, wherein the conveying arrangement has a diverter 2102 which is arranged between a linear conveyor 1702 and the circulating conveyor transport wheel 100.

[0157] The switch 2102 can be configured to change between two states, of which the switch 2102 in a first state (also referred to as the first switch state) is in contact with the conveyor transport wheel 100 and in the second state (also referred to as the second switch state) has a greater distance from the conveyor transport wheel 100 than in the first switch state.

[0158] To change the switch state (between the first and second switch states), a guide profile of switch 2102 can, for example, be displaced 2101, e.g., along direction 105 or perpendicular to direction 105. Changing the switch state can be accomplished, for example, by means of an actuator of switch 2102. Displacing the guide profile along direction 105 can be achieved, for example, by rotating the guide profile around a pivot axis. For this purpose, switch 2102 can have a pivot bearing by means of which the guide profile is rotatably mounted.

[0159] The guide profile can, for example, have a rail-shaped support (here also referred to simply as a rail or guide rail). For instance, the guide profile can be mounted at an end section (e.g., rotatably), so that it is configured as a rail-shaped cantilever beam, as described in more detail below. A guide rail can be understood as a longitudinally extended body that provides a section of the transport path.

[0160] For example, the guide rail, or each guide rail, can be made of or constructed from plastic. This reduces abrasion.

[0161] Fig. Figure 22 illustrates a vacuum arrangement 1800 according to various embodiments 2200 in a schematic perspective view, which has a first diverter 2102 between the first linear conveyor and the circulating conveyor transport wheel 100 and a second diverter 2102 between the second linear conveyor and the circulating conveyor transport wheel 100. The diverters 2102 are shown in the second diverter state (i.e., open).

[0162] The following refers to one of the diverters and one of the linear conveyors, which can apply to both diverters or linear conveyors (if present).

[0163] The switch 2102 can have two rail-shaped cantilever beams 2202, each of which can be displaced by means of a gear mechanism 2204 (e.g., comprising an eccentric, a crankshaft, or a toggle lever) and can be mounted by means of a joint 2206 (e.g., comprising a pivot bearing). When the switch 2102 is moved into the second switch position (also referred to as opening the switch), the two rail-shaped cantilever beams 2202 can be rotated away from each other. When the switch 2102 is moved into the first switch position (also referred to as closing the switch), the two rail-shaped cantilever beams 2202 can be rotated towards each other.

[0164] In the first switch state, the cantilever beams 2202 can extend an upper or lower guide rail 2210 of the linear conveyor 1702 or connect it to the circulating conveyor transport wheel 100 along the transport path. In the second switch state, the cantilever beams 2202 can interrupt the transport path.

[0165] The linear conveyor 1702 can have the guide rail 2210 and one or more gears 2212 (see also the following description) for transmitting a translation to a substrate carrier 400 held by the linear conveyor 1702. The gear or gears 2212 can be part of a drive train of the linear conveyor 1702, which further comprises a drive device (e.g., a motor) for driving the gear 2212. The gear or gears 2212 can be arranged such that their teeth engage with a drive shaft of the substrate carrier 400, as will be described in more detail later.

[0166] The following refers, by way of example, to a turnout 2102 with a gearbox. The description can, of course, be applied analogously to a differently configured turnout 2102. The gearbox 2204 enables a transmission and / or conversion between translation and rotation to facilitate the movement of the turnout rail. For example, the vacuum assembly 1800 can have a drive device (e.g., a motor) configured to transmit a movement (e.g., rotation) to the gearbox 2204. The drive device for the turnout can, for example, be located outside the vacuum chamber (e.g., at atmosphere), so that its movement can be transmitted to the gearbox via a vacuum feedthrough (e.g., rotary feedthrough). However, the gearbox can also be omitted entirely, for example, if the force generated by the drive device is transmitted directly to the turnout.

[0167] Fig. Figure 23 illustrates a vacuum arrangement 1800 according to various embodiments 2300 in a schematic perspective view, wherein the switches 2102 of embodiments 2200 are shown in the first switch state (i.e. closed).

[0168] Fig. Figure 24 illustrates a vacuum arrangement 1800 according to various embodiments 2400 in a schematic top view, wherein the switch 2102 of embodiments 2300 is in the first switch state. In the first switch state, the switch 2102 can, for example with its rail 2202, adjoin the path along which the gap between the rollers of the roller pair 410 is moved when the circulating conveyor transport wheel 100 rotates.

[0169] More generally, the switch 2102 and the substrate carrier 400 can be arranged such that, when the switch 2102 is in its first switch position, it engages the carriage 406 of the substrate carrier 400 when the latter is transported by means of the circulating conveyor transport wheel 100. This causes the unwinding process to begin.

[0170] Fig. Figure 25 illustrates a vacuum arrangement 1800 according to embodiments 2400 in a schematic top view, wherein the circulating conveyor transport wheel 100 is shown at a later time with respect to embodiments 2400, so that it has rotated a little.

[0171] By means of this engagement, the carriage 406 can be guided by the circulating conveyor transport wheel 100 along the rail 2202 of the switch 2102, or guided from the third transport section 711c to the second transport section 711b (also referred to as unwinding). This releases (i.e., decouples) the substrate carrier 400 from the circulating conveyor transport wheel 100.

[0172] In the opposite direction of transport, the carriage 406 can be guided from the rail 2202 of the switch 2102, when the switch is in the first switch position, onto the circulating conveyor transport wheel 100, or from the second transport section 711b onto the third transport section 711c (also referred to as winding). This attaches (i.e., couples) the substrate carrier 400 to the circulating conveyor transport wheel 100.

[0173] This ensures that the carriers (also known as substrate carriers) are automatically guided from a translational to a rotational motion on the drum. This can be achieved, for example, without having to vent the chamber or bring the drum to a standstill from its rotational movement. This results in a smooth process.

[0174] The carriers are guided to the drum via a rail system and then connected to the drum's mounting points using a switch. The switch, for example, has a hinged guide rail. It also features a hinge and a receptacle for opening and closing. After the joining process, the switch can be opened again to avoid interfering with the drum and carriers during the coating process.

[0175] To carry out the ejection process, the switch can be closed and the carriers can be forcibly moved from rotational motion into translational motion and thus forced to be ejected.

[0176] The switch can, for example, incorporate a crank mechanism as its gearbox. Furthermore, a rotary feedthrough is cost-effective. Additionally, the sensors for controlling the switch (e.g., limit switches) can be located outside the vacuum chamber. This simplifies the design.

[0177] The following section discusses the drive mechanism, which is provided by the interlocking of the drive stock and the gears 2212 (also referred to as drive stock gearing).

[0178] Fig. Figure 26 illustrates a substrate carrier 400 according to various embodiments 2600 in a schematic cross-sectional view (viewed in the direction of transport), which simplifies the construction of the drive rod.

[0179] Each or all bolt axis 504 of the drive shaft can be provided by means of a dowel screw (also referred to as a cylindrical pin screw). This simplifies the design. The dowel screw can have a thread at one end and a so-called pass 2604 (the screw head) at the opposite end, between which a cylindrical section is arranged. A nut 2602 can be screwed onto the thread, so that the side walls 516 are arranged between the pass 2604 and the nut 2602. A groove can be formed between the side walls through which the cylindrical section of the dowel screw extends.

[0180] For example, a U-beam can be used, which provides the groove and the side walls 516.

[0181] Fig. Figure 27 illustrates a conveying arrangement 1700 according to various embodiments 2700 in a schematic cross-sectional view (viewed perpendicular to the transport direction 111), which enables a simplified construction.

[0182] Each linear conveyor 1702 of the conveying arrangement 1700 (e.g., its drive train) can have one or more gears 2212 for transmitting a translation to a substrate carrier 400 by means of the meshing of the gear edge 2212 and the drive pin 652 of the substrate carrier 400. Each linear conveyor 1702 of the conveying arrangement 1700 (e.g., its drive train) can further have a drive device 2706 (e.g., comprising a motor) for driving each gear 2212. The drive device 2706 can be configured to supply torque to each gear 2212.

[0183] The gear or gears 2212 can be arranged such that their teeth engage with a drive shaft (e.g. between its bolts) of the substrate carrier 400.

[0184] The conveying arrangement 1700 can further include a control device 2704, which is configured to control the drive device 2706, e.g., its output torque. Furthermore, the linear conveyor 1702 can include one or more sensors 2702 (also referred to as transport sensors 2702) which are configured to detect the transport process of the substrate carrier 400.

[0185] The control device 2704 can be configured to control the transport sensor 2702, process its measured value as an input, and, based on this, provide an electrical signal as an output that represents the state of the input value at the time of detection. Detection can generally be optical, mechanical, electrical, and / or magnetic (e.g., inductive).

[0186] A transport sensor 2702 can, for example, be configured to detect a physical quantity representing the position and / or speed of the substrate carrier 400. Detection of the substrate carrier 400 can generally be optical, mechanical, electrical, and / or magnetic (e.g., inductive). For example, the transport sensor 2702 can also be configured for mechanical detection (e.g., like a limit switch) or electromagnetic detection.

[0187] Alternatively or additionally, a transport sensor 2702 can be configured to detect a physical quantity representing the position and / or speed of a gear 2212. For example, the transport sensor 2702 can be provided by means of an absolute encoder of a servomotor driving the gear 2212 in the drive device 2706. The latter simplifies the detection of the position or speed of the gear, either as an alternative or in addition to the position or speed of the substrate carrier 400. Alternatively or additionally, the gear can also be detected directly, e.g., optically, mechanically, electrically, and / or magnetically (e.g., inductively), for example, by means of a photoelectric sensor whose light beam is cyclically interrupted by the rotating teeth.

[0188] A servomotor can be understood as a drive device designed to detect the angular position, rotational speed, and / or acceleration of its motor shaft. A servomotor can consist of an electric motor and may include a sensor for detecting the motor shaft (e.g., its angular position, rotational speed, and / or acceleration). A control device (implementing a servo controller) can control the electric motor based on the sensor's detected position of the motor shaft (i.e., its detected state) and one or more setpoints (e.g., a target angular position, rotational speed, and / or acceleration), thus implementing a control loop.

[0189] If the absolute encoder is sufficient as a transport sensor 2702, additional transport sensors 2702 in the vacuum can be omitted. For example, the servo motor can be coupled to the gear via a vacuum feedthrough.

[0190] Alternatively or additionally to a servo motor, an electric stepper motor can also be used, which eliminates the need for sensors and a control loop. In other words, the 2702 transport sensor can also be omitted, for example, if the drive device has a stepper motor.

[0191] In another example, the transport sensor 2702 can be configured to detect the substrate carrier 400. For instance, the transport sensor 2702 can have a light barrier that detects an interruption of a light beam caused by the substrate carrier 400. The following description refers to a light barrier as an example of the transport sensor 2702. The description can, of course, be applied analogously to a differently configured transport sensor 2702.

[0192] The light barrier allows for a simplified design. For example, the light barrier can be set up to detect a gap between two immediately adjacent shoots or substrate carriers 400 transported immediately one after the other.

[0193] The control device 2704 can be configured to control the drive device 2706 of the linear conveyor 1702 based on the transport process detected by the sensor 2702, i.e., the current state of the transport process. Alternatively or additionally, the control device 2704 can be configured to control the drive device of the circulating conveyor 900 based on the transport process detected by the sensor 2702, i.e., the current state of the transport process. The control can be achieved, for example, such that the peripheral speed of the circulating conveyor's transport wheel 100 corresponds to the transport speed of the substrate carrier 400 transported by the linear conveyor 1702. This synchronizes the transport by the circulating conveyor 900 and by the linear conveyor 1702.

[0194] A pinion drive provides a simplified, reliable, and positive-locking drive system. For example, the pinion drive prevents slippage during the assembly process of the carriers onto the drum. Furthermore, the positions of the pinions (or carriers) can be detected using the absolute encoders of servo motors. This eliminates the need for additional sensors in a vacuum.

[0195] Each carrier can be transported to specific positions without slippage. Measurement errors can be minimized using a 2702 transport sensor. Furthermore, the drive trains can be reduced to a minimum. The gear teeth (e.g., their rotary bearings) also reduce wear and abrasion, thus reducing particle contamination.

[0196] In one example, the carriers are guided to the drum via a drive rail system and then connected to the drum's mounting points via a switch. The drive pins then become part of the carriers. These drive pins feature a loose plastic bearing sleeve. The carrier can roll on this bearing sleeve, combining rolling friction and positive drive. Alternatively or additionally, each guide rail is made of a wear-resistant plastic. The bearing sleeves of the drive pins roll on this plastic, reducing wear.

[0197] The drive train can include a vacuum rotary union, by means of which drive energy supplied to the drive shaft is passed through a chamber wall of a vacuum chamber. Furthermore, the sensor technology can be arranged outside the vacuum chamber for process reliability.

[0198] As in Fig. As illustrated in Figure 27, the linear conveyor 1702 can have two guide rails (also referred to as upper and lower rails) between which the substrate carrier 400 is transported. The upper and lower rails ensure a very smooth transport process, e.g., acceleration, by inhibiting any tilting effect.

[0199] This enables strong acceleration and rapid movement of the carriers, as slippage and tilting effects are inhibited. Furthermore, no complex SBS (System-Based Control) is necessary to implement the control or regulation of the transport process.

[0200] Fig. Figure 28 illustrates a vacuum arrangement 1800 according to various embodiments 2800 in a schematic perspective view. The guide rail 2210 of the linear conveyor 1702 of the vacuum arrangement 1800 can have several spatially separated segments 2804 (also referred to as rail segments). In other words, the guide rail 2210 can have one or more interruptions 2802 (i.e., be interrupted).

[0201] For example, the linear conveyor section in lock chamber 1806, 1804 can have one or more rail segments. Alternatively or additionally, the linear conveyor section in processing chamber 1802 can have one or more rail segments.

[0202] A gear 2212 can be arranged, for example, between two immediately adjacent segments 2804 of the linear conveyor section. The gear 2212 can, for example, pass through the gap 2802. Alternatively or additionally, the sluice valve 1816a, 1816b can be arranged between two immediately adjacent linear conveyor sections.

[0203] Fig. Figure 29 illustrates a vacuum arrangement 1800 according to various embodiments 2900 in a schematic cross-sectional view (viewed perpendicular to the transport direction 111), which illustrates a simplified construction.

[0204] A method for operating the vacuum arrangement 1800 can include: transporting a substrate carrier 400 by means of a linear conveyor 1702 to a circulating conveyor transport wheel 100; and coupling the substrate carrier 400 to the circulating conveyor transport wheel 100.

[0205] The transport of the substrate carrier 400 to the circulating conveyor transport wheel 100 can involve the switch 2102 being or being brought into the first switch state and the substrate carrier 400 being transferred from the linear conveyor 1702 to the circulating conveyor transport wheel 100 by means of the switch 2102.

[0206] The coupling of the substrate carrier 400 can include the joining (comprising a contacting) of a counter-coupling device of the substrate carrier 400 with a coupling device of the circulating conveyor transport wheel 100 when a locking device of the circulating conveyor transport wheel 100 is in the second locking state (i.e., open); and the locking device being brought into the first locking state (also referred to as closing) when the counter-coupling device of the substrate carrier 400 is joined with the coupling device of the circulating conveyor transport wheel 100.

[0207] By joining the counter-coupling device of the substrate carrier 400 with a coupling device of the circulating conveyor transport wheel 100, one or more (previously free) degrees of freedom of the substrate carrier 400 can be blocked. By bringing the locking device into the first locking state, at least one or more (previously free) additional degrees of freedom of the substrate carrier 400 can be blocked.

[0208] Fig. Figure 30 illustrates a circulating conveyor 900 according to various embodiments in a schematic top view in a method 3000. The coupling device 104 (e.g., its positive-locking contour 104f and / or its locking device 1102) can be configured such that it forms a pivot joint when engaged with the substrate carrier 400. In other words, the substrate carrier 400, e.g., its frame 408, can be provided with at least one degree of rotational freedom when the coupling device 104 is joined with the mating coupling device of the substrate carrier 400 and / or when the locking device 1102 is in the first locking state.

[0209] This ensures that each support frame 408 (or each link) can be rotated 3001 relative to the circulating conveyor transport wheel 100 when it is coupled on only one side by means of a coupling device 104. If the frame 408 (or the link) is coupled to the circulating conveyor transport wheel 100 on opposite sides, more (e.g., all) degrees of freedom of the frame 408 (or the link) can be blocked.

[0210] For example, the substrate carrier 400 (without any guide or coupling) can have the general three translational degrees of freedom and three rotational degrees of freedom. Furthermore, the substrate carrier 400 can have an additional degree of freedom (also called a link degree of freedom) per rotary joint between two carrier members (visually, the angle between two of the carrier members that can be changed). Thus, a substrate carrier 400 with three members can have 8 degrees of freedom.

[0211] The positive-locking connection in 3011 of the frontal (frontmost) counter-coupling device 414 of the substrate carrier 400 with a coupling device 104 can block two translational degrees of freedom on both sides and two rotational degrees of freedom of the substrate carrier 400. If the corresponding locking is achieved, the third translational degree of freedom (away from the circulating conveyor transport wheel 100) can be blocked on both sides. More generally, in the first state of the locking device, more degrees of freedom of the substrate carrier can be blocked than in the second state of the locking device (in which, for example, at least one linkage degree of freedom of the substrate carrier or one translational degree of freedom is free on one side).

[0212] In 3013, the conveyor wheel 100 can be rotated until the next counter-coupling device 414 of the substrate carrier 400 comes into contact with a coupling device 104 of the conveyor wheel 100. Each positive-locking engagement in 3013 of one of the next counter-coupling devices 414 of the substrate carrier 400 with a coupling device 104 and the establishment of the locking mechanism can block one degree of freedom of the substrate carrier 400. This can be repeated until the rear end-face counter-coupling device 414 of the substrate carrier 400 comes into contact with a coupling device 104 of the conveyor wheel 100.

[0213] The positive-locking joining in 3015 of the rear counter-coupling device 414 of the substrate carrier 400 with a coupling device 104 and the establishment of the locking can block the last degree of freedom of the substrate carrier 400.

[0214] Using the sequence 3011, 3013, 3015 of method 3000, the substrate carrier 400 can be wound up (i.e., the links of the substrate carrier are coupled one after the other). In the opposite direction of the sequence 3011, 3013, 3015, the substrate carrier 400 can be unwound (i.e., the links of the substrate carrier are uncoupled one after the other).

[0215] Fig. Figure 31 illustrates a conveying arrangement 1700 according to various embodiments in a schematic top view in a method 3100. The conveying arrangement 1700 can have an adjustable ramp 3102.

[0216] The ramp 3102 can be configured to change between two states. In the first state (also referred to as the first ramp state), the ramp 3102 actuates the locking mechanism 1202 3111 during the rotation of the circulating conveyor transport wheel 100. In the second state (also referred to as the second ramp state), it has a greater distance from the locking mechanism 1202 than in the first ramp state. For example, the ramp 3102 can be configured to be tiltable or height-adjustable. The (e.g., mechanical) adjustment of the ramp 3102 can be achieved, for example, by means of an actuator.

[0217] In the first ramp state (in 3103), the locking mechanism 1202 can be actuated in such a way that the locking is released. In the second ramp state (in 3101), the locking mechanism 1202 can be either not actuated or not be actuated, or it can pass through the ramp without contact during the rotation of the circulating conveyor transport wheel 100, so that the locking is maintained.

[0218] The adjustment of ramp 3102 and the adjustment of switch 2102 can, for example, be carried out together or coupled or synchronized.

[0219] If the switch 2102 is or is moved into the second switch state 3101, the ramp 3102 can be or be moved into the second ramp state. This ensures that the locking mechanism is maintained if the switch does not engage in the gap of the roller pair (not shown) or if the first transport section 711a and / or the second transport section 711b is interrupted.

[0220] If the switch 2102 is or is moved into the first switch state 3103, the ramp 3102 can be or will be moved into the first ramp state. This ensures that the locking mechanism is released when the switch engages in the gap of the roller pair (not shown) or when the first transport section 711a and / or the second transport section 711b is completed. The substrate carrier can then be unwound. Winding can be carried out in the opposite direction.

[0221] Fig. Figure 32 illustrates a method 3200 according to various embodiments in a schematic flowchart.

[0222] The substrate carrier can have a first side (also called the first end face) facing in the direction of transport and a second side (also called the second end face) facing away from the direction of transport. The first end face and the second end face can be opposite each other.

[0223] Method 3200 may include, in 3201, coupling the substrate carrier to a circulating conveyor transport wheel which is arranged in a vacuum; and in 3205, uncoupling the substrate carrier from the circulating conveyor transport wheel which is arranged in the vacuum, wherein the coupling and uncoupling of the substrate carrier begins at the first side of the substrate carrier; and / or wherein the coupling and uncoupling of the substrate carrier ends at the second side of the substrate carrier.

[0224] Method 3200 can include, in 3203, processing one or more substrates which are carried by the substrate carrier coupled to the circulating conveyor transport wheel, wherein the circulating conveyor transport wheel is rotated during processing. The processing can, for example, include coating the substrate(s) with a coating material.

[0225] The processing (e.g., coating) of the substrate(s) can take place along more than half (e.g., three-quarters) of a revolution per turn of the circulating conveyor transport wheel. The revolution can correspond to a rotation angle of 360°, in which case half of the revolution corresponds to a rotation angle of 180°. The processing can also take place along the third transport section 711c, which has more than half (corresponding to a rotation angle of 180°) of a revolution per turn, e.g., more than three-quarters (corresponding to a rotation angle of 270°) of a revolution per turn.

[0226] In general, processing one or more of the following may include: heating, coating, irradiation, ablation (e.g., cleaning), and / or chemical modification. Processing may be performed using one or more processing devices (e.g., per cycle). Processing of the substrate(s) may be sequential, e.g., multiple times per cycle or by means of multiple cycles. For example, each substrate may be transported through a gaseous coating material emitted by one or more coating devices. Coating may be performed, for example, by physical vapor deposition.

[0227] The substrate carrier can be transported along the first transport section 711a before coupling and along the second transport section 711b after uncoupling, or vice versa. The first transport section 711a and the second transport section 711b can differ from each other, e.g., in length, position, route, starting point, and / or end point.

[0228] Alternatively or additionally, the first transport section 711a and the second transport section 711b may be adjacent to each other at at least one point or may intersect at this point.

[0229] Coupling the substrate carrier can involve coupling the multiple sections of the substrate carrier one after the other (also referred to as winding), as described herein. Disconnecting the substrate carrier can involve uncoupling the multiple sections of the substrate carrier one after the other (also referred to as unwinding), as described herein.

[0230] Coupling the substrate carrier may involve locking the coupling of the substrate carrier to the conveyor wheel (e.g., by closing the locking device). Disconnecting the substrate carrier may involve releasing the locking mechanism of the coupling of the substrate carrier to the conveyor wheel (e.g., by opening the locking device).

[0231] The substrate carrier can be uncoupled and / or coupled while the circulating conveyor transport wheel is rotating and / or in a vacuum.

[0232] The substrate carrier can be uncoupled after or before the coupling of another substrate carrier, e.g. before the circulating conveyor transport wheel has completed one revolution.

[0233] Fig.Figure 33 illustrates a method 3300 according to various embodiments in a schematic flowchart. The method 3300 can include, in 3301, guiding a substrate carrier by means of a guide profile along a transport path; and in 3303, generating a feed motion (in other words, driving a transport motion) of the substrate carrier by means of a toothing.

[0234] The following are exemplary values ​​for a vacuum setup and the process: Simultaneously connectable substrate carriers: 24 (This has the advantage that the number 24 is divisible multiple times. Thus, 8 three-carriers can be combined); Time for connecting / disconnecting a substrate carrier: approximately 12 minutes for 12 substrate carriers; Coating window: approximately 650 mm (millimeters) x 360 mm (height x width); Footprint of the circulating conveyor wheel: approximately 4100 mm x 6200 mm x 2800 mm (length x diameter x height); Speed ​​range of the circulating conveyor wheel: approximately 10 to 100 revolutions per minute (rpm); Coating time: approximately 100 revolutions, which at 100 rpm corresponds to 0.025 s / substrate carrier or 1 / 40 of a second; The speed of the substrate carriers on the circulating conveyor transport wheel at 100 rpm is approximately 886 m / min.

[0235] In the following, various examples are described which refer to those described above and those shown in the figures.

[0236] Example 1 is a circulating conveyor transport wheel according to the appended claim 1, comprising, among other things: a frame on which the circulating conveyor transport wheel can be rotatably mounted; a plurality of coupling devices arranged on an outer circumference of the frame, each of which has at least one positive-locking contour for positive-locking coupling of a substrate carrier, wherein the plurality of coupling devices comprises a pair of coupling devices whose positive-locking contours are spaced closer together (e.g., no space apart) along (e.g., in a direction) of the circumference (e.g., projected onto the path of the circumference) than the positive-locking contours of the plurality of coupling devices immediately adjacent to the pair, wherein, for example, the positive-locking contours of the pair are offset from each other along (e.g., in a direction) of the circumference (e.g., laterally).on opposite sides of a path along the circumference), e.g. next to each other (e.g. having no distance along the path), wherein, for example, the pair or each pair has a first coupling device of several (e.g. equidistant) first coupling devices of the plurality of coupling devices and a second coupling device of several (e.g. equidistant) second coupling devices of the plurality of coupling devices.

[0237] Example 2 is a circulating conveyor transport wheel (e.g., according to Example 1), comprising: a frame on which the circulating conveyor transport wheel can be rotatably mounted; a plurality of coupling devices arranged on an outer circumference of the frame, each of which has at least one (e.g., two) positive-locking contour for positive-locking coupling of a substrate carrier, wherein the plurality of coupling devices comprises several first coupling devices, each spaced apart from the others, for example, along (e.g., one direction) of the circumference; and wherein the plurality of coupling devices comprises at least one second coupling device, the positive-locking contour of which forms a positive-locking contour (e.g., with the second coupling device) of the several first coupling devices along (e.g., one direction) of the circumference (e.g.,(projected onto the path of the circumference) has a smaller distance (e.g. no distance) than from this immediately adjacent first coupling devices (e.g. their positive locking contours).

[0238] Example 3 is the circulating conveyor transport wheel according to Example 1 or 2, wherein each of the form-fitting contours is provided by means of a projection or by means of a recess.

[0239] Example 4 is the circulating conveyor transport wheel according to one of Examples 1 to 3, wherein the plurality of coupling devices comprises several pairs of coupling devices; wherein the positive locking contours of each pair have a smaller distance from each other along (e.g., one direction) of the circumference than from the positive locking contours of the plurality of coupling devices which are arranged between the several pairs; and / or between which several equidistant coupling devices are arranged.

[0240] Example 5 is the circulating conveyor transport wheel according to one of Examples 1 to 4, wherein the at least one second coupling device has several second coupling devices, of which, for example, every second coupling device has a positive locking contour that has a smaller distance from the positive locking contour of one of the several first coupling devices than the several first coupling devices (e.g., their positive locking contours) from each other.

[0241] Example 6 is the circulating conveyor transport wheel according to one of Examples 1 to 5, wherein the number of the multiple second coupling devices is smaller than the number of the multiple first coupling devices.

[0242] Example 7 is the circulating conveyor transport wheel according to Example 6, wherein a distance along the circumference of the several second coupling devices is greater from each other than the distance between the several first coupling devices; and / or wherein coupling devices immediately adjacent to each other of the several second coupling devices are substantially the same distance from each other (i.e., that they are equidistant).

[0243] Example 8 is the circulating conveyor transport wheel according to one of Examples 1 to 7, wherein the positive locking contour of each second coupling device along (e.g. the direction) of the circumference has a smaller distance from the positive locking contour of a first coupling device of the several first coupling devices than the positive locking contours of the first coupling device and the coupling devices immediately adjacent to the first coupling devices of the several first coupling devices from each other.

[0244] Example 9 is the circulating conveyor transport wheel according to one of Examples 1 to 8, wherein the positive locking contour of the at least one second coupling device is arranged next to the positive locking contour of one of the several first coupling devices with respect to (e.g. the direction) of the circumference.

[0245] Example 10 is the circulating conveyor transport wheel according to one of Examples 1 to 9, wherein the positive locking contour of the at least one second coupling device is arranged between two positive locking contours of one of the several first coupling devices.

[0246] Example 11 is the circulating conveyor transport wheel according to one of Examples 1 to 10, wherein immediately adjacent coupling devices of the several first coupling devices are substantially the same distance apart (i.e., that they are equidistant).

[0247] Example 12 is the circulating conveyor transport wheel according to one of Examples 1 to 11, wherein the positive locking contours of the plurality of coupling devices adjoin a cylinder whose cylinder axis is arranged, for example, on a rotary axis of the circulating conveyor transport wheel.

[0248] Example 13 is the circulating conveyor transport wheel according to any one of Examples 1 to 12, wherein the plurality of coupling devices comprises several groups, each group comprising exactly one second coupling device and several first coupling devices.

[0249] Example 14 is the circulating conveyor transport wheel according to one of Examples 1 to 13, wherein the frame has a first level and a second level arranged one behind the other with respect to an axis of rotation of the circulating conveyor transport wheel, wherein the at least one (e.g. two) positive locking contour has a first positive locking contour on the first level and a second positive locking contour on the second level.

[0250] Example 15 is the circulating conveyor transport wheel according to one of Examples 1 to 14, wherein the positive locking contours of the several first coupling devices are arranged equidistantly to each other; and / or wherein the positive locking contours of the several second coupling devices are arranged equidistantly to each other.

[0251] Example 16 is the circulating conveyor transport wheel according to one of Examples 1 to 15, wherein the frame has a hub on which the circulating conveyor transport wheel can be rotatably mounted about an axis of rotation.

[0252] Example 17 is the circulating conveyor transport wheel according to Example 16, wherein the hub has an axial bearing which provides the axis of rotation.

[0253] Example 18 is the circulating conveyor transport wheel according to any one of Examples 1 to 17, wherein the plurality of coupling devices are arranged around the hub and / or a pivot axis of the circulating conveyor transport wheel.

[0254] Example 19 is the circulating conveyor transport wheel according to one of Examples 1 to 18, wherein the positive locking contour of each of the plurality of coupling devices is provided by means of a segment of a cylindrical surface (e.g. a circular cylinder or a parabolic cylinder).

[0255] Example 20 is the circulating conveyor transport wheel according to one of Examples 1 to 19, wherein the positive locking contour of each of the plurality of coupling devices is provided by means of a segment of a rotating surface.

[0256] Example 21 is the circulating conveyor transport wheel according to any one of Examples 1 to 20, wherein the rotational speed during operation of the circulating conveyor transport wheel is in a range from approximately 10 revolutions per minute (rpm) to approximately 100 revolutions per minute.

[0257] Example 22 is the circulating conveyor transport wheel according to any of Examples 1 to 21, wherein the circumferential speed in operation of the circulating conveyor transport wheel is in a range of approximately 80 meters per minute to approximately 900 meters per minute.

[0258] Example 23 is the circulating conveyor transport wheel according to one of Examples 1 to 22, wherein at least one positive locking contour is provided to provide a rotary joint in engagement with the substrate carrier.

[0259] Example 24 is the circulating conveyor transport wheel according to one of Examples 1 to 23, wherein at least one positive locking contour is curved towards or away from an axis of rotation of the circulating conveyor transport wheel.

[0260] Example 25 is the circulating conveyor transport wheel according to one of Examples 1 to 24, wherein at least one positive locking contour of each of the plurality of coupling devices is curved towards or away from each other.

[0261] Example 26 is the circulating conveyor transport wheel according to any one of Examples 1 to 25, wherein each of the plurality of coupling devices has a fork or a bolt which provides the positive locking contour.

[0262] Example 27 is the circulating conveyor transport wheel according to any one of Examples 1 to 26, wherein each of the plurality of coupling devices has a locking device which can be brought into a first state and a second state, wherein in the first state a positive-locking coupling is locked with the substrate carrier and in the second state the locking is released, wherein, for example, more degrees of freedom of the coupling are blocked when the locking is engaged than when the locking is released; wherein, for example, the locking device has a lever for locking the coupling.

[0263] Example 28 is the circulating conveyor transport wheel according to Example 27, wherein each of the plurality of coupling devices has a locking mechanism which is configured: to bring the locking device into the second state when the locking mechanism is actuated against its weight force; and / or to bring the locking device into the first state by means of the weight force.

[0264] Example 29 is the circulating conveyor transport wheel according to Example 28, wherein the locking mechanism is arranged to be actuated by means of a rotary movement of the circulating conveyor transport wheel.

[0265] Example 30 is the circulating conveyor transport wheel according to one of Examples 27 to 29, wherein each of the plurality of coupling devices (e.g. its locking device and / or its locking mechanism) is arranged such that the locking devices can be independently brought into the first state or the second state.

[0266] Example 31 is a circulating conveyor comprising: a circulating conveyor transport wheel according to one of Examples 1 to 30, a bearing arrangement by means of which the circulating conveyor transport wheel is rotatably mounted.

[0267] Example 32 is the circulating conveyor according to Example 31, wherein the circulating conveyor transport wheel provides a curved transport path along the circumference.

[0268] Example 33 is the circulating conveyor according to Example 31 or 32, wherein the circulating conveyor transport wheel is rotatably mounted about an axis of rotation, the axis of rotation running along a direction of gravity.

[0269] Example 34 is the circulating conveyor according to one of Examples 31 to 33, further comprising: at least one substrate carrier for carrying one or more than one substrate, which is, for example, arranged according to one of Examples 50 to 74.

[0270] Example 35 is a conveying arrangement comprising: a circulating conveyor according to one of Examples 31 to 34, a first linear conveyor for providing a transport path towards the circulating conveyor transport wheel and / or a second linear conveyor for providing a transport path away from the circulating conveyor transport wheel, wherein the first linear conveyor and / or the second linear conveyor are configured according to one of Examples 76 to 87.

[0271] Example 36 is the conveying arrangement according to Example 35, wherein the transport path is redirected from the first linear conveyor to the second linear conveyor by means of the circulating conveyor transport wheel.

[0272] Example 37 is the conveying arrangement according to Example 35 or 36, wherein the circumference of the circulating conveyor transport wheel has a greater length than the first linear conveyor and / or the second linear conveyor.

[0273] Example 38 is the conveying arrangement according to one of Examples 35 to 37, further comprising: a synchronization mechanism which synchronizes a translation generated by the first linear conveyor and / or the second linear conveyor and a rotation of the circulating conveyor transport wheel.

[0274] Example 39 is the conveying arrangement according to one of Examples 35 to 38, wherein the transport path runs diagonally.

[0275] Example 40 is the conveying arrangement according to one of Examples 35 to 39, which is set up for bidirectional transport along the transport path.

[0276] Example 41 is the conveying arrangement according to one of Examples 35 to 40, further comprising: at least one switch which can be changed between two states, in a first state the switch provides a section of the transport path to or from the circulating conveyor transport wheel and in the second state interrupts the section of the transport path, wherein the at least one switch has a guide rail.

[0277] Example 42 is the conveying arrangement according to Example 41, wherein the at least one diverter has a first diverter which is arranged between the first linear conveyor and the circulating conveyor transport wheel, and / or wherein the at least one diverter has a second diverter which is arranged between the second linear conveyor and the circulating conveyor transport wheel.

[0278] Example 43 is the conveying arrangement according to Example 41 or 42, wherein the at least one diverter has an actuating mechanism which is configured to actuate the locking mechanism of the circulating conveyor transport wheel in the first state of the at least one diverter, wherein the actuating mechanism has, for example, a raised section (e.g., a ramp).

[0279] Example 44 is the conveying arrangement according to one of Examples 41 to 43, wherein the guide rail of at least one switch has a cantilever beam.

[0280] Example 45 is the conveying arrangement according to one of Examples 41 to 44, further comprising: a joint by means of which the guide rail of the at least one switch is rotatably mounted about an axis of rotation, wherein the axis of rotation of the switch is transverse to an axis of rotation of the circulating conveyor transport wheel.

[0281] Example 46 is the conveying arrangement according to one of Examples 41 to 45, further comprising: a gearbox which is configured to transmit a movement to the guide rail of the at least one switch, wherein the gearbox, for example, has a vacuum feedthrough.

[0282] Example 47 is a vacuum arrangement comprising: a conveying arrangement according to one of Examples 35 to 46, and a vacuum chamber in which the circulating conveyor transport wheel, the substrate carrier and / or the linear conveyor are arranged.

[0283] Example 48 is the vacuum arrangement according to Example 47, further comprising: several coating devices arranged around the circulating conveyor transport wheel.

[0284] Example 49 is the vacuum arrangement according to Example 47 or 48, further comprising: wherein the vacuum chamber has a chamber wall (e.g. configured as a chamber lid); wherein the vacuum chamber has, for example, a chamber opening which is sealed when the chamber lid and the vacuum chamber are joined together, wherein the chamber lid optionally has a housing in which one of the coating devices is received.

[0285] Example 50 is a substrate carrier according to the attached claim 15, comprising, among other things: several links which are connected to each other (e.g. in pairs) by means of a rotary connection (e.g. a hinge); and two slides arranged on opposite sides of the substrate carrier (e.g. top and bottom) for guiding the substrate carrier along a transport path.

[0286] Example 51 is a substrate carrier according to the attached claim 15 (e.g. the substrate carrier according to Example 50), further comprising: several coupling devices (also referred to as counter-coupling devices), of which, for example, each counter-coupling device is configured to be coupled to a coupling device of the plurality of coupling devices of the circulating conveyor transport wheel.

[0287] Example 52 is the substrate carrier according to Example 50 or 51, wherein at least one (i.e., one or more than one) of the two slides has a plurality of drive teeth, and / or wherein, for example, one (i.e., one or more than one) of the two slides has a rack (e.g., a pinion) which, for example, has the plurality of drive teeth.

[0288] Example 53 is the substrate carrier according to one of Examples 50 to 52, wherein at least one (e.g. two or each) of the two slides (e.g. each slide of the substrate carrier) has a plurality of bolts (which, for example, provide the drive teeth), each of which, for example, has a rotary bearing.

[0289] Example 54 is the substrate carrier according to one of Examples 50 to 53, wherein each of the multiple counter-coupling devices has a positive locking contour arranged between the two slides.

[0290] Example 55 is the substrate carrier according to one of Examples 50 to 54, wherein two positive locking contours of the multiple coupling devices are arranged offset from each other, e.g. next to each other, along the transport path of the substrate carrier, wherein the two positive locking contours are arranged, for example, on opposite sides of the transport path.

[0291] Example 56 is the substrate carrier according to one of Examples 50 to 55, wherein at least one positive locking contour of each of the several counter-coupling devices is arranged on one side of the substrate carrier, wherein, for example, a rotary axis of the rotary connection is arranged on that side.

[0292] Example 57 is the substrate carrier according to one of Examples 50 to 56, wherein the multiple counter-coupling devices along the transport path of the substrate carrier each have a distance from each other (e.g. in pairs).

[0293] Example 58 is the substrate carrier according to one of Examples 50 to 57, wherein the multiple counter-coupling devices are arranged equidistant from each other along the transport path of the substrate carrier.

[0294] Example 59 is the substrate carrier according to one of Examples 50 to 58, wherein the multiple counter-coupling devices comprise at least a first counter-coupling device and at least a second counter-coupling device, the positive locking contours of which are arranged laterally offset from each other to the transport path of the substrate carrier (for example, the positive locking contours are arranged side by side projected onto a surface that is arranged transversely to the transport path and between the positive locking contours), and / or the positive locking contours of which are spaced apart from each other (along a direction) transversely to the transport path of the substrate carrier.

[0295] Example 60 is the substrate carrier according to Example 59, wherein the at least one second counter-coupling device has two second counter-coupling devices arranged on opposite end faces of the substrate carrier.

[0296] Example 61 is the substrate carrier according to one of Examples 50 to 60, wherein at least one (e.g. two or each) of the two slides (e.g. each slide of the substrate carrier) has one or more than a pair of rotatably mounted rollers, the (e.g. parallel to each other) axes of rotation are arranged next to each other, wherein, for example, a gap is formed between the rollers or their axes of rotation, wherein, for example, the rollers or their axes of rotation have a distance from each other which is along a direction transverse to the axes of rotation.

[0297] Example 62 is the substrate carrier according to one of Examples 50 to 61, further comprising: a first extension along the transport path and a second extension perpendicular to the transport path, wherein the first extension and the second extension are substantially the same (e.g. differing from each other by less than 20%).

[0298] Example 63 is the substrate support according to one of Examples 50 to 62, wherein each of the several links has a frame and a substrate holding device attached thereto.

[0299] Example 64 is the substrate carrier according to one of Examples 50 to 63, wherein a first member of the several members has the two slides arranged on opposite sides of the first member (e.g. top and bottom).

[0300] Example 65 is the substrate carrier according to one of Examples 50 to 64, wherein the second member of the multiple members has two additional slides arranged on opposite sides of the second member (e.g. top and bottom).

[0301] Example 66 is the substrate carrier according to one of Examples 50 to 65, wherein the multiple counter-coupling devices have one counter-coupling device per link and have at least one additional counter-coupling device.

[0302] Example 67 is the substrate support according to one of Examples 50 to 66, wherein each swivel joint which couples two links together has a hinge or is formed from one.

[0303] Example 68 is the substrate support according to Example 67, wherein the hinge has several spatially separated hinge segments.

[0304] Example 69 is the substrate support according to one of Examples 50 to 68, wherein each rotary joint (e.g., each of the hinge segments) has a hinge pin which supports one of the several counter-coupling devices.

[0305] Example 70 is the substrate carrier according to one of Examples 50 to 69, wherein each of the multiple counter-coupling devices has a bolt or fork which provides the positive locking contour.

[0306] Example 71 is the substrate support according to Example 70, wherein the bolt tapers, e.g. by an angle of 10° (e.g. 3°) or less.

[0307] Example 72 is the substrate carrier according to one of Examples 50 to 71, wherein one or each rotary joint has a bolt which protrudes and provides one of the several counter-coupling devices.

[0308] Example 73 is the substrate carrier according to one of Examples 50 to 72, wherein each of the counter-coupling devices has a rotary bearing which rotatably supports the positive locking contour.

[0309] Example 74 is the substrate carrier according to one of Examples 50 to 73, wherein a length of the substrate carrier is less than 1 / 10 of the circumference of the circulating conveyor transport wheel, e.g. less than 1 / 20 of the circumference of the circulating conveyor transport wheel, e.g. less than 1 / 26 of the circumference of the circulating conveyor transport wheel.

[0310] Example 75 is a vacuum arrangement comprising: a substrate support according to one of Examples 50 to 74, and a vacuum chamber in which the substrate support is arranged.

[0311] Example 76 is a linear conveyor comprising: a longitudinally extended guide profile which provides a transport path for a substrate carrier according to the attached claim 15 (e.g. according to one of Examples 50 to 74); several bodies arranged and rotatably mounted on the guide profile, each body having a plurality of drive teeth for forming a toothing with the substrate carrier; a drive device for transmitting a torque to each of the several bodies, e.g. such that their drive teeth pass the guide profile at the same rate (in other words, at the same frequency).

[0312] Example 77 is the linear conveyor according to Example 76, wherein the bodies match in a tooth width of the plurality of drive teeth.

[0313] Example 78 is the linear conveyor according to Example 76 or 77, wherein the bodies are identical in diameter and / or circumference.

[0314] Example 79 is the linear conveyor according to one of Examples 76 to 78, where the bodies agree in a diameter pitch (corresponding to the tooth pitch divided by the number Pi) or a tooth pitch (corresponding to the distance between two adjacent teeth, also called circumferential pitch, for example measured in part of the circumference per tooth).

[0315] Example 80 is the linear conveyor according to Example 76 or 79, wherein the bodies match in a pitch circle diameter and / or rolling circle diameter.

[0316] Example 81 is the linear conveyor according to one of Examples 76 to 80, wherein the bodies agree in a number of the plurality of drive teeth.

[0317] Example 82 is the linear conveyor according to one of Examples 76 to 81, wherein each of the multiple bodies has a gear.

[0318] Example 83 is the linear conveyor according to one of Examples 76 to 82, wherein each of the multiple bodies is rotationally symmetric, e.g. with a countiness which corresponds to the number of multiple teeth.

[0319] Example 84 is the linear conveyor according to one of Examples 76 to 83, wherein each of the multiple bodies borders a straight line which runs along (e.g. parallel) to the guide profile and / or the transport path.

[0320] Example 85 is the linear conveyor according to one of Examples 76 to 84, wherein the guide profile has two segments between which one of the several bodies is arranged.

[0321] Example 86 is the linear conveyor according to one of Examples 76 to 85, wherein the multiple bodies projected along the transport path overlap each other.

[0322] Example 87 is the linear conveyor according to one of Examples 76 to 86, further comprising: a rail guide which has the guide profile.

[0323] Example 88 is a vacuum arrangement comprising a vacuum chamber and a linear conveyor arranged in the vacuum chamber according to one of Examples 76 to 87.

[0324] Example 89 is a method according to the appended claim 17, comprising, among other things: coupling a substrate carrier (e.g. configured according to one of Examples 50 to 74) to a circulating conveyor transport wheel (e.g. configured according to one of Examples 1 to 30) which is arranged in a vacuum; and / or uncoupling the substrate carrier from the circulating conveyor transport wheel which is arranged in the vacuum, wherein the coupling and uncoupling commence, for example, on the same side of the substrate carrier, wherein the substrate carrier has, for example, links coupled to one another by means of rotary joints.

[0325] Example 90 is a method according to the attached claim 17 (e.g., according to Example 89), comprising, among other things: guiding a substrate carrier (e.g., configured according to one of Examples 50 to 74) by means of a (e.g., longitudinally extended) guide profile of a linear conveyor along a transport path; generating a feed motion of the substrate carrier by means of a toothing (e.g., a pinion toothing) between the linear conveyor and the substrate carrier, wherein the toothing is provided, for example, between the substrate carrier and a linear conveyor which has the guide profile (and is, for example, configured according to one of Examples 76 to 87), wherein, for example, generating the feed motion comprises coupling or uncoupling the substrate carrier to a circulating conveyor transport wheel (e.g., configured according to one of Examples 1 to 30).

[0326] Example 91 is the method according to Example 89 or 90, wherein the substrate carrier is transported on different sections of a transport path before coupling and / or after uncoupling, wherein, for example, the different sections of the transport path are at an angle to each other and / or cross each other.

[0327] Example 92 is the method according to one of Examples 89 to 91, wherein the transport before coupling takes place towards the circulating conveyor transport wheel and the transport after uncoupling takes place away from the circulating conveyor transport wheel.

[0328] Example 93 is the method according to any one of Examples 89 to 92, further comprising: processing (e.g. coating with a coating material) one or more than one substrate which is carried by the substrate carrier coupled to the circulating conveyor wheel, wherein the circulating conveyor wheel is rotated during processing; wherein the processing (e.g. coating) of the substrate takes place along more than half (e.g. three-quarters) of a revolution per revolution of the circulating conveyor wheel.

[0329] Example 94 is the method according to one of Examples 89 to 93, wherein coupling the substrate carrier includes coupling several elements of the substrate carrier successively.

[0330] Example 95 is the method according to one of Examples 89 to 94, wherein coupling the substrate carrier includes locking the coupling of the substrate carrier to the circulating conveyor transport wheel.

[0331] Example 96 is the method according to one of Examples 89 to 95, wherein the circulating conveyor transport wheel rotates when the substrate carrier is uncoupled and / or coupled.

[0332] Example 97 is the method according to one of Examples 89 to 96, wherein the uncoupling of the substrate carrier includes releasing a locking mechanism of the coupling of the substrate carrier with the circulating conveyor transport wheel.

[0333] Example 98 is the method according to one of Examples 89 to 97, wherein the circulating conveyor transport wheel is rotatably mounted, e.g. about an axis of rotation aligned along the force of gravity.

Claims

[1] Circulating conveyor transport wheel (100), comprising: • a frame (102) on which the circulating conveyor transport wheel (100) can be rotatably mounted; • a plurality of coupling devices (104) which are arranged on an outer circumference of the frame (102) and of which each of the coupling devices has two positive-locking contours (104f) arranged one above the other for the positive coupling of a substrate carrier (400), • wherein the plurality of coupling devices (104) comprises a pair (302) of coupling devices (104) whose positive locking contours are arranged offset from one another along the circumference and are spaced apart from one another by a smaller distance along the circumference than from the positive locking contours of the plurality of coupling devices (104) which are immediately adjacent to the pair (302). [2] Circulating conveyor transport wheel (100) according to claim 1, wherein the form-fitting contours (104f) are each provided by means of a recess. [3] Circulating conveyor transport wheel (100) according to claim 1 or 2, wherein the plurality of coupling devices (104) comprise a plurality of pairs (302) of coupling devices (104), the positive engagement contours of each pair being spaced circumferentially from one another by a smaller distance than from the positive engagement contours of the plurality of coupling devices (104) arranged between the plurality of pairs (302). [4] Circulating conveyor transport wheel (100) according to one of claims 1 to 3, wherein the two form-fitting contours are arranged to provide a rotary joint in engagement with the substrate carrier. [5] Circulating conveyor transport wheel (100) according to one of claims 1 to 4, • wherein each of the coupling devices (104) has a locking device (1102) which can be brought into a first state and a second state, • wherein in the first state a positive coupling is locked to the substrate carrier (400) and in the second state the locking is released. [6] Circulating conveyor (900), comprising: • a circulating conveyor transport wheel (100) according to one of claims 1 to 5, • a bearing arrangement by means of which the circulating conveyor transport wheel (100) is rotatably mounted. [7] Circulating conveyor (900) according to claim 6, further comprising: • at least one substrate carrier (400) for carrying one or more than one substrate, • wherein the at least one substrate carrier (400) has a plurality of counter-coupling devices (414), each counter-coupling device (414) of which is configured to be coupled to a coupling device of the plurality of coupling devices (104). [8] Circulating conveyor (900) according to claim 7, wherein the at least one substrate carrier (400) has a drive rod (652). [9] Conveyor arrangement (1700), comprising: • a circulating conveyor (900) according to claim 7 or 8, and • a first linear conveyor (1702) for providing a transport path (111) to the circulating conveyor transport wheel (100). [10] Conveyor assembly (1700) according to claim 9, further comprising: • a second linear conveyor (1702) for providing a transport path away from the circulating conveyor transport wheel (100); • wherein the transport path (100) is diverted from the first linear conveyor (1702) to the second linear conveyor (1702) by means of the circulating conveyor transport wheel (100). [11] Conveyor arrangement (1700) according to claim 9 or 10, wherein the first linear conveyor (1702) and / or the second linear conveyor (1702) have a plurality of gears for driving a transport movement along the transport path. [12] Conveyor arrangement (1700) according to one of claims 9 to 11, wherein the transport path is cross-shaped. [13] Conveyor arrangement (1700) according to one of claims 9 to 12, wherein the first linear conveyor (1702) and / or the second linear conveyor (1702) each comprises: • an elongated guide profile (2210) which provides the transport path (111) for the substrate carrier (400); • a plurality of bodies (2212) arranged on the guide profile (2210) and rotatably mounted, each body (2212) having a plurality of drive teeth for forming a toothing with the substrate carrier (400); • a drive device (2706) for transmitting a torque to each of the plurality of bodies (2212). [14] Vacuum arrangement (1800), comprising: • a conveyor arrangement (1700) according to one of claims 9 to 13, and • a vacuum chamber (1802) in which the circulating conveyor transport wheel (100) is arranged. [15] Substrate carrier (400), comprising: • several links (402) which are connected to one another by means of a rotary connection (404); • two carriages (406) arranged on opposite sides of the substrate carrier (400) for guiding the substrate carrier (400) along a transport path (111); • a plurality of coupling devices (414), each coupling device having at least two positive locking contours arranged one above the other, which are arranged between the two carriages (406); • wherein two form-fitting contours (104f) of the plurality of coupling devices (104) are arranged offset from one another along the transport path of the substrate carrier (400). [16] Substrate carrier (400) according to claim 15, • wherein at least one of the two carriages (406) has a plurality of drive teeth. [17] Method (3200) for a substrate carrier according to claim 15 or 16, comprising: • coupling (3201) the substrate carrier (400) to a circulating conveyor transport wheel (100) which is arranged in a vacuum; • Uncoupling (3205) the substrate carrier (400) from the circulating conveyor transport wheel (100) which is arranged in the vacuum, • wherein the coupling and uncoupling start on the same side of the substrate carrier (400). [18] The method (3300) of claim 17, further comprising: • guiding (3301) the substrate carrier (400) by means of a guide profile (2210) of a linear conveyor (1702) along a transport path; • Driving (3303) a transport movement of the substrate carrier (400) by means of a toothing between the linear conveyor (1702) and the substrate carrier (400).

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