REINFORCED THIN-LAYER BUILDING ELEMENT

DE602019079544T2Active Publication Date: 2025-12-24EPINOVATECH AB
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Patent Information

Application Number
DE602019079544
Authority / Receiving Office
DE · DE
Patent Type
Patents
Current Assignee / Owner
Filing Date
2019-04-23
Publication Date
2025-12-24
Estimated Expiration
2039-04-23

AI Technical Summary

Technical Problem

The integration of III-V semiconductor materials on silicon wafers for CMOS technology is challenging due to lattice mismatch, leading to cracking, dislocation propagation, and complex doping requirements, which limits the scalability and performance of integrated circuits.

Method used

A reinforced thin-film device with vertically embedded semiconductor needles is used to support III-V semiconductor growth, providing a lattice-matched and dislocation-free epitaxial layer on silicon wafers, allowing for high-mobility charge carrier materials like graphene and III-V semiconductors to be integrated without cracking, even on large substrates.

Benefits of technology

The solution enables high-quality epitaxial growth of III-V materials on silicon wafers up to 30 cm in diameter, facilitating the production of high-performance electronic components and quantum computing devices with improved heat dissipation and reduced manufacturing time.

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