Semiconductor substrate arrangement and method for its preparation

DE602020072840T2Active Publication Date: 2026-06-03INFINEON TECHNOLOGIES AG

Patent Information

Authority / Receiving Office
DE · DE
Patent Type
Patents
Current Assignee / Owner
INFINEON TECHNOLOGIES AG
Filing Date
2020-08-06
Publication Date
2026-06-03

AI Technical Summary

Technical Problem

Power semiconductor module arrangements face issues with cracks in solder connections due to differing coefficients of thermal expansion (CTEs) among materials, leading to mechanical and electrical connection failures.

Method used

A substrate arrangement with a dielectric insulation layer and a first metallization layer featuring protrusions and recesses, where a connection layer covers these features, and a hollow rivet is positioned to redirect stress, preventing cracks by redirecting strain from a purely horizontal direction to a partly vertical direction.

Benefits of technology

The solution significantly reduces the risk of cracks in the connection layer, enhancing the mechanical and electrical stability of the substrate arrangement, thereby improving the reliability and performance of power semiconductor modules.

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