Pressure sensor and moving device with pressure sensor

Abstract

Pressure sensor (1, 1a, 1b), comprising: a sensing element (20) for detecting a pressure change; and a cover element (10) in which the sensing element (20) is received, and which is cuboid in shape;wherein a first through-hole (11a) and a second through-hole (11b) are each arranged in opposing side walls of the cover element (10) at a position which, in a front view of the respective hole, does not overlap with the detection element (20), characterized in that the cover element (10) comprises a wall section (12) which divides the interior of the cover element (10) into a first chamber (100) and a second chamber (200), and which has a communication opening which connects the first chamber (100) and the second chamber (200), the first through-hole (11a) and the second through-hole (11b) are arranged in the second chamber (200) of the cover element (10), and the detection element (20) is arranged in the first chamber (100).

Description

TECHNICAL AREA

[0001] The present invention relates to a pressure sensor and a moving device with a pressure sensor. TECHNICAL BACKGROUND ART

[0002] Pressure sensors are used to detect pressure. A pressure sensor comprises a pressure sensing element that detects a change in pressure, and a housing that protects the pressure sensing element. The pressure sensor housing has an inlet hole for allowing pressure to enter the housing. The atmospheric pressure outside the housing is drawn into the housing through the inlet hole, and the pressure sensing element detects the incoming pressure.

[0003] Patent document 1, for example, discloses a semiconductor pressure sensor comprising a pressure sensing element, a support for the pressure sensing element, and a housing having an inlet hole for the pressure to be measured by the pressure sensing element. The support is fixed to the housing, and the housing contains the pressure sensing element and the support. An elastic buffer element is incorporated into an adhesive that bonds the support and the housing together. The semiconductor pressure sensor according to patent document 1, by virtue of the adhesive in which the buffer element is incorporated, can absorb external forces and distortions, and can thus reduce a decrease in the accuracy of the pressure measurements when an external force or the like acts on the housing. PREVIOUSLY KNOWN DOCUMENTS PATENT DOCUMENTS

[0004] Patent Document 1: JP H10-325769A Outline of the invention; Problem to be solved by the invention

[0005] If an airflow enters the pressure sensor through the inlet hole, the airflow that has entered the pressure sensor can press on the pressure sensing element, or the atmospheric pressure in the pressure sensor can increase, thus reducing the accuracy of the pressure sensing with the pressure sensing element.

[0006] According to one aspect of the disclosed technology, a reduction in detection accuracy due to the penetration of an airflow into the pressure sensor is reduced. MEANS TO SOLVE THE PROBLEM

[0007] One aspect of the technology disclosed herein is illustrated by the pressure sensor described below. The pressure sensor comprises a sensing element for detecting a change in pressure, and a cover element in which the sensing element is received, and which has a first through-hole and a second through-hole, wherein the first through-hole and the second through-hole are each arranged in a position that, in a front view of the respective hole, does not overlap with the sensing element.

[0008] The pressure sensor according to the technology disclosed herein is a sensor that detects an external pressure introduced or admitted through a first through-hole and / or a second through-hole. The pressure to be measured by the pressure sensor is, for example, the atmospheric pressure around the cover element. Since the first and second through-holes are positioned so that they do not overlap the sensing element in a front view, an airflow entering the interior of the cover element through either the first or second through-hole is prevented from exerting direct pressure on the sensing element. Because the airflow entering the interior of the cover element through either the first or second through-hole escapes to the outside through the other through-hole, the pressure rise inside the cover element is reduced.As a result, the technology disclosed here reduces the decrease in sensing accuracy caused by airflow entering the pressure sensor. Furthermore, by arranging the first and second through-holes in this manner, the adhesion of dust, dirt, or similar contaminants to the sensing element is reduced compared to a pressure sensor where the inlet hole is located in an area that overlaps the sensing element in the front view of the inlet hole. Therefore, the technology proposed here reduces inaccurate pressure readings due to dust accumulation.

[0009] The disclosed technology can also feature the first and second through-holes being arranged opposite each other. With this feature, when an airflow enters the pressure sensor from either the first or second through-hole, the other through-hole is positioned downstream in the direction of airflow, allowing the airflow to easily escape to the outside through the other through-hole.

[0010] The disclosed technology may further feature that the cover element comprises a wall section that divides the interior of the cover element into a first chamber and a second chamber, and that has a communication opening connecting the first and second chambers, the first through-hole and the second through-hole being located in the second chamber of the cover element, and the sensing element being located in the first chamber. The communication opening may be a hole in the wall section or a gap between the wall section and the inner wall of the cover element. Since the inflow of an airflow that has flowed into the second chamber through the first through-hole or the second through-hole is blocked by the wall section, a pressure increase in the first chamber equipped with the sensing element can be reduced.

[0011] The disclosed technology can further feature that a surface normal on the opening of the first through-hole and a surface normal on the communication opening are orthogonal to each other, and a surface normal on the opening of the second through-hole and a surface normal on the communication opening are also orthogonal to each other. Since the first through-hole, the second through-hole, and the communication opening are arranged in this way, the direction of movement of the airflow entering from the first through-hole or the second through-hole is orthogonal to the direction connecting the first chamber and the second chamber via the communication opening, and the airflow entering from the first through-hole or the second through-hole can be prevented from entering the first chamber.

[0012] The disclosed technology can further include the feature that the sensing element is covered by a housing element containing an inlet hole, and the covering element receives the sensing element, which is covered by the housing element, in the first chamber. With this technology, it is possible to prevent a reduction in sensing accuracy due to an airflow entering the pressure sensor by covering the sensing element, which is covered by the housing element having the inlet hole, with the covering element.

[0013] The technology disclosed herein can also be applied to the pressure sensor and a moving device described above, wherein a means of locomotion is provided on a cover element in the pressure sensor. The means of locomotion of the moving device can also be a flying device. EFFECTS OF INVENTION

[0014] The pressure sensor presented here can reduce detection errors due to the influence of air currents. List of characters Fig. Figure 1A is a first diagram showing an example of the appearance of a pressure sensor according to an embodiment. Fig. 1B is a second diagram showing an example of the appearance of a pressure sensor according to an embodiment. Fig. 1C is a third diagram showing an example of the appearance of a pressure sensor according to an embodiment. Fig. 1D is a fourth diagram showing an example of the appearance of a pressure sensor according to an embodiment. Fig. 2 is an example of a cross-section along line AA in Fig. 1A. Fig. Figure 3 is a diagram showing the relative positions between through holes and a gap. Fig. Figure 4 is an example of a top-viewed pressure sensor as shown in a comparison example. Fig. Figure 5 is an example of a cross-section along line BB in Fig. 4. Fig. Figure 6 is a diagram that shows, by way of example, the airflow that flows from an inlet hole in the pressure sensor into the pressure sensor according to a comparative example. Fig. Figure 7 is a diagram illustrating the airflow that flows from a through-hole in the pressure sensor according to the embodiment into the pressure sensor. Fig. Figure 8 is a diagram showing a pressure sensor according to a first modification. Fig. Figure 9 is a first diagram showing a pressure sensor according to a second modification. Fig. Figure 10 is a second diagram showing a pressure sensor according to a second modification. Fig. Figure 11 is an example of a cross-section along line CC in Fig. 10. Fig. Figure 12 is a diagram showing an application example in which the pressure sensor is combined with a flow sensor according to the embodiment. FORMS OF EXECUTION OF THE INVENTION

[0015] The following describes embodiments with reference to the figures. The configurations described below are merely exemplary, and the disclosed techniques are not limited to the configurations shown in the embodiments. Application example

[0016] A pressure sensor according to an application example comprises a sensing element for detecting a pressure change and a cover element that houses and protects the sensing element. The cover element has a first through-hole and a second through-hole. The sensing element comprises, for example, a diaphragm and detects pressure based on the displacement of the diaphragm when pressurized. The cover element protects the sensing element from dust, dirt, and the like, as well as from impacts and the like. The cover element is made of, for example, plastic or metal. In the pressure sensor according to the application example, the pressure outside the cover element is introduced into the interior of the pressure sensor through the first and second through-holes.Since both the first and second through-holes are positioned so that they do not overlap the sensing element in a front view, the sensing element is protected from direct exposure to the airflow, even if air enters the pressure sensor through either the first or second through-hole. Furthermore, any airflow entering the pressure sensor from either the first or second through-hole is released to the outside through the other through-hole. Consequently, any increase in atmospheric pressure within the pressure sensor due to the incoming airflow is reduced. This means that the pressure differential between the pressure inside the pressure sensor and the pressure around the pressure sensor is decreased. Therefore, with this pressure sensor, as described in the application example, the influence of airflow on the accuracy of the pressure sensing is reduced.

[0017] The cover element of the pressure sensor, as described in the application example, can include a wall section that divides the interior of the cover element into two parts: a receiving chamber, which houses the sensing element, and an inlet chamber, into which the external pressure is introduced. A communication opening can be provided in one part of the wall section, connecting the receiving chamber and the inlet chamber. The first and second through-holes can be located on the inlet chamber side of the cover element and positioned opposite each other. By dividing the interior of the cover element into the receiving chamber and the inlet chamber via the wall section, an airflow entering the inlet chamber through either the first or second through-hole can be prevented from entering the receiving chamber.Furthermore, the airflow entering the inlet chamber from the first or second through-hole is simply released through the other through-hole, as it is guided by the wall section. Consequently, the influence of the airflow on the accuracy of the pressure measurement is suppressed even further.

[0018] In the pressure sensor according to the application example, the communication port can also be located where the surface normal on the opening of the first through-hole and the surface normal on the communication port are orthogonal to each other, and the surface normal on the opening of the second through-hole and the surface normal on the communication port are orthogonal to each other. If the first through-hole, the second through-hole, and the communication port are arranged in this way, then the direction of the airflow entering from the first through-hole or the second through-hole is orthogonal to the direction in which the communication port connects the inlet chamber and the receiving chamber, and the airflow entering from the first through-hole or the second through-hole can be prevented from entering the receiving chamber.

[0019] The cover element can also accommodate a sensing element within the receiving chamber, which is covered by a housing element. The housing element can be provided with an inlet hole for the introduction of the pressure to be measured into its interior. There is no restriction regarding the position of the inlet hole. The inlet hole can be located in a position that does not overlap the sensing element in a front view, or it can be located in a position that does overlap the sensing element in a front view. Because the housing element is covered by the cover element described above, with its first and second through-holes, airflow from the inlet hole into the interior of the housing element is prevented, even if the inlet hole is located in a position that overlaps the sensing element in a front view.Thus, even with such a pressure sensor, the influence of an airflow on the accuracy of the pressure measurement can be reduced. Examples of implementation

[0020] The pressure sensor described in the application example is explained in more detail below with reference to the figures. Fig. 1A to Fig. 1D views are an example of the external appearance of a pressure sensor. 1 according to an exemplary embodiment. Fig. 1A is an example of a top-down view of the pressure sensor. 1 , Fig. 1B is an example of a right side view of the pressure sensor. 1 , Fig. 1C is an example of a left side view of the pressure sensor. 1 , and Fig. 1D is an example of a front view of the pressure sensor. 1 . In the Fig. 1A to Fig. 1D is a component in a cover element 10 installed detection element 20indicated by a dashed line. The pressure sensor 1 The cover element includes 10 Although the cover element in the Fig. 1A to Fig. The shape of the cover element is represented as a cuboid in 1D. 10 not limited to a cuboid shape.

[0021] The cover element 10 is a cover that protects the detection element 20 protects. The cover element 10 houses the capture element and covers the capture element 20 from its environment, thereby the detection element 20 It is protected from dust, dirt, or the like adhering to it, as well as from impacts and the like. As in the Fig. 1B and Fig. As shown in 1C, the right side wall and the left side wall of the cover element are located in the right side wall and the left side wall. 10 Each has through holes 11a and 11bProvided. A change in pressure outside the cover element. 10 is through the through holes 11a and 11b to the capture element 20 forwarded. The through holes 11a and 11b are provided in positions where an airflow originating from outside the cover element 10 through the through holes 11a and 11b in the pressure sensor 1 flows, not directly onto the detection element 20 hits. The through holes. 11a and 11b are provided, for example, at positions where the surface normals are on the openings of the through holes 11a and 11b orthogonal to the surface normal on a detection surface 20a are. The through holes 11a and 11b are preferably provided in such positions that the detection element 20 not between the through holes11a and 11b is provided for. Since the detection element 20 not between the through holes 11a and 11b The airflow from the through holes is intended to 11a and 11b flowing into the pressure sensor, prevented from directly onto the sensing element 20 to meet, so that a reduction in detection accuracy due to the pressure sensor 1 The flowing airflow is reduced.

[0022] Fig. Figure 2 is an example of a cross-sectional view along line AA in Fig. 1A. The cover element 10 includes a top cover 10a and a lower cover 10b The top cover 10a includes a section of wall 12 , which is from an inner wall of the upper cover 10a to the lower cover 10b protrudes. A gap 12b is between a final section 12aof the wall section 12 and the floor area 10b1 the lower cover 10b planned. The wall section 12 divides the interior of the cover element 10 into an admission chamber 100 and an entrance chamber 200 .

[0023] The through holes described above 11a and 11b are in the entrance chamber 200 provided. The pressure outside the pressure sensor. 1 , which through the through holes 11a and 11b is introduced via the gap 12b into the admissions chamber 100 introduced. Furthermore, the airflow entering through one of the through-holes is 11a and 11b into the entrance chamber 200 flows from the wall section 12 prevented from entering the admission chamber 100 to flow, and is passed through the other of the through holes 11a and 11b omitted. The entrance chamber200 is an example of a "second chamber".

[0024] In the admissions chamber 100 The capture element 20 on the floor surface 10b1 the lower cover 10b placed, whereby the detection area 20a to the top cover 10a indicates a (not shown) wiring pattern on the floor surface. 10b1 the lower cover 10b in an area on the side of the intake chamber 100 provided, and the capture element 20 and the control unit 30 They are connected to each other via the wiring pattern. As described above, the pressure is applied outside the cover element. 10 through the through holes 11a and 11b and the gap 12b into the admissions chamber 100 admitted. The one who entered the admission chamber 100 The embedded pressure is matched to the detection area. 20aof the detection element 20 recorded. The admissions chamber 100 is an example of a "first chamber". The gap 12b is an example of a "communication opening".

[0025] The capture element 20 For example, a MEMS (microelectronic mechanical system) that detects pressure. The detection element 20 An example is an absolute pressure gauge, which has a membrane on the sensing surface. 20a exhibits, and based on a displacement of the membrane due to a change in the area of ​​the detection surface. 20a outputs a detection value corresponding to the applied pressure.

[0026] The control unit 30 is an integrated semiconductor circuit that reduces the pressure outside the cover element 10 calculated by taking the data from the capture element 20The control unit subjects the recorded data to a predetermined processing procedure. 30 It includes, for example, a main processor (CPU - Central Processing Unit) and memory. The CPU can also be called a microprocessor or processor. The CPU is not limited to a single processor but can also be designed as a multiprocessor. The memory can, for example, be a storage unit that the CPU accesses directly. The memory includes RAM (Random Access Memory) and ROM (Read Only Memory). The control unit 30 Can a predetermined processing, such as noise elimination processing, be performed, where the data is processed by the acquisition element? 20 The captured data values ​​are subjected to a filter by the CPU executing a program stored in memory.

[0027] Fig. Figure 3 shows the relative positions between the through holes. 11a and11b and the gap 12b shows, whereby Fig. Figure 3 is a schematic view showing the pressure sensor 1 shows from above. In Fig. 3 are the through holes for illustrative purposes. 11a and 11b and the gap 12b represented as rectangles. As in Fig. The through holes are shown in section 3. 11a and 11b arranged opposite each other. The gap 12b is provided at a position where a surface normal 12b1 is on the opening of the slit 12b and a surface normal 11a1 on the opening of the through hole 11a are orthogonal to each other, and furthermore a surface normal 12b1 on the opening of the slit 12b and a surface normal 11b1 on the opening of the through hole 11b are orthogonal to each other. Since the through holes 11a and 11b and the gap 12bThe direction of the airflow from the through holes is determined by the arrangement of the airflow. 11a and 11b inflows, and the direction that the entrance chamber 200 and the admissions chamber 11 through the gap 12b connects them, orthogonally to each other, and the airflow from the through holes 11a and 11b as it flows in, it is prevented from entering the intake chamber 100 to flow. It should be noted that as long as the relative positions are such that at least one of the through holes is open, the flow will continue. 11a and 11b into the admissions chamber 100 If the incoming airflow is suppressed, then the relative position of the gap can 12b and the through holes 11a and 11b can also be shifted from positions where the surface normal 12b1 lies on the opening of the slit. 12band the surface normal 11a1 on the opening of the through hole 11a are orthogonal to each other, or the surface normal 12b1 on the opening of the slit. 12b and the surface normal 11b1 on the opening of the through hole 11b are orthogonal to each other.

[0028] Furthermore, the through holes 11a and 11b When arranged opposite each other, an airflow is created that passes through one of the through holes. 11a and 11b flows in, without further ado through the other of the passage holes 11a and 11b flowing out. The pressure sensor is involved. 1 not limited to an arrangement in which the through holes 11a and 11b They are opposite each other. As long as they are arranged in an area where the airflow passing through one of the holes is unobstructed. 11a and 11b flows in appropriately through the other of the through holes 11a and11b If the holes are omitted again, the through holes can be used. 11a and 11b They can also be moved from opposite positions. Comparative example

[0029] For comparison with the exemplary embodiment, a pressure sensor according to a comparative example will now be described. Fig. Figure 4 is an example of a view of a pressure sensor. 500 according to a comparative example viewed from above 500 The pressure sensor 500 includes a housing element 510 with an inlet hole 511 In the following description of the comparative example, identical components as in the exemplary embodiment are marked with the same reference numerals, and further explanation of them is omitted.

[0030] The inlet hole 511 is a through-hole used to introduce pressure into the interior of the pressure sensor. 500 to engage. In Fig. 4 is the inlet hole511 provided at a position where the inlet hole is located 511 and the capture element 20 overlap when the inlet hole 511 Viewed from the front. The pressure outside the pressure sensor. 500 is through the inlet hole 511 inside the pressure sensor 500 admitted.

[0031] Fig. Figure 5 is an example of a cross-sectional view along line BB in Fig. 4 is taken. The housing element 510 includes an upper housing part 510a and a lower housing part 10b The housing element 510 differs from the cover element 10 according to the exemplary embodiment, in that the upper housing part 510a of the housing element no wall section 12 or through holes 11a and 11b features, but the inlet hole 511 exhibits.

[0032] Fig. Figure 6 is a diagram that exemplifies the airflow according to the comparative example of an inlet hole. 511 in the pressure sensor 500 flows inwards. In Fig. 6, the arrow points W schematically the airflow from the inlet hole 511 into the interior of the housing element 510 flows. In the following description, the airflow, exemplified by the arrow, is described. W is represented as an airflow W designated. In the pressure sensor 500 According to the comparison example described above, the inlet hole 511 and the capture element 20 provided at positions that are aligned with each other in a front view of the inlet hole 511 overlap. Consequently, the pressure from the inlet hole is increased. 511 incoming airflow W against the detection area 20a of the detection element 20 , so that the accuracy with which the detection element can detect data decreases 20The pressure is detected. Furthermore, the housing element 510 no other hole than the inlet hole 511 exhibits the airflow that enters the interior of the pressure sensor. 500 No flow from the pressure sensor 500 omitted, and the pressure in the pressure sensor 500 increases. Consequently, the pressure in the pressure sensor decreases. 500 According to the comparative example, the accuracy with which the detection element 20 The pressure is detected due to the inflow of airflow. W Even if, in the comparative example, the inlet hole 511 is provided at a position that is not connected to the detection element 20 overlaps when the inlet hole 511 When viewed from the front, the pressure inside the pressure sensor increases. 500 due to the inflow of airflow W , and thus the accuracy with which the detection element measures data decreases. 20 The pressure is measured.

[0033] Fig. Figure 7 is a diagram that exemplifies the airflow. W shows, the one from the through hole 11b in the pressure sensor 1 according to the exemplary embodiment, into the interior of the pressure sensor 1 flows. Fig. Figure 7 is an example of a perspective view through the top cover. 10a in the pressure sensor 1 , when the top cover 10a viewed from the front. The airflow W , which went through the through hole 11b into the entrance chamber 200 flows, is carried by the wall section 12 to the through hole 11a directed, which leads to the through hole 11b opposite, and flows from the inlet chamber 200 through the through hole 11a outwards. Consequently, there will be an increase in pressure in the inlet chamber. 200 due to the inflow of airflow W suppressed. Since, furthermore, the through holes 11a and 11bare provided at positions that include the detection element 20 Since they do not overlap in the front view, this also prevents the capture element from 20 is exposed to the airflow coming from the through holes 11a and 11b into the interior of the cover element 10 flows. Therefore, the pressure sensor can be used. 1 according to this embodiment in comparison with the pressure sensor 500 According to the comparative example, a reduction in detection accuracy occurs due to the inflow of an airflow into the cover element. 10 be prevented.

[0034] Furthermore, both through holes 11a and 11b Since they are positioned where they do not overlap the detection element in the respective front views, the adhesion of dust, dirt and the like to the detection element is prevented. 20 compared to the pressure sensor 500reduced according to the comparison example. Therefore, the pressure sensor can be used. 1 According to the exemplary embodiment, a distorted pressure reading due to the adhesion of dust is reduced. First modification

[0035] In this embodiment, the cover element 10 the detection element 20 open, but the cover element 10 can also use the pressure sensor 500 record according to the comparative example. Fig. Figure 8 is a diagram that shows an example of a pressure sensor. 1a as represented according to a first modification. In the pressure sensor 1a share the one in the cover element 10 recorded pressure sensor 500 and the cover element 10 the lower cover 10b Furthermore, the pressure sensor 1a according to the first modification of the airflow, which comes from one of the through holes 11a and 11b into the cover element10 flows through the other of the through holes 11a and 11b The holes were omitted to the outside. And there, as described above, each of the through holes... 11a and 11b is provided in an area that includes the detection element 20 Since the overlap is not present in a front view, it prevents the passage through the through holes. 11a and 11b incoming airflow onto the detection element 20 presses. Consequently, the pressure sensor prevents 1a According to the first modification, there is also a reduction in detection accuracy due to the inflow of wind into the interior of the pressure sensor. 1a It should be noted that in Fig. 8, the inlet hole 511 is provided in a position which, in a front view, displays the detection element 20 overlaps, however the position of the inlet hole is 511 not limited to such a position. The inlet hole 511It can also be provided in an area that contains the detection element. 20 not overlapping. Second modification

[0036] The Fig. 9 and Fig. 10 are diagrams that show an example of a pressure sensor 1b show according to a second modification. Fig. Figure 9 is an example of a side view of a drone. 300 , and Fig. 10 is an example of a top-down view of the drone. 300 The drone 300 is a device that uses the rotation of propellers 320 flies, which over arm section 330 to a housing 310 are coupled, and which detach from the legs upon landing. 340 is supported. In the second modification, the cover element serves as 10 of the pressure sensor 1 according to the exemplary embodiment also as a housing 310 the drone 300 In other words, the drone 300 the detection element 20inside the case 310 provided for, and the pressure exerted through the through-holes 11a and 11b Once admitted, it can be used with the detection element. 20 be recorded. The drone 300 This is an example of a "moving device with a pressure sensor". The propellers 320 are an example of "means of transport" and "means of flight".

[0037] Fig. Figure 11 is an example of a cross-sectional view along line CC in Fig. 10. Inside the drone 300 According to the second modification, the cover element serves as described above. 10 of the pressure sensor 1 according to the exemplary embodiment also as a housing 310 the drone 300 Accordingly, similar to the embodiment in question, the drone also uses this method. 300 a reduction in detection accuracy due to the inflow of air into the interior of the pressure sensor. 1bprevented. It should be noted that the drone 300 through the rotation of the propellers 320 creates an airflow so that the through holes 11a and 11b preferably located in places exposed to the wind or airflow from the propellers 320 are not exposed or are less exposed.

[0038] In the second modification, the drone 300 as an example of a moving device, but the moving device with a pressure sensor according to the embodiment and the modifications thereof are not based on a drone 300 limited. The moving device can, for example, also be a vehicle with wheels as a means of transport. Examples of such a vehicle are cars and bicycles. Other modifications

[0039] In this embodiment, the interior of the pressure sensor 1 through the wall section 12divided into the recording chamber 100 , in which the capture element 20 is recorded, and the admission chamber 200 , in which the through holes 11a and 11b are intended. However, the technology revealed here is not designed for an arrangement with a wall section. 12 limited. Even if the pressure sensor 1 the wall section 12 If not provided for, an airflow from one of the through holes will occur. 11a and 11b inside the pressure sensor 1 flows, from other through holes 11a and 11b The pressure sensor is preferably included. 1 the wall section 12 However, the influence of airflow on the accuracy of the pressure measurement is reduced, even if the pressure sensor 1 the wall section 12 not included. In the exemplary embodiment, the gap 12b, which is between the wall section 12 and the floor area 10b1 The design is given as an example of a "communication opening". However, the "communication opening" is not located at the gap. 12b restricted, and the shape, size, etc. of the communication opening can be determined in a suitable manner, as long as the communication opening allows the receiving chamber 100 and the entrance chamber 200 They are in communication with each other or are connected to each other. Furthermore, in the exemplary embodiment, the wall section 12 from the inner wall of the upper cover 10a to the lower cover 10b down. The section of wall 12 However, it is not limited to such a shape and can be any section of wall that forms the interior of the pressure sensor. 1 into an admission chamber 100 and an entrance chamber 200 subdivided, and the recording chamber 100and the entrance chamber 200 through a communication opening, allowing communication or connection between the two sides. The wall section 12 It can therefore also depend, for example, on the floor area 10b1 protrude towards the upper cover, or can also extend from one of the right and left inner walls of the cover element. 10 protrude from each other. Alternatively, the wall section can 12 also the space between the recording chamber 100 and the entrance chamber 200 close, and a “communication opening” through which the intake chamber 100 and the entrance chamber 200 Communicating or being in contact with each other can also happen at any other location on the wall section. 12 be provided for. In the exemplary embodiment, the wall section 12 designed so that it is inside the pressure sensor 1 into a rear recording chamber 100and a front intake chamber 200 divides. However, the wall section can 12 It should also be designed so that it covers the interior of the pressure sensor. 1 vertically into a recording chamber 100 and an entrance chamber 200 divides. Example of a combination with other sensors

[0040] Fig. Figure 12 is a diagram showing an application example in which the pressure sensor is combined with a flow sensor according to the embodiment. 600 combined. Gas flows in a river channel. 610 into the arrow G in Fig. 12 specified direction, and the flow sensor 600 measures the flow velocity and flow rate of the gas in this flow path 610 Since, as described above, the influence of an airflow or gas flow on the accuracy with which the pressure is measured is reduced, the pressure sensor can 1according to the embodiment, it is installed in an environment where gas passes through the flow path. 610 It flows, as in this example, and can reliably measure the ambient pressure.

[0041] The exemplary embodiment and the modifications can be combined. Reference symbol list 1, 1a, 1b, 500 pressure sensor 10 Cover element 10a top cover 10b lower cover 10b1 Floor area 11a, 11b Through hole 12 Wall section 12a Final section 12b Split 20 recording elements 20a Recording area 30 control unit 100 admission chamber 200 Entrance Chamber 300 drone 310 housing 320 Propeller 330 arm section 510 Housing element 510a upper housing part 511 Inlet hole 600 flow sensor 610 River Trail G Arrow W airflow QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature

[0000] JP H10325769 A

[0004]

Claims

[1] Pressure sensor, with: a detection element for recording a pressure change; and a cover element in which the detection element is included, and which has a first through-hole and a second through-hole; wherein the first through-hole and the second through-hole are each arranged in a position which, in a front view of the respective hole, does not overlap with the detection element. [2] Pressure sensor according to claim 1, wherein the first through-hole and the second through-hole are arranged opposite each other. [3] Pressure sensor according to claim 1 or 2, wherein the cover element comprises a wall section that divides the interior of the cover element into a first chamber and a second chamber, and which has a communication opening that connects the first chamber and the second chamber, the first through-hole and the second through-hole are arranged in the second chamber of the cover element, and the detection element is located in the first chamber. [4] Pressure sensor according to claim 3, wherein a surface normal on the opening of the first through-hole and a surface normal on the communication opening are orthogonal to each other, and a surface normal on the opening of the second through-hole and a surface normal on the communication opening are also orthogonal to each other. [5] Pressure sensor according to claim 3 or 4, wherein the detection element is covered with a housing element which contains an inlet hole, and The cover element receives the detection element, which is covered by the housing element, in the first chamber. [6] Moving device with pressure sensor, comprising: the pressure sensor according to any one of claims 1 to 5; and means of locomotion coupled to the pressure sensor, wherein the moving device is configured to be movable. [7] Moving device with pressure sensor according to claim 6, wherein the means of locomotion are flying means for flying the moving device.