PROBE MODULE AND THE SAME MICROPROBE SYSTEM

Abstract

A probe module is provided. The probe module according to one embodiment may include the following features: a base; a guide rail provided on the base; a guide element sliding along the guide rail; a rotary element connected to the guide element to be rotatable about a first axis parallel to the vertical direction with respect to the guide element; a probe assembly connected to the rotary element to be rotatable about a second axis perpendicular to the first axis in a first horizontal direction of rotation towards a sample and a second horizontal direction of rotation away from the sample, and comprising a probe; and an elastic element that imparts a torque to the probe assembly in the first horizontal direction of rotation.

Description

TECHNICAL AREA

[0001] The following description refers to one probe module and one comprehensive microprobe system. BACKGROUND TECHNOLOGY

[0002] In the semiconductor manufacturing process, it is necessary to investigate the material characteristics of solid-liquid samples formed on a wafer or base substrate, such as electromagnetic, dielectric, optical, and chemical characteristics. Since the device characteristics are affected by external factors, it is necessary to provide a vacuum or an environment in which light irradiation, gas, temperature, and humidity are controlled during the process of acquiring these characteristics.

[0003] To capture characteristics of a sample, a microprobe system is used, which includes an internal chamber containing the sample. Generally, a microprobe system captures characteristics of a device via a probe that makes contact with the device. Therefore, a microprobe system is required that includes a probe module capable of precise movement.

[0004] The above description is information that the inventor(s) acquired in the course of preparing the present disclosure or already possessed at that time and which was not necessarily publicly known before filing the present application. DISCLOSURE OF INVENTIONAL ENGINEERING GOALS

[0005] According to one embodiment, one task is to provide a probe module whose position is precisely controlled.

[0006] According to one embodiment, one task is to provide a probe module whose position is easily controlled.

[0007] One objective according to an exemplary embodiment is to provide a probe module with lower manufacturing costs.

[0008] According to one embodiment, one task is to provide a probe module that is capable of maintaining contact with a sample with a uniform force. TECHNICAL SOLUTIONS

[0009] A probe module according to one embodiment comprises a base, a guide rail installed on the base, a guide element configured to slide along the guide rail, a rotary element rotatably connected to the guide element about a first axis parallel to a vertical direction, a probe assembly comprising a probe rotatably connected to the rotary element about a second axis perpendicular to the first axis in a first horizontal direction of rotation towards a sample and a second horizontal direction of rotation away from the sample, and an elastic element configured to impart a torque to the probe assembly in a first horizontal direction of rotation.

[0010] The elastic component can be positioned between a rotary component and a probe arrangement.

[0011] The elastic component can include a compression spring that is located further away from an end section of the probe than the second axis, based on a distance.

[0012] The elastic component can include a tension spring that is located closer to the second axis than to an end section of the probe, based on a distance.

[0013] The probe arrangement may further comprise a probe housing that is connected to the rotary element and encloses at least a section of the probe.

[0014] The probe housing may include a detachment prevention pin configured to prevent detachment of the elastic component.

[0015] The probe module may further include a gripping section extending from the probe housing to an end section of the probe to enable gripping when the probe module rotates in a second horizontal direction.

[0016] An uneven section can be formed on at least one section of the gripping section.

[0017] The probe may comprise an exposed section that is exposed towards an outside of the housing and an insertion section that is inserted into the housing, the insertion section being able to include at least a curved section, and the probe housing may include a receiving groove that is recessed in a shape corresponding to the insertion section in order to receive at least a portion of the insertion section.

[0018] The probe module may further include one or more stop devices configured to limit a rotation angle of the probe assembly in the first horizontal direction of rotation and / or the second horizontal direction of rotation.

[0019] A microprobe system according to one embodiment can include the probe module. EFFECTS OF THE INVENTION

[0020] *21 A probe module according to one embodiment can accurately measure a characteristic of a sample.

[0021] A probe module according to one embodiment can easily measure a characteristic of a sample.

[0022] A probe module according to one embodiment can be manufactured at low cost.

[0023] The effects of the probe module and the microprobe system comprising it according to one embodiment are not limited to the effects described above, and other, unmentioned effects are clearly evident to those skilled in the field from the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The accompanying drawings illustrate preferred embodiments of the present disclosure and are provided together with a detailed description to facilitate a better understanding of the technical concept of the present disclosure. Therefore, the present disclosure is not to be interpreted as being limited to the embodiments shown in the drawings. Fig. Figure 1 is a perspective view of a microprobe system according to an exemplary embodiment. Fig. Figure 2 is a top view showing a state in which a second housing in a microprobe system is open, viewed from a top surface, according to an embodiment. Fig. Figure 3 is a perspective view of a probe module according to an exemplary embodiment. Fig. Figure 4 is an expanded perspective view of a guide element and a rotary element according to an exemplary embodiment. Fig. Figures 5A to 5C are top views showing a probe module viewed from a side surface, according to an exemplary embodiment. Fig. Figure 6 is an expanded perspective view of a probe arrangement according to an exemplary embodiment. Fig. Figure 7 is a perspective view of a probe module according to an exemplary embodiment. BEST MODE FOR EXECUTING THE INVENTION

[0025] Exemplary embodiments are described in detail below with reference to the accompanying drawings. However, various changes and modifications to these exemplary embodiments are possible, which is why the scope of the disclosure is not limited to these exemplary embodiments. It should be noted that the exemplary embodiments encompass all changes, equivalents, and substitutions within the scope of the concept and technical aspects of the disclosure.

[0026] The terminology used herein serves solely to describe particular embodiments and is not intended to limit them. The singular forms "ein," "eine," and "der," "die," "das" are intended to include the plural forms unless the context clearly indicates otherwise. It is further noted that the terms "aufweist / aufweisen" and / or "umfassent / umfassen," when used herein, specify the presence of the aforementioned features, integers, steps, processes, elements, and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, processes, elements, components, and / or groups thereof.

[0027] Unless otherwise defined, all terms used herein, including technical and scientific terms, have the same meanings as they are generally understood by those skilled in the art in the field to which the embodiments relate. It is further noted that terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with their meaning in the context of the relevant technology and not in an idealized or overly formal sense, unless expressly defined otherwise herein.

[0028] When describing exemplary embodiments with reference to the accompanying drawings, similar reference numerals refer to similar elements, and repeated descriptions in this regard are omitted. Similarly, when describing exemplary embodiments, a detailed description of known, related structures or functions is omitted if it is assumed that such a description would lead to an ambiguous interpretation of the present disclosure.

[0029] Furthermore, terms such as first, second, A, B, (a), (b), and the like may be used when describing components of the exemplary embodiments. These terms are not used to define any essential nature, order, or sequence of the respective components, but solely to distinguish the respective components from other components. It should be noted that when a component is described as "connected," "coupled," or "joined" to another component, the former may be directly "connected," "coupled," or "joined" to the latter, or connected, "coupled," or "joined" to the latter via another component.

[0030] Components included in one embodiment and components that have a common function are described in other embodiments with the same designation. Unless otherwise stated, the description of one embodiment can also be applied to other embodiments, and any repetition of this description is omitted.

[0031] Fig. Figure 1 is a perspective view of a microprobe system according to an exemplary embodiment and Fig. Figure 2 is a top view showing a state in which a second housing in a microprobe system is open, viewed from a top surface, according to an embodiment.

[0032] With reference to Fig. 1 and Fig. 2. A microprobe system 1, according to one embodiment, can detect a material characteristic of a sample W. The sample W can, for example, be a semiconductor device formed on a wafer. In Fig. 1 and Fig. 2 For the sake of simplicity, the sample W is represented as a quadrilateral, this example serving only to simplify the description, and can be various types of semiconductor devices formed on the wafer. The microprobe system 1 can acquire various characteristics of the sample W, such as electrical, optical, and chemical characteristics, in conjunction with other devices. According to one embodiment, the microprobe system 1 can comprise a housing 11, a vacuum port 12, an observation stage 13, a probe module 14, a signal port 15, a support 16, a temperature controller, a cooling device 17, a power port 18, and a power connector 19.

[0033] In one embodiment, the housing 11 can form the outer surface of the microprobe system 1. In another embodiment, the housing 11 can comprise a first housing 111, a second housing 112, a window 113, and a sealing element 114.

[0034] In one embodiment, the first housing 111 can have an open side and can provide an examination chamber 1111 for investigating the characteristics of the sample W. For example, an upper section of the first housing 111 can be open. For example, the examination chamber 1111 can have a volume of 100 cm³. 3or less. According to this structure, the process of creating the examination chamber 1111 in a vacuum state or purging gas into the examination chamber 1111 for the examination of sample W can be carried out quickly. Accordingly, the microprobe system 1 can accurately measure the characteristics of sample W, even if the characteristics of sample W are sensitive to the environment.

[0035] In one embodiment, the second housing 112 can be connected to one side of the first housing 111, thus sealing the test chamber 1111. For example, the second housing 112 can be connected to the open upper section of the first housing 111. The second housing 112 can maintain a vacuum or gas purge condition of the test chamber 1111 by sealing it. The second housing 112 can be provided with a fastening screw that can be securely coupled to the first housing 111. The fastening screw can, for example, be provided on an outer edge of the second housing 112 and can be coupled to a fastening groove formed in an upper surface of the first housing 111.

[0036] In one embodiment, the window 113 can be made of a transparent material, allowing the examination chamber 1111 to be viewed from the outside of the housing 11. The window 113 can be made of a material such as quartz, sapphire, glass, tempered glass, or acrylic. With this structure, a method for acquiring the optical characteristics of the sample W can be performed by shining light from the outside of the examination chamber 1111 through the window 113, and conversely, the optical characteristics of the sample W can be acquired by applying an electrical signal. For example, the window 113 can be arranged on one side of the second housing 112. However, this is only an example, and the arrangement of the window 113 is not limited to this.

[0037] In one embodiment, the sealing element 114 can seal the gap between the first housing 111 and the second housing 112 when the second housing 112 is connected to the first housing 111. The sealing element can be arranged on the upper surface of the first housing 111 and / or on a lower surface of the second housing along the periphery of the test chamber 1111. Accordingly, the sealing element 114 can assist in sealing the test chamber 1111.

[0038] In one embodiment, the vacuum port 12 can be formed by the housing 11, thus creating a vacuum in the test chamber 1111. In another embodiment, the vacuum port 12 can be connected to an outlet line and thereby serve as a path for exhaust gas from the test chamber 1111. In yet another embodiment, the vacuum port 12 can be connected to an external device and thereby serve as a path for removing air from the test chamber 1111. Furthermore, the vacuum port 12 can introduce gas and moisture into the test chamber 1111 through the connection to the external device. During the process of acquiring at least one electrical, optical, dielectric, magnetic, and / or chemical characteristic of the sample W, the vacuum port 12 can serve as a path for introducing gas and moisture into the test chamber 1111.In one embodiment, the vacuum port 12 can be provided in multiple locations. For example, two vacuum ports 12 can be arranged on one side of the first housing 11. However, this is only an example, and the number and arrangement of the vacuum ports 12 are not limited to this.

[0039] In one embodiment, the observation table 13 can be arranged in the examination chamber 1111 and the sample W to be examined can be placed there. In another embodiment, the observation table 13 can be positioned in a central section of the examination chamber 1111.

[0040] In one embodiment, the probe module 14 can be arranged in the examination chamber 1111 and can acquire various characteristics of the sample W by making contact with the sample W. In another embodiment, the probe module 14 can be arranged around the observation table 31. In yet another embodiment, the probe module 14 can be provided in multiples and can simultaneously acquire electrical characteristics from multiple points on the sample W. For example, the probe module 14 can comprise a first probe module 14a, a second probe module 14b, a third probe module 14c, and a fourth probe module 14d. For example, each of the probe modules 14 can be arranged to surround the observation table 13 and can make contact with the sample W at the four different points.

[0041] In one embodiment, the signal terminal 15 can be formed by the housing 11 to connect a signal line for sending and receiving an electrical signal from the probe module 14. For example, the signal terminal 15 can be located on one side of the first housing 111. In another embodiment, the signal terminal 15 can be provided in a number corresponding to the number of probe modules 14. For example, the signal terminal 15 can be provided in a group of four if the probe module 14 is provided in a group of four. However, this is only an example, and the number and arrangement of the signal terminals 15 are not limited to this.

[0042] In one embodiment, the support 16 can carry the observation table 13 from the housing 11. For example, the support 16 can carry the observation table 13 relative to the first housing 111. In another embodiment, a support space can be formed in a lower section of the support 16. For example, the temperature controller and the cooling device 17, as described below, can be located in the support space.

[0043] In one embodiment, the temperature controller can regulate the temperature of sample W. In this embodiment, the temperature controller can comprise a thermoelectric element formed from a Peltier element, a resistance heater / heating device, and various heat exchange devices. For example, the temperature controller can regulate the temperature of sample W in a range from -40 degrees or more to 150 degrees or less. However, this is only an example, and the range for regulating the temperature of sample W is not limited to this. For example, the temperature controller can regulate the temperature of sample W in a range from 80 K or more to 373 K or less.

[0044] In one embodiment, the cooling device 17 can cool the temperature controller. In another embodiment, heat can be generated during the process of regulating the temperature of the sample W by the temperature controller, and the cooling device 17 can dissipate the heat generated in the temperature controller. The cooling device 17 can be supported by the first housing 111.

[0045] In one embodiment, the power connection 18 can be formed by the housing 11 to supply power to the microprobe system 1. For example, the power connection 18 can be located on one side of the first housing 111. For example, the power connection 18 can be electrically connected to the temperature controller to supply power to the temperature controller. However, this is only one example, and the arrangement of the power connection 18 and the power supply destination is not limited to this.

[0046] In one embodiment, the power connection element 19 can be connected to the other side of a probe 1451, for example, a contact section of the probe 1451, so that electricity is applied to the probe 1451. The power connection element 19 can be connected to the first signal terminal 15, whereby electricity is applied to the sample W via the probe 1451, or the electrical characteristics of the sample W are sent to an external signal line.

[0047] Fig. Figure 3 is a perspective view of a probe module according to an exemplary embodiment. Fig. Figure 4 is an expanded perspective view of a guide element and a rotary element according to an exemplary embodiment and Fig. Figures 5A to 5C are top views showing a probe module viewed from a side surface, according to an exemplary embodiment and Fig. Figure 6 is an expanded perspective view of a probe arrangement according to an exemplary embodiment.

[0048] With reference to Fig. According to an embodiment 3 to 5C, the probe module 14 can comprise a base 141, a guide rail 142, a guide element 143, a rotary element 144, a probe arrangement 145, a connecting element 146, an elastic element 147 and a stop device 148.

[0049] The base 141 can be installed on the underside of the examination chamber 1111 of the housing 11. A through-hole, formed by penetration along a vertical direction, can be formed in the base 141, and a screw can be inserted into the through-hole, thereby fixing the base 141 to the underside of the examination chamber 1111 of the housing 11.

[0050] In one embodiment, the guide rail 142 can be installed on an upper surface of the base 141, and the guide element 143 can slide along the guide rail 142 in a first sliding direction SD1 and / or a second sliding direction SD2. For example, the guide rail 142 can be a linear motion (LM) guide. As it slides along the guide rail 142, the guide element 143 can move towards or away from the observation stage 31. Consequently, it may be possible to adjust the distance of the probe assembly 145 in a horizontal direction with respect to the sample W by moving the guide element 143.

[0051] For example, the rotary element 144 can be rotatably connected to the guide element 143 about a first axis X1, which is parallel to a height direction. For example, as in Fig. As shown in Figure 4, a shaft 1441 projects from one side of the rotary member 144, and a shaft groove 1431 can be recessed from one side of the guide member 143 in a shape corresponding to the shaft 1441. For example, the shaft 1441 of the rotary member 144 can be attached to the shaft groove 1431 of the guide member 143, and the rotary member 144 can rotate about the shaft 1441 with respect to the guide member 143 in a first vertical direction of rotation VD1 and / or a second vertical direction of rotation VD2. In this structure in Fig. 3 can rotate the probe arrangement 145 about the first axis X1 with respect to the base 141.

[0052] In one embodiment, the probe assembly 145 can be rotatably connected to the rotary element 144 about a second axis X2, which is perpendicular to the first axis X1, in a first horizontal direction of rotation HD1 towards the sample W and in a second horizontal direction of rotation HD2 away from the sample W. For example, a connecting groove in a direction parallel to the second axis X2 can be formed by a probe housing 1452 described below and the rotary element 144, and the connecting element 146 can connect the rotary element 144 to the sample assembly 145 by penetrating the connecting groove.

[0053] In one embodiment, the elastic component 147 can impart a torque to the probe assembly 145 in the first horizontal direction of rotation HD1. For example, the elastic component 147 can be positioned between the rotary component 144 and the probe assembly 145 and can connect the rotary component 144 to the sample assembly 145. For example, a groove for receiving the elastic component 147 can be formed on one side of the rotary component 144. In one embodiment, the elastic component 147 can include a compression spring. For example, the elastic component 147, which includes the compression spring, can be located further away from an end section of the probe 1451 described below, based on the distance. In this structure, where the sample W is positioned on the observation table 143, the probe assembly 145 can maintain contact with the sample W by continuously applying external forces to the sample W.

[0054] In one embodiment, the stop device 148 can limit the rotation angle of the probe arrangement 145 in the first horizontal direction of rotation HD1 and / or the second horizontal direction of rotation HD2. In another embodiment, as shown in Fig. As shown in Figure 5A, the stop device 148 comprises a first stop device 1481, which limits the rotation angle of the probe assembly 145 in the first horizontal direction of rotation HD1, and a second stop device 1482, which limits the rotation angle of the probe assembly 145 in the second horizontal direction of rotation HD2. For example, both the first stop device 1481 and the second stop device can project from one side of the probe housing 1452 described below. With this structure, as shown in Fig. As shown in Figure 5B, the first stop device 1481 and the rotary element 144 come into contact with each other when the probe assembly 145 is rotated by a certain angle in the first horizontal direction of rotation HD1, thereby preventing the probe assembly 145 from rotating beyond the certain angle in the first horizontal direction of rotation HD1. As shown in Fig. As shown in Figure 5C, the second stop device 1482 and the rotary element 144 can come into contact with each other when the probe assembly 145 is rotated by a certain angle in the second horizontal direction of rotation HD2, thereby preventing the probe assembly 145 from rotating beyond the certain angle in the second horizontal direction of rotation HD2.

[0055] With reference to Fig. 3 and Fig. 6 The probe arrangement 145 can, according to an embodiment, comprise the probe 1451, the probe housing 1452 and a gripping section 1453.

[0056] In one embodiment, the probe 1451 can have a longitudinal direction, a pointed end section, and contact the sample W. For example, the end section of the probe 1451 can be shaped such that it is bent at a certain angle to the sample W, based on the longitudinal direction of the probe 1451. In another embodiment, the probe 1451 can have an exposed section 14511, which is exposed towards the outside of the probe housing 1452, and an insertion section 14512, which is inserted into the housing, as described below.

[0057] In one embodiment, the probe housing 1452 can enclose at least a section of the probe 1451. In another embodiment, the probe housing 1452 can comprise a first probe housing 1452a and a second probe housing 1452b. For example, the first probe housing 1452a and the second probe housing 1452b can be connected to each other with the probe 1451 positioned between them.

[0058] In one embodiment, the insertion section 14512 of the probe 1451 can comprise at least one curved section 14513. For example, the insertion section 14512 can be curved at an angle specified in the curved section 14513. In another embodiment, the probe housing 1452 can comprise a receiving groove 14522 that is recessed in a shape corresponding to the insertion section 14512. For example, the receiving groove 14522 can be curved to correspond to the curved section 14513 of the probe 1451 on one side of the second housing 112. In another embodiment, the receiving groove 14522 can receive at least one portion of the insertion section 14512 of the probe 1451.For example, the insertion section 14512 of the probe 1451 can be received in the receiving groove 14522 formed in the second housing 112, and the first housing 111 can be coupled to a surface of the second housing 112 in which the receiving groove 14522 is formed. With this structure, it may be possible to prevent rotation of the probe 1451 by taking the longitudinal direction as an axis while it is received in the probe housing 1452.

[0059] In one embodiment, the length in the longitudinal direction of the probe 1451 can be reduced depending on the shape of the probe housing 1452. The probe 1451 can generally be more expensive than the probe housing 1452. To reduce the manufacturing costs of the probe assembly 145, the length in the longitudinal direction of the probe 1451 can be shortened in such a way as to increase its overall length.

[0060] With reference to Fig. 3, Fig. 5A and Fig. 6. According to an embodiment, the probe arrangement 145 can further comprise the gripping section 1453 and the probe housing 1452 can further comprise a separation prevention pin 14521.

[0061] In one embodiment, the gripping section 1453 can extend from one side of the housing 11 to the end section of the probe 1451 in the longitudinal direction of the probe 1451. For example, the gripping section 1453 can extend from one side of the first housing 111. When viewed in a direction parallel to the second axis X2, at least one section of the gripping section 1453 and at least one section of the probe 1451 can overlap. In one embodiment, a gripping element 1453A can be formed in at least one section of the gripping section 1453 to enable gripping when the probe module 14 rotates in the second horizontal direction of rotation HD2. For example, the probe assembly 145 can rotate in the second horizontal direction of rotation HD2 when tweezers P come into contact with the gripping element 1453A to place the sample W onto the observation stage 13.In one embodiment, the gripping part 1453A may have a structure to prevent the tweezers P from slipping. For example, the gripping part 1453A may have an uneven section. However, this is only one example, and the structure of the gripping part 1453A is not limited to this. For example, the gripping part 1453A may be made of a flat material with high friction.

[0062] In one embodiment, the separation-prevention pin 14521 can prevent the separation of the elastic component 147. In another embodiment, the separation-prevention pin 14521 can extend from one side of the housing 11 in a direction toward the rotary component 144 to have a longitudinal direction. For example, the separation-prevention pin 14521 can extend from one side of the first housing 111 and be located further away from the end section of the probe 1451 than the second axis X2, based on the distance. In another embodiment, the elastic component 147 can be wrapped around the separation-prevention pin 14521 and simultaneously connect the rotary component 144 to the probe assembly 145. With this structure it may be possible to prevent the separation of the elastic component 147 from the probe arrangement 145 while the same is received in the groove formed in the rotary component 1444.

[0063] Fig. Figure 7 is a perspective view of a probe module according to an exemplary embodiment.

[0064] With reference to Fig. 7 a probe module 14' according to an embodiment can comprise a guide element 143', a rotary element 144', a probe arrangement 145', a connecting element 146' and an elastic element 147'.

[0065] The guide element 143', the rotary element 144', the probe arrangement 145' and the connecting element 146' of Fig. 7 are essentially the same as the guide element 143, the rotary element 144, the probe arrangement 145 and the connecting element 146, which are described with reference to Fig. Sections 1 to 6 have already been described, therefore a detailed description of them is omitted. Furthermore, for the sake of simplicity, the description of probe module 14' is based on the following: Fig. 7 a detailed description of the contents that overlap with probe module 14, which refers to Fig. Items 1 to 6, as described above, have been omitted.

[0066] In one embodiment, the elastic component 147' can impart a torque to the probe assembly 145' in a first horizontal direction of rotation HD1' about the second axis X2. For example, the elastic component 147' can be positioned between the rotary component 144' and the probe assembly 145' and can connect the rotary component 144' to the probe assembly 145'. For example, a ring can be formed in both end sections of the elastic component 147', and the ring formed in one end section of the elastic component 147' can be retained by the probe assembly 145', and the ring formed in the other end section can be retained by the rotary component 144'. In one embodiment, the elastic component 147' can comprise a tension spring.For example, the elastic component 147', which includes the tension spring, can be located closer to the second axis based on the distance from an end section of a probe. In this structure, where a sample is positioned on an observation table, the probe assembly 145' can maintain contact with the sample by continuously applying external forces to the sample.

[0067] Although the embodiments have been described with reference to the limited drawings, those skilled in the field may apply various technical modifications and variations based thereon. For example, suitable results may be obtained if the described techniques are carried out in a different sequence and / or if components in a system, architecture, device, or circuit, as described, are combined differently or replaced or supplemented by other components or equivalents thereof.

[0068] Therefore, other implementations also fall under the scope of protection of the following claims.

Claims

[1] A probe module that has the following features: a base; a guide rail that is installed on the base; a guide element configured to slide along the guide rail; a rotary component which is rotatably connected to the guide component about a first axis parallel to a height direction with respect to the guide component; a probe arrangement comprising a probe and rotatably connected to the rotary element in a first horizontal direction of rotation towards a sample and in a second horizontal direction of rotation away from the sample about a second axis perpendicular to the first axis; and an elastic component configured to apply a torque to the probe assembly in the first horizontal direction of rotation. [2] The probe module according to claim 1, wherein the elastic component is positioned between the rotary component and the probe arrangement. [3] The probe module according to claim 2, wherein the elastic component has a compression spring which is located further away from an end section of the probe than the second axis on the basis of a distance. [4] The probe module according to claim 2, wherein the elastic component has a tension spring which is located closer than the second axis based on a distance from an end section of the probe. [5] The probe module according to claim 1, wherein the probe arrangement further comprises a probe housing which is connected to the rotary element and encloses at least a section of the probe. [6] The probe module according to claim 5, wherein the probe housing has a separation prevention pin configured to prevent separation of the elastic component. [7] The probe module according to claim 6, which further comprises the following feature: a gripping section extending from the probe housing to an end section of the probe to enable gripping when the probe module rotates in the second horizontal direction. [8] The probe module according to claim 7, wherein at least one section of the gripping section has an uneven section. [9] The probe module according to claim 6, wherein the probe has an exposed section that is exposed towards an outside of the housing and an insertion section that is inserted into the housing, wherein the insertion section has at least one curved section, wherein the probe housing has a receiving groove which is recessed in a shape corresponding to the insertion section in order to receive at least a portion of the insertion section. [10] The probe module according to claim 1, which further comprises the following feature: one or more stop devices configured to limit a rotation angle of the probe arrangement in at least either the first horizontal direction of rotation or the second horizontal direction of rotation. [11] A microprobe system according to claim 10, comprising the following feature: the probe module according to claim 1.

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