Actuator device and method for using such an actuator device

Description

[0001] The invention relates to an actuator device and a method for operating such an actuator device.

[0002] Actuator devices and methods for operating such actuator devices are already well known from the general prior art. These actuator devices are typically used to move, clamp, deform, and / or compress an object. For this purpose, a fluid, in particular a liquid, is conveyed, for example, by means of a pump to move at least one output element and, via the output element, to move, clamp, deform, compress, and / or reshape the object. A transmission, in particular a fluidic and especially a hydraulic one, is usually provided between the pump and the output element.Through this transmission, it is possible, for example, to apply a first force to operate the pump, whereby a second force, greater or lesser than the first force, subsequently acts on the output element, or the output element provides a second force, greater or lesser than the first force, to move, tension, deform, compress, and / or reshape the object. In general terms, the actuator device can exert a force, particularly the second force, on the object, thereby, for example, moving and / or tensioning the object, that is, securing it against movement.

[0003] DE 10 2015 109 513 A1 discloses a hydrostatic control circuit and its use. DE 103 44 662 A1 discloses a hydraulic steering system for motor vehicles. JP S57 190104 A discloses a fluid actuator device.

[0004] The object of the present invention is to provide an actuator device and a method for operating such an actuator device, so that a particularly advantageous operation of the actuator device can be realized.

[0005] This problem is solved by an actuator device with the features of claim 1 and by a method with the features of claim 12. Advantageous embodiments with expedient further developments of the invention are specified in the remaining claims.

[0006] A first aspect of the invention relates to an actuator device comprising at least two working chambers, also referred to as output chambers. These working chambers are coupled to one another in such a way that an increase in the volume of the first working chamber, particularly simultaneously, is accompanied by a decrease in the volume of the second working chamber, and vice versa. This means that an increase in the volume of the second working chamber, particularly simultaneously, is accompanied by a decrease in the volume of the first working chamber. The increase in volume need not necessarily correspond to the decrease in volume. In other words, it is conceivable that the decrease in volume is greater or lesser than the increase in volume. In other words, the decrease in volume can be greater or lesser than the increase in volume, and vice versa.In particular, it is conceivable that, for example, when a medium, preferably gaseous or liquid and most preferably incompressible, flows out of the first working chamber due to a reduction in the volume of the first working chamber, the medium or another medium, preferably gaseous or liquid and particularly incompressible, flows into the second chamber, since the reduction in volume of the first working chamber is accompanied by an increase in the volume of the second working chamber. It is particularly conceivable that a first quantity of the medium flows out of the first working chamber and a second quantity of the medium or a second quantity of the other medium flows into the second working chamber, wherein the first quantity can correspond to the second quantity, or wherein the quantities are different. The media or quantities can be the same medium.

[0007] The actuator also includes a drive element which can be driven and thus moved by the respective increase in volume of the respective working chamber. This means, in particular, that the respective increase in volume of the respective working chamber can effect, or does effect, a translational and / or rotational and / or oscillating movement of the drive element. The drive element can, for example, have at least or exactly one drive element which can be moved, for example, by the increase in volume of the first working chamber in a first direction of movement and by the increase in volume of the second working chamber in a second direction of movement, in particular translationally and / or rotationally and / or oscillatingly, wherein, for example, the second direction of movement is opposite to the first direction of movement.Furthermore, it is conceivable, for example, that the drive unit has at least or exactly two drive elements. By increasing the volume of the first drive chamber, for example, a first drive element can be moved in a first element direction, in particular translationally and / or rotationally and / or oscillatingly. By increasing the volume of the second working chamber, for example, a second drive element can be moved in a second element direction, in particular translationally and / or rotationally and / or oscillatingly. It is conceivable that the element directions are parallel, oblique, or perpendicular to each other. The element directions can point in the same direction or be opposite to each other.For example, a reduction in the volume of the first working chamber is accompanied by a movement of the first drive element in a third element direction, which may be opposite to the first element direction. Furthermore, it is conceivable that a reduction in the volume of the second working chamber is accompanied by a movement of the second drive element in a fourth element direction, which may be opposite to the second element direction.

[0008] The actuator also includes a pump for conveying a fluid, which is, for example, the aforementioned medium and, in particular, the other medium. The fluid can be a gas. However, it is most preferably an incompressible liquid. In other words, the fluid is preferably an incompressible fluid, in particular an incompressible liquid, whose density does not depend on the pressure.

[0009] The actuator further comprises a first flow path through which the fluid conveyed by the pump can flow. This first flow path is preferably arranged or runs upstream of the first working chamber and downstream of the pump in the direction of flow of the fluid conveyed by the pump and, in particular, subsequently flowing through the first flow path. The fluid conveyed by the pump, and, in particular, flowing through the first flow path, can be introduced into the first working chamber via this first flow path to increase its volume.The actuator also has a second flow path through which the fluid pumped by the pump can flow. This second flow path is preferably arranged or runs upstream of the second working chamber and downstream of the pump in the direction of flow of the fluid pumped by the pump and, in particular, through the second flow path. The fluid pumped by the pump can be introduced into the second working chamber via this second flow path. In other words, the fluid pumped by the pump can be guided or directed from the pump to and into the respective working chamber by means of the respective flow path. The flow paths can, for example, be at least partially, and especially fluidically, separated from each other.

[0010] The pumping device comprises at least one solid-state actuator. Within the scope of this disclosure, the term "solid-state actuator" can refer, for example, to a piezoelectric actuator comprising at least one or more, in particular stacked, piezoelectric elements, which, when an electrical voltage is applied to the piezoelectric actuator, performs a mechanical movement or deforms, in particular lengthens or shrinks, and thereby performs a movement at least in a partial area. Furthermore, the term "solid-state actuator" can refer, for example, to a magnetostrictive actuator comprising at least one solid body that is deformable, or is deformed, by the application of a magnetic field, i.e., when the solid body is exposed to a magnetic field.Furthermore, a solid-state actuator can be understood to be an electrostrictive actuator, which in particular comprises a medium, especially a dielectric one, which is deformable and movable, at least in a partial area, by applying an electric field to the medium. A solid-state actuator can also be understood to be a solenoid actuator, also simply called a solenoid. The solenoid actuator comprises at least or exactly one coil through which an electric current can be passed, thereby generating a magnetic field by means of the coil, whereby at least one moving element, especially a solid and also called a rotor, is movable, in particular relative to the coil and / or translationally, wherein the coil is also a solid. The solenoid actuator is also referred to as a linear magnetic drive.Furthermore, the solid-state actuator can be a polymer actuator which has at least one electroactive polymer (EAP) that can be deformed by applying an electrical voltage to the electroactive polymer and is therefore movable at least in a partial area.

[0011] The actuator also includes a first discharge path associated with the first working chamber, through which fluid can be discharged from the first working chamber to reduce its volume. The actuator also includes a second discharge path associated with the second working chamber, through which fluid can be discharged from the second working chamber to reduce its volume.

[0012] A first valve element is arranged in the first discharge path, which is movable between a first closed position, which closes the first discharge path, and at least one first open position, which releases the first discharge path. In the first open position, the fluid can be discharged from the first working chamber, or is discharged, because in the first closed position the first valve element releases the first discharge path, allowing the fluid to flow from the first working chamber through it. In the first closed position, however, the first valve element closes the first discharge path, so that in the first closed position the fluid does not flow through the first discharge path and therefore cannot flow out of the first working chamber via the first discharge path.

[0013] A second valve element is arranged in the second discharge path, which is movable between a second closed position that closes the second discharge path and at least one second open position that releases the second discharge path. The preceding and following descriptions of the first valve element also apply to the second valve element and vice versa. Accordingly, in the second open position, the fluid from the second working chamber can be discharged or is discharged via the second discharge path, since the second valve element, in the second open position, allows the fluid from the second working chamber to flow through the second discharge path.In the second closed position, however, the second valve element closes off the second discharge path, so that the fluid cannot flow through the second discharge path and, in particular, so that the fluid from the second working chamber cannot be discharged via the second discharge path.

[0014] The actuator device also comprises a first actuation path, which is fluidically connected to the first flow path at a first branch point located downstream of the pumping device and upstream of the first working chamber. At the first branch point, a portion of the fluid pumped by the pumping device and, in particular, flowing through the first flow path, can be diverted from the first flow path and introduced into the first actuation path. The second valve element can then be actuated by means of the fluid introduced into and flowing through the first actuation path, and thus moved from the second closed position to the second open position.

[0015] The actuator further comprises a second actuation path, which is fluidically connected to the second flow path at a second branch point located downstream of the pumping device and upstream of the second working chamber. At the second branch point, a portion of the fluid pumped by the pumping device, and in particular flowing through the second flow path, can be diverted from the second flow path and introduced into the second actuation path. Via the second actuation path, the first valve element can be actuated by means of the fluid introduced into and flowing through the second actuation path, and thus moved from the first closed position to the first open position.In particular, it is provided that by moving the first valve element from the first closed position to the first open position, the fluid from the first working chamber can be discharged via the first discharge path, thus enabling the discharge of fluid from the first working chamber via the first discharge path. Furthermore, it is conceivable that by moving the second valve element from the second closed position to the second open position, the fluid from the second working chamber can be discharged via the second discharge path, thus enabling the discharge of fluid from the second working chamber via the second discharge path.

[0016] The invention enables a so-called four-quadrant operation of the actuator device in a particularly simple manner, and in particular, with the exception of the pumping device, without the use of active components and especially solely by pumping the fluid. Four-quadrant operation means that, for example, the aforementioned output element can be actively moved in the first direction of movement and in the second direction of movement, i.e., by pumping the fluid using the pumping device. The active movement of the output element in the first direction of movement is, so to speak, a first quadrant, and the active movement of the output element in the second direction of movement is a second quadrant. Passive movement of the output element in the first and second directions of movement is also permitted.Passive movement of the output element means that an external force acts upon it. If the external force acts in the first direction of movement, for example, a tensile force, thus pulling the output element in the first direction, then movement of the output element in the first direction is permitted, particularly in a controlled manner. If, for example, an external force acts upon the output element in the second direction of movement, such as a compressive force, then movement of the output element in the second direction is permitted, particularly in a controlled manner. Passive movement of the output element in the first direction of movement is, for example, a third quadrant, and passive movement of the output element in the second direction of movement is, for example, a fourth quadrant.In particular, the respective passive movement can be a controlled and / or active braking of the output element. Specifically, in the case of active braking, a controlled throttling can occur, whereby, for example, braking energy leads to heating of the fluid, or kinetic energy is converted into thermal energy, thereby heating the fluid. Put another way, by actively moving the output element in the first direction of motion, the output element provides, for example, a first force, in particular a first compressive force, which acts in the first direction of motion. By actively moving the output element in the second direction of motion, the output element provides, for example, a second force, in particular a tensile force, which acts in the second direction of motion.For example, if a third force, in particular a tensile force, acting in the first direction of movement, is exerted on the output element, the actuator device can permit a resulting movement of the output element in the first direction of movement, and in particular a passive, especially controlled, movement, such that the output element is moved, in particular pulled, in the first direction of movement. If, for example, a fourth force, in particular a compressive force, acting in the second direction of movement, is exerted on the output element, the actuator device can permit a resulting movement of the output element in the second direction of movement, such that the output element is pushed, in particular pulled, in the second direction of movement.These different movements or movement possibilities of the output element can be realized in a particularly simple manner, and in particular only by means of the pumping device, which delivers the fluid, in particular selectively, into the first working chamber or the second working chamber. In particular, the described movement possibilities of the output element can be realized without any active, in particular actively switchable, elements apart from the pumping device, so that the number of parts, the installation space required, the weight, and the cost of the actuator device can be kept to a particularly low level. The pumping device is preferably designed, in particular only, to deliver, i.e., pump, the fluid into the respective working chamber, so that the pumping device is preferably not capable of actively pumping the fluid out of the respective working chamber.Despite this design of the pumping device, the previously described four-quadrant operation can be realized in particular by coupling the working chambers to each other in the manner described.

[0017] The respective valve element is preferably designed as a normally closed valve. This means, in particular, that the respective valve element assumes its closed position whenever it is not actuated by the fluid, and specifically, whenever the actuation of the respective valve element by the fluid ends, the respective valve element returns to its closed position automatically. Thus, it is preferably provided that the respective valve element can be moved from the closed position to the open position and held in the open position only when the respective valve element is actuated by the fluid.

[0018] In order to achieve four-quadrant operation and thus a particularly advantageous mobility or movement capability of the output element or output device in a particularly simple manner, the invention provides that the first valve element is assigned a first actuation area and a first actuation chamber, at least partially and directly bounded by the first actuation area, into which the fluid introduced into and flowing through the second actuation path can be introduced, whereby the first actuation area can be acted upon, in particular directly, by the fluid introduced into and flowing through the second actuation path and introduced into the first actuation chamber, whereby the first valve element can be moved from the first closed position to the first open position.

[0019] In this arrangement, a first flow-limiting element is assigned to the first actuation area and the first actuation chamber. This element is connected or arranged parallel to the first actuation chamber and the first actuation area in the flow direction of the fluid flowing through the second actuation path and into the first actuation chamber, particularly in terms of fluid dynamics. The fluid can be discharged from the first actuation chamber via the first flow-limiting element, thereby causing or allowing movement of the first valve element from the first open position to the first closed position.For example, if the pumping device conveys the fluid through the second flow path and thus into the second working chamber via the second flow path, the first actuation area is supplied with the fluid conveyed by the pumping device, and consequently the first valve element is actuated, since at the second branch point a portion of the fluid conveyed by the pumping device and flowing through the second flow path is diverted from the second flow path and used to actuate the first valve element, thus introducing the fluid into the first actuation chamber.When the fluid flow is stopped, the fluid can flow out of the first actuation chamber, particularly bypassing the pump, via the first flow restrictor. This allows the first valve element, which was moved to the first open position by the previous actuation and is therefore initially in the first open position, to return to the first closed position. For example, the first flow restrictor is arranged in a first drain path through which the fluid can be discharged from the first actuation chamber. The first flow restrictor has a physical characteristic, or imparts a physical characteristic to the first drain path, particularly with regard to the flow of fluid from the first actuation chamber through the first drain path.In particular, the first flow limiting element is a functional element that allows pressure equalization between the first actuation chamber and, for example, a receiving area into which the fluid from the first actuation chamber can be guided via the first discharge path.

[0020] For example, the respective flow-limiting element is a non-linear or proportional flow-limiting element, wherein a flux or flow of the fluid through the flow-limiting element, i.e., a volume and / or mass flow of the fluid through the flow-limiting element, is pressure-dependent, i.e., depends on a pressure of the fluid flowing through the flow-limiting element.

[0021] In order to make four-quadrant operation possible in a particularly simple way, a further embodiment of the invention provides that the second valve element is assigned a second actuation area and a second actuation chamber that is at least partially and directly limited by the second actuation area, wherein the second actuation chamber is provided in addition to the first actuation chamber and is in particular arranged outside the first actuation chamber, and wherein preferably the first actuation chamber is provided in addition to the second actuation chamber and is arranged outside the second actuation chamber.The fluid introduced into and flowing through the first actuation path can be introduced into the second actuation chamber, thereby allowing the second actuation area to be actuated, particularly directly, by the fluid introduced into and flowing through the first actuation path and into the second actuation chamber. This allows the second valve element to be moved from the second closed position to the second open position. The preceding and following descriptions of the first actuation area and the first actuation chamber are readily applicable to the second actuation area and the second actuation chamber, and vice versa.

[0022] It has proven particularly advantageous if a second flow limiting element is assigned to the second actuation area and the second actuation chamber, which is connected in the flow direction of the fluid flowing through the first actuation path and into the second actuation chamber parallel to the second actuation chamber and the second actuation area, wherein the fluid can be discharged from the second actuation chamber via the second flow limiting element in order to effect or allow a movement of the second valve element from the second open position to the second closed position.

[0023] For example, if the pump conveys the fluid through the first flow path and thus into the first working chamber via the first flow path, the second actuation area is supplied with the fluid conveyed by the pump, and consequently the second valve element is actuated, since at the first branch point a portion of the fluid conveyed by the pump and flowing through the first flow path is diverted from the first flow path and used to actuate the second valve element, thus introducing the fluid into the second actuation chamber.When the fluid flow is stopped, the fluid can flow out of the second actuation chamber, particularly bypassing the pump, via the second flow restrictor. This allows the second valve element, which was moved to the second open position by the previous actuation and is therefore initially in the second open position, to return to the second closed position. For example, the second flow restrictor is arranged in a second drain path through which the fluid can be discharged from the second actuation chamber. The second flow restrictor has a physical characteristic, or imparts a physical characteristic to the second drain path, particularly with regard to the flow of fluid from the second actuation chamber through the second drain path.In particular, the second flow limiting element is a functional element that allows pressure equalization between the second actuation chamber and, for example, the receiving area into which the fluid from the second actuation chamber can be directed via the second discharge path.

[0024] In order to implement four-quadrant operation without an excessive number of active, i.e., in particular actively switchable, elements, and thus in a particularly simple and cost-effective manner, a further embodiment of the invention provides that a first check valve is arranged in the first flow path downstream of the first branch point and upstream of the first working chamber, which prevents the flow of fluid through the first flow path in the direction of the first branch point, thus closing in the direction of the first branch point, and allows the flow of fluid through the first flow path in the direction of the first working chamber, thus opening in the direction of the first working chamber.

[0025] It has proven particularly advantageous to arrange a second check valve in the second flow path downstream of the second branch point and upstream of the second working chamber. This check valve prevents fluid flow through the second flow path towards the second branch point, thus closing in that direction, and allows fluid flow through the second flow path towards the second working chamber, thus opening in that direction. This enables a particularly simple and cost-effective implementation of four-quadrant operation, as it avoids an excessive number of active and, in particular, actively switchable elements.

[0026] In order to achieve particularly advantageous mobility of the output device, especially the output element, in a particularly cost-effective manner, one embodiment of the invention comprises the pumping device as a first solid-state actuator, which is assigned to the first flow path, and by means of which the fluid can be conveyed through the first flow path. Furthermore, the pumping device comprises a second solid-state actuator assigned to the second flow path, by means of which the fluid can be conveyed through the second flow path.

[0027] To minimize the number of parts and thus the cost, weight, and installation space required for the actuator device, a further embodiment of the invention provides that the pumping device includes the solid-state actuator as a single actuator common to both the first and second flow paths, by means of which the fluid can be pumped. The pumping device includes a valve assembly that can be switched between a first and a second switching state. For example, the valve assembly is arranged upstream of the flow paths and downstream of the solid-state actuator in the direction of fluid flow through the respective flow path. In particular, it is conceivable that the flow paths are arranged in parallel to each other in terms of fluid flow.

[0028] In the first switching state, the fluid conveyed by the solid-state actuator can be introduced into the first flow path via the valve assembly and conveyed through the first flow path. Furthermore, in the first switching state, the introduction of the fluid conveyed by the solid-state actuator into the second flow path via the valve assembly is prevented. In other words, the solid-state actuator is designed solely to convey the fluid into, and specifically, one conveying device. If the fluid is now conveyed by the solid-state actuator, particularly in the conveying direction, while the valve assembly is in the first switching state, the valve assembly introduces the fluid conveyed by the solid-state actuator into the first flow path and prevents the fluid conveyed by the solid-state actuator from flowing into the second flow path.

[0029] In the second switching state, the fluid conveyed by the solid-state actuator, particularly in the conveying direction, can be introduced into the second flow path via the valve device and conveyed through the second flow path. In the second switching state, the valve device prevents the fluid conveyed by the solid-state actuator from being introduced into the first flow path via the valve device. In other words, if the fluid is conveyed by the solid-state actuator, particularly in the conveying direction, while the valve device is in the second switching state, the fluid conveyed by the solid-state actuator, particularly in the conveying direction, is directed into the second flow path by the valve device, and the valve device prevents the fluid conveyed by the solid-state actuator, particularly in the conveying direction, from flowing into the first flow path.

[0030] In order to keep the weight, cost and installation space requirements of the actuator device particularly low, a further embodiment of the invention provides that the solid-state actuator is arranged in a third flow path upstream of the valve device, through which the fluid conveyed by means of the solid-state actuator through the third flow path and in particular conveyed in the conveying direction is to be led to the valve device.

[0031] In a further, particularly advantageous embodiment of the invention, the actuating device comprises the aforementioned output element, which partially and directly delimits each of the working chambers. The feature that the output element directly delimits the working chambers, i.e., both working chambers, means that the fluid introduced into and thus contained within the respective working chamber directly contacts the output element.

[0032] The output element is preferably, and in particular translationally and / or rotationally and / or oscillatingly, movably mounted in a housing which partially delimits the working chambers. The output element can be directly actuated by the fluid introduced into the first working chamber and is thereby movable in the first direction of movement relative to the housing, particularly translationally and / or rotationally and / or oscillatingly. The output element can be directly actuated by the fluid introduced into the second working chamber and is thereby moved in the second direction of movement, opposite to the first, relative to the housing, particularly translationally and / or rotationally and / or oscillatingly.

[0033] It has therefore proven particularly advantageous if the output element is movable translationally and / or rotationally and / or oscillatingly in the respective direction of movement relative to the housing. The output element can thus, for example, have a piston and, in particular, a piston rod connected to and movable with the piston, via which, for example, the aforementioned forces can be provided or exerted on the output element.

[0034] Furthermore, it is conceivable that the output device comprises a first bellows, in particular a first pleated bellows, which delimits the first output chamber, particularly directly. It is also conceivable that the output device comprises a second bellows, in particular a second pleated bellows, which delimits the second output chamber, particularly directly. It is conceivable that each bellows has a respective pleated section and, in particular, a respective base, which, for example, can be moved in the respective direction of movement, particularly translationally, by changing the length of the respective pleated section and the associated volume change of the respective working chamber. Thus, for example, the first base is the first output element, and the second base is, for example, the second output element.

[0035] In order to achieve particularly advantageous mobility or movement of the output device, especially the output element, a further embodiment of the invention provides that a free-running valve is assigned to one of the output chambers, in particular exactly one of the output chambers, through which the fluid from a reservoir can be introduced into one of the working chambers, bypassing the pump device and preferably also bypassing the other working chamber, preferably also bypassing the check valves, and most preferably bypassing the discharge paths and most preferably also bypassing the valve elements. The free-running valve opens in the direction of the one working chamber and closes in the direction of the reservoir. For example, the reservoir is the aforementioned receiving area.The feature that the free-flow valve opens towards one working chamber and closes towards the reservoir means that the free-flow valve allows fluid to flow from the reservoir to and into the working chamber, while preventing fluid from flowing from the working chamber back into the reservoir. Thus, the free-flow valve functions as a type of check valve, allowing for particularly rapid movement of the output device, especially the output element, particularly in one of the directions of movement.

[0036] The feature that the fluid can be introduced from the reservoir into the working chamber via the free-running valve, bypassing the pumping device and preferably the other working chamber, the check valves, the discharge paths and / or the valve element, means that the fluid flowing from the reservoir into one working chamber via the free-running valve bypasses the pumping device and preferably the other working chamber, the check valves, the discharge paths and / or the valve element, and thus does not flow through the pumping device, the other working chamber, the check valves, the discharge paths and the valve elements.

[0037] A second aspect of the invention relates to a method for operating an actuator device, particularly according to the first aspect of the invention. In the method according to the second aspect of the invention, the actuator device has at least two working chambers, which are also referred to as output chambers. The working chambers are coupled to each other in such a way that an increase in the volume of one of the working chambers, particularly simultaneously, is accompanied by a decrease in the volume of the second working chamber, and vice versa. The actuator device has an output device which is driven and thereby moved by the respective increase in volume of the respective working chamber. The actuator device includes a pump device having at least one solid-state actuator, by means of which a fluid is conveyed, particularly in exactly one conveying direction.The actuator comprises a first flow path through which the fluid conveyed by the pump, and in particular in the conveying direction, flows. To increase the volume of the first working chamber, the fluid conveyed by the pump and flowing through the first flow path is introduced into the first working chamber via this first flow path. The actuator also comprises a second flow path through which the fluid conveyed by the pump, and in particular in the conveying direction, flows. To increase the volume of the second working chamber, the fluid conveyed by the pump and flowing through the second flow path is introduced into the second working chamber via this second flow path. The actuator also includes a first discharge path associated with the first working chamber, through which the fluid is discharged from the first working chamber to reduce its volume.Furthermore, the actuator device includes a second discharge path assigned to the second working chamber, via which the fluid is discharged from the second working chamber to reduce the volume of the second working chamber.

[0038] The actuator device also comprises a first valve element arranged in the first discharge path, which is moved between a first closed position that closes the first discharge path and at least one first open position that releases the first discharge path. The actuator device also comprises a second valve element arranged in the second discharge path, which is moved between a second closed position that closes the second discharge path and at least one second open position that releases the second discharge path.

[0039] The actuator also includes a second valve element arranged in the second discharge path, which is moved between a second closed position that closes the second discharge path and at least one second open position that releases the second discharge path. Furthermore, a first actuation path is provided, which is fluidically connected to the first flow path at a first branch point located downstream of the pumping device and upstream of the first working chamber. At the first branch point, a portion of the fluid pumped by the pumping device and flowing through the first flow path is diverted from the first flow path and introduced into the first actuation path. The second valve element is actuated via the first actuation path by means of the fluid introduced into and flowing through the first actuation path, thereby moving it from the second closed position to the second open position.

[0040] Furthermore, the actuator device has a second actuation path which is fluidically connected to the first flow path at a second branch point located downstream of the pumping device and upstream of the second working chamber. At the second branch point, a portion of the fluid pumped by the pumping device and flowing through the second flow path is diverted from the second flow path and introduced into the second actuation path. Via the second actuation path, the first valve element is actuated by means of the fluid introduced into and flowing through the second actuation path, thereby moving it from the first closed position to the first open position. Advantages and advantageous embodiments of the first aspect of the invention are to be considered as advantages and advantageous embodiments of the second aspect of the invention, and vice versa.

[0041] In order to achieve four-quadrant operation and thus a particularly advantageous mobility or movement capability of the output element or output device in a particularly simple manner, the method provides that the first valve element is assigned a first actuation area and a first actuation chamber, at least partially and directly bounded by the first actuation area, into which the fluid introduced into and flowing through the second actuation path can be introduced, whereby the first actuation area can be actuated, in particular directly, with the fluid introduced into and flowing through the second actuation path and introduced into the first actuation chamber, whereby the first valve element can be moved from the first closed position to the first open position.

[0042] In this arrangement, a first flow-limiting element is assigned to the first actuation area and the first actuation chamber. This element is connected or arranged parallel to the first actuation chamber and the first actuation area in the flow direction of the fluid flowing through the second actuation path and into the first actuation chamber, particularly in terms of fluid dynamics. The fluid can be discharged from the first actuation chamber via the first flow-limiting element, thereby causing or allowing movement of the first valve element from the first open position to the first closed position.For example, if the pumping device conveys the fluid through the second flow path and thus into the second working chamber via the second flow path, the first actuation area is supplied with the fluid conveyed by the pumping device, and consequently the first valve element is actuated, since at the second branch point a portion of the fluid conveyed by the pumping device and flowing through the second flow path is diverted from the second flow path and used to actuate the first valve element, thus introducing the fluid into the first actuation chamber.When the fluid flow is stopped, the fluid can flow out of the first actuation chamber, particularly bypassing the pump, via the first flow restrictor. This allows the first valve element, which was moved to the first open position by the previous actuation and is therefore initially in the first open position, to return to the first closed position. For example, the first flow restrictor is arranged in a first drain path through which the fluid can be discharged from the first actuation chamber. The first flow restrictor has a physical characteristic, or imparts a physical characteristic to the first drain path, particularly with regard to the flow of fluid from the first actuation chamber through the first drain path.In particular, the first flow limiting element is a functional element that allows pressure equalization between the first actuation chamber and, for example, a receiving area into which the fluid from the first actuation chamber can be guided via the first discharge path.

[0043] Further advantages, features, and details of the invention will become apparent from the following description of preferred embodiments and from the drawings. The features and combinations of features mentioned above in the description, as well as those mentioned below in the figure description and / or shown in the figures alone, are not only usable in the combinations specified, but also in other combinations or individually, as long as they fall within the scope of the claims.

[0044] The drawing shows in: Fig. 1 a schematic representation of a first embodiment of an actuator device; Fig. 2 a partial schematic representation of a second embodiment of the actuator device; Fig. 3 a schematic representation of a third embodiment of the actuator device; and Fig. 4 a partial schematic representation of a fourth embodiment of the actuator device.

[0045] In the figures, identical or functionally equivalent elements are provided with the same reference numerals.

[0046] Fig. 1 Figure 10 shows a schematic representation of a first embodiment of an actuator device 10, by means of which, for example, at least one force or several forces can be exerted on an object. This can, for example, move the object, or it can be actively and / or controllably braked or tensioned, and thus, for example, actively secured against movement. Alternatively or additionally, the object can, for example, be moved and / or deformed and / or compressed. In the first embodiment, the actuator device 10 has exactly two working chambers 12 and 14, which are also referred to as output chambers.The working chambers 12 and 14 are coupled in such a way that an increase in the volume of working chamber 12, particularly simultaneously, is accompanied by a decrease in the volume of working chamber 14, and vice versa. This is shown schematically in Figure 1. Fig. 1 A reservoir 16 in which a fluid, preferably in the form of a liquid, is received or contained. The reservoir 16 is also referred to as the mass.

[0047] The actuator device 10 has a drive unit 18, which can be driven and thus moved by the respective increase in volume of the respective working chamber 12, 14. In the first embodiment, the drive unit 18 has at least one, or in this case exactly one, drive element 20, which comprises a piston 22 and, in particular, exactly one piston rod 24. The actuator device 10 comprises a housing 26 in which the drive element 20, in particular the piston 22, is movably received. In the first embodiment, the drive element 20, and thus the drive unit 18, is moved translationally relative to the housing 26 in a first direction of movement and in a second direction of movement. The first direction of movement is illustrated by an arrow 28, and the second direction of movement is illustrated by an arrow 30.Arrows 28 and 30 indicate that the directions of movement are parallel to each other, with the second direction of movement being opposite to the first. The output element 20, in particular the piston 22, directly and partially delimits both the working chamber 12 and the working chamber 14, with the working chamber 12 and the working chamber 14 each being partially directly delimited by the housing 26. It can be seen that the working chamber 12 is arranged, in particular along the respective direction of movement, on a first side 32 of the piston 22 or the output element 20, and the working chamber 14 is arranged on a second side 34 of the piston 22 or the output element 20, with side 34 facing away from side 32 along the respective direction of movement, or vice versa.This means that in the first embodiment, the working chambers 12 and 14 are arranged on the sides 32 and 34 of the output element 20, in particular the piston 22, which are opposite each other along the direction of movement. Side 32 partially and directly delimits the working chamber 12, and side 34 partially and directly delimits the working chamber 14. As shown in... Fig. 1 Since it is evident that the piston rod 24 is at least partially located in the working chamber 14, the increase in volume of the working chamber 12 does not occur to the same extent as the decrease in volume of the working chamber 14, and vice versa. Thus, if, for example, the output element 20 is moved translationally a first distance in the second direction of movement relative to the housing 26, a first quantity of fluid is conveyed out of the working chamber 12 and, in particular, simultaneously, a second quantity of fluid, smaller than the first, is conveyed into the working chamber 14. In other words, for example, a decrease in volume of the working chamber 12 by a first unit occurs, which is accompanied by an increase in volume of the working chamber 14 by a second unit, smaller than the first.In this context, the respective working chamber 12 or 14 is to be understood as a non-physical space enclosed or directly bounded by the housing 26 and the output element 20, in which the fluid can be received.

[0048] The actuator device 10 further comprises a pump device 36, which is used in the Fig. 1 The first embodiment shown comprises a solid-state actuator 38 as the first solid-state actuator and a second solid-state actuator 40, wherein the solid-state actuators 38 and 40 are separate and, in particular, spaced apart from each other components. The fluid can be pumped from the reservoir 16 by means of the pumping device 36, in particular in exactly one conveying direction. In other words, the respective solid-state actuator 38, 40 is preferably configured to pump the fluid from the reservoir 16 in exactly one, i.e., a single conveying direction.

[0049] It can be seen, for example, that the volume of a respective pump chamber can be changed by means of the respective solid-state actuator 38, 40, in particular such that the volume of the respective pump chamber can be alternately increased and decreased. By increasing the volume of the respective pump chamber, the fluid is conveyed from the reservoir 16 into the respective pump chamber, in particular via a respective check valve 43 or 47, or rather, drawn in. The respective check valve 43, 47 allows the fluid to flow from the reservoir 16 into the respective pump chamber, but prevents the fluid from flowing back from the respective pump chamber into the reservoir 16 via the respective check valve 43, 47, especially when the volume of the respective pump chamber is decreased.If the respective volume of the respective pump chamber is reduced, the fluid is thereby pumped out of the respective pump chamber, in particular via a respective check valve 45 or 49.

[0050] The actuator device 10 has a first flow path 42 through which the fluid conveyed by the pump device 36, in particular by the solid-state actuator 38, can flow, wherein the solid-state actuator 38 is associated with the first flow path 42 and vice versa. The first flow path 42 is arranged upstream of the first working chamber 12 and downstream of the pump device 36, and thus downstream of the associated solid-state actuator 38. The fluid conveyed by the pump device 36, in particular by the solid-state actuator 38, and flowing through the first flow path 42, can be introduced into the first working chamber 12 via the first flow path 42 to effect an increase in volume of the first working chamber 12. The actuator device 10 also comprises a second flow path 44 through which flow can be made by means of the pump device 36, in particular by means of the solid-state actuator 40. The solid-state actuator 40 is assigned to the flow path 44 and vice versa.The flow path 44 is arranged upstream of the second working chamber 14 and downstream of the pumping device 36, in particular the solid-state actuator 40. The fluid pumped by the pumping device 36, in particular by the second solid-state actuator 40, and flowing through the second flow path 44, can be introduced into the second working chamber 14 via the second flow path 44 to increase the volume of the second working chamber 14.

[0051] If the volume of the respective pump chamber is reduced, the fluid is thereby pumped out of the respective pump chamber, in particular via the respective check valve 45, 49, and pumped into the respective flow path 42, 44, and subsequently pumped through the respective flow path 42, 44. The respective check valve 45, 49 allows the fluid to flow from the respective pump chamber into the respective flow path 42, 44, but prevents the fluid from flowing back from the respective flow path 42, 44 via the respective check valve 45, 49 into the respective pump chamber, especially when the volume of the respective pump chamber is reduced.

[0052] Out of Fig. 1 It is evident that in the present case the respective pump chamber is delimited, in particular directly and / or partially, by a respective pump piston 39 or 41, which is movable, in particular translationally, relative to a respective pump housing that partially and preferably directly delimits the respective pump chamber, in particular by means of the respective solid actuator 38, 40. By moving, in particular by moving back and forth, the respective pump piston 39, 41 by means of the respective solid actuator 38, 40, the respective volume of the respective pump chamber can be alternately reduced and increased.

[0053] The first working chamber 12 is assigned a first discharge path 46, through which the fluid from the first working chamber 12 can be discharged and, in particular, introduced into the reservoir 16 to reduce its volume. The second working chamber 14 is assigned a second discharge path 48, through which the fluid from the second working chamber 14 can be discharged and, in particular, introduced into the reservoir 16 to reduce its volume. It can be seen that the respective solid actuator 38, 40 can pump the fluid from the reservoir 16, conveying it through the respective assigned flow path 42, 44 and into the respective assigned working chamber 12, 14 via the respective assigned flow path 42, 44, wherein the working chamber 12 is assigned to flow path 42 and vice versa, and wherein the working chamber 14 is assigned to flow path 44 and vice versa.The fluid can be discharged from the working chamber 12 via the discharge path 46 and, in particular, directed back into the reservoir 16, and the fluid can be discharged from the working chamber 14 via the discharge path 48 and, in particular, directed back into the reservoir 16.

[0054] In the first discharge path 46, a first valve element 50 is arranged, which is movable between a first closed position that closes the first discharge path 46 and at least one first open position that releases the first discharge path 46. In the second discharge path 48, a second valve element 52 is arranged, which is movable between a second closed position that closes the second discharge path 48 and at least one second open position that releases the second discharge path 48. For example, the respective valve element 50, 52 is, in particular, purely translationally movable between the respective closed position and the respective open position, especially relative to a Fig. 1 Valve housing not shown in detail.

[0055] The actuator device 10 has a first actuation path 54, which is fluidically connected to the first flow path 42 at a first branch point A1 located downstream of the pumping device 36, in particular downstream of the solid-state actuator 38, and upstream of the first working chamber 12. At the first branch point A1, a portion of the fluid pumped by the pumping device 36, in particular by the solid-state actuator 38, and flowing through the first flow path 42, can be diverted from the first flow path 42 and introduced into the first actuation path 54. Via the first actuation path 54, the second valve element 52 can be actuated by means of the fluid introduced into and flowing through the first actuation path 54, and thereby moved from the second closed position to the second open position and, in particular, for example, held in the second open position.Furthermore, the actuator device 10 comprises a second actuation path 56, which is fluidically connected to the second flow path 44 at a second branch point A2 located downstream of the pumping device 36, in particular the solid-state actuator 40, and upstream of the second working chamber 14. At the second branch point A2, a portion of the fluid pumped by the pumping device 36, in particular the solid-state actuator 40, and flowing through the second flow path 44, can be diverted from the second flow path 44 and introduced into the second actuation path 56. Via the second actuation path 56, the first valve element 50 can be actuated by means of the fluid introduced into and flowing through the second actuation path 56, and thereby moved from the first closed position to the first open position and, in particular, held in the first open position.In the first embodiment, a first actuating area 58 is associated with the first valve element 50. This area is formed by a first actuating piston 60 designed as a solid body, in particular by a surface of the actuating piston 60. Furthermore, a first actuating chamber 62 is associated with the valve element 50. This chamber is directly bounded by the actuating area 58 and thus by the actuating piston 60. The first actuating chamber 62 is partially and directly bounded by the actuating area 58 and thus by the actuating piston 60, and partially and directly bounded by a first actuating housing 64. The first actuating piston 60 is movably received, in particular translationally, in the first actuating housing 64 and is connected to the first valve element 50, in particular via a first actuating piston rod 66.Thus, the actuating piston 60 and the valve element 50, and in particular the actuating piston rod 66, are jointly or simultaneously and preferably translationally movable relative to the first actuating housing 64, especially between the first open position and the first closed position. The fluid introduced into and flowing through the second actuating path 56 can be introduced into the actuating chamber 62 via the second actuating path 56, thereby allowing the first actuating area 58, and thus the first actuating piston 60, to be directly actuated by the fluid introduced into and flowing through the second actuating path 56 and introduced into the first actuating chamber 62 via the second actuating path 56. This allows the first valve element 50 to be moved from the first closed position to the first open position, in particular translationally and relative to the actuating housing 64.

[0056] The second valve element 52 is associated with a second actuation area 68, which is formed by a second actuating piston 70 designed as a solid body, in particular by a surface of the second actuating piston 70. Furthermore, the valve element 52 is associated with a second actuating chamber 72, which is at least partially and directly bounded by the second actuating area 68 and thus by the second actuating piston 70. The second actuating chamber 72 is also partially and directly bounded by a second actuating housing 74, in which the second actuating piston 70 is movably received, in particular translationally.The second actuating piston 70 is connected, in particular via a second actuating piston rod 76, to the second valve element 52, so that the second valve element 52 and the second actuating piston 70 and in particular the second actuating piston rod 76, in particular together or simultaneously, are movable relative to the second actuating housing 74, in particular translationally, in particular between the second closed position and the second open position.The fluid introduced into and flowing through the first actuation path 54 can be introduced into the second actuation chamber 72 via the first actuation path 54, thereby allowing the second actuation area 68 and thus the second actuation piston 70 to be directly actuated by the fluid introduced into, flowing through, and introduced into the second actuation chamber 72 via the first actuation path 54, thereby allowing the second valve element 52 and, for example, the second actuation piston 70 and, in particular, the second actuation piston rod 76, especially relative to the actuation housing 74 and / or translationally, to be moved from the second closed position to the second open position.

[0057] As an alternative to the respective actuating piston 60 or 70, a bellows, in particular a bellows, can be used. The same applies to all other pistons disclosed herein.

[0058] The actuating area 58, and thus the actuating piston 60, the actuating chamber 62, the actuating housing 64, and the actuating piston rod 66, are components of or form an actuating unit 78, through which the valve element 50 can be actuated by means of the fluid flowing through the actuating path 56 and thereby moved from the first closed position to the first open position. Accordingly, the actuating area 68 and the actuating piston 70, the actuating chamber 72, the actuating housing 74, and the actuating piston rod 76 are or form a second actuating unit 80, through which the valve element 52 can be actuated by means of the fluid flowing through the first actuating path 54 and thus moved from the second closed position to the second open position.The respective valve element 50, 52 is a normally closed valve, which, when it is not actuated, automatically returns to its respective closed position or assumes its respective closed position.

[0059] The actuating unit 78, and thus the first actuating area 58 and the first actuating chamber 62, is associated with a first flow-limiting element 82, which is arranged in a first drain path 84. The first flow-limiting element 82 and the first drain path 84 are connected parallel to the actuating unit 78 in the flow direction of the fluid flowing through the second actuating path 56 and into the first actuating chamber 62. The fluid can be discharged from the first actuating chamber 62 via the first drain path 84 and thus via the first flow-limiting element 82, and in particular introduced into the reservoir 16, in order to effect or permit movement of the first valve element 50 from the first open position to the first closed position.Accordingly, a second flow-limiting element 86 is assigned to the actuating unit 80, and thus to the second actuating area 68 and the second actuating chamber 72. This flow-limiting element is arranged in a second drain path 88. The drain path 88 and the flow-limiting element 86 are connected parallel to the actuating unit 80 in the flow direction of the fluid flowing through the first actuating path 54 and into the second actuating chamber 72. The fluid can be discharged from the second actuating chamber 72 and introduced into the reservoir 16 via the drain path 88 and thus via the second flow-limiting element 86, in order to effect or permit movement of the second valve element 52 from the second open position to the second closed position.

[0060] The respective flow-limiting element 82, 86 can be a throttle, such as a rigid and therefore non-adjustable throttle or an adjustable, in particular controllable, throttle. The flow-limiting element 82, 86 can be an active or passive element to effect or permit, for example, a controllable, controlled, or adjustable flow of the fluid from the respective actuation chamber 62, 72, in particular into the reservoir 16. In particular, the respective flow-limiting element 82, 86 is a functional element that permits pressure equalization between the respective actuation chamber 62, 72 and the reservoir 16 and / or, in particular subsequently, pressure equalization between the working chambers 12 and 14.

[0061] The flow-limiting element 82, 86 can be a linear element, meaning it exhibits linear behavior, in particular such that a higher pressure, especially prevailing in the respective discharge path 84, 88, leads to a higher flow rate of the fluid through the respective flow-limiting element 82, 86, or the flow-limiting element 82, 86 can be a constant-flow element and / or a flow regulator, in particular such that the flow rate of the fluid through the respective flow-limiting element 82, 86 remains constant regardless of the pressure of the fluid, especially prevailing in the respective discharge path 84, 88. In particular, for example, if the flow-limiting element 82, 86 is a throttle, it is a linear element and thus exhibits proportional or degressive behavior, that is, in particular, constant proportional or constant degressive behavior.

[0062] Furthermore, it is from Fig. 1 It can be seen that in the first flow path 42, downstream of the first branch point A1 and upstream of the working chamber 12, a first check valve 90 is arranged, which prevents the fluid from flowing through the first flow path 42 towards the first branch point A1 and allows it to flow towards the first working chamber 12. In the second flow path 44, downstream of the second branch point A2 and upstream of the second working chamber 14, a second check valve 92 is arranged, which prevents the fluid from flowing through the second flow path 44 towards the second branch point A2 and allows it to flow towards the second working chamber 14.

[0063] The actuator device 10 can be operated in a four-quadrant mode. In other words, the actuator device 10 enables a four-quadrant operation, which is explained below: For example, in a first operating state, the pumping device 36, in particular the solid-state actuator 38, pumps the fluid, in particular from the reservoir 16, via the flow path 42 into the working chamber 12, in particular while the pumping of the fluid into the working chamber 14 by means of the pumping device 36, in particular by means of the solid-state actuator 40, is omitted, and most particularly while the pumping of the fluid by means of the solid-state actuator 40 is completely omitted.Firstly, this results in an increase in the volume of working chamber 12 and a concomitant decrease in the volume of working chamber 14, in particular by diverting a portion of the fluid conveyed by the pumping device 36, especially by the solid-state actuator 38, and flowing through the flow path 42 at the branch point A1, introducing it into the actuation path 54, and then into the actuation chamber 72 via the actuation path 54. This actuates the valve element 52, moving it from the second closed position to the second open position, so that, in order to allow the reduction in volume of working chamber 14, the fluid can flow out of working chamber 14 via the discharge path 48 and thus via the valve element 52, and in particular into reservoir 16.This moves the output element 20 in the first direction of movement illustrated by arrow 28, in particular translationally and / or relative to the housing 26. Specifically, this moves the output element 20 from a first position to a second position that differs from the first. If the delivery of fluid to the working chamber 12 ceases and no fluid is delivered to the working chamber 14, the valve element 52 returns, in particular automatically, from the second open position to the second closed position, specifically by at least a portion of the fluid initially received in the actuating chamber 72 being discharged from the actuating chamber 72 via the discharge path 88 and thus via the flow-limiting element 86, and in particular by being directed into the reservoir 16. Consequently, the output element 20 remains in the aforementioned second position.This means in particular that when no fluid is conveyed into the working chambers 12 and 14 and the valve elements 50 and 52 are in their closed positions, the actuator device 10, also referred to as system or overall system, has a high impedance, i.e., a high stiffness, and is therefore stiff, so that the output element 20 remains in the second position, i.e., in the position to which the output element 20 was previously moved.

[0064] For example, in the first operating state, and thus when it is moved in the first direction of motion, the output element 20 provides a first force which in Fig. 1 This is illustrated by a force arrow F1. The force F1 can be used, for example, to move and / or tension an element, which is provided in addition to the output element 20 and is thus also referred to as an object, particularly in the first direction of movement illustrated by arrow 28, in which the first force (force arrow F1) acts. In particular, the first force (force arrow F1) can act as a pressure force from the output element 20 onto the element, so that, for example, in the first operating state, the output element 20 can press the object or onto the object. The first operating state is an active operating state because, in or by the first operating state, the output element 20 is actively moved in the first direction of movement by means of the pumping device 36, in particular by means of the solid-state actuator 38, which actively pumps the fluid into the working chamber 12.The first operating state, that is, the movement of the output element 20 in the first direction of movement, is also referred to as the first quadrant or as movement in a first quadrant.

[0065] In a second operating state, for example, the pumping device 36, in particular the solid-state actuator 40, pumps the fluid, especially from the reservoir 16, via the flow path 44 into the working chamber 14, particularly while the pumping device 36, in particular the solid-state actuator 38, does not pump the fluid into the working chamber 12, and in particular while the pumping device 36, in particular the solid-state actuator 38, does not pump the fluid at all. This results in an increase in the volume of the working chamber 14, which is accompanied by a decrease in the volume of the working chamber 12.The reduction in volume of the working chamber 12 is achieved in particular by diverting at the branch point A2 at least a portion of the fluid conveyed by the pumping device 36, especially by the solid-state actuator 40, and flowing through the flow path 44, and introducing it into the actuating path 56 and directing it into the actuating chamber 62 via the actuating path 56. This moves the valve element 50 from its first closed position to its first open position, so that at least a portion of the fluid received in the working chamber 12 can flow through the discharge path 46 and thus out of the working chamber 12 via the discharge path 46 and thus via the valve element 50, and in particular flow into the reservoir 16.It can be seen that in the first operating state the valve element 50 is closed, so that in the first operating state no fluid can flow out of the working chamber 12 via the discharge path 46, and in the second operating state the valve element 52 is closed, so that in the second operating state no fluid can flow out of the working chamber 14 via the discharge path 48.

[0066] In or through the second operating state, the output element 20 is moved, in particular translationally and / or relative to the housing 26, in the second direction of movement illustrated by arrow 30, whereby, for example, the output element 20 is moved from the second position back to the first position, from the second position to a third position different from the first and second positions.When the flow of fluid into working chamber 14 ceases, particularly when fluid flow into working chamber 12 stops, the valve element 50 returns, especially automatically, from its first open position to its first closed position. This results in the system again exhibiting high impedance, i.e., high stiffness, and the output element 20 remains in the first or third position, i.e., the position to which it was previously moved. The characteristic that the respective valve element 50 or 52 returns automatically from its respective open position to its respective closed position means that the respective valve element 50 or 52 returns from its respective open position to its respective closed position without requiring active actuation.The respective valve element 50 or 52 can only return from its respective open position to its respective closed position by stopping the pumping of the fluid into the respective working chamber 14 or 12.

[0067] Furthermore, it is conceivable that the respective valve element 50, 52 is open, that is, in its open position, when no fluid is being pumped into the working chamber 12 or 14. In other words, it is conceivable that the valve element 50, 52, particularly on its own, returns to its open position or remains open, that is, stays in the open position, when the pumping of the fluid into the working chamber 12, 14 is stopped.

[0068] In particular, the respective valve element 50 or 52 returns from its respective open position to its respective closed position solely due to pressure and / or flow conditions in the system, i.e. without having to actively actuate the respective valve element 50 or 52.

[0069] The second operating state, that is, the movement of the output element 20 in the second direction of motion, is also referred to as the second quadrant or movement in a second quadrant. The first and second operating states are motor operating states, that is, motorized operation of the actuator device 10, since in the first and second operating states the output element 20 is moved by the active pumping of the fluid into the respective working chamber 12 or 14 by means of the pumping device 36 in order to cause an increase in the volume of the respective working chamber 12 or 14, in particular actively.

[0070] For example, the output element 20 in or through the second operating state represents a Fig. 1 A second force, illustrated by force arrow F2, acts in the second direction of motion, illustrated by arrow 30, in which the output element 20 is moved in or by the second operating state, in particular translationally and / or relative to the housing 26. Since force F1 acts in the first direction of motion and force F2 in the second direction of motion, the second force F2 is opposite to the first force and vice versa. For example, the second force is a tensile force acting, for instance, from the output element 20 on the aforementioned object.Thus, for example, in the second operating state, the object can be moved and / or tensioned by means of the output element 20, particularly in the second direction of movement. Alternatively, it is conceivable that, for example, if the object is tensioned in the first operating state, it is relaxed or released in the second operating state. In particular, in the second operating state, the second force, illustrated by the force arrow F2, can be exerted on the object by the output element 20.

[0071] Overall, it can be seen that, for example, in the first operating state, the first force is provided by the output element 20, in particular acting from the output element 20 on the object, and in the second operating state, the second force is provided by the output element 20, or rather, the second force acts from the output element 20 on the object.

[0072] For example, in a third operating state of the actuator device 10, an external third force, illustrated by force arrow F3, acts on the output element 20, acting in the first direction of movement (arrow 28). In particular, the third force acts as a tensile force on the output element 20.For example, to allow the output element 20 to be movable or moved in the first direction of movement by means of the third force, in particular translationally and / or relative to the housing 26, the following can be provided: By exerting the third force on the output element 20 in the first direction of movement, a pressure is created in the working chamber 12 that is at least temporarily or briefly lower than an initial level, and a pressure is built up in the working chamber 14 that is higher than or above the initial level, so that the check valve 92 and in particular at least predominantly or briefly also the valve element 52 are closed.To allow movement of the output element 20 caused by the third force, the fluid, particularly from the reservoir 16, is pumped by means of the pumping device 36, in particular by means of the solid-state actuator 38, especially while the pumping of fluid into the working chamber 14 is omitted, and is pumped into the working chamber 12. This creates a pressure in the working chamber 12, which increases until the valve element 52 is actuated and thus opened, i.e., moved from its second closed position to its second open position, because the actuating chamber 72 is fluidically connected to the flow path 42 at the branch point A1. As a result, the fluid can flow out of the working chamber 14 via the now open discharge path 48, allowing the output element 20 to move in the first direction of motion.As a result, a pressure builds up in the working chamber 12 that is at least temporarily lower than the initial level, causing fluid to be pumped, or in particular sucked, out of the actuating chamber 72 via the branch point A1 and the actuating path 54, thereby closing the valve element 52 again. Consequently, the output element 20 can no longer move in the first direction of movement, since fluid can no longer flow out of the working chamber 14. This allows the output element 20 to move precisely at the pumping speed of the solid-state actuator 38, that is, at the speed in the first direction of movement at which fluid is pumped through the flow path 42 by means of the pumping device 36, in particular by means of the solid-state actuator 38.Due to the reduced pressure prevailing, at least temporarily or briefly, in the working chamber 12, fluid is conveyed into the working chamber 12 via the branch point A1 and the actuation path 54, and not via the first solid-state actuator 38 (also referred to as the first pump) or via the pumping device 36. In particular, it is drawn in, since the flow of fluid through the actuation path 54 and via the branch point A1 into the working chamber 12 encounters a lower pressure or a lower pressure difference than the flow of fluid via the pumping device 36. In other words, the pressure drop along the path of the fluid via the actuation path 54 and the branch point A1 into the working chamber 12 is lower than along the path of the fluid via the pumping device 36 into the working chamber 12.The movement of the output element 20 in the first direction of movement caused by the external, third force is also referred to as the third quadrant or movement in a third quadrant, whereby, because the output element 20 is moved by means of the external, third force, the third operating state is a quasi-generator operation or quasi-generator operating state.

[0073] For example, in a fourth operating state of the actuator device, an external, fourth force, illustrated by force arrow F4, is exerted on the output element 20, wherein the fourth force acts in the second direction of movement (arrow 30) and is thus opposite to the third force F3. Thus, for example, the fourth force (force arrow F4) acts as a compressive force on the output element 20, in particular from the aforementioned object.The fourth operating state is a second generator operation or a second generator operating state of the actuator device 10, which basically corresponds to the first generator operation, only with the difference that in the first generator operation (third operating state) the third force, which acts in the first direction of movement, and in the second generator operation and thus in the fourth operating state the fourth force, which acts in the second direction of movement, is exerted externally on the output element 20.Because the fourth external force acts on the output element 20 in the second direction of movement (arrow 30), a pressure lower than the initial level is created, at least temporarily, in the working chamber 14, and a pressure higher than the initial level is temporarily or briefly built up in the working chamber 12, so that initially the check valve 90 and the valve element 50 are closed. However, in the fourth operating state, the pumping device 36, in particular the solid-state actuator 40, now pumps the fluid, especially from the reservoir 16, particularly into or towards the working chamber 14, so that the pressure of the fluid in the working chamber 14 would increase until the valve element 50 is actuated by the fluid via the branch point A2 and the actuation path 56 and thus moved into the first open position.As a result, the fluid can flow out of the working chamber 12 via the discharge path 46, and the output element 20 can, so to speak, evade or yield to the fourth force and thus move in the second direction of motion, in particular translationally and / or relative to the housing 26. Consequently, a pressure lower than the initial level, i.e., a reduced pressure, builds up at least temporarily or briefly in the working chamber 14, causing fluid to be drawn out of the actuating chamber 62 via the branch point A2 and the actuating path 56. This closes the valve element 50, thus moving it into the first closed position, so that the output element 20 can no longer move in the second direction of motion.Thus, the output element 20 moves in the second direction of motion at precisely the pumping speed of the pumping device 36, in particular the solid-state actuator 40, and therefore at precisely the speed at which the pumping device 36, in particular the solid-state actuator 40, pumps the fluid, especially through the flow path 44. The reduced pressure that builds up in the working chamber 14 draws fluid out of the actuating chamber 62 via the branch point A2 and the actuating path 56, and not via the pumping device 36, in particular the solid-state actuator 40, since the pressure drop along a path of the fluid from the actuating chamber 62 via the actuating path 56 and the branch point A2 is lower than along a path of the fluid from the reservoir 16 via the pumping device 36, in particular via the solid-state actuator 40, towards or into the working chamber 14.The two motor operations and the two generator operations thus constitute the four-quadrant operation, which represents a particularly advantageous movement, mobility or possibility of movement of the output element 20 and thus of the output device 18.

[0074] Fig. 2 Figure 1 shows a partial schematic representation of a second embodiment of the actuator device 10. In the second embodiment, the pumping device 36 includes the solid-state actuator 38 as a solid-state actuator common to the first flow path 42 and the second flow path 44 for conveying the fluid. The pumping device 36 also includes a valve assembly 94, which is arranged upstream of the flow paths 42 and 44 and downstream of the pumping device 36, and thus downstream of the solid-state actuator 38, in the flow direction of the fluid flowing through the respective flow paths 42 and 44 and the pumping device 36, in particular the solid-state actuator 38. The valve assembly 94 is switchable between a first switching state and a second switching state. By means of the solid-state actuator 38, and thus by means of the pumping device 36, the fluid, in particular from the reservoir, can be conveyed in exactly one conveying direction, which is Fig. 2 This is illustrated by arrow 96. If the fluid is conveyed by means of the pumping device 36, i.e., by means of the solid-state actuator 38, particularly in the conveying direction, while the valve device 94 is in the first switching state, the fluid is conveyed from the reservoir 16 to and into the valve device 94 by means of the solid-state actuator 38 and conveyed through the valve device 94, wherein in the first switching state of the valve device 94 the fluid conveyed by means of the solid-state actuator 38 and thereby conveyed into and through the valve device 94 is introduced into the first flow path 42 via the valve device 94, i.e., by means of the valve device 94, so that in the first switching state of the valve device 94 the fluid is conveyed through the flow path 42 via the valve device 94 by means of the solid-state actuator 38.In the first switching state, however, the valve device 94 prevents or stops the fluid conveyed by the solid actuator 38 and conveyed into the valve device 94 from flowing into and through the flow path 44, so that, for example, in the first switching state, the flow path 42 is fluidically connected to the solid actuator 38 via the valve device 94, and in the first switching state, the flow path 44 is fluidically separated from the solid actuator 38 by means of the valve device 94.

[0075] If the fluid, in particular from the reservoir 16, is conveyed by means of the solid-state actuator 38, especially in the conveying direction (arrow 96), while the valve assembly 94 is in the second switching state, the fluid is conveyed to and into the valve assembly 94 by means of the solid-state actuator 38 and conveyed through the valve assembly 94, such that the fluid conveyed by means of the solid-state actuator 38 and conveyed into and through the valve assembly 94 is introduced into the second flow path 44, so that the fluid conveyed by means of the solid-state actuator 38 is conveyed through the flow path 44 by means of the solid-state actuator 38. In the second switching state, the valve assembly 94 prevents or stops the fluid conveyed by means of the solid-state actuator 38 and conveyed into the valve assembly 94 from flowing into and through the flow path 42.Thus, for example, in the second operating state, the flow path 44 is fluidically connected to the solid-state actuator 38 via the valve device 94, and in the second switching state, the flow path 42 is fluidically separated from the solid-state actuator 38 by means of the valve device 94.

[0076] In the second embodiment, the solid-state actuator 38, i.e., the pumping device 36, is arranged in a third flow path 98, through which the solid-state actuator 38 can convey the fluid from the reservoir 16, particularly in the conveying direction. In the flow direction of the fluid conveyed by the solid-state actuator 38 and thus flowing through the flow path 98, the flow path 98 is arranged upstream of the valve device 94. The fluid conveyed by the solid-state actuator 38, particularly from the reservoir, is conveyed via the flow path 98 to, and in particular into, the valve device 94. Thus, it is particularly conceivable that in the first switching state of the valve device 94, the flow path 42 is fluidically connected to the flow path 98 via the valve device 94, while the flow path 44 is fluidically separated from the flow path 98 by means of the valve device 94.In the second switching state, for example, the flow path 44 is fluidically connected to the flow path 98 via the valve device 94, while the flow path 42 is fluidically separated from the flow path 98 by means of the valve device 94.

[0077] Fig. 3 Figure 1 shows a schematic representation of a third embodiment of the actuator device 10. In this third embodiment, a free-running valve 100 is assigned to the working chamber 14 and is arranged in a free-running path 102. The free-running path 102 is fluidically connectable to, or already connected to, the working chamber 14. Furthermore, the free-running path 102 is fluidically connected to the reservoir 16, so that, as will be explained in more detail below, the free-running path 102 bypasses the pumping device 36, the working chamber 12, and also the check valves 90 and 92, as well as, in this case, the discharge paths 46 and 48 and the valve elements 50 and 52, particularly with regard to the flow of fluid from the reservoir 16 through the free-running path 102 and via the free-running path 102 into the working chamber 14. The free-running valve 100 can be a check valve or be designed in the manner of a check valve.In the third embodiment, the free-flow valve 100 opens towards the working chamber 14 and closes towards the reservoir 16. This means that the free-flow valve 100 allows fluid to flow from the reservoir 16 into the working chamber 14 via the free-flow path 102, while preventing, i.e., blocking, a reverse flow of fluid from the working chamber 14 into the reservoir 16 via the free-flow path 102. The preceding and following descriptions of the working chamber 14, particularly with regard to the free-flow valve 102, can readily be applied to the working chamber 12 and vice versa.

[0078] The fluid from reservoir 16 can be introduced into working chamber 14 via the free-running valve 100 and thus via the free-running path 102, bypassing the pumping device 36, the working chamber 12, the check valves 90 and 92, the discharge paths 46 and 48, and the valve elements 50 and 52. In particular, the fluid from reservoir 16 can be introduced into working chamber 14, to which the free-running valve 100 is assigned, via the free-running valve 100 and thus via the free-running path 102, without affecting the valve elements 50 and 52, that is, without causing any movement of the respective valve element 50 or 52 from the respective open position to the respective closed position or from the respective closed position to the respective open position. In the case of the Fig. 3 In the illustrated third embodiment, the freewheel valve 100 ensures freewheeling, i.e., rapid movement of the output element 20 in the second direction of movement illustrated by arrow 30, particularly as a result of the external, fourth force (force arrow F4) acting on the output element 20. Because, for example, the fourth force acts on the output element 20, a lower pressure, at least temporarily or briefly, builds up in the working chamber 14 compared to the initial level, so that fluid is conveyed, in particular drawn, from the reservoir 16 into the working chamber 14 via the freewheel path 102 and thus via the freewheel valve 100, particularly until pressure equalization has occurred between the working chamber 14 and the reservoir 16 via the freewheel path 102.Thus, the output element 20 can be moved particularly quickly in the second direction of motion by the fourth force until pressure equalization between the working chamber 14 and the reservoir 16 has occurred via the freewheel path 102. For example, to continue moving the output element 20 in the second direction of motion via the freewheel path 102 after pressure equalization between the working chamber 14 and the reservoir 16 has occurred, the fluid is pumped from the reservoir 16 into the working chamber 14 via the flow path 44, as described previously for the fourth operating state, by means of the pumping device 36. This pumping action actuates the valve element 50 via the actuation path 56, opening it so that the fluid can flow out of the working chamber 12 via the discharge path 46 and, in particular, into the reservoir 16.

[0079] Reduced pressure means that the pressure is lowered compared to the initial level. Increased pressure means that the pressure is raised compared to the initial level.

[0080] For example, if the pumping of the fluid by means of the pumping device 36 is terminated during or after the first or second operating state, thereby ending the actuation of the respective valve element 50 or 52, pressure equalization can occur between the respective actuation chamber 62 or 72 in the reservoir 16 via the respective flow limiting element 82 or 86 and thus via the respective drain path 84 or 88, in particular such that the fluid can flow out of the actuation chamber 62 or 72 via the drain path 84 or 88 and thus via the respective flow limiting element 82 or 86 and flow into the reservoir 16. As a result, the respective valve element 50 or 52 moves back to its respective closed position. As described in Fig. 1 and 3As shown, the flow limiting element 82 or 86 can, for example, be a throttle.

[0081] Fig. 4 A fourth embodiment of the actuator device 10 is shown in partial schematic representation, wherein in Fig. 4 The valve element 50 is shown as an example. An arrow 104 illustrates that, as in the first, second, and third embodiments, the discharge path 46 is fluidically connectable to, or can be connected to, the working chamber 12, so that the fluid can be discharged from the working chamber 12 and directed into the reservoir 16 via the discharge path 46. Furthermore, an arrow 106 illustrates that the actuation path 56 is fluidically connected or connectable to the flow path 44 at the branch point A2. This is evident in Fig. 4The drain path 84, in which the flow-limiting element 82 is arranged, is also included. However, the flow-limiting element 82 is no longer, or not only, a simple throttle, but a flow- or current-controlled, force-compensated switching valve, which may optionally, and in particular optionally, have a simple, especially linear, throttle.

Claims

1. An actuator device (10), comprising: - at least two working chambers (12, 14), which are coupled to each other such that an increase in volume of a first one of the working chambers (12, 14) is accompanied by a reduction in volume of the second working chamber (14) and vice versa, - a driven device (18), which can be driven and thereby is movable by the respective increase in volume of the respective working chamber (12, 14), - a pumping device (36) comprising at least one solid-state actuator (38) for conveying a fluid, - a first flow path (42) capable of being passed by the fluid conveyed by means of the pumping device (36), via which the fluid conveyed by means of the pumping device (36) and flowing through the first flow path (42) can be introduced into the first working chamber (12) for effecting the increase in volume of the first working chamber (12), - a second flow path (44) capable of being passed by the fluid conveyed by means of the pumping device (36), via which the fluid conveyed by means of the pumping device (36) and flowing through the second flow path (44) can be introduced into the second working chamber (14) for effecting the increase in volume of the second working chamber (14), - a first discharge path (46) associated with the first working chamber (12), via which the fluid can be discharged from the first working chamber (12) for reduction in volume of the first working chamber (12), - a second discharge path (48) associated with the second working chamber (14), via which the fluid can be discharged from the second working chamber (14) for reduction in volume of the second working chamber (14), - a first valve element (50) arranged in the first discharge path (46), which is movable between a first closed position closing the first discharge path (46) and at least one first open position releasing the first discharge path (46), - a second valve element (52) arranged in the second discharge path (48), which is movable between a second closed position closing the second discharge path (48) and at least one second open position releasing the second discharge path (48), - a first actuating path (54), which is fluidically connected to the first flow path (42) at a first branch point (A1 ) arranged downstream of the pumping device (36) and upstream of the first working chamber (12), at which a portion of the fluid conveyed by means of the pumping device (36) and flowing through the first flow path (42) can be branched off from the first flow path (42) and introduced into the first actuating path (54), via which the second valve element (52) can be actuated by means of the fluid introduced into the first actuating path (54) and flowing through the first actuating path (54) and thereby is movable from the second closed position into the second open position, and - a second actuating path (56), which is fluidically connected to the second flow path (44) at a second branch point (A2) arranged downstream of the pumping device (36) and upstream of the second working chamber (14), at which a portion of the fluid conveyed by means of the pumping device (36) and flowing through the second flow path (44) can be branched off from the second flow path (44) and introduced into the second actuating path (56), via which the first valve element (50) can be actuated by means of the fluid introduced into the second actuating path (56) and flowing through the second actuating path (56) and thereby is movable from the first closed position into the first open position; characterized in that: - a first actuating region (58) and a first actuating chamber (62) at least partially and directly bounded by the first actuating region (58), into which the fluid introduced into the second actuating path (56) and flowing through the second actuating path (56) can be introduced, are associated with the first valve element (50), whereby the first actuating region (58) can be acted upon by the fluid introduced into the second actuating path (56), flowing through the second actuating path (56) and introduced into the first actuating chamber (62), whereby the first valve element (50) is movable from the first closed position into the first open position; and - a first flow-limiting element (82) is associated with the first actuating region (58) and the first actuating chamber (62), which is connected parallel to the first actuating chamber (62) and the first actuating region (58) in flow direction of the fluid flowing through the second actuating path (56) and flowing into the first actuating chamber (62), wherein the fluid can be discharged from the first actuating chamber (62) via the first flow-limiting element (82) to thereby effect or permit a movement of the first valve element (50) from the first open position into the first closed position.

2. The actuator device (10) according to claim 1, characterized in that a second actuating region (68) and a second actuating chamber (72) at least partially and directly bounded by the second actuating region (68), into which the fluid introduced into the first actuating path (54) and flowing through the first actuating path (54) can be introduced, are associated with the second valve element (52), whereby the second actuating region (68) can be acted upon by the fluid introduced into the first actuating path (54), flowing through the first actuating path (54) and introduced into the second actuating chamber (72), whereby the second valve element (52) is movable from the second closed position into the second open position.

3. The actuator device (10) according to Claim 2, characterized by a second flow-limiting element (86) associated with the second actuating region (68) and the second actuating chamber (72), which is connected parallel to the second actuating chamber (72) and the second actuating region (68) in flow direction of the fluid flowing through the first actuating path (54) and flowing into the second actuating chamber (72), wherein the fluid can be discharged from the second actuating chamber (72) via the second flow-limiting element (86) to thereby effect and / or permit a movement of the second valve element (52) from the second open position into the second closed position.

4. The actuator device (10) according to any one of the preceding claims, characterized in that a first non-return valve (90) is arranged in the first flow path (42) downstream of the first branch point (A1) and upstream of the first working chamber (12), which prevents a flow of the fluid through the first flow path (42) towards the first branch point (A1 ) and permits it towards the first working chamber (12).

5. The actuator device (10) according to any one of the preceding claims, characterized in that a second non-return valve (92) is arranged in the second flow path (44) downstream of the second branch point (A2) and upstream of the second working chamber (14), which prevents a flow of the fluid through the second flow path (44) towards the second branch point (A2) and permits it towards the second working chamber (14).

6. The actuator device (10) according to any one of the preceding claims, characterized in that the pumping device (36) comprises: - the solid-state actuator (38) associated with the first flow path (42) as a first solid-state actuator (38) for conveying the fluid through the first flow path (42), and - a second solid-state actuator (40) associated with the second flow path (44) for conveying the fluid through the second flow path (44).

7. The actuator device (10) according to any one of Claims 1 to 6, characterized in that the pumping device (36) comprises: - the solid-state actuator (38) as a solid-state actuator (38) common to the first flow path (42) and the second flow path (44) for conveying the fluid, and - a valve device (94) which is switchable between: o a first switching state, in which: ■ the fluid conveyed by means of the solid-state actuator (38) can be introduced into the first flow path (42) via the valve device (94) and can be conveyed through the first flow path (42), and ■ by means of the valve device (94), an introduction of the fluid conveyed by means of the solid-state actuator (38) via the valve device (94) into the second flow path (44) is prevented, and o a second switching state, in which: ■ the fluid conveyed by means of the solid-state actuator (38) can be introduced into the second flow path (44) via the valve device (94) and can be conveyed through the second flow path (44), and ■ by means of the valve device (94), an introduction of the fluid conveyed by means of the solid-state actuator (38) via the valve device (94) into the first flow path (42) is prevented.

8. The actuator device (10) according to Claim 7, characterized in that the solid-state actuator (38) is arranged in a third flow path (98) arranged upstream of the valve device (94), via which the fluid conveyed by means of the solid-state actuator (38) through the third flow path (98) is to be guided to the valve device (94).

9. The actuator device (10) according to any one of the preceding claims, characterized in that the driven device (18) comprises a driven element (10) respectively partially and directly bounding the working chambers (12, 14), which: - is movably accommodated in a housing (26) respectively partially bounding the working chambers (12, 14), - can be directly acted upon by the fluid introduced into the first working chamber (12) by introducing the fluid into the first working chamber (12) and is thereby movable in a first direction of movement (28) in relation to the housing (26), and - can be directly acted upon by the fluid introduced into the second working chamber (14) by introducing the fluid into the second working chamber (14) and is thereby movable in a second direction of movement (30) opposite to the first direction of movement (28) in relation to the housing (26).

10. The actuator device (10) according to Claim 9, characterized in that the driven element (20) is movable in the respective direction of movement (28, 30) in relation to the housing (26) in translational and / or rotational and / or oscillating manner.

11. The actuator device (10) according to any one of the preceding claims, characterized in that a freewheel valve (100) is associated with one of the working chambers (12, 14), via which the fluid can be introduced from a reservoir (16) into the one working chamber (14) while bypassing the pumping device (36), the freewheel valve (100) opening towards the one working chamber (14) and closing towards the reservoir (16).

12. A method for operating an actuator device (10), in which the actuator device (10) comprises: - at least two working chambers (12, 14), which are coupled to each other such that an increase in volume of a first of the working chambers (12, 14) is accompanied by a reduction in volume of the second working chamber (14) and vice versa, - a driven device (18), which is driven and thereby moved by the respective increase in volume of the respective working chamber (12, 14), - a pumping device (36) comprising at least one solid-state actuator (38), by means of which a fluid is conveyed, - a first flow path (42) capable of being passed by the fluid conveyed by means of the pumping device (36), via which the fluid conveyed by means of the pumping device (36) and flowing through the first flow path (42) is introduced into the first working chamber (12) for effecting the increase in volume of the first working chamber (12), - a second flow path (44) capable of being passed by the fluid conveyed by means of the pumping device (36), via which the fluid conveyed by means of the pumping device (36) and flowing through the second flow path (44) is introduced into the second working chamber (14) for effecting the increase in volume of the second working chamber (14), - a first discharge path (46) associated with the first working chamber (12), via which the fluid is discharged from the first working chamber (12) for reduction in volume of the first working chamber (12), - a second discharge path (48) associated with the second working chamber (14), via which the fluid is discharged from the second working chamber (14) for reduction in volume of the second working chamber (14), - a first valve element (50) arranged in the first discharge path (46), which is moved between a first closed position closing the first discharge path (46) and at least one first open position releasing the first discharge path (46), - a second valve element (52) arranged in the second discharge path (48), which is moved between a second closed position closing the second discharge path (48) and at least one second open position releasing the second discharge path (48), - a first actuating path (54), which is fluidically connected to the first flow path (42) at a first branch point (A1 ) arranged downstream of the pumping device (36) and upstream of the first working chamber (12), at which a portion of the fluid conveyed by means of the pumping device (36) and flowing through the first flow path (42) is branched off from the first flow path (42) and introduced into the first actuating path (54), via which the second valve element (52) is actuated by means of the fluid introduced into the first actuating path (54) and flowing through the first actuating path (54) and is thereby moved from the second closed position into the second open position, and - a second actuating path (56), which is fluidically connected to the second flow path (44) at a second branch point (A2) arranged downstream of the pumping device (36) and upstream of the second working chamber (14), at which a portion of the fluid conveyed by means of the pumping device (36) and flowing through the second flow path (44) is branched off from the second flow path (44) and introduced into the second actuating path (56), via which the first valve element (50) is actuated by means of the fluid introduced into the second actuating path (56) and flowing through the second actuating path (56) and is thereby moved from the first closed position into the first open position; characterized in that: - a first actuating region (58) and a first actuating chamber (62) at least partially and directly bounded by the first actuating region (58), into which the fluid introduced into the second actuating path (56) and flowing through the second actuating path (56) can be introduced, are associated with the first valve element (50), whereby the first actuating region (58) can be acted upon by the fluid introduced into the second actuating path (56), flowing through the second actuating path (56) and introduced into the first actuating chamber (62), whereby the first valve element (50) is movable from the first closed position into the first open position; and - a first flow-limiting element (82) is associated with the first actuating region (58) and the first actuating chamber (62), which is connected parallel to the first actuating chamber (62) and the first actuating region (58) in flow direction of the fluid flowing through the second actuating path (56) and flowing into the first actuating chamber (62), wherein the fluid can be discharged from the first actuating chamber (62) via the first flow-limiting element (82) to thereby effect or permit a movement of the first valve element (50) from the first open position into the first closed position.

Images