Compound semiconductor substrate
DE112012007376B4Pending Publication Date: 2026-07-02SUMITOMO ELECTRIC INDUSTRIES LTD
Patent Information
- Application Number
- DE112012007376
- Authority / Receiving Office
- DE · DE
- Patent Type
- Patents
- Current Assignee / Owner
- Priority Date
- 2011-05-18
- Filing Date
- 2012-05-09
- Publication Date
- 2026-07-02
- Estimated Expiration
- 2032-05-09
Smart Images
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Abstract
A compound semiconductor substrate (1) comprising a natural oxide film and having a mirror-polished surface; wherein the mirror-polished surface is covered with a surfactant layer of an organic substance (20) containing hydrogen (H), carbon (C) and oxygen (O); wherein the film thickness of the surfactant layer, comprising the surfactant layer and the natural oxide film underlying the surfactant layer, is 1.5 nm or greater and 3.0 nm or less, as measured by an ellipsometer.
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Citation Information
Patent Citations
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