COMPONENT WITH AN INTEGRATED SENSOR DEVICE FOR OPTICAL, MULTI-AXIS MEASUREMENT OF A FORCE

Description

[0001] The present invention relates to a component with an integrated sensor device for an optical, multi-axis measurement of a force acting on the component, a method for producing such a component with an integrated sensor device, and in particular to a structure-integrated optical multi-axis force / torque measurement. BACKGROUND

[0002] Sensor devices that are integrated into a component or part of a structure are known for measuring the force acting on it. For example, patent DE 10 2012 005 614 B4 discloses a support structure with a sensor unit integrated into a cavity in the form of a connecting element with integrated sensors. The sensors comprise piezo actuators or strain gauges to detect loads and their direction of action. Strain gauges or piezoelectric sensors are also used, for example, in a sensor unit integrated into a hollow shaft, as disclosed in WO 2016 177 356 A1. Sensor devices based on optical devices that detect forces along multiple axes are also known.For example, document WO 2013 072 712 A1 shows a light source arranged on a support element beneath a hemispherical cover layer, as well as a light detector designed to detect deformation of the cover layer due to light reflection therefrom. Furthermore, sensor units based on interferometry are known, such as the interferometer from document DE 41 32 110 A1, which is embedded in an elastically deformable body.

[0003] Optical sensors for multi-axis force measurement are also known. For example, the published patent application US 2013 / 0265233 A1 discloses an optical measuring device for multi-axis input devices with multiple parts that can move relative to one another. The patent application US 2019 / 0072443 A1 discloses an optical measuring device for a robot that is designed to determine a displacement of an inner element relative to an outer element connected to it by flexible elements in multiple axes. Regarding optical measurement technology, the patent application DE 10 2017 101 580 A1 discloses a laser interferometer that can measure even a small parallel offset of the reflected laser beam and thus determine displacements of an object to be measured.

[0004] The disadvantages of state-of-the-art integrated sensors for multi-axis measurement using strain gauge and piezo-based designs include the high costs and complex manufacturing of the measuring chain. Optical multi-axis force sensors are hindered by the required large deformation of the sensor bodies. Force sensors with interferometers have so far suffered from their sensitivity to interference during assembly and installation.

[0005] There is therefore a need for components with cost- and production-efficiently integrated optical measuring sensors that are designed to measure loads on the components due to the effects of external forces or torques in several spatial axes or directions. BRIEF DESCRIPTION OF THE INVENTION

[0006] This object is at least partially achieved by a component with an integrated sensor device according to claim 1 and by a method for producing such a component with an integrated sensor unit according to claim 8. The dependent claims relate to advantageous developments of the subject matter of claim 1.

[0007] The present invention relates to a component with an integrated sensor device for optical, multi-axis measurement of a force (a force or a torque) acting on the component. The component has a cavity in which a first support element with one or more first optical elements and a second support element with one or more second optical elements are formed and partially inserted into the component. The portions of the first and second support elements joined into a material of the component fix the support elements to the component. The support elements can be fixed, for example, by soldering, gluing, welding, or screwing; however, these joining methods are not sufficiently secure and are only partially suitable for the high demands of the sensor device for a precise, backlash-free, and long-term stable connection to the component.Advantageously, the fixing of the support elements is achieved by cold forging or cold forming of the support elements and / or the component. Furthermore, the component comprises a transmission device which is designed to be connected to an energy source and, when connected to the energy source, to transmit or generate at least two beams in mutually independent directions, wherein the beams each run between the first optical elements and the second optical elements through the cavity. The first optical elements and the second optical elements are designed to generate information about a relative position change of the first support element with respect to the second support element based on the at least two beams. The transmission device is also designed to provide or generate the information for measuring the effect of force.to transmit the information out of the device, wherein the second optical elements comprise a mirror and the at least two beams comprise a mirrored beam and an unreflected beam.

[0008] A relative change in position between the first and second support elements occurs due to the joining connection of the first and second support elements to the component when an external force or torque acts on the component and deforms it due to the elasticity of the component. The two beams are advantageously part of a beam path that is suitable for providing information about the change in position even in the event of minor deformations of the component due to external force. The independent directions of the at least two beams allow measurement of the change in position or the force effect with respect to multiple axes or directions. The first and second optical elements can be designed to superimpose the at least two beams to form a collected beam, and the transmission device can be designed to transmit the collected beam out of the structure.To generate the information, a pixel-based displacement detection method, such as digital image correlation or a digital moiré method, can be used. Alternatively or additionally, at least one of the beams can pass between partially reflecting plates (or semi-transparent mirrors), thus forming a Fabry-Pérot interferometer. Furthermore, at least one of the beams can also be part of the beam path of a Michelson interferometer.

[0009] Optionally, the transmission device is designed to be connected to a light source as an energy source. The light source can in particular be a laser device. The connection can be implemented as coupling a laser beam into an optical fiber such as a fiber optic cable, which is designed to guide the laser beam to the first and / or the second optical elements and thus generate a beam path between the optical elements that comprises the at least two beams. However, the transmission device can also be designed to be connected to a power source as an energy source. In this case, a power cable can conduct energy to one or more of the first and / or second optical elements, which are designed to generate a beam path that comprises the at least two beams.The transmission device can further be configured to transmit the information about the relative position change of the first support element with respect to the second support element out of the component via a light guide. A fiber optic cable can again be provided for this purpose. However, the transmission device can also be configured to transmit the information out of the component via an electrical line. For this purpose, for example, a superposition of the beams can be converted by optical elements such as diodes, semiconductor components, or cameras into an electrical signal that transmits the information through the electrical line.

[0010] Optionally, the component is one of the following: a hollow shaft, a hollow cylindrical component, a pipe, a robot element (in particular a robot arm), an element intended for a structure, a crane or load arm, a connecting element, a column of a machine tool, a tool, a tool holder.

[0011] Optionally, the first optical elements and / or the second optical elements have an optical pattern and are designed to superimpose the at least two beams, such that the information comprises a change in a captured optical image of the optical pattern. The change in the optical image of this pattern can occur in particular through a displacement of the optical pattern. For example, masks can be attached in the path of the two beams, each having openings as an optical pattern, such that the beams transmit an image of the optical pattern. The change in the image then results, for example, from a relative displacement and / or rotation of the openings, triggered by the relative change in position of the support elements. The change in the image can be determined in particular from the superimposed beams using a pixel-based method.The pixel-based method can be, for example, a digital image correlation or a method in which a shift of a moiré pattern is measured.

[0012] Optionally, the first optical elements and the second optical elements form a Michelson interferometer for at least one of the at least two beams. This results in a Michelson interference pattern that is used to generate the information about the relative position change or that represents this information.

[0013] Optionally, at least one first optical element and at least one second optical element each comprise a partially reflecting plate and are configured to form a Fabry-Pérot interferometer for at least one of the at least two beams.

[0014] Optionally, at least one further support element with one or more further optical elements is formed in the cavity and partially inserted into the component, so that the at least one further support element is correspondingly included in the beam path and the information also allows conclusions to be drawn about a relative change in position with respect to the additional support element(s).

[0015] Embodiments also relate to a method for producing a component according to claim 1 with an integrated sensor device for optical, multi-axis measurement of a force acting on the component. The component comprises a cavity, a first support element with first optical elements, and at least one further support element with further optical elements. The method comprises the steps of providing a starting component with a starting cavity; positioning the first support element and the at least one further support element in the starting cavity of the starting component; forming the starting component to form the component and the cavity; and thereby plastically joining the first support element and the at least one further support element to fix the first support element and the second support element in the cavity.

[0016] Within the scope of conventional joining methods for fixing the support elements, these could also be fixed, for example, by soldering, gluing, welding, or by a screw connection. However, if the sensor device has high requirements for a precise, backlash-free, and / or long-term stable connection to the component, these joining methods may prove to be unreliable. The forming process presented here as a preferred embodiment can, in particular, be cold bulk forming or cold forming. The forming process fixes the first and at least one further support element to the boundary of the cavity. The following two embodiments of the process can be used for this purpose.

[0017] In a first embodiment, at least one of the support elements comprises a core made of very hard material and has an edge region comprising a material that is more easily deformable than the material of the core. The more easily deformable material is plastically deformed by the forming of the component, so that the at least one support element is fixed in the resulting cavity.

[0018] In a second embodiment, at least one of the support elements comprises a very hard material compared to a material of the starting component, so that during forming, the starting component is plastically deformed by the hard material of the at least one support element. The support element is thus fixed in the cavity of the component created by the forming process.

[0019] Both embodiments can also be combined, i.e. different support elements can be fixed by different embodiments.

[0020] Advantageously, the first support element can be inserted first, before the at least one additional support element is positioned. To improve the positioning or to improve the position of the support elements, the sensor device can be coupled or operated during positioning and / or during the forming process.

[0021] Furthermore, embodiments also relate to methods for using the integrated sensor device for optical, multi-axis measurement of a force acting on a component having a cavity in which a first support element with one or more first optical elements and at least one second support element with one or more second or further optical elements are formed and partially inserted into the component, and which further has a transmission device configured to be connected to an energy source. Such a method comprises the steps: Generating, by the transmission device connected to the energy source, at least two beams in mutually independent directions, wherein the beams each extend between the first optical elements and the second optical elements through the cavity; Generating, by the first optical elements and the second optical elements and based on the at least two beams, information about a relative change in position of the first support element with respect to the second support element; Transmitting, by the transmission device, the information about the relative change in position in order to measure the force effect.

[0022] Embodiments of the present component with an integrated sensor device are thus characterized in that at least two support elements are fixed within an at least partially hollow structure of the component, to which optical elements such as optical fibers, mirrors, light sources, optical markers, and cameras are attached. The optical elements are positioned relative to one another such that a relative displacement or rotation of the support elements relative to one another causes, for example, a change in a pattern captured by an internal camera or an external camera connected via an optical fiber. This change in the pattern can be traced back to the existing deformation via image analysis. Embodiments implement various beam paths, each of which comprises rays in different directions or in inclined planes.The support elements are advantageously integrated into the structure of the component by (partial) plastic joining. For this purpose, the support elements each comprise, at least in one part, a high-strength and rigid material to which the optical elements can also be attached. The strength or hardness of the material is greater than that of a cavity wall of the component structure, so that the support elements can be inserted by forming the component. For positioning or fixing and aligning the support elements in the structure during plastic joining, the support elements can each also have a softer material, particularly in an edge region, which ensures that the arrangement of the support elements is maintained during the forming process. For example, a support element can have a very hard core and a comparatively more easily deformable edge region.

[0023] In this way, both interference- and pixel-based optical measuring chains can be embedded in support structures using forming technology. The integrated sensors then consist of at least two parts that are inserted separately into the structure with high precision. Extensions of the measuring axes are achieved through the use of mirrors and, for example, by inclining part of the beam path to a longitudinal axis of the support structure. For the pixel-based methods mentioned, a suitable pattern can be applied to a photomask or a surface so that its relative displacement to another optical element (e.g., a camera) is recorded when the structure is loaded. By splitting the beam path (inclined patterns and mirrors), a displacement of the pattern relative to the camera is translated into a relative change in position between the support elements, thus recording the force or torque effect.Depending on the pattern, the evaluation with pixel-based methods can be performed either by digital image correlation or by digital moiré methods (superposition of line patterns). These pixel-based methods can, in particular, determine parallel displacements between two support elements in all six degrees of freedom. Distance displacements can also be measured. However, the sensor device can also be implemented in a similar way, for example, for a Fabry-Pérot and / or a Michelson interferometry method. Here, in addition to the parallel displacement, a change in the distance between the support elements can also be detected using an obliquely installed interferometer and suitable beam guidance (by mirrors). Combinations of different measurement methods for different beams are also possible.

[0024] In conventional sensor devices for measuring forces or torques on components, measurement chains based on changes in electrical properties are largely standardized. However, in addition to the sensors themselves, they require additional electrical elements such as charge amplifiers or bridge circuits. They also require electrical power supply, and the complexity increases significantly, especially when measuring forces or torques across multiple axes. Some conventional measurement chains also use preloaded structures or sensor devices, which can be disadvantageous in some applications.

[0025] In contrast, embodiments of the present invention offer the following advantages. The component with an integrated sensor device expands the measuring axes through cost-effective components (particularly when using pixel-based methods) and a suitable arrangement of the beam paths, as well as through an integral design consisting of optical elements and support structures. It also opens up the possibility of scaling the sensors and thus of manufacturing sensor structures in small dimensions. The integral design is achieved in particular through plastic joining. This results in a compact design of the component with an integrated sensor device for multi-axial detection of forces and / or torques acting on the component. The use of pixel-based methods in particular can result in significant cost savings compared to conventional strain gauge and piezo-based sensors. BRIEF DESCRIPTION OF THE CHARACTERS

[0026] The embodiments of the present invention will be better understood from the following detailed description and the accompanying drawings of the various embodiments, which, however, should not be construed as limiting the disclosure to the specific embodiments, but are for explanation and understanding only. Fig. 1 illustrates an embodiment of the present invention for a component with an integrated sensor device for a pixel-based method; Fig. 2 illustrates a further embodiment with a Fabry-Pérot sensor device; Fig. 3 illustrates a further embodiment with a sensor device having a Michelson interferometer; Fig. 4 illustrates a measurement by an embodiment according to Fig. 1using a digital image correlation; Fig. 5 illustrates a measurement by an embodiment according to Fig. 1 using a digital moiré method; Fig. 6 shows steps of a method for producing a component with an integrated sensor device; Fig. 7 illustrates further results of embodiments of the method according to Fig. 6 . DETAILED DESCRIPTION

[0027] Fig. 1illustrates an embodiment of the present invention for a component 100 with an integrated sensor device 200 for optical, multi-axis measurement of a force F and / or a torque M on the component 100. The component 100 has a cavity 110 with a wall 120. The sensor device 200 comprises a first support element 210 with a plurality of first optical elements 220. In the illustrated embodiment, the first optical elements 220 comprise, in particular, two beam expansion elements 221, which are designed to expand light supplied from an energy source via a light guide and to guide it as beams 331, 332 into the cavity 110 through an optical pattern 222 or a backlit photomask. The sensor device 200 also comprises a second support element 230 with a plurality of second optical elements 240.In the illustrated embodiment, the second optical elements 240 comprise a mirror 245 and a beam collection element 243, which is designed to collect or superimpose the two beams 331, 332 and transmit them as a light signal through a line 320, in this case, for example, a fiber optic cable. The first support element 210 and the second support element 230 are formed in the cavity 110 and partially inserted into the component 100. The component 100 further comprises a transmission device 300, which is designed to be connected to an energy source—here, for example, a laser device—and to generate the two beams 331, 332 upon connection to the energy source. The two beams 331, 332 extend in mutually independent directions between the first optical elements 220 and the second optical elements 240 through the cavity 110.The first optical elements 220 and the second optical elements 240 are designed to generate information about a relative position change of the first support element 210 with respect to the second support element 230 based on the two beams 331, 332. In the present embodiment, this occurs through superposition in the beam collection element 243. The transmission device 300 is designed to provide the information for measuring the force F and / or the torque M, or to transmit this information out of the component 100. Due to the independent directions of the beams 331, 332, the measurement is carried out with respect to several axes, which are determined by the directions of the beams 331, 332 in the cavity 110: The force F or the torque M shifts a position of the first support element 210 relative to a position of the second support element 230.This creates a difference in the superposition of the two beams 331, 332 in the beam collection element 243, which is output as information via a line 320 from the component 100. A conclusion about the displacement, and thus a measurement of the force F and / or the torque M, is then possible, for example, by applying a known pixel-based method or by applying a known digital moiré method to the information.

[0028] In an embodiment similar to the one presented here, the transmission device 300 can also be configured to supply a supply voltage to the optical elements 220, 240 or to output images from the component 100 instead of light. Light-emitting diodes can then be used instead of or in addition to the beam expansion elements 221 to generate the beams (331, 332). The beam collection element 243 can be designed as a camera. Mixed forms of these designs (for example, with a voltage supply for the first optical elements 220 and a light guide for transmitting the information, or vice versa) are also possible.

[0029] Fig. 2 illustrates a further embodiment of the component 100 with integrated sensor device 200. As in the Figure 1In the illustrated embodiment, the first optical elements 220 generate two beams 331, 332 in independent directions, but here comprise a partially reflecting plate 227 for each of the beams 331, 332. A further partially reflecting plate 247 is located in front of a beam collection element 243 as part of the second optical elements 240. The partially reflecting plates 227, 247 each form a Fabry-Pérot interferometer or optical resonator for the two beams 331, 332. A relative position change of the support elements 210, 230 changes the distance between the partially reflecting plates 227, 247 and thus the resonance condition. For monochromatic beams 331, 332, this results in a change in the intensity of an optical or electrical output signal generated by the beam collection element 227 and led out of the component 100 via the line 320.If the beams 331, 332 comprise multiple wavelengths, the change in the resonance condition leads to a color shift of the output signal. The output signal can be used to determine the relative position change of the support elements 210, 230 and thus the force F or torque M.

[0030] Fig. 3illustrates a further embodiment of the component 100 with an integrated sensor device 200. The embodiment comprises a component 100 with a first support element 210 with first optical elements 220 and a second support element 230 with second optical elements 240, similar to the preceding figures. Again, the beam path comprises two beams 331, 332 between the first optical elements 220 and the second optical elements 240 in mutually independent spatial directions. The first and second optical elements 220, 240 are configured such that each of the beams 331, 332 is a part of a beam path of a Michelson interferometer. A relative positional shift between the first support element 210 and the second support element 230 leads to a change in an interference formed in the interference elements 249.As in the previous figures, this information is transmitted as an output signal from the component 100.

[0031] Fig. 4 illustrates a measurement of a force effect (a force F and a torque M) on the component 100 by determining a relative position change between the first support element 210 and the second support element 230 for an embodiment according to Figure 1. Here, digital image correlation is used as a pixel-based method. Part (a) of the figure shows a first image 410 of an optical pattern 222, created in the beam collection element 243 by the first beam 331, and a second image 420 of a second optical pattern 222, here identical to the first, created in the beam collection element 243 by the second beam 332. For the present embodiment, the images 410, 420 are connected by a reflection caused by the mirror 245. The points 411, 412, 423 in the first image represent light-transmitting regions or calculation points in the optical pattern 222. They correspond to the calculation points 421, 423, 423 in the second image.A pixel-based method comprises measuring positions of the calculation points 411 - 413, 421 - 423 in a state with force and in a state without force and comparing the positions in the state with force with the positions in the state without force.

[0032] In part (b) of the figure, a displacement of the positions of the calculation points 411, 412, 413 from the unreflected first beam 331 is shown on the left, as caused by the force. From the displacement of the calculation points 421, 422, 423, a pivot point 430 can be determined, which represents an application position of the torque M. Based on a horizontal displacement vx of the pivot point 440, a magnitude of a horizontal force component of the force F acting on the component 100 can be determined. Based on a vertical displacement vyof the pivot point 430, a value of a vertical force component of the force F acting on the component 100 can be determined. From an angle φ also follows a value of the torque M.

[0033] In part (b) of the figure, a shift of the positions of the calculation points 421, 422, 423 from the mirrored first ray 332 is also shown on the right, which results after deducting a shift of the calculation points 411, 412, 413, which is shown on the left in part (b). Based on the resulting shift v y ′ In the present illustration, a value of an axial force component of the force F acting on the component 100 can be determined.

[0034] Fig. 5illustrates a measurement of a force effect (a force F and a torque M) on the component 100 by determining a relative position change between the first support element 210 and the second support element 230 for an embodiment according to Figure 1 . A digital moiré process is used as a pixel-based process.

[0035] Part (a) of the figure shows a first image 410 of an optical pattern 222, produced in the beam collection element 243 by the first beam 331, and a second image 420 of a second optical pattern 222, produced in the beam collection element 243 by the second beam 332. The optical patterns 222 each comprise periodic grating structures in different orientations. By recording the grating structures, their orientation can be compared with and without the application of force. This results in an overlay for the first image 410, which represents a moiré pattern 440 of a first period Δy For the second image 420, a moiré pattern 450 results, which has a second period Δx and a moiré pattern 460, which has a third period Δy' Force components of the force F in a horizontal, vertical and axial direction can be determined from these periods.

[0036] In part (b) of the figure, a moiré pattern is shown, which is created by a superposition of a lattice structure in a state without force acting on the component 100 and a lattice structure in a state with force acting on the component 100. The lattice structures have an angle relative to each other α Based on the angle α For example, a value of the torque M can be determined.

[0037] Fig. 6shows steps of a method for producing a component 100 with an integrated sensor device 200 for optical, multi-axis measurement of a force acting on the component 100. The component 100 comprises a cavity 110, a first support element 210 with first optical elements 220, and at least one further support element 230 with further optical elements 240, wherein a hardness of the first support element 210 and of the at least one further support element 230 is greater than a hardness of the component 100. In particular, the support elements 210, 230 can each have a hard region and a soft or more easily deformable region. For example, a support element with a core and an edge that is more easily deformable than the core can be used. One step of the method comprises providing S110 an initial component with an initial cavity.A further step comprises positioning S120 the first support element 210 and the at least one further support element 230 in the initial cavity. A further step then comprises forming S130 the initial component in order to form the component and the cavity. The forming S130 can in particular comprise cold forming, for example, round pressing for a cylindrical component 100, or cold bulk forming. The cavity 110 is also formed by the forming S130 of the structure. The forming S130 also effects a plastic joining S140 of the first support element 210 and the second support element 230 in the cavity 110 of the component 100.

[0038] Fig. 7 illustrates further results of embodiments of the method according to Fig. 6 . In part (a) of the figure, an embodiment with a sensor device 200 similar to that in Figure 1shown. In this result of a first embodiment of the method, the support elements 210, 230 have a core made of very hard material and an edge region comprising a material that is more easily deformable than the material of the core. The more easily deformable material has been plastically deformed by the forming S130 of the component 100, so that the support elements 210, 230 have been fixed in the resulting cavity 110.

[0039] In part (b) of the figure, an embodiment with a sensor device 200 similar to that in Figure 2shown. In this result of a second embodiment of the method, the support elements 210, 230 comprise a very hard material compared to a material of the component 100, so that during forming S130, the material of the component 100 has been plastically deformed by the hard material of the support elements 210, 230. The support elements 210, 230 have thus been fixed in the cavity 110 of the component 100 created by the forming S130.

[0040] Sizes, displacements and angles in the figures are for illustrative purposes only. LIST OF REFERENCE SYMBOLS

[0041] 100 Component 110 Cavity 120 Wall thickness 200 Sensor device 210 First support element 220 First optical elements 221 Beam expansion element 222 Optical mask 225 Mirror of the first optical elements 227 Partially reflecting plate of the first optical elements 230 Second support element 240 Second optical elements 243 Beam collection element 245 Mirror of the second optical elements 247 Partially reflecting plate of the second optical elements 249 Interference element 300 Transmission device 320 Line 331 First beam 332 Second beam 410 Image of the optical pattern in the first beam 411, 412, 413 First calculation points 420 Image of the optical pattern in the second beam 421, 422, 423 Second calculation points 430 Pivot point 440, 450, 460 Moiré pattern vx , vy , v y ′ , Δ x, Δ y, Δ y' Shifts α, φ Angle F Force M Torque

Claims

1. A component (100) having an integrated sensor device (200) for an optical, multi-axis measurement of a force effect on the component (100), the component (100) comprising a cavity (110); a first support element (210) having one or more first optical elements (220) and a second support element (230) having one or more second optical elements (240), the first support element (210) and the second support element (230) being formed in the cavity (110) and partially inserted into the component (100); and a transmission device (300) which is designed to be connected to an energy source and to transmit, when connected to the energy source, at least two beams (331, 332) in mutually independent directions, the beams (331, 332) each extending between the first optical elements (220) and the second optical elements (240) through the cavity (110), the first optical elements (220) and the second optical elements (240) being designed to generate, on the basis of the at least two beams (331, 332), information about a relative position change of the first support element (210) with respect to the second support element (230), and the transmission device (300) being designed to provide the information for measuring the force effect, the second optical elements (240) having a mirror (245), characterized in that the at least two beams (331, 332) have a reflected beam (332) and a non-reflected beam (331).

2. The component (100) according to claim 1, wherein the transmission device (300) is designed to form one or more of the following: connection to a light source as an energy source, connection to a power source as an energy source, transmission of the information from the component (100) via a lighting line (320), transmission of the information from the component (100) via an electrical line (320).

3. The component (100) according to either of the preceding claims, wherein the component (100) is one of the following: a hollow shaft, a hollow cylindrical component, a tube, a robot element, in particular a robot arm, an element intended for a building, a crane arm, a connecting element, a column of a machine tool, a tool, a tool holder.

4. The component (100) according to any of the preceding claims, wherein the first optical elements (220) or the second optical elements (240) have an optical pattern (222) and are designed to superimpose the at least two beams (331, 332) such that the information comprises a change in a captured optical image of this pattern.

5. The component (100) according to any of claims 1 to 3, wherein the first optical elements (220) and the second optical elements (240) form a Michelson interferometer and the information is based on a Michelson interference pattern.

6. The component (100) according to any of claims 1 to 3, wherein at least one of the first optical elements (220) and at least one of the second optical elements (240) each have a partially reflective plate (227, 247) and are designed to form a Fabry-Perot interferometer for at least one of the at least two beams (331, 332).

7. The component (100) according to any of the preceding claims, wherein at least one further support element having one or more further optical elements is formed in the cavity (100) and partially inserted into the component (100).

8. A method for producing a component (100) according to claim 1, the method comprising the steps of providing (S110) an initial component having an initial cavity; positioning (S120) the first support element (210) and the at least one further support element (230) in the initial cavity; shaping (S130) the initial component to form the component (100) and the cavity (110); thereby plastically joining (S140) the first support element (210) and the at least one further support element (230) in order to fix the first support element (210) and the at least one further support element (230) in the cavity (110).