Charge particle beam device

Abstract

Charge particle beam device, comprising: an electron gun (701) that emits a primary electron beam (750); an aberration corrector (703) which has multi-stage multi-polar lenses (771-774) onto which the primary electron beam (750) is incident; an objective lens (706) onto which the primary electron beam (750), which has passed through the aberration corrector (703), is incident; and a vacuum container (740) for receiving the electron gun (701), the aberration corrector (703) and the objective lens (706), wherein The multipole lens (771-774) comprises a magnetic core (150, 550), a plurality of current lines (101-112), a plurality of wire-shaped electrodes (301-312), an insulating electrode mounting section (331-342) for mounting the plurality of electrodes (301-312) to a structure in the vacuum vessel (740), and a conductive shield (320, 321) set to a reference potential, which is provided between the electrode mounting section (331-342) and a central axis of the magnetic core (150, 550), Main conductor sections (121) of the plurality of power lines (101-112) are arranged axially symmetrically to the central axis of the magnetic core (150, 550) along an inner wall of the magnetic core (150, 550), and Sections of the plurality of electrodes (301-312) extending along the central axis of the magnetic core (150, 550) are arranged axially symmetric to the central axis of the magnetic core (150, 550).

Description

Technical area

[0001] The present invention relates to a technique for applying a charged particle beam, and more particularly to a charged particle beam apparatus such as a scanning electron microscope and a transmission electron microscope equipped with an aberration corrector. State of the art

[0002] In a charged particle beam device such as a scanning electron microscope (SEM) or a scanning transmission electron microscope (STEM), an aberration corrector has been introduced to improve resolution. One type of aberration corrector comprises multipole lenses arranged in a plurality of stages. A multipole lens, in which a plurality of multipole fields are combined by generating an electric or magnetic field, is known as a lens that eliminates aberrations in a charged particle beam passing through it. PTL 1 discloses a coil-type aberration corrector that generates multipole fields using a magnetic field obtained through a plurality of power lines. List of reference literaturePatent literature

[0003] PTL 1: JP 2009 054581 A

[0004] Other conventional devices for aberration correction in particle beam devices are known from US 2018 / 0 190 469 A1, DE 10 2008 035 297 A1, US 2007 / 0 181 806 A1 and DE 10 2010 001 349 A1. Summary of the inventionTechnical problem

[0005] In PTL 1, an aberration corrector of a relatively low-cost multipole correction system can be realized by forming multipole fields using power lines, but this requires high mechanical positional accuracy, in this case, high positional accuracy for the arrangement of the power lines.

[0006] The requirement for high charging accuracy is reduced by providing the multipole lens with a magnetic core, forming an inner wall of the magnetic core with a plurality of grooves for arranging main line portions of the power lines, and arranging the plurality of grooves so that the centers of the plurality of grooves are axially symmetrical to a central axis of the magnetic core. According to this configuration, by manufacturing a center position of the groove of the magnetic core in a circumferential and radial direction with high accuracy, it is possible to virtually eliminate the influence of a deviation in the arrangement position of the power line in the groove on the magnetic field strength of a multipole lens.

[0007] One of the aberrations of an electron lens used in electron microscopes is chromatic aberration. To correct chromatic aberration and increase the resolution of the electron microscope, it is necessary to excite an electric field in addition to the magnetic field. Therefore, in an aberration corrector (called a "coil aberration corrector") that uses a multipole lens with current lines, it is necessary to excite an electric field. It is necessary to place an electrode in the multipole lens to excite the electric field. Solution to the problem

[0008] A charged particle beam device according to an embodiment comprises: an electron gun that emits a primary electron beam; an aberration corrector having multi-stage multipole lenses onto which the primary electron beam is incident; an objective lens onto which the primary electron beam, which has passed through the aberration corrector, is incident;and a vacuum container for accommodating the electron gun, the aberration corrector, and the objective lens, wherein the multipole lens comprises: a magnetic core, a plurality of power lines, a plurality of wire-shaped electrodes, an insulating electrode fixing portion for fixing the plurality of electrodes to a structure in the vacuum container, and a conductive shield set to a reference potential provided between the electrode fixing portion and a central axis of the magnetic core, wherein main line portions of the plurality of power lines are arranged axially symmetrically to the central axis of the magnetic core along an inner wall of the magnetic core, and portions of the plurality of electrodes that are parallel to the central axis of the magnetic core are arranged axially symmetrically to the central axis of the magnetic core. Beneficial effect

[0009] A charged particle beam device is provided which has a coil aberration corrector capable of correcting chromatic aberration.

[0010] Further objects and novel features will become apparent from the description of the invention and the accompanying drawings. Short description of the drawings [ Fig. 1A] Fig. Figure 1A is a bird's-eye view of a cross-sectional view (schematic representation) of a multipole lens. [ Fig. 1B] Fig. Figure 1B is a top view (schematic representation) of the multipole lens. [ Fig. 1C] Fig. 1C is a bird's-eye view (schematic representation) of a center position of a groove provided in the magnetic core. [ Fig. 2] Fig. Figure 2 is a bird's-eye view (schematic representation) of power lines. [ Fig. 3] Fig. Figure 3 is a diagram showing a configuration of a multipole lens capable of superimposing electric fields. [ Fig. 4] Fig. Figure 4 shows diagrams of a multipole lens configuration capable of superimposing electric fields. [ Fig. 5] Fig. 5 is an example of a multipole lens in which a non-magnetic spacer is provided in the magnetic core. [ Fig. 6] Fig. 6 is a bird's-eye view of the cross-sectional view of the magnetic core. [ Fig. 7] Fig. 7 is a configuration example of an electron beam device. [ Fig. 8A] Fig. Figure 8A is an electron optical diagram showing a trajectory of an electron beam passing through a coil aberration corrector. [ Fig. 8B] Fig. Figure 8B is an electron optical diagram showing a trajectory of the electron beam passing through the coil aberration corrector. Description of embodiments

[0011] A coil aberration corrector is constructed of multi-stage multipole lenses. The multipole lens of the present embodiment has a configuration in which current lines that generate a magnetic field are arranged in grooves provided in an inner wall of a magnetic core. Referring to Fig. 1A to 1C, a configuration of the magnetic core and the current lines that generate the magnetic field in the multipole lens according to the present embodiment will be described. Fig. Figure 1A is a bird's-eye cross-sectional view (schematic representation) of a single-stage multipole lens of the coil aberration corrector. Fig. Figure 1B is a plan view (schematic representation) of the single-stage multipole lens of the coil aberration corrector. Fig. Figure 1C is a bird's-eye view (schematic representation) of a center position of a groove provided in the magnetic core. A magnetic core 150 is made of a magnetic material such as pure iron or mu-metal (permalloy), has a cylindrical shape, and has grooves 151 to 162 on its inner wall, each extending in a Z direction. As shown in Fig. As shown in Figure 1C, the center positions 151a to 162a of the slots are arranged axially symmetrically to a central axis 150a of the magnetic core 150. That is, the center position 151a of the slot 151 and the center position 157a of the slot 157 are arranged in the same plane so as to be axially symmetrical to the central axis 150a. The same applies to the slot center position 152a and the slot center position 158a, the slot center position 153a and the slot center position 159a, the slot center position 154a and the slot center position 160a, the slot center position 155a and the slot center position 161a, and the slot center position 156a and the slot center position 162a. Although 12 slots are provided in this example, the number of slots is not limited. The angle between adjacent slots is an angle obtained by dividing a circle centered on the central axis 150a of the magnetic core 150 by the number k of slots (360° / k).

[0012] The main line sections of the power lines 101 to 112 are respectively arranged in the grooves 151 to 162 of the magnetic core 150. Fig. Figure 2 is a bird's-eye view (schematic diagram) obtained by extracting only the power lines 101 to 112. The twelve power lines including the power lines 101 to 112 are arranged around an optical axis 100 of a charged particle beam. The optical axis 100 of the charged particle beam coincides with the central axis 150a of the magnetic core 150.

[0013] The structure of the power lines is illustrated by the example of Fig. 1A. The power line 101 has a rectangular shape, and the current is supplied from a power supply (not shown). An arrow on the power line indicates the direction of current flow. As shown in Fig. As shown in Figure 1A, the power line is divided into four sections corresponding to the sides of the rectangular shape, and hereinafter referred to as the main line section 121, the connecting section 122, the connecting section 123, and the return line section 124, respectively. The main line section 121 is a section of the power line disposed in the groove of the magnetic core; the connecting sections 122 and 123 are sections where the main line section 121 is inserted into the groove from the outside of the magnetic core, or where the main line section 121 is led out of the groove to the outside of the magnetic core; and the return line section 124 is a section of the power line located on the outside of the magnetic core.

[0014] The magnetic field of the main line sections creates a multi-pole field. Even if the power supply for a Fig. Since the coil lens (multipole lens) shown in Figure 2 has been omitted, it is necessary that the current flows in a certain distribution to excite the multipole field. As a combination for exciting a 2N-pole field (N is an integer of 1 or more), for example, when I1 to I 12 Currents are applied to the power lines 101 to 112, respectively, by (Formula 1) a combination of current values ​​with respect to a reference current AN receive. Ii=AN⋅Cos(N(i−1)π / 6)

[0015] (Formula 1) shows a current distribution in which a single multipole field is excited. In contrast, it is possible to superimpose a multitude of different multipole fields, and in this case, power lines 101 to 112 are connected to different power supplies.

[0016] Since in the conventional coil lens without a magnetic core, the current directions of the main line section and the return line section are reversed, the multipole field caused by the return line section has an attenuating effect on the multipole field caused by the main line section. In contrast, in the coil lens of the present embodiment, the magnetic core 150 is arranged between the main line section 121 and the return line section 124, so that the magnetic core serves as a magnetic shield, and the return line section does not influence the multipole field caused by the main line section.

[0017] In the multipole lens of the present embodiment, the excited magnetic field strength is hardly affected by the positioning accuracy of the main line portion of the power line arranged in the groove of the magnetic core. In the conventional coil aberration corrector without a magnetic core, high precision is required for the arrangement position of the power line to generate a desired magnetic field. In contrast, in the coil aberration corrector of the present embodiment, if the center position of the magnetic core groove is manufactured with high accuracy in the circumferential and radial directions, a deviation in the arrangement position of the power line in the groove has almost no influence on the magnetic field strength generated by the multipole lens. This is a practical advantage for the manufacture of the multipole lens and the design of the aberration corrector.

[0018] Referring to Fig. 3 and Fig. 4 describes a multipole lens in which electrodes are arranged that excite an electric field superimposed on the magnetic field excited by the power lines. Fig. 3 is a cross-sectional view of the multipole lens. The cross-sectional view in Fig. 3 is a cross-sectional view in a plane containing the optical axis 100 (central axis 150a). Fig. 4 shows cross-sectional views 391, 392 and 393 along the Fig. 3 shown lines AA, BB and CC. That is, the cross-sectional views in Fig. 4 are cross-sectional views in a plane perpendicular to the optical axis 100 (central axis 150a).

[0019] The electrodes 301 to 312, which excite the electric field, each have a wire shape, and a specific voltage is applied to each of the electrodes 301 to 312 to generate a desired electric field. Here, the structure of a vacuum container 350, in which the coil aberration corrector is arranged, is kept at a reference potential (GND). Therefore, the electrodes 301 to 312 are insulated from the surrounding structure and fixed in position by electrode fixing portions 331 to 342, respectively. The electrode fixing portions are configured, for example, as an insulating member whose surface is provided with a groove for fixing the electrode.In this example, a region through which the optical axis 100 passes is maintained in a vacuum state, and electrode fixing portions 331 to 342 are provided in a vacuum partition wall 351 to maintain a region where the magnetic core 150 is disposed at, for example, atmospheric pressure. For example, the electrode 301 is fixed by a first electrode fixing portion 331a provided on an upper side (electron source side) and a second electrode fixing portion 331b provided on a lower side (sample side). In this example, electrode fixing portions 331 to 342 are provided for the respective electrodes, but a single insulating member may be provided separately, for example, in the vacuum partition wall 351 located above and below the magnetic core 150, and the groove for arranging the electrode may be provided in the insulating member to fix the position of the electrode.In addition, the vacuum partition wall 351 in which the electrode fixing portion is provided is an example and may be another structure in the vacuum container.

[0020] For aberration correction, high positioning accuracy of the electrodes 301 to 312 is required. That is, a distance ε between the electrodes (a section parallel to the optical axis 100) and the optical axis 100 (the central axis 150a) and an angle θ between adjacent electrodes, viewed from the optical axis 100 (the central axis 150a), must be equal. In this example, twelve electrodes are provided, and the number of electrodes corresponds to the number of grooves of the magnetic core 150, but the number of electrodes does not have to correspond to the number of grooves (or the number of power lines). The angle between adjacent electrodes is an angle obtained by dividing a circle with the optical axis 100 (the central axis 150a of the magnetic core 150) as the center by the number j of electrodes (360° / j).

[0021] In this example, the number of electrodes corresponds to the number of slots of the magnetic core, and the electrodes are arranged correspondingly to the slots of the magnetic core. That is, in a plane passing through the center of the slots opposite each other around the central axis 150a of the magnetic core, a portion of one electrode parallel to the central axis of the magnetic core and a portion of another electrode parallel to the central axis of the magnetic core are arranged symmetrically to the central axis of the magnetic core. Specifically, the electrode 301 and the electrode 307 are arranged so as to be symmetrical to the optical axis 100 (center axis 150a) in a plane passing through the center position 151a of the groove 151 and the center position 157a of the groove 157, the electrode 302 and the electrode 308 are arranged so as to be symmetrical to the optical axis 100 (center axis 150a) in a plane passing through the center position 152a of the groove 152 and the center position 158a of the groove 158,symmetrical to the optical axis 100 (central axis 150a), the electrode 303 and the electrode 309 are arranged so that they are symmetrical to the optical axis 100 (central axis 150a) in a plane passing through the centre position 153a of the groove 153 and the centre position 159a of the groove 159, the electrode 304 and the electrode 310 are arranged so that they are symmetrical to the optical axis 100 (central axis 150a) in a plane passing through the centre position 154a of the groove 154 and the centre position 160a of the groove 160, the electrode 305 and the electrode 311 are arranged so that they are symmetrical to the optical axis 100 (central axis 150a) in a plane passing through the centre position 155a of the groove 155 and the centre position 161a of the groove 161 optical axis 100 (central axis 150a), and the electrode 306 and the electrode 312 are arranged so that they are in a plane passing through the center position 156a of the groove 156 and the center position 162a of the groove 162,are symmetrical to the optical axis 100 (central axis 150a).

[0022] Since the electric field excited by the electrodes 301 to 312 depends on the magnetic field excited by the multipole lens, the magnitude of the voltage applied to the electrodes 301 to 312 depends on the magnitude of the current flowing through the power lines 101 to 112 of the multipole lens. Therefore, it is possible to simplify the control of the coil aberration corrector if the number of electrodes corresponds to the number of grooves of the magnetic core and the electrodes are arranged correspondingly to the grooves of the magnetic core, as in the present invention. Even if the number and arrangement are different, the coil aberration corrector can be controlled by controlling the voltage applied to the electrodes or the current flowing in the power lines so that a positional deviation between a magnetic field generation position and an electric field generation position is interpolated.

[0023] In the present embodiment, a first shield 320 is provided above the magnetic core, and a second shield 321 is provided below the magnetic core. The shields 320 and 321 are conductive cylindrical members provided to surround the optical axis 100 (center axis 150a) and arranged so that a center axis of the shield coincides with the optical axis 100 (center axis 150a). The potentials of the shields 320 and 321 are set to the reference potential. The positioning of the shields 320 and 321 along with the application of the reference potential can be performed, for example, by attaching the shields 320 and 321 to a structure of the vacuum container 350 that corresponds to the reference potential.

[0024] One of the functions of the shields 320 and 321 is to make the insulating elements invisible to an electron beam because these insulating elements (electrode fixing portions 331 to 342) are arranged near the optical axis 100. By disposing the shields 320 and 321, which are set to the reference potential, between the optical axis 100 and the insulating elements, the electron beam is not adversely affected even if the insulating elements are electrically charged.

[0025] Another function of the shields 320 and 321 is to match an effective range of the magnetic field caused by the power lines with an effective range of the electric field caused by the electrodes. Therefore, it is desirable that a bottom surface of the first shield 320 be at the same height as a top surface of the magnetic core 150, or at a position lower than the top surface, and accordingly, it is desirable that a top surface of the second shield 321 be at the same height as a bottom surface of the magnetic core 150, or at a position higher than the bottom surface. That is, it is desirable that the shields be arranged so that one of their ends coincides with one end of the magnetic core or is opposite the inner wall of the magnetic core.In this case, the effective range of the electric field and the effective range of the magnetic field are the same, which simplifies the control of the coil aberration corrector. On the other hand, if the bottom surface of the first shield 320 is located at a higher position than the top surface of the magnetic core 150 and / or the top surface of the second shield 321 is located at a lower position than the bottom surface of the magnetic core 150, the effective ranges of the electric field and the magnetic field are different, and control is required to compensate for this difference in the effective ranges.

[0026] The magnetic core used in the multipole lens of the present embodiment is not limited to the above-described shape, and various modifications are possible. For example, the shape of the grooves provided in the magnetic core may be fixed to facilitate winding. As shown in Fig. As shown in Figure 5, a non-magnetic spacer 400 may be provided in the Z direction of the magnetic core 150. By arranging the connecting portion of the power lines on the non-magnetic spacer 400, it is possible to reduce the strength of the hexapole field excited by the connecting portions and to reduce the required positional accuracy in the Z direction. Fig. 5 shows an example in which the non-magnetic spacer is provided on the top surface of the magnetic core 150, but the non-magnetic spacer may be provided on both the top and bottom surfaces.

[0027] Instead of providing grooves that reach the top and bottom of the magnetic core, it is also possible to provide slots, as in Fig. 6. The slot 501 has a smaller wall thickness than the rest of the magnetic core 550, and through-holes 502, 503 are provided at the upper and lower ends of the slot 501 through the inner and outer walls of the magnetic core 550. The power lines are arranged through the through-holes 502 and 503 in the slot 501. This structure makes it possible to eliminate the influence of a positional deviation of the connecting section of the power lines and to excite an ideal multi-pole field through the coil lens. A comparable effect can be achieved by using a magnetic core with an upper and a lower cover, wherein the cylindrical magnetic covers have the same inner and outer diameter and are arranged above and below the Fig. 1A shown magnetic core.

[0028] Fig. 7 shows a configuration example of an electron beam device incorporating the above-described coil aberration corrector. The electron beam emitted from an electron gun 701 is formed into a parallel beam by a condenser lens 702, passes through a coil aberration corrector 703, undergoes a converging action by a condenser lens 704, and converges onto a sample 707 through an objective lens 706. A converged spot is deflected by a scanning coil 705 to scan the sample 707. The interior of a vacuum container 740 is placed in a vacuum state, and the electron beam propagates from the electron gun 701 to the sample 707 while maintaining the vacuum. The coil aberration corrector 703 corrects axial chromatic aberration and spherical aberration.The coil aberration corrector 703 is connected to a power supply 711, and the voltage and current output from the power supply 711 excite a multipolar electric or magnetic field in the coil aberration corrector 703. The power supply 711 is also connected to a computer 720 that controls the entire system. An output value from the power supply 711 to the coil aberration corrector 703 is changed in response to a command from the computer 720.

[0029] Fig. 8A and Fig. 8B are electron-optical diagrams, each showing a trajectory of an electron beam 750 passing through the coil aberration corrector. The trajectory of the electron beam 750 passing through the coil aberration corrector 703 changes depending on the direction. Fig. Figure 8A shows a trajectory (x-trajectory) from a y-direction (orthogonal to the paper surface in Fig. 7) and Fig. Figure 8B shows a trajectory (y-trajectory) from an x-direction (horizontal to the paper surface in Fig.7). The coil aberration corrector 703 comprises four stages of multipole lenses 771 to 774, wherein the quadrupole field in each of the multipole lenses 771 to 774 is excited such that the trajectory of the electron beam 750 is split into an x-trajectory and a y-trajectory by a quadrupole field excited by the multipole lens 771, then converges in the x-direction at the position of the multipole lens 772 and converges in the y-direction at the position of the multipole lens 773, and the x-trajectory and the y-trajectory become symmetrical trajectories (parallel trajectories) again after passing through the multipole lens 774. To form such a trajectory, it is necessary to excite a magnetic or an electric field in the multipole lens 771 and the multipole lens 774, or to excite both a magnetic and an electric field in the multipole lens 772 and the multipole lens 773.The use of the coil aberration corrector of the present embodiment makes it possible to correct the chromatic aberration and the spherical aberration.

[0030] The invention is not limited to the above embodiment and includes various modifications. For example, the above embodiment may be described in detail to facilitate understanding of the invention, and the invention is not necessarily limited to those having all of the configurations described above. Part of the configurations of one embodiment may be replaced with configurations of another embodiment, and configurations of another embodiment may be added to configurations of another embodiment. Part of the configuration of each embodiment may be added to, deleted from, or replaced with another configuration.For example, in the embodiment, an aspect is described in which the current line that generates the magnetic field in the multipole lens is arranged in a groove provided on the inner wall of the magnetic core, but the plurality of current lines may be arranged axisymmetrically to the center axis of the magnetic core along the inner wall of the magnetic core without providing a groove. List of reference symbols 100 optical axis 101 to 112 power line 121 main line section 122, 123 connecting section 124 return line section 150, 550 magnetic core 151 to 162 groove 301 to 312 electrode 320 first shielding 321 second shield 331 to 342 Electrode mounting section 350 vacuum containers 351 Vacuum partition 391, 392, 393 Cross-sectional view 400 non-magnetic spacers 501 slot 502, 503 through hole 701 Electron Beam Gun 702, 704 condenser lens 703 Coil Aberration Corrector 705 scanning coil 706 objective lens 707 Sample 711 Power supply 720 computers 740 vacuum containers 750 electron beam 771 to 774 multipole lens

Claims

[1] Charged particle beam device comprising: an electron gun (701) emitting a primary electron beam (750); an aberration corrector (703) having multi-stage multipole lenses (771-774) onto which the primary electron beam (750) is incident; an objective lens (706) onto which the primary electron beam (750) which has passed through the aberration corrector (703) is incident; and a vacuum container (740) for accommodating the electron gun (701), the aberration corrector (703) and the objective lens (706), wherein the multipole lens (771-774) comprises a magnetic core (150, 550), a plurality of power lines (101-112), a plurality of wire-shaped electrodes (301-312), an insulating electrode fixing portion (331-342) for fixing the plurality of electrodes (301-312) to a structure in the vacuum vessel (740), and a conductive shield (320, 321) set to a reference potential, which is provided between the electrode fixing portion (331-342) and a central axis of the magnetic core (150, 550), Main line sections (121) of the plurality of power lines (101-112) are arranged axially symmetrically to the central axis of the magnetic core (150, 550) along an inner wall of the magnetic core (150, 550), and Portions of the plurality of electrodes (301-312) extending along the central axis of the magnetic core (150, 550) are arranged axially symmetrically to the central axis of the magnetic core (150, 550). [2] A charged particle beam device according to claim 1, wherein the number of the plurality of power lines (101-112) and the number of the plurality of electrodes (301-312) are the same. [3] A charged particle beam device according to claim 1, wherein a plurality of grooves are provided in the inner wall of the magnetic core (150, 550), the centers of the plurality of grooves are arranged axially symmetrically to the central axis of the magnetic core (150, 550), and the main line portions (121) of the plurality of power lines (101-112) are each arranged in one of the plurality of grooves of the magnetic core (150, 550). [4] A charged particle beam device according to claim 3, wherein the plurality of electrodes (301-312) comprise a first electrode and a second electrode, and in a plane passing through the center of the grooves opposing each other around the center axis of the magnetic core (150, 550), a portion of a first electrode parallel to the center axis of the magnetic core (150, 550) and a portion of a second electrode parallel to the center axis of the magnetic core (150, 550) are arranged symmetrically to the center axis of the magnetic core (150, 550). [5] A charged particle beam device according to claim 1, wherein the shield (320, 321) is a cylindrical member arranged such that a central axis of the shield (320, 321) coincides with the central axis of the magnetic core (150, 550), and the shield (320, 321) is arranged such that an end portion of the shield (320, 321) coincides with an end portion of the magnetic core (150, 550), or is arranged such that the end portion of the shield (320, 321) is opposite the inner wall of the magnetic core (150, 550). [6] A charged particle beam device according to claim 3, wherein the power line (101-112) has a connecting section (122, 123) which introduces the main line section (121) from an outside of the magnetic core (150, 550) into the groove or guides the main line section (121) from the groove to the outside of the magnetic core (150, 550), and a non-magnetic spacer (400) is arranged between the connecting section (122, 123) of the power line (101-112) and the magnetic core (150, 550). [7] A charged particle beam device according to claim 3, wherein the power line (101-112) has a connecting section (122, 123) which introduces the main line section (121) from the outside of the magnetic core (150, 550) into the groove or guides the main line section (121) from the groove to the outside of the magnetic core (150, 550), the multipole lens (771-774) has opposing magnetic covers provided in a longitudinal direction of the grooves of the magnetic core (150, 550), and the connecting portion (122, 123) of the power line (101-112) is arranged in a through hole (502, 503) provided between the magnetic core (150, 550) and the magnetic cover. [8] A charged particle beam device according to claim 1, wherein the aberration corrector (703) comprises four stages of multipole lenses (771-774), and in the multipole lenses (771, 774) of the first and fourth stages, either a magnetic or an electric field is excited, and in the multipole lenses (772, 773) of the second and third stages, a magnetic and an electric field are excited.

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