Protective element application device and protective element application method for applying a thermoplastic film

Abstract

A protective element attachment device (1) for attaching a thermoplastic resin film (210) to a front surface (201) of a substrate (200) having projections and recesses (202) on the side of the front surface (201), the protective element attachment device (1) comprising: a pressure reduction chamber (10) having an upper casing (11) and a lower casing (12) separable from the upper casing (11), a pressure reduction unit (13, 14) and a unit for opening to atmospheric air being connected to the upper casing (11) and the lower casing (12), respectively; a support table (20) provided in the lower casing (12) and to which the substrate (200) is attached; a film attachment section (30) for attaching the film (210) in such a manner that an interior space of the pressure reduction chamber (10) is projected into the side of the upper casing housing (11) and the side of the lower housing (12),when the upper housing (11) and the lower housing (12) are connected;a heating unit (40) which heats the film (210) to soften the film (210); and a control unit (50) that controls the pressure reduction chamber (10) and the heating unit (40) to reduce pressures in the upper housing (11) and the lower housing (12), and then softens the film (210) and brings it into close contact with the substrate (200) attached to the support table (20) by a pressure difference generated by opening the upper housing (11) to the atmospheric air, wherein the film fixing portion (30) comprises: an outer periphery fixing portion (31) that fixes an outer periphery of the film (210), and a transition fixing portion (31) that holds the portion of the film (210) facing the support table (20) from the side of the upper housing (11),and the film (210) is temporarily attached to the substrate (200) mounted on the support table (20) through a gap between the film (210) and the substrate (200), and the transitional attachment portion (31) is a support plate (34) provided on a lower surface thereof with a plastic layer (33) for holding the film (210) by an adhesive force, and the plastic layer (33) and the support plate (34) are formed with ventilation holes (35).

Claims

[1] A protective element attachment device (1) for attaching a thermoplastic film (210) to a front surface (201) of a substrate (200) having projections and recesses (202) on the side of the front surface (201), the protective element attachment device (1) comprising: a pressure reduction chamber (10) having an upper housing (11) and a lower housing (12) separable from the upper housing (11), wherein a pressure reduction unit (13, 14) and a unit for opening to atmospheric air are connected to the upper housing (11) and the lower housing (12), respectively; a support table (20) provided in the lower housing (12) and to which the substrate (200) is attached; a film fixing portion (30) for fixing the film (210) in such a manner that an interior of the pressure reduction chamber (10) is divided into the upper case (11) side and the lower case (12) side when the upper case (11) and the lower case (12) are connected; a heating unit (40) which heats the film (210) to soften the film (210); and a control unit (50) which controls the pressure reduction chamber (10) and the heating unit (40) to reduce pressures in the upper housing (11) and the lower housing (12), and then softens the film (210) and brings it into close contact with the substrate (200) attached to the support table (20) by a pressure difference which is generated by opening the upper housing (11) to the atmospheric air, wherein the film fastening section (30) comprises: an outer periphery fixing portion (31) fixing an outer periphery of the film (210), and a transitional fixing portion (31) which holds the portion of the film (210) facing the support table (20) from the side of the upper case (11) and temporarily fixes the film (210) to the substrate (200) mounted on the support table (20) through a gap between the film (210) and the substrate (200), and the transition fixing portion (31) is a support plate (34) provided on a lower surface thereof with a plastic layer (33) for holding the film (210) by an adhesive force, and the plastic layer (33) and the support plate (34) are formed with ventilation holes (35). [2] The protective member attaching device (1) according to claim 1, wherein the heating unit (40) heats the support table (20). [3] A protective element attachment method for attaching a thermoplastic resin film (210) to a front surface (201) of a substrate (200) having projections and recesses (202) on the side of the front surface (201), using a protective element attachment device (1), the protective element attachment device (1) comprising: a pressure reduction chamber (10) comprising an upper housing (11) and a lower housing (12) separable from the upper housing (11), wherein a pressure reduction unit (13, 14) and a unit for opening to atmospheric air are connected to the upper housing (11) and the lower housing (12), respectively, a support table (20) provided in the lower housing (12) and to which the substrate (200) is attached, a film fixing portion (30) that fixes the film (210) in such a manner that an interior of the pressure reduction chamber (10) is divided into the upper case (11) side and the lower case (12) side when the upper case (11) and the lower case (12) are connected; a heating unit (40) which heats the film (210) to soften the film (210); and a control unit (50) which controls the pressure reduction chamber (10) and the heating unit (40) to reduce pressures in the upper housing (11) and the lower housing (12), and then softens the film (210) and brings it into close contact with the substrate (200) attached to the support table (20) by a pressure difference which is generated by opening the upper housing (11) to the atmospheric air, wherein the film fastening section (30) comprises: an outer periphery fixing portion (31) fixing an outer periphery of the film (210), and a transitional fixing portion (31) that holds the portion of the film (210) facing the support table (20) from the side of the upper case (11) and temporarily fixes the film (210) to the substrate (200) attached to the support table (20) through a gap between the film (210) and the substrate (200), and wherein the transitional fixing portion (31) is a support plate (34) provided on a lower surface thereof with a plastic layer (33) for holding the film (210) by an adhesive force, wherein the plastic layer (33) and the support plate (34) are formed with ventilation holes (35), wherein the protective element attachment method comprises: a heating step (101) of operating the heating unit (40); a preparation step (102) of attaching the film (210) to the film attaching portion (30) and attaching the substrate (200) to the support table (20); a pressure reduction step (103) of connecting the upper case (11) and the lower case (12) and reducing pressures within the upper case (11) and the lower case (12) in a state in which the film (210) held by the transition fixing portion (31) on an upper side of the substrate (200) faces the substrate (200) after the heating step (101) and the preparation step (102) have been performed; and a step for closely contacting (104) the film (210), causing the pressure inside the upper case (11) to approach atmospheric pressure to set a difference in atmospheric pressure between the inside of the upper case (11) and the inside of the lower portion to be equal to or greater than a predetermined value, thereby causing the film (210) to be separated from the transition fixing portion (31) and brought into close contact with the substrate (200) after the pressure reducing step (103) has been carried out. [4] The protective member mounting method according to claim 3, wherein the step of closely contacting (104) the film (210) comprises: a preliminary close contact step (104-1) of causing the interior of the upper case (11) to approach atmospheric pressure and bringing a center of the film (210) into close contact with the substrate (200), and a final close contact step (104-2) of bringing the inside of the upper case (11) to atmospheric pressure to enlarge an area of close contact of the film (210), which was brought into close contact with the substrate (200) in the preliminary close contact step, from the center to the outside of the film (210).

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