Adapter unit, handling device, handling system and method for handling a component of a semiconductor technology system

Abstract

An adapter unit (1) for a handling device (13) for handling a component (14) of a semiconductor technology system (25) is shown and described, comprising: at least one primary interface (2) for connecting the adapter unit (1) to a movable handling unit (16), preferably a robot, for compensating a force on a component (14) of a semiconductor technology system (25), and at least one secondary interface (3) for connecting the adapter unit (1) to the component (14) of a semiconductor technology system (25) and / or to a carrying device (15) for carrying the component (14) of a semiconductor technology system (25).In order to enable simple and precise handling of a component (14) of a semiconductor technology system (25) with a large number of different components (14) and / or system types, it is proposed that the adapter unit (1) comprises a force and / or moment determining device (6) for determining a force and / or a moment acting on the adapter unit (1) and / or that the adapter unit (1) comprises a primary adapter element (7) and a secondary adapter element (8), wherein the primary adapter element (7) and the secondary adapter element (8) are connected in a way that allows movement, in particular displacement, relative to each other along a direction of movement (B).

Description

[0001] The present invention relates to an adapter unit for a handling device for handling a component of a semiconductor technology system comprising: at least one primary interface for connecting the adapter unit to a movable handling unit, preferably a robot, for compensating a force of a component of a semiconductor technology system, and at least one secondary interface for connecting the adapter unit to the component of a semiconductor technology system and / or to a carrying device for carrying the component of a semiconductor technology system.

[0002] The present invention further relates to a handling device for handling a component of a semiconductor technology system comprising: a movable handling unit for compensating a force of the component of a semiconductor technology system, an adapter unit, preferably according to one of claims 1 to 7, for connecting the handling unit to the component and / or to a carrying device for carrying the component.

[0003] The present invention further relates to a handling system for handling a component of a semiconductor technology system, comprising: a handling device for handling the component of a semiconductor technology system, and a carrying device for carrying the component of the semiconductor technology system.

[0004] The present invention further relates to a method for handling a component of a semiconductor technology system, comprising the following steps: a) providing a component of a semiconductor technology system, b) providing a handling system, preferably according to any one of claims 17 to 20, for handling the component, wherein the handling system comprises a handling device, preferably according to any one of claims 8 to 16, for handling the component and, preferably, a carrying device for carrying the component, c) connecting the handling device to the carrying device and / or the component, d) moving the component along a transport direction, preferably by means of the carrying device, e) compensating for at least one force exerted by the component along at least one compensating direction, preferably along at least two compensating directions, by means of the handling device, preferably obliquely to the transport direction.

[0005] Microlithography, as part of semiconductor technology, is used to manufacture microstructured components, such as integrated circuits. The microlithography process is carried out using a projection exposure system, which includes illumination optics and / or projection optics. The structure of a mask (reticule) illuminated by the illumination optics is projected by the projection optics onto a substrate, such as a wafer (especially a silicon wafer), coated with a photosensitive layer (photoresist) and positioned in the image plane of the projection optics. This transfers the mask structure onto the photosensitive coating of the substrate.

[0006] One of the goals in the development of projection exposure systems is to lithographically produce structures with increasingly smaller dimensions on the substrate, for example, to achieve higher integration densities in semiconductor devices. One approach is to work with shorter wavelengths of electromagnetic radiation. For example, optical systems have been developed that use electromagnetic radiation from the so-called "deep ultraviolet" (DUV) range, preferably with operating wavelengths in the range between 150 nm and 400 nm, in particular 365 nm, 248 nm, or 193 nm, or from the extreme ultraviolet (EUV) range, preferably with operating wavelengths in the range between 5 nm and 30 nm, in particular 13.5 nm.

[0007] To ensure that a semiconductor technology system achieves the desired results in the best possible way—for example, that a projection exposure system achieves the most precise exposure possible—it is necessary to move the system's components as precisely as possible to the desired position during installation or replacement. Furthermore, precise movement of a component during installation, removal, or replacement prevents damage to the component itself or to other components of the semiconductor technology system during the movement.

[0008] During installation or replacement, a multitude of individual devices are currently often used to handle and move components in semiconductor technology systems, depending on the specific component and / or system type. For example, when replacing a single component in a semiconductor system, one device is used to support the weight of the component being replaced, and another to guide the component to the desired position. With numerous different components to be replaced, and at least two devices required for each replacement, this results in an enormous number of devices needed for precise replacement.Furthermore, developing, manufacturing, and maintaining individual devices for handling and moving components for each component and each type of system incurs considerable costs, development, and production expenses. Therefore, there is a need to standardize at least some of the devices for handling and moving the components.

[0009] Against this background, the present invention is based on the objective of providing an adapter unit, a handling device, a handling system and a method for handling a component of a semiconductor technology system, which enables simple and precise handling of a component of a semiconductor technology system for a large number of different components and / or system types.

[0010] The following describes various embodiments of the adapter unit, the handling device, the handling system and the method for handling a component of a semiconductor technology system, whereby the individual embodiments can be combined with each other as desired, regardless of whether they are described for the adapter unit, the handling device, the handling system and / or the method for handling a component of a semiconductor technology system.

[0011] The aforementioned problem is solved in the adapter unit by the fact that the adapter unit comprises a force and / or moment determining device for determining a force and / or a moment acting on the adapter unit and / or that the adapter unit comprises a primary adapter element and a secondary adapter element, wherein the primary adapter element and the secondary adapter element are connected in a way that allows movement relative to each other along a direction of movement, in particular being displaceable.

[0012] The adapter unit for a handling device for handling a component of a semiconductor technology system comprises: at least one primary interface for connecting the adapter unit to a movable handling unit, preferably a robot, for compensating for a force exerted by a component of a semiconductor technology system, and at least one secondary interface for connecting the adapter unit to the component of a semiconductor technology system and / or to a carrying device for supporting the component of a semiconductor technology system. The adapter unit, in particular the primary and secondary interfaces, allows a component to be handled or the carrying device supporting the component to be coupled, preferably connected, to a handling unit standardized for a variety of different components and / or system types.This simplifies the process of reducing the number of devices required for handling individual components. Alternatively or additionally, it is also conceivable to couple a standardized carrying device with a handling unit to achieve the same effect. The handling unit is preferably used to handle the component, ideally guiding it and compensating for unwanted forces, thus preventing unwanted movements, while simultaneously the carrying device supports the component and preferably bears the majority of its weight. The handling and transport of the component is thus divided between two different devices, the handling unit and the carrying device, which means that the handling unit, in particular, only has to withstand minimal loads. The adapter unit can be designed for use in a cleanroom.The primary interface can be designed to provide a detachable connection to the handling unit, and / or the secondary interface can be designed to provide a detachable connection to the component and / or the carrying device. This simplifies the mounting of the adapter unit to the handling unit or carrying device and also allows, for example, the connection between these components to be released in the event of an unwanted load on the handling unit, the carrying device, and / or the adapter unit, thus preventing overloading. Such an unwanted load could result, for example, from an unwanted force and / or movement of the component being handled. In the case of semiconductor technology, this could be, for example, a projection exposure system, a wafer inspection system, and / or a mask inspection system.

[0013] The adapter unit is also designed to include a force and / or torque measuring device for determining the force and / or torque acting on it. This simplifies the use of a single handling unit connected to the adapter unit for a wide variety of different components and / or system types. Since different components in semiconductor technology systems often have significantly different weights and / or are fed into the system via different transport paths, such as those of different shapes and / or lengths, it was previously generally necessary to use different handling units for each component, each suitable for its specific weight and / or transport path.The force and / or moment determination device of the adapter unit allows the movement of the component being handled to be determined and / or the load on the handling unit to be determined, for example, due to movement of the component. Based on these determinations, the handling unit can be moved precisely in sync with the component being handled. This prevents overloading of the handling unit, as it prevents, for example, the handling unit from being excessively or even at all burdened with the weight of the component due to a significant deviation in the movement of the component and / or support device from the movement of the handling unit.Alternatively or additionally, an impending overload, for example due to the weight of the component, can be detected in time by means of the force and / or torque measuring device, and the connection between the handling unit and the support device and / or component can be released. This prevents overloading of the handling unit. Due to at least one of these approaches, a single handling unit can be used for a large number of different components and / or system types, even if the handling unit is not fundamentally designed to withstand a load equivalent to the weight of the component being handled. The force and / or torque acting on the adapter unit can preferably be caused by movement of the component in the semiconductor technology system.The force and / or moment determination device can be designed to measure a force and / or a moment acting on the adapter unit and / or can include at least one measuring sensor, preferably for detecting a force and / or a moment.

[0014] Alternatively or additionally, the adapter unit is provided to comprise a primary adapter element and a secondary adapter element, wherein the primary and secondary adapter elements are connected in a way that allows them to be moved, in particular slidably, relative to each other along a direction of movement. This also simplifies the use of a handling unit connected to the adapter unit for a large number of different components and / or system types. Due to the movable design of the two adapter elements, a deviation in the movement of the handling unit and the component and / or carrying device during transport of the component does not directly lead to an overload of the handling unit. The deviation in movement then initially becomes a movement between the adapter elements and not directly a transmission of an unwanted force or moment to the handling unit.This provides a certain amount of time to readjust the movement of the handling unit. This variant is particularly suitable when the handling unit does not have immediate information about the component's movement, for example, because the handling unit's control system and the control system of the carrying device do not communicate with each other. Advantageously, the movement of the primary and secondary adapter elements relative to each other can be restricted, preferably locked, along at least one direction oblique to the direction of movement. This allows the carrying device and / or the component to be handled, and in particular guided, by the adapter unit, despite the adapter elements' fundamental mobility relative to each other, and compensates for unwanted forces and / or movements of the component.Advantageously, the primary adapter element and the secondary adapter element can be arranged to be movable, and in particular displaceable, relative to each other along only one direction of movement. This enhances the aforementioned effect. The adapter unit can comprise at least one linear guide, wherein the primary adapter element and the secondary adapter element are movable, preferably displaceable, relative to each other by means of the linear guide. This provides a structurally simple way to establish a movable connection between the adapter elements.

[0015] The terms “primary” and “secondary” are used in this disclosure solely to distinguish between different features, for example the primary adapter element and the secondary adapter element, and are not to be interpreted restrictively in principle, in particular with regard to the number and / or order of the features described therein, unless otherwise described in this disclosure.

[0016] In one embodiment of the adapter unit, the force and / or torque determination device is configured to provide at least one control signal, the control signal being based on a force and / or torque determined by the force and / or torque determination device. Based on this, a movement of the handling unit can then be controlled and / or a connection between the adapter unit and the handling unit, the component, and / or the support device can be released. This, in turn, prevents overloading of the handling unit and allows the use of a standardized handling unit for a variety of different components and / or system types.

[0017] In one embodiment of the adapter unit, the adapter unit comprises at least one spring element. This spring element is designed to align the position and / or orientation of the primary and secondary adapter elements relative to each other, preferably along the direction of movement. Furthermore, the spring element dampens movement between the primary and secondary adapter elements relative to each other, preferably along the direction of movement. Finally, the adapter unit includes a spring force measuring device for determining the spring force of the spring element. The spring element facilitates the damping of divergent movement between the two adapter elements, for example, due to divergent movements between the handling unit and the carrying device and / or the component.Furthermore, the spring element can be used to center and / or return the adapter elements to a desired position and / or orientation relative to each other. The adapter unit can comprise a plurality of spring elements. The at least one spring element, preferably the plurality of spring elements, can comprise at least one spring, preferably a plurality of springs. However, other configurations of the spring element are also conceivable, for example, without the use of springs. The spring element, preferably the plurality of spring elements, can be arranged on and / or between the primary adapter element and / or the secondary adapter element.The spring force measuring device allows the spring force of the spring element, preferably of the plurality of spring elements, to be determined, and the handling unit to be adjusted accordingly to reduce any deviation in the movement of the handling unit relative to the movement of the support device and / or the component. Specifically, when the primary and secondary adapter elements move relative to each other, the spring force of the spring element changes, so that the spring force is indicative of the position and / or orientation of the adapter elements, preferably relative to each other.

[0018] The spring force measuring device can comprise at least one measuring sensor, preferably for measuring a force, in particular spring force. Determining the force using the spring force measuring device can preferably include measuring it.

[0019] In the context of this disclosure, the “orientation” of an object, such as the primary adapter element, is understood to mean the angular position of the object with respect to one or more independent axes of rotation, while the “position” is understood to mean the arrangement of the object along independent spatial directions of a coordinate system.

[0020] In one embodiment of the adapter unit, the spring element is connected to the primary adapter element and / or the secondary adapter element, and / or the spring element is arranged at least partially between the primary and secondary adapter elements. This provides a structurally simple way to create a movable connection between the adapter elements.

[0021] In one embodiment of the adapter unit, the primary adapter element and the secondary adapter element are movable relative to each other along the direction of movement by at least 5 mm, preferably at least 15 mm, particularly at least 20 mm, and / or by a maximum of 100 mm, preferably at most 50 mm, particularly at most 25 mm. This provides sufficient freedom of movement to allow for a deviation between the handling unit and the carrying device and / or the component without overloading the handling unit, while simultaneously keeping the freedom of movement sufficiently limited to maintain a compact adapter unit even at maximum deflection. Advantageously, the direction of movement of the adapter unit, particularly when used in a handling device and / or a handling system, runs at least partially parallel to the vertical.This allows deviations in the movement of the handling unit relative to the carrying device and / or the component during movement, particularly lifting or lowering, without overloading the handling unit. The movement of the adapter elements along the direction of movement can occur relative to the target position and / or target orientation.

[0022] In one embodiment of the adapter unit, the adapter unit comprises at least one position measuring device. This position measuring device is configured to determine the position and / or orientation of the primary adapter element, the position and / or orientation of the secondary adapter element, the position and / or orientation of the primary adapter element relative to the secondary adapter element, and / or the position and / or orientation of the secondary adapter element relative to the primary adapter element. Preferably, the position measuring device is arranged on the primary adapter element and / or the secondary adapter element. This allows the movement of the adapter elements relative to each other to be determined, and the handling unit to be adjusted accordingly to reduce any deviation of the handling unit's movement relative to the movement of the support device and / or the component.The position measuring device can comprise at least one measuring sensor, preferably for measuring a position and / or orientation. Determining a position using the measuring device can preferably include measuring it.

[0023] In one embodiment of the adapter unit, the adapter unit, preferably the primary interface and / or the secondary interface, comprises at least one adapter unit coupling element for providing a detachable connection with the handling unit, the component, and / or the carrying device, and preferably the adapter unit coupling element is a component of a magnetic coupling or a magnetic coupling itself. This allows for a structurally simple disconnection of the connection between the adapter unit and the handling unit, the component, and / or the carrying device, thus preventing overloading of the handling unit. A magnetic coupling simplifies the quick disconnection process. Advantageously, the adapter unit may comprise at least two adapter unit coupling elements.Preferably, a primary adapter unit coupling element can be provided to provide a detachable connection with the handling unit, preferably at the primary interface, and / or a secondary adapter unit coupling element can be provided to provide a detachable connection with the component and / or the carrying device, preferably at the secondary interface.

[0024] The aforementioned problem is solved in the handling device by the fact that the handling device, preferably the handling unit, is configured to compensate for a force of the component of a semiconductor technology system to be handled by means of the handling device along at least one compensating direction, preferably along at least two compensating directions.

[0025] The handling device for handling a component of a semiconductor technology system comprises: a movable handling unit for compensating for forces exerted by the component. The handling unit is designed to counteract unwanted forces on the component being transported, thereby preventing unwanted movements, such as the component swinging at an angle to the transport direction, and thus simplifying precise component assembly. The handling unit can therefore actively guide the component. The handling device, preferably the adapter unit and / or the handling unit itself, may be designed for use in a cleanroom.The handling unit can be designed, in particular, to compensate for a force acting obliquely to the transport direction and / or vertical, so that unwanted forces are compensated for during transport of the component along the transport direction and / or vertical, and thus unwanted movements are prevented.

[0026] The handling device also includes an adapter unit, preferably according to one of claims 1 to 7, for connecting the handling unit to the component and / or to a carrying device for carrying the component. This achieves the effects mentioned in connection with the adapter unit described above.

[0027] The handling device is further designed to compensate for a force exerted by the component of a semiconductor technology system being handled by the handling device along at least one compensating direction, preferably along at least two compensating directions. This allows unwanted forces on the component being transported to be compensated for, thus simplifying precise assembly of the component. Since the handling unit is preferably designed primarily to compensate for a force exerted by the component and not primarily to absorb the component's weight, it can be used for a variety of different components and / or system types.According to the present disclosure, balancing a force preferably means compensating for a force and, more preferably, preventing movement of the component along the direction of the compensated force. Balancing a force can be achieved by applying a counterforce and / or countermovement. The handling device can be configured, when balancing a force along at least one compensating direction, preferably along at least two compensating directions, to allow movement of the component by a distance of at most 4 mm, more preferably at most 3 mm, more preferably at most 2 mm, more preferably at most 1 mm, more preferably at most 0.5 mm, and in particular at most 0.25 mm, along the at least one compensating direction, preferably the at least two compensating directions. This simplifies particularly precise assembly of the component.The handling device can alternatively or additionally be configured to allow movement of the component to be handled by the handling device exclusively in one direction, preferably the transport direction described below. This also simplifies precise assembly. The at least one compensating direction, preferably the at least two compensating directions, can extend at least partially obliquely to the vertical and / or the transport direction.

[0028] In one embodiment of the handling device, the handling unit comprises at least one handling unit coupling element for providing a detachable connection with the adapter unit, and / or the adapter unit comprises at least one adapter unit coupling element for providing a detachable connection with the handling unit, the component, and / or the carrying device. This allows the individual components to be connected quickly and easily. Furthermore, the coupling elements also allow the components to be quickly disconnected, thus preventing overloading of the handling unit. Advantageously, the adapter unit may comprise at least two adapter unit coupling elements.Preferably, a primary adapter unit coupling element can be provided to establish a detachable connection with the handling unit, and / or a secondary adapter unit coupling element can be provided to establish a detachable connection with the component and / or the carrying device. The primary adapter unit coupling element can be located on the primary adapter element, and / or the secondary adapter unit coupling element can be located on the secondary adapter element. The handling unit coupling element and / or the adapter unit coupling element can preferably each be a component of a magnetic coupling or a magnetic coupling itself. Magnetic couplings simplify the quick establishment and detachment of a connection.

[0029] In one embodiment of the handling device, the device includes a handling device control unit, preferably configured to change the position and / or orientation of the handling unit and / or the adapter unit. This simplifies the precise compensation of a force exerted by the component using the handling unit. Furthermore, it simplifies the prevention of overloading the handling unit, as the handling unit can be moved more easily and precisely along with the component and / or the carrying device by means of the handling device control unit. Alternatively or additionally, an impending overload of the handling device can be detected more quickly and precisely, and a detachable connection can be released to prevent the overload.

[0030] In one embodiment of the handling device, the handling device, preferably the adapter unit and / or the handling unit itself, is provided with a force and / or torque measuring device for determining a force and / or a torque acting on the handling device, preferably on the adapter unit and / or the handling unit. As already explained in relation to the adapter unit, a force and / or torque measuring device can determine the movement of the component to be handled and / or the load on the handling unit, for example, caused by movement of the component. This allows the handling unit to be moved precisely along with the component and / or the carrying device, and alternatively or additionally, an overload of the handling unit can be determined.The adapter unit and / or the handling unit can each have a corresponding force and / or torque measuring device. If both the adapter unit and the handling unit have such a measuring device, the determination of a force and / or torque acting on the adapter unit and / or handling unit becomes even more precise and can be carried out even if one of the force and / or torque measuring devices fails. Such fail-safe operation is particularly ensured if at least one of the force and / or torque measuring devices, preferably both force and / or torque measuring devices, measures coaxially with the other force and / or torque measuring device.In the case of the force and / or torque determination device of the handling unit, a force and / or a torque acting on the handling unit can preferably be determined based on the current consumption of the handling unit's drive. Alternatively or additionally, the force and / or torque determination device of the adapter unit and / or handling unit can each comprise at least one measuring sensor, preferably for measuring a force and / or a torque.

[0031] In one embodiment of the handling device, the handling device, preferably the handling device control unit, is configured to release the releasable connection by means of the handling unit coupling element and / or the adapter unit coupling element when a threshold value of a force and / or torque acting on the handling device, preferably on the handling unit and / or adapter unit, preferably caused by the component, is exceeded. This prevents overloading of the handling unit. The releasable connection by means of the adapter unit coupling element can preferably be a connection by means of the primary adapter unit coupling element and / or the secondary adapter unit coupling element.The threshold value is preferably a force and / or a moment and can advantageously be at most 500 N, more preferably at most 250 N, more preferably at most 100 N, more preferably at most 50 N, in particular at most 25 N, and / or at most 25 Nm, more preferably at most 20 Nm, more preferably at most 15 Nm, more preferably at most 10 Nm, more preferably at most 5 Nm, in particular at most 1 Nm. Alternatively or additionally, the threshold value is at most the force and / or moment load limit, preferably the load capacity, of the handling unit. A threshold value that is as low as possible reduces the probability of damage to the handling device, preferably the handling unit and / or adapter unit, due to overloading.

[0032] In one embodiment of the handling device, the handling device, preferably the handling device control unit, is configured to release the detachable connection by means of the handling unit coupling element and / or the adapter unit coupling element based on a force and / or torque determined by the force and / or torque measuring device of the adapter unit and / or the handling unit. This allows for the reliable detection and prevention of an impending overload of the handling unit. Preferably, the determined force and / or torque is used to determine whether a threshold value of a force and / or torque acting on the handling unit and / or adapter unit, preferably caused by the component, has been exceeded.

[0033] In one embodiment of the handling device, the handling device, preferably the handling device control unit, is configured to counteract a force exerted by the component based on a force and / or torque determined by the force and / or torque determination device of the adapter unit and / or the handling unit. This allows for particularly precise control of the handling unit. The counteracting of the component's force is preferably achieved by means of the handling device, more preferably by means of a counterforce and / or countermovement.

[0034] In one embodiment of the handling device, it is provided that the handling device, preferably the handling device control, is configured to move the handling unit and / or the adapter unit along at least one direction of movement with the component, wherein preferably the movement of the handling unit and / or adapter unit differs from the movement of the component and / or carrying device along the direction of movement by a maximum of 100 mm, preferably a maximum of 50 mm, and in particular a maximum of 25 mm, and / or that the handling device, preferably the handling device control, is configured to move the primary adapter element and the secondary adapter element relative to each other along the direction of movement by a maximum of 100 mm, preferably a maximum of 50 mm, and in particular a maximum of 25 mm.This ensures that the movement of the handling unit and / or adapter unit does not deviate from the movement of the component and / or the carrying device in such a way as to overload the handling unit. The direction of movement can preferably extend at least partially parallel to the direction of movement, the transport direction, and / or the vertical.The handling device, preferably the handling device control, can preferably be configured, based on at least one piece of information, preferably at least one control piece of information, from the spring force measuring device, the position measuring device, the force and / or torque determining device of the handling unit and / or the force and / or torque determining device of the adapter unit, to move the handling unit and / or the adapter unit along the direction of movement with the component and / or the carrying device and / or to move the primary adapter element and the secondary adapter element along the direction of movement relative to each other.

[0035] In one embodiment of the handling device, the handling unit comprises a robot, preferably an industrial robot, and / or is movable along at least two degrees of freedom, preferably at least four degrees of freedom, and in particular at least six degrees of freedom. This allows for a highly mobile and simultaneously precise handling unit. The handling unit is advantageously a robot, preferably an industrial robot. The handling unit is preferably movable along at least one rotational degree of freedom, preferably at least three rotational degrees of freedom, and / or along at least one translational degree of freedom, preferably at least three translational degrees of freedom. This simplifies the balancing of a force on the component along a multitude of balancing directions.

[0036] The aforementioned problem is solved in the handling system by the fact that the handling device is a handling device according to one of claims 8 to 16.

[0037] The handling system for handling a component of a semiconductor technology system comprises: a handling device for handling the component of the semiconductor technology system, and a carrying device for carrying the component of the semiconductor technology system, wherein the handling device is a handling device according to any one of claims 8 to 16. The handling device, in particular the handling unit, is preferably used to handle the component, preferably to guide it and to compensate for unwanted forces and thus prevent unwanted movements, while at the same time the carrying device carries the component and thus preferably absorbs the majority of the component's weight.The handling and transport of the component is thus divided between two different devices: the handling device, in particular the handling unit, and the carrying device. This means that the handling unit, in particular, only needs to withstand minimal loads. Therefore, the handling device, especially the handling unit, can be used for a variety of different components and / or system types. Preferably, the handling system can also include a component of a semiconductor technology system, wherein the component is preferably designed to be handled, preferably guided, by the handling device and / or carried by the carrying device.The handling system, preferably the adapter unit, the handling unit, and / or the carrying device, can be designed for use in a cleanroom. The carrying device preferably comprises at least one carrying device coupling element for providing a detachable connection with the adapter unit, preferably by means of the adapter unit coupling element, in particular the secondary adapter unit coupling element. This allows the handling device to be easily and detachably connected to the carrying device, and this detachable connection can also be used to protect the handling unit from overload.

[0038] In one embodiment of the handling system, the carrying device comprises a crane, a lifting beam, and / or a support structure for carrying the component. Preferably, the crane can be connected to the lifting beam and / or the support structure, preferably detachably, and / or the lifting beam and / or the support structure can be connected to the adapter unit, preferably detachably. This provides an easy-to-use and flexible carrying device. Advantageously, the lifting beam is a crane beam. The lifting beam and / or the support structure can be connected to the component, preferably detachably, and / or the lifting beam can be connected to the support structure, preferably detachably. This simplifies the handling and flexible use of the components of the carrying device.Advantageously, it is also provided that the respective components are not only, preferably detachably, connectable or can be, preferably detachably, joined, but are also, preferably detachably, connected to each other.

[0039] In one embodiment of the handling system, the system includes a carrying device control unit, and preferably, the carrying device control unit is configured to change the position and / or orientation of the carrying device and / or does not communicate with the handling device control unit. The ability to change the position and / or orientation via the carrying device control unit allows for precise transport of the component, thus simplifying its precise assembly. Because the carrying device control unit does not communicate with the handling device control unit, the handling device, particularly the handling unit, can be used with a multitude of carrying devices without requiring complex coupling of the control units.Thus, the handling device, in particular the handling unit, can be designed separately from the carrying device and transported flexibly from one place of use to another, and used with carrying devices available at the place of use, for example cranes permanently mounted at the place of use.

[0040] In one embodiment of the handling system, the carrying device, preferably the lifting beam, is provided with a protective element for redirecting airflow around the component being carried and / or for protecting the component from contamination. Preferably, at least one handle is arranged outside the projection surface of the component being carried. This protects the component, particularly in a cleanroom, from the deposition of falling dust and / or other substances. A suitably positioned handle, for example, provides a contact point for an operator, minimizing the risk of dust or other substances falling from the protective plate onto the component being carried when manually handling the lifting beam.The component to be supported is preferably the previously described component of a semiconductor technology system. The lifting beam, which is preferably a crane beam, can comprise at least one protective plate and / or a frame structure, preferably X-shaped or H-shaped. The protective plate preferably extends at least partially, and in particular completely, beyond the projection surface of the component to be supported by the lifting beam. In other words, the protective plate completely covers the component to be supported. The protective plate can be arranged on the frame structure. The at least one handle element can preferably include at least one through-opening and / or be arranged on the protective plate. This simplifies manual handling of the lifting beam and the component to be supported by it, for example, when the support device is detached from the handling unit.The protective plate can be made of metal and / or plastic, at least in sections, and / or be transparent, at least in sections. The use of metal provides a rigid and stable lifting beam. Plastic, on the other hand, is relatively lightweight and allows the protective plate to be transparent. Because the protective plate is transparent, it allows visibility through it, thus reducing the risk of collision, particularly when handling the lifting beam by hand. A connection unit for attaching it to a crane can be provided on the lifting beam. The lifting beam, preferably a crane beam, designed according to this embodiment can also be provided and used independently of the handling system described herein, and thus as a standalone lifting beam, preferably a crane beam.

[0041] The aforementioned task is further solved by the sophisticated method for handling a component of a semiconductor technology system.

[0042] The procedure for handling a component of a semiconductor technology system comprises the following step: a) Providing a component of a semiconductor technology system. The component may be a component of a projection exposure system, a wafer inspection system, and / or a mask inspection system.

[0043] The method further comprises the following step: b) providing a handling system, preferably according to one of claims 17 to 20, for handling the component, wherein the handling system comprises a handling device, preferably according to one of claims 8 to 16, for handling the component and, preferably, a carrying device for carrying the component. The carrying device may preferably be the carrying device already described above, particularly in connection with the handling system. The handling device preferably comprises a handling unit and / or an adapter unit.The handling device, in particular the handling unit, is preferably used to handle the component, ideally to guide it, and to compensate for unwanted forces, thus preventing unwanted movements, while simultaneously the carrying device supports the component and thus preferably absorbs the majority of its weight. The handling and transport of the component is therefore divided between two different devices: the handling device, in particular the handling unit, and the carrying device. This means that the handling unit, in particular, only needs to withstand minimal loads. Consequently, the handling device, in particular the handling unit, can be used for a wide variety of different components and / or system types.

[0044] The method further comprises the following step: c) Connecting the handling device to the carrying device and / or the component. This can be done, for example, during installation, removal, and / or replacement of the component. In step c), the connection can be made using the adapter unit and / or the at least one adapter unit coupling element, preferably the primary adapter unit coupling element and / or the secondary adapter unit coupling element, the carrying device coupling element, and / or the handling unit coupling element. Before and / or after step c), the component, the handling device (preferably the handling unit and / or the adapter unit), and / or the carrying device can be aligned relative to each other. This simplifies precise transport of the component. Advantageously, step c) is performed after step a) and / or after step b).

[0045] The method further comprises the following step: d) Moving the component along a transport direction, preferably by means of the carrying device. This allows the component to be moved away from a specific position and / or towards a specific position. In step d), the movement can preferably take place exclusively along the transport direction. The transport direction can extend at least partially parallel to the vertical and / or the direction of movement. In step d), it can be provided that the carrying device absorbs at least partially, preferably predominantly, the weight of the component. This allows the handling unit to be used relatively independently of the weight of the component to be carried and thus be used for a large number of different components and / or system types. Advantageously, step d) takes place after step a), after step b), and / or after step c).

[0046] The method further comprises the following step: e) balancing at least one force of the component along at least one balancing direction, preferably along at least two balancing directions, by means of the handling device, preferably obliquely to the transport direction. The balancing can be based on at least one piece of information, preferably at least one control piece of information, from the spring force measuring device, the position measuring device, the force and / or torque determination device of the handling unit, and / or the force and / or torque determination device of the adapter unit. This simplifies precise balancing. Preferably, in step e), the balancing of at least one force of the component is carried out by means of the handling unit. Advantageously, step e) is carried out after step a), after step b), and / or after step c).Alternatively or additionally, step e) is preferably carried out during step d).

[0047] In one embodiment of the method, it is provided that in steps d) and / or e) a connection between the handling device and the carrying device, preferably a connection between the handling unit and the adapter unit and / or a connection between the adapter unit and the carrying device, and / or a connection between the handling device and the component, preferably a connection between the handling unit and the component and / or a connection between the adapter unit and the component, is released when a force and / or moment acting on the handling device, preferably the handling unit and / or adapter unit, preferably caused by the component, exceeds a threshold value. This prevents overloading of the handling unit.The connection to be released is the connection made in step c). The releaseable connection is preferably a connection made by means of the adapter unit coupling element, preferably the primary adapter unit coupling element and / or the secondary adapter unit coupling element, the carrying device coupling element, and / or the handling unit coupling element. The threshold value is preferably a force and / or a torque and can advantageously be at most 500 N, more preferably at most 250 N, more preferably at most 100 N, more preferably at most 50 N, in particular at most 25 N, and / or at most 25 Nm, more preferably at most 20 Nm, more preferably at most 15 Nm, more preferably at most 10 Nm, more preferably at most 5 Nm, in particular at most 1 Nm.Alternatively or additionally, the threshold value is at most the force and / or moment load limit, preferably the load capacity, of the handling unit. A threshold value that is as low as possible reduces the probability of damage to the handling device, preferably the handling unit and / or adapter unit, due to overloading.

[0048] In one embodiment of the method, it is provided that in steps d) and / or e) the handling unit and / or adapter unit is moved along at least one direction of movement together with the carrying device and / or component, and / or that the carrying device and / or component is moved along at least one direction of movement together with the handling unit and / or adapter unit. This ensures, firstly, that the component is guided precisely, and in particular that any unwanted force is reliably compensated. Secondly, it prevents the handling unit from being overloaded due to a deviation in the movement of the handling unit and the component and / or carrying device.When moving in tandem, the movement of the handling unit and / or adapter unit may deviate from the movement of the component and / or carrying device along the direction of movement by a maximum of 100 mm, preferably a maximum of 50 mm, and in particular a maximum of 25 mm. This ensures that the movement of the handling unit and / or adapter unit does not deviate from the movement of the component and / or carrying device to such an extent that the handling unit becomes overloaded.

[0049] One embodiment of the method is characterized by at least one of the following steps: f) detaching and / or separating the component from a semiconductor technology system, and / or g) connecting and / or arranging the component on a semiconductor technology system. Step f) may preferably be performed before, during, and / or after step c) and / or before step d) and / or before step e). Step g) may preferably be performed after step d) and / or after step e).

[0050] Further features and advantages of the adapter unit, the handling device, the handling system and the method for handling a component of a semiconductor technology system will become apparent from the following description of exemplary embodiments, with reference to the accompanying drawing.

[0051] The drawing shows Fig. 1a to 1b a first embodiment of an adapter unit in a front view and a side view, Fig. 2a to 2b a second embodiment of an adapter unit in a perspective view and a cutaway side view, Fig. 3 a handling system in a front view and Fig. Figures 4a to 4b show a first embodiment and a second embodiment of a lifting traverse in a top view.

[0052] Fig. Figures 1a to 1b show a first embodiment of an adapter unit 1 in a front view ( Fig. 1a) and a side view ( Fig. 1b) The adapter unit 1 comprises a primary interface 2 for connecting the adapter unit 1 to a movable handling unit for compensating a force of a component of a semiconductor technology system and a secondary interface 3 for connecting the adapter unit 1 to a component of a semiconductor technology system and / or to a carrying device for carrying the component of a semiconductor technology system.

[0053] In the illustrated embodiment, the primary interface 2 comprises a primary adapter unit coupling element 4, and the secondary interface 3 comprises a secondary adapter unit coupling element 5. The primary adapter unit coupling element 4 and the secondary adapter unit coupling element 5 each form part of a magnetic coupling. However, the connection to the handling device, the component, and / or the carrying device can also be made using only a coupling or in another manner.

[0054] In order to determine the forces and / or moments acting on the adapter unit 1, a force and / or moment determination device 6 is also provided on the adapter unit for determining a force and / or a moment acting on the adapter unit 1.

[0055] Fig. Figures 2a to 2b show a second embodiment of an adapter unit 1 in a perspective view ( Fig. 2a) and a sectional side view ( Fig. 2b). In the following, particular attention will be paid to the differences compared to adapter unit 1 of the first embodiment according to Fig. 1a to 1b received. Components of the adapter unit of the Fig. 2a to 2b, the components of adapter unit 1 of the Fig. 1. These correspond to the corresponding reference symbols.

[0056] The adapter unit 1 of the second embodiment comprises a primary adapter element 7 and a secondary adapter element 8, wherein the primary adapter element 7 and the secondary adapter element 8 are connected in a manner movable relative to each other along a direction of movement B.

[0057] The in Fig. The adapter unit 1 of the second embodiment shown in 2a to 2b comprises, like the adapter unit 1 of the first embodiment, a force and / or torque determining device 6, wherein the second embodiment, due to the movable arrangement of the primary adapter element 7 and the secondary adapter element 8, can also be used without a force and / or torque determining device 6 to avoid overloading a handling unit connected to the adapter unit 1.

[0058] The illustrated adapter unit 1 has two spring elements 9 in the form of coil springs, wherein the spring elements 9 align the primary adapter element 7 and the secondary adapter element 8 relative to each other in their position and / or orientation. In the Fig. 2a and Fig. In the position shown in Figure 2b, the adapter elements 7 and 8 are in their intended position and orientation. If the primary adapter element 7 and the secondary adapter element 8 move differently from each other, for example, because a handling unit connected to the adapter unit 1 and a carrying device and / or component connected to the adapter unit 1 move differently relative to each other, overloading of a handling unit attached to the adapter unit 1 can be avoided. After readjusting the movement of the handling unit, the spring element 9 can then re-center the adapter elements 7 and 8 relative to each other along the direction of movement B. The primary adapter element 7 and the secondary adapter element 8 are movable relative to each other by approximately 50 mm, preferably 25 mm upwards and 25 mm downwards, along the direction of movement.The suspension element 9 is connected to the primary adapter element 7 and the secondary adapter element 8 and is arranged between the primary adapter element 7 and the secondary adapter element 8.

[0059] The adapter unit 1 also includes two linear guides 10, which also contribute to ensuring that the primary adapter element 7 and the secondary adapter element 8 can be moved precisely relative to each other. Furthermore, the linear guides 10 can be used to restrict, and in particular prevent, the primary adapter element 7 and the secondary adapter element 8 from moving relative to each other in a direction other than the direction of movement B.

[0060] The in Fig. 2a and Fig. The adapter unit 1 shown in Figure 2b also includes a position measuring device 11, which can be used to determine the position and / or orientation of the primary adapter element 7 relative to the secondary adapter element 8. In the illustrated embodiment, the position measuring device 11 is arranged on the secondary adapter element 8. Alternatively or additionally, the measuring device 11 shown can be a spring force measuring device, which can be used to determine the spring force of the spring element 9.

[0061] Fig. Figure 3 shows a handling system 12 in a front view. The handling system comprises a handling device 13 for handling the component 14 of a semiconductor technology system and a carrying device 15 for carrying the component 14. The handling device 13 in turn comprises a handling unit 16 for compensating a force on the component 14 and an adapter unit 1, in this case the adapter unit 1 according to the Fig. 2a to 2b. In the embodiment shown, a robot is used as the handling unit 16.

[0062] The handling unit 16 is used to compensate for unwanted forces on component 14 during transport by means of the carrying device 15, and thus to prevent unwanted movements of component 14, for example, movements not along the transport direction T, during transport. During transport, the carrying device 15 absorbs the majority of the component 14's weight. The handling and transport of component 14 is therefore divided between two different devices: the handling device 13, in particular the handling unit 16, and the carrying device 15. This means that the handling unit 16, in particular, only has to withstand minor loads. Therefore, the handling device 13, and especially the handling unit 16, can be used for a variety of different components 14 and / or system types.

[0063] To compensate for a force, especially an unwanted force, on component 14, the handling unit 16 is movable along three independent rotational and three independent translational degrees of freedom, whereby this is in Fig. 3 is indicated by several arrows. If a force of the component acts in a compensating direction A at an angle to the transport direction T, for example, parallel to the horizontal, the unwanted force is compensated by the handling unit 16. This compensation can be achieved, for example, by a counterforce and / or countermovement of the handling unit 16 along the compensating direction A.

[0064] To connect the handling unit 16 with the adapter unit 1 and the adapter unit 1 in turn with the carrying device 15, the handling unit 16 comprises a handling unit coupling element 17 for providing a detachable connection with the adapter unit 1 by means of the primary adapter unit coupling element 4. The adapter unit 1 is in turn detachably connected to the carrying device 15 by means of the secondary adapter unit coupling element 5 and a carrying device coupling element 18.

[0065] The handling device 13 also includes a handling device control 19, wherein the handling device control 19 can change the position and / or orientation of the handling unit 16 and thus of the adapter unit 1. During the transport of the component 14, the handling unit 16 can therefore be moved precisely along with the component 14 in the direction of movement M, preferably parallel to the transport direction T.

[0066] The handling unit 16, like the adapter unit 1, comprises a force and / or torque determination device 6 for determining a force and / or a torque acting on the handling unit 16. In the handling unit 16 of the illustrated embodiment, a force and / or a torque acting on the handling unit 16 is determined based on the current consumption of the drive 20 of the handling unit 16. If a threshold value of a force and / or torque acting on the handling unit 16 and / or adapter unit 1 is exceeded, for example, due to an unwanted force of component 14 along the compensating direction A, one of the detachable connections formed by means of the coupling elements 4, 5, 17, 18 can be released, thus preventing an overload of the handling unit 16.It is also possible, based on a force and / or moment determined by one of the force and / or moment determining devices 6, to compensate for a force on component 14 by means of the handling unit 16 and thus to prevent an unwanted movement of component 14.

[0067] In the illustrated embodiment, the support device 15 comprises a crane 21, a lifting beam 22, and a support structure 23, each of which is detachably connected to one another. However, it is also possible to permanently connect at least parts of the support device 15. Furthermore, the support device 15 includes a support device control unit 24 by means of which the position and / or orientation of the support device 15 can be selectively changed.

[0068] Using the carrying device 15 and the handling device 13, in particular the handling unit 16, the component 14 can then be precisely transported to a desired position on a semiconductor technology system 25 and positioned and installed there. It is also conceivable to transport a component 14 that is to be replaced away from the semiconductor technology system 25 in a similar manner.

[0069] Fig. Figures 4a to 4b show a first embodiment ( Fig. 4a) and a second embodiment ( Fig. 4b) a lifting traverse 22 in a respective top view. The lifting traverse 22 is preferably the one shown in Fig. 3 Lifting traverse shown 22.

[0070] The lifting traverse 22 includes a protective plate 26 for protection against dirt, for example dust and other substances. The protective plate 26 is arranged on a frame structure 27, wherein in the embodiment of the Fig. 4a around an H-shaped frame structure 27 and in the embodiment of the Fig. 4b is a section-shaped X-frame structure 27. The protective plate 26 extends completely beyond the projection surface 28 of the component 14 to be supported by the lifting traverse 22. The lifting traverse 22 also includes four handle elements 29 outside the projection surface 28, by which the lifting traverse 22 can be gripped by an operator. In the embodiments shown, the protective plate 26 is made of metal; however, it is also conceivable to manufacture the protective plate from transparent plastic. A connecting unit 30 for connecting the lifting traverse 22 to a crane 21 is also provided on the lifting traverse 22. Reference symbol list 1 adapter unit 2 primary interface 3 secondary interfaces 4 primary adapter unit coupling element 5 secondary adapter unit coupling element 6 Force and / or moment determining device 7 primary adapter element 8 secondary adapter element 9 Suspension element 10 linear guides 11 Position measuring device 12 Handling system 13 Handling device 14 components 15 Carrying device 16 handling units 17 Handling unit coupling element 18 Carrying device coupling element 19 Handling device control 20 Drive 21 crane 22 Habetraverse 23 Support structure 24 Carrying device control 25 Semiconductor technology system 26 Protective plate 27 Framework structure 28 projection surfaces 29 Handle element 30 connection unit A. Compensation direction B Direction of movement M Direction of movement T Transport direction

Claims

[1] Adapter unit (1) for a handling device (13) for handling a component (14) of a semiconductor technology system (25) comprising: - at least one primary interface (2) for connecting the adapter unit (1) to a movable handling unit (16), preferably a robot, for compensating a force of a component (14) of a semiconductor technology system (25), and - at least one secondary interface (3) for connecting the adapter unit (1) to the component (14) of a semiconductor technology system (25) and / or to a carrying device (15) for carrying the component (14) of a semiconductor technology system (25), characterized by, that the adapter unit (1) comprises a force and / or moment determining device (6) for determining a force and / or moment acting on the adapter unit (1) and / or that the adapter unit (1) comprises a primary adapter element (7) and a secondary adapter element (8), wherein the primary adapter element (7) and the secondary adapter element (8) are connected in a manner movable, in particular displaceable, along a direction of movement (B) relative to each other. [2] Adapter unit (1) according to claim 1, characterized by , that the force and / or moment determining device (6) is configured to provide at least one control information, wherein the control information is based on a force and / or moment determined by means of the force and / or moment determining device (6). [3] Adapter unit (1) according to claim 1 or claim 2, characterized by, that the adapter unit (1) comprises at least one suspension element (9) and that the suspension element (9) is provided for aligning the position and / or orientation of the primary adapter element (7) and the secondary adapter element (8) relative to each other, preferably along the direction of movement (B), that the suspension element (9) is provided for damping a movement of the primary adapter element (7) and the secondary adapter element (8) relative to each other, preferably along the direction of movement (B), and / or that the adapter unit (1) has a spring force measuring device for determining the spring force of the suspension element (9). [4] Adapter unit (1) according to claim 3, characterized by , that the suspension element (9) is connected to the primary adapter element (7) and / or the secondary adapter element (8) and / or that the suspension element (9) is arranged at least sectionally between the primary adapter element (7) and the secondary adapter element (8). [5] Adapter unit (1) according to any one of claims 1 to 4, characterized by that the primary adapter element (7) and the secondary adapter element (8) are movable relative to each other along the direction of movement (B) by at least 5 mm, preferably at least 15 mm, in particular at least 20 mm, and / or by at most 100 mm, preferably at most 50 mm, in particular at most 25 mm. [6] Adapter unit (1) according to any one of claims 1 to 5, characterized by, that the adapter unit (1) comprises at least one position measuring device (11), that the position measuring device (11) is configured to determine the position and / or orientation of the primary adapter element (7), the position and / or orientation of the secondary adapter element (8), the position and / or orientation of the primary adapter element (7) relative to the secondary adapter element (8) and / or the position and / or orientation of the secondary adapter element (8) relative to the primary adapter element (7), and that, preferably, the position measuring device (11) is arranged on the primary adapter element (7) and / or the secondary adapter element (8). [7] Adapter unit (1) according to any one of claims 1 to 6, characterized by, that the adapter unit (1), preferably the primary interface (2) and / or the secondary interface (3), comprises at least one adapter unit coupling element (4, 5) for providing a detachable connection with the handling unit (16), the component (14) and / or the carrying device (15) and that, preferably, the adapter unit coupling element (4, 5) is a component of a magnetic coupling or a magnetic coupling. [8] Handling device (13) for handling a component (14) of a semiconductor technology system (25) comprising: - a movable handling unit (16) for compensating a force on the component (14) of a semiconductor technology system (25), - an adapter unit (14), preferably according to one of claims 1 to 7, for connecting the handling unit (16) to the component (14) and / or to a carrying device (15) for carrying the component (14), characterized by, that the handling device (13), preferably the handling unit (16), is configured to compensate for a force of the component (14) of a semiconductor technology system (25) to be handled by means of the handling device (13) along at least one compensating direction (A), preferably along at least two compensating directions (A). [9] Handling device (13) according to claim 8, characterized by , that the handling unit (16) comprises at least one handling unit coupling element (17) for providing a detachable connection with the adapter unit (1) and / or the adapter unit (1) comprises at least one adapter unit coupling element (4,5) for providing a detachable connection with the handling unit (16), the component (14) and / or the carrying device (15). [10] Handling device (13) according to claim 8 or claim 9, characterized by, that the handling device (13) comprises a handling device control (19) and that, preferably, the handling device control (19) is configured to change the position and / or orientation of the handling unit (16) and / or the adapter unit (1). [11] Handling device (13) according to one of claims 8 to 10, characterized by , that the handling device (13), preferably the adapter unit (1) and / or the handling unit (16), has a force and / or moment determining device (6) for determining a force and / or a moment acting on the handling device (13), preferably on the adapter unit (1) and / or handling unit (16). [12] Handling device (13) according to one of claims 8 to 11, characterized by, that the handling device (13), preferably the handling device control (19), is configured to release the releasable connection by means of the handling unit coupling element (17) and / or the adapter unit coupling element (4, 5) when a threshold value of a force and / or moment acting on the handling device (13), preferably on the handling unit (16) and / or adapter unit (1), preferably caused by the component (14), is exceeded. [13] Handling device (13) according to one of claims 8 to 12, characterized by, that the handling device (13), preferably the handling device control (19), is configured to release the detachable connection by means of the handling unit coupling element (17) and / or the adapter unit coupling element (4,5) based on a force and / or moment determined by the force and / or moment determining device (6) of the adapter unit (1) and / or the handling unit (16). [14] Handling device (13) according to any one of claims 8 to 13, characterized by , that the handling device (13), preferably the handling device control (19), is configured to counteract a force of the component based on a force and / or moment determined by the force and / or moment determination device (6) of the adapter unit (1) and / or the handling unit (16). [15] Handling device (13) according to any one of claims 8 to 14, characterized by, that the handling device (13), preferably the handling device control (19), is configured to move the handling unit (16) and / or the adapter unit (1) along at least one direction of movement (M) with the component (14), wherein preferably the movement of the handling unit (16) and / or adapter unit (1) differs from the movement of the component (14) and / or carrying device (15) along the direction of movement (M) by a maximum of 100 mm, preferably a maximum of 50 mm, in particular a maximum of 25 mm, and / or that the handling device (13), preferably the handling device control (19), is configured to move the primary adapter element (7) and the secondary adapter element (8) along the direction of movement (B) by a maximum of 100 mm, preferably a maximum of 50 mm, in particular a maximum of 25 mm, relative to each other. [16] Handling device (13) according to any one of claims 8 to 15, characterized bythat the handling unit (16) comprises a robot, preferably an industrial robot and / or that the handling unit (16) is movable along at least two degrees of freedom, preferably at least four degrees of freedom, in particular at least six degrees of freedom. [17] Handling system (12) for handling a component (14) of a semiconductor technology system (25), comprising: - a handling device (13) for handling the component (14) of a semiconductor technology system (25), and - a carrying device (15) for carrying the component (14) of the semiconductor technology system (25), characterized by , that the handling device (13) is a handling device (13) according to one of claims 8 to 16. [18] Handling system (12) according to claim 17, characterized by, that the carrying device (15) comprises a crane (21), a lifting traverse (22) and / or a support structure (23) for carrying the component (14) and that, preferably, the crane (21) is connectable to the lifting traverse (22) and / or the support structure (23), preferably detachably, and / or the lifting traverse (22) and / or the support structure (23) is connectable to the adapter unit (1), preferably detachably. [19] Handling system (12) according to claim 17 or claim 18, characterized by , that the handling system (12) includes a carrying device control (24) and that, preferably, the carrying device control (24) is configured to change the position and / or orientation of the carrying device (15) and / or the carrying device control (24) does not communicate with the handling device control (19). [20] Handling system (12) according to any one of claims 17 to 19, characterized by, that the carrying device (15), preferably the lifting traverse (22), has a protective element for diverting an airflow around the component (14) to be carried by means of the carrying device (15) and / or for protecting the component (14) to be carried from contamination and that, preferably, at least one handle element (29) is arranged outside the projection surface (28) of the component (14) to be carried. [21] Method for handling a component (14) of a semiconductor technology system (25), comprising the following steps: a) Providing a component (14) of a semiconductor technology system (25), b) Providing a handling system (12), preferably according to one of claims 17 to 20, for handling the component (14), wherein the handling system (12) comprises a handling device (13), preferably according to one of claims 8 to 16, for handling the component (14) and, preferably, a carrying device (15) for carrying the component (14), c) Connecting the handling device (13) to the carrying device (15) and / or the component (14), d) Moving the component (14) along a transport direction (T), preferably by means of the carrying device (15), e) Compensating at least one force of the component (14) along at least one compensating direction (A), preferably along at least two compensating directions (A), by means of the handling device (13), preferably oblique to the transport direction (T). [22] Method according to claim 21, characterized by, that in step d) and / or e) a connection between the handling device (13) and the carrying device (15), preferably a connection between the handling unit (16) and the adapter unit and / or a connection between the adapter unit (1) and the carrying device (15), and / or a connection between the handling device (13) and the component (14), preferably a connection between the handling unit (16) and the component (14) and / or a connection between the adapter unit (1) and the component (1), is released when a force and / or moment acting on the handling device (13), preferably the handling unit (16) and / or adapter unit (1), preferably caused by the component (14), exceeds a threshold value. [23] Method according to claim 21 or claim 22, characterized by, that in step d) and / or e) the handling unit (16) and / or adapter unit (1) is moved together with the carrying device (15) and / or component (14) along at least one direction of movement (M) and / or that the carrying device (15) and / or component (14) is moved together with the handling unit (16) and / or adapter unit (1) along at least one direction of movement (M). [24] Method according to any one of claims 21 to 23, characterized by at least one of the following steps: f) Detaching and / or spacing the component (14) from a semiconductor technology system (25), and / or g) Connecting and / or arranging the component (14) on a semiconductor technology system (25).

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