Temperature control device

Abstract

The invention relates to a temperature control device (6) comprising: a first temperature control element (7) which progresses in a spiral manner at least in some sections; and at least one second temperature control element (8) which also progresses in a spiral manner at least in some sections, the first and the second temperature control elements (7, 8) being positioned so as to be at least in part nested within one another.

Description

[0001] TEMPERATURE CONTROL DEVICE

[0002] The invention relates to a tempering device comprising a first tempering element which has a spiral shape at least in sections.

[0003] Furthermore, the invention relates to a tempering device with a receptacle for a material to be heated and with a tempering device for heating the material.

[0004] It is known that electric heating devices are used to heat a material, especially to melt it, for example, for the production of single crystals. DE 101 03 691 A1 is one example among many.

[0005] The growth of large crystals in particular requires very constant conditions in order to avoid defects or errors in the crystal lattice as much as possible.

[0006] The object of the invention is to enable the most uniform possible temperature control, in particular heating, of a surface.

[0007] The object of the invention is achieved in the tempering device mentioned at the outset in that the tempering device has at least one second tempering element which also has a spiral shape at least in sections, wherein the first and the second tempering element are arranged at least partially nested within one another.

[0008] Furthermore, the object of the invention is achieved with the tempering device mentioned at the outset, in which the tempering device is designed according to the invention.

[0009] The advantage here is that the nested arrangement of the temperature control elements allows differences in temperature control, which are inherent in the temperature control elements themselves, to be better compensated for. Temperature control here refers on the one hand to heating, but on the other hand also to cooling. The temperature control device can therefore be a heating device or a cooling device. Accordingly, the term “temperature control” can be understood as “heating”, “warming” or “cooling”. The temperature control device thus enables a more uniform energy input into a material to be heated or a more uniform energy output from a material to be cooled. Furthermore, the length of the individual temperature control elements can be shortened for the same heated or cooled surface area compared to a temperature control device with only one spiral-shaped temperature control element, which also reduces the energy input into the material to be heated or cooled.the material to be heated (these two terms are used synonymously in this description) or cooled can be made uniform.

[0010] According to one embodiment of the invention, the spiral courses of the first and second temperature control elements can be designed as Fibonacci spirals. This design allows for the technical implementation of nesting the temperature control elements within each other more easily. Furthermore, the temperature control of a surface is possible with greater homogeneity compared to a spiral of a different shape.

[0011] To further improve the above-mentioned effects, according to further embodiments of the invention, it can be provided that the invention has at least one third tempering element and optionally at least one further tempering element, which is arranged at least partially nested with the first and the second tempering element, wherein the spiral course of the third tempering element and optionally of the at least one further tempering element is or are preferably designed as a Fibonacci spiral.

[0012] A further improvement in the homogeneity of the temperature control of a surface or the energy input into the material to be heated or the energy removal from the material to be cooled can be achieved according to an embodiment of the invention if the first, the second and the third temperature control element each have a first and a second connection area for the electrical contact and the first connection areas are arranged at an angle of 120 0 are arranged offset from each other.

[0013] According to another embodiment of the invention, it can be provided that all temperature control elements have a common second connection area, whereby the structural design of the temperature control device can be simplified.

[0014] According to a further embodiment of the invention, the first and second connection areas can form a three-phase connection. This not only allows for greater performance of the temperature control device, but also improves the power flows, thus also achieving more homogeneous heating of the material to be heated.

[0015] According to a further embodiment of the invention, it is preferably provided that the three-phase connection is designed as a star connection, wherein the second connection regions of the first, second and third temperature control elements form the star point of the star connection. In particular, in conjunction with the design of the temperature control elements as Fibonacci spirals, the surface of the material to be heated can be better covered by the temperature control elements. In addition, the arrangement of the temperature control elements in the temperature control device is also easier to implement, since fewer attachment points are required. The same applies if the temperature control elements are electrically operated cooling elements based, for example, on the thermoelectric effect. The star point can be used as a ground connection, which means it can also be used as an attachment point to a housing.

[0016] A further improvement in the energy input into the material to be heated can be achieved if, according to an embodiment of the invention, it is provided that the first and the second tempering element are designed in the form of a flat wire, at least in sections.

[0017] A corresponding improvement can be achieved if the third tempering element and the optionally present further tempering element or the optionally present further tempering elements are at least partially designed in the form of a flat wire.

[0018] To further homogenize the energy input into a material to be heated, it can be achieved if, according to other embodiments of the invention, it is provided that a distance between the first and the second tempering element is a maximum of 50 mm, and optionally a distance between the first and the third tempering element and / or between the second and the third tempering element is a maximum of 50 mm.

[0019] To further improve the homogenization of the energy input into a material to be heated, one embodiment of the temperature control device can provide for the temperature control device, particularly in the heating device configuration, to be arranged between at least one reflector element and the receptacle for the material to be heated. The reflector element allows the intermediate areas between the temperature control elements to be more effectively supplied with heating energy. Furthermore, this also improves the energy efficiency of the temperature control device.

[0020] In the preferred embodiment of the invention, the receptacle for the material to be heated is designed as a crucible for heating or heating the material, in particular for heating or heating material for single crystal growth, since uniform heating of the material is particularly advantageous for these technical fields.

[0021] In order to further improve the energy input into a material to be heated or cooled, according to a further embodiment of the tempering device, it can be provided that the first, the second and the third tempering element or generally the tempering elements of the tempering device are connected to a load distribution control.

[0022] For a better understanding of the invention, it is explained in more detail using the following figures.

[0023] They show in a highly simplified, schematic representation:

[0024] Fig. 1 shows a tempering device with at least one tempering unit;

[0025] Fig. 2 shows a variant of a tempering device;

[0026] Fig. 3 shows a further embodiment of a tempering device in plan view;

[0027] Fig. 4 shows a variant of a tempering device;

[0028] Fig. 5 shows a variant of a tempering device;

[0029] Fig. 6 shows a variant of a tempering device;

[0030] Fig. 7 shows a variant of a tempering device.

[0031] By way of introduction, it should be noted that in the variously described embodiments, identical parts are provided with identical reference symbols or component designations. The disclosures contained throughout the description can be applied analogously to identical parts with identical reference symbols or component designations. Furthermore, the positional information chosen in the description, such as top, bottom, side, etc., refers to the directly described and illustrated figure, and these positional information must be applied analogously to the new position in the event of a change in position.

[0032] Fig. 1 shows a simplified side view of a tempering device 1. The tempering device 1 can be a furnace or a heating device and / or a cooling device. Accordingly, the tempering device 1 can be used to warm or heat a material or to cool a material or to keep the material at a defined temperature level. The tempering device 1 is preferably used to heat or melt a solid material, in particular for growing or producing a single crystal, such as aluminum oxide (sapphire), Si, SiC, etc. Although the use of the tempering device 1 in single crystal production is one of the preferred applications, it should be noted that the invention is not limited to this field of application.

[0033] In the following, the temperature control device 1 is described as a heating device to provide a clearer illustration of the invention. However, these explanations can also be applied to the "cooling device" version, unless explicitly stated otherwise, such as "in the heating device version." Formulations such as "material to be heated" or "furnace" should therefore also be read as "material to be cooled" or "material to be maintained at a certain temperature," "cooler," etc.

[0034] The tempering device 1 according to Fig. 1 comprises a receptacle for the material to be heated, such as a shelf onto which the material to be heated is placed. In particular, according to one embodiment of the tempering device 1, the receptacle can be a crucible 2 or a receptacle into which the material for tempering is poured and in which it is melted if necessary.

[0035] The crucible 2 is preferably cylindrical with a circular bottom surface 3. However, the crucible 2 can also have a different cross-sectional shape, for example, rectangular, square, or generally polygonal. Furthermore, the crucible 2 can also have a shape deviating from the cylindrical shape, for example, frustoconical or generally with a cross-section that widens towards an opening 4 for filling the material. If the tempering device 1 is used to produce a single crystal, the crystal is preferably not pulled out of the crucible 2. The finished single crystal can, for example, have a diameter between 5 cm and 50 cm and a height between 5 cm and 80 cm. It should be noted, however, that these values ​​are for illustrative purposes and are not intended to limit the scope of protection.

[0036] For the sake of completeness, it should be mentioned at this point that the temperature control device 1 comprises or can comprise further elements than those mentioned in this description, such as a control and / or regulating unit, etc. However, since these can correspond to the state of the art, they will not be discussed further in this description, but reference is made to the relevant state of the art.

[0037] The tempering device 1 preferably has a housing 5 for forming a receiving space (also referred to as a furnace space) in which the receiving space and the material to be heated can be arranged, at least during heating.

[0038] The tempering device 1 further comprises at least one tempering device 6, which is arranged in particular in the receiving space of the tempering device 1.

[0039] The temperature control device 6 is arranged, in particular, below the receptacle for the material, for example, below the bottom surface 3 of the crucible 2. The temperature control device 6 can alternatively also be arranged in another area in the temperature control device 1, for example, to the side or above the receptacle for the material to be heated. Furthermore, it is possible for several temperature control devices 6 to be arranged in the temperature control device 1, for example, below and to the side and / or above the receptacle for the material to be heated, as shown partially in dashed lines in Fig. 1.

[0040] As can be better seen from Fig. 2, which shows an embodiment variant of a detail of the temperature control device 6 belonging to the invention, the temperature control device 6 has a first temperature control element 7 and a second temperature control element 8. The (preferred) embodiment variant of the temperature control device 6 shown in Fig. 2 also has a third temperature control element 9. It should be noted, however, that the temperature control device 6 can also have only the first and the second temperature control element 7, 8, as can be seen from Fig. 3, or can have more than three temperature control elements 7, 8, 9, as can be seen from Figs. 6 and 7. The first and the second temperature control element 7, 8 and the third temperature control element 9, which is present in particular, or any further temperature control element that may be present, are at least partially spiral-shaped. In particular, each of the tempering elements 7, 8, 9 of the tempering device 6 is spiral-shaped.For clarification, it should be noted that spirals are structures in a single plane and should not be confused with coils, such as heating coils. The temperature control elements 7, 8, and 9 are not helical, meaning they do not follow the course of a helix.

[0041] By "at least partially spiral-shaped," we mean that the tempering elements 7, 8, and 9 have initial and final sections that may deviate from the spiral shape. Between the initial and final sections, however, the tempering elements 7, 8, and 9 follow the spiral shape.

[0042] The temperature control elements 7, 8, 9 are arranged at least partially or at least sectionally nested within one another. Due to this nesting, in the embodiment of the temperature control device 6 shown in Fig. 3, the first temperature control element 7 is arranged in sections directly between the second and third temperature control elements 8, 9, the second temperature control element 8 is arranged in sections directly between the first and third temperature control elements 7, 9, and the third temperature control element 9 is arranged in sections directly between the first and second temperature control elements 7. In general, due to the nesting, the temperature control elements of the temperature control device 6 are arranged at least sectionally between other temperature control elements of the temperature control device 6 or at least one other temperature control element of the temperature control device 6.

[0043] In Fig. 2, only the temperature control elements 7, 8, 9 of the temperature control device 6 are shown. However, the temperature control device 6 can also comprise further components or parts, such as a regulating and / or control device, a housing, etc. In this regard, reference is made to the known prior art for heating devices.

[0044] The tempering device 6 is preferably assigned to the bottom surface 3 or the opening 4 of the crucible 2. In particular, the embodiment of the tempering device 6 shown in Fig. 2 is assigned to a crucible 2 with a circular bottom surface 3 or circular opening 4 or is arranged at a distance therefrom. In the embodiment variant of the tempering device 1 shown in Fig. 1, the device has several tempering devices 6. One or more or all of these tempering devices 6 can be designed according to the invention. However, the tempering device 6 according to the invention can also be combined with tempering devices known from the prior art or even used alone as the sole tempering device 6 of the tempering device 1.

[0045] In the tempering device 1, several tempering devices 6 can also be combined with one another. In this case, the combined tempering device 6 comprises several (at least two) groups of nested, spirally arranged tempering elements 7, 8, and optionally 9. These can be arranged below (the base surface 3) and / or above (the opening 4) and / or to the side of the receptacle for the material to be heated, in particular the melting crucible 2.

[0046] It is also possible for the tempering device 6 arranged below (the bottom surface 3) and / or above (the opening 4) and / or to the side of the receptacle for the material to be heated, in particular the crucible 2, to have / have at least two or more groups of nested, spirally arranged tempering elements 7, 8 and optionally 9.

[0047] The temperature control elements 7, 8, 9 can be designed as resistance heating elements when used as a heating device. Since resistance heating elements are known per se, reference is made to the relevant prior art.

[0048] The tempering elements 7, 8, 9 can also be designed as tubes and can be flowed through by a heating fluid or a cooling fluid, for example water.

[0049] The distance between the tempering elements 7, 8, 9 and the material to be heated can be, for example, between 3 cm and 150 cm, in particular between 10 cm and 50 cm. However, according to a variant of the tempering device 1, it is also possible for at least the tempering elements 7, 8, 9 to rest, in particular directly, on a surface of the holder, in particular the crucible 2.

[0050] As stated, the first tempering element 7, the second tempering element 8, and the third tempering element 9 have a spiral-shaped configuration, at least in sections. The spiral-shaped configuration can be in the form of an Archimedean, hyperbolic, or logarithmic spiral. Other spiral configurations or combinations of different spiral configurations are also possible.

[0051] According to preferred embodiments of the temperature control device 6, the spiral courses of the first and second temperature control elements 7, 8 are designed as Fibonacci spirals and / or the spiral course of the third temperature control element 9 is designed as a Fibonacci spiral. These embodiments are shown in Fig. 2. This is based on the so-called Fibonacci numbers, i.e., a number sequence in which each element is formed from the sum of the two previous numbers (0, 1, 1, 2, 3, 5, 8, 13, 21, ...). The Fibonacci spiral is formed by selecting the radii of immediately consecutive circular sectors of this Fibonacci number sequence. The Fibonacci spiral can be approximately represented as a series of quarter-circle arcs, with the quarter-circle arcs with radius 1, or the smallest number in the Fibonacci number sequence, being arranged at the inner end of the Fibonacci spiral.Due to the beginning of the Fibonacci number sequence, a semicircle with a radius of 1 can be formed at the inner end. The temperature control elements of the temperature control device 6 can be scaled according to the Fibonacci numbers. Designing the temperature control elements as Fibonacci spirals has the advantage of better nesting of the individual temperature control elements.

[0052] Fig. 3 is intended to clarify that, within the scope of the invention, other spiral shapes for the tempering elements 7, 8 are also possible, for example, tempering elements 7, 8 which have a section-wise course in the form of a rectangular, in particular square, spiral. In general, the tempering elements 7, 8 can have a course in the form of polygonal spirals. Such at least quadrangular spiral shapes are used in particular for a receptacle for the material to be heated, in particular crucibles 2, which have a corresponding polygonal base area, in particular bottom area 3. For example, a rectangular spiral shape is used for a crucible 2 with a rectangular bottom area 3 or a square spiral shape is used for a crucible 2 with a square bottom area 3. The shape of the tempering device 6, iethe tempering elements 7, 8, 9 (viewed in plan view) is therefore preferably based on the shape of the receptacle for the material to be heated, in particular the shape of the bottom surface 3 of the crucible 2. In particular, the tempering device 6, ie the tempering elements 7, 8, 9 (viewed in plan view) therefore preferably have the same shape as the receptacle for the material to be heated, in particular the shape of the bottom surface 3 of the crucible 2, although size differences may exist.

[0053] Preferably, the tempering device 6 has a surface area which corresponds to at least 70%, in particular between 80% and 100%, of the surface area of ​​the receptacle for the material to be heated, in particular the bottom surface 3 of the crucible 2.

[0054] This surface area corresponds to the surface area of ​​the temperature control elements 7, 8, 9 without any first connection elements 10 that may be present for connecting the temperature control elements 7, 8, 9 to a fluid guidance system or for electrically contacting the temperature control elements 7, 8, 9. Each of the temperature control elements 7, 8, 9 has (particularly in the embodiment with resistance heating elements) the first connection area 10 and a second connection area 11 for electrical contacting. The first connection areas 10 are located at the outer beginning and the second connection areas 11 at the inner end of the temperature control elements 7, 8, 9. The first connection areas are those areas that deviate from the spiral shape, for example, sections on the outer circumference of the temperature control device or of the temperature control elements 7, 8, 9 that run at an angle to the further course of the temperature control elements 7, 8, 9 in Fig. 2.

[0055] The first and second connection areas 10, 11 can also be designed for the connection of a fluid, for example water.

[0056] As can be seen from Fig. 3, the first and / or second connection areas 10, 11 can be arranged next to one another. However, according to a preferred embodiment of the temperature control device 6, the first connection areas 10 are arranged at an angle of 120 0 arranged offset from one another, as shown in Fig. 2. Other arrangements of the first connection areas 10 with an offset from one another in the circumferential direction of the temperature control device 6 or the temperature control elements 7, 8, 9 are also possible, for example in a range between 30 0 and 110 °, although the version with 120 0 which is preferred.

[0057] Particularly in the embodiment with resistance heating elements, the first, second, and third temperature control elements 7, 8, 9 can preferably form first and second connection areas 10, 11 for electrical contact in the form of a three-phase connection. The three-phase connection can be designed as a delta connection. In the preferred embodiment of the temperature control device 6, however, the three-phase connection is designed as a star connection, with the second connection areas 11 of the first, second, and third temperature control elements 7, 8, 9 forming the star point 12 of the star connection, as shown in Fig. 2.

[0058] Even when the temperature control elements 7, 8, 9 are designed as fluid lines, the temperature control elements 7, 8, 9 can have a common connection in the center of the temperature control device 6, into which the or all temperature control elements 7, 8, 9 of the temperature control device 6 open. In the broadest sense, this design variant of the temperature control device 6 also has a "core point."

[0059] The first and / or second connection areas 10, 11 can be provided with openings, for example bores, whereby the first and / or second connection areas 10, 11 can simultaneously serve as fastening points for the temperature control elements 7, 8, 9, in particular for receiving screws or other fastening means.

[0060] The temperature control elements 7, 8, 9 can be designed as round wires, flat wires, or as electrical conductors with a polygonal, for example rectangular or square, cross-section, or as tubes with a round or polygonal, for example rectangular or square, cross-section. For example, the temperature control elements 7, 8, 9 can have a width 13 between 0.1 mm and 50 mm and a height 14 between 0.1 mm and 50 mm. Furthermore, they can have a length between 10 cm and 200 cm between the two connection areas 10, 11. A round wire, for example, can have a diameter between 5 mm and 1000 mm. Other forms of temperature control elements 7, 8, 9 can have a cross-sectional area between 0.01 mm 2 and 2500 mm 2 or between 0.01 mm 2 and 0.1 m 2However, this information should not be construed as limiting the scope of protection. The temperature control elements 7, 8, 9 can also be larger or smaller. The temperature control elements 7, 8, 9 can also have sections with different cross-sectional shapes along their length.

[0061] The temperature control elements 7, 8, 9 comprise or consist of a metallic material, preferably a metallic alloy. For example, the temperature control elements 7, 8, 9 comprise or consist of manganin, constantan, platinum, etc. Semiconductors, such as silicon carbide, molybdenum disilicide, etc., can also be used, particularly for higher temperatures. The temperature control elements 7, 8, 9 can also comprise or consist of a different material, such as graphite in the heating device design.

[0062] According to other embodiments, it can be provided that a distance 15 between the first and second temperature control elements 7, 8 is a maximum of 50 mm, for example, between 1 mm and 10 mm, and / or that a distance 15 between the first and third temperature control elements 7, 9 and / or between the second and third temperature control elements 8, 9 is a maximum of 50 mm, for example, between 1 mm and 10 mm. The distance 15 is measured between sections of the temperature control elements 7, 8, 9 that run directly adjacent to one another.

[0063] Fig. 4 shows a section of a variant embodiment of a tempering device 1. Shown are the receptacle for the material (to be heated), in particular the crucible 2, and the tempering device 6. The tempering device 1 also has at least one reflector element 16. In this variant embodiment, the tempering device 6 is arranged between the reflector element 16 and the receptacle for the material to be heated, in particular the crucible 2. The reflector element 16 can be made of a ceramic material or graphite, for example.

[0064] According to a further embodiment, the first, second, and third temperature control elements 7, 8, 9 of the temperature control device 6 can be connected to a load distribution controller 17. This makes it possible to at least reduce differences in the heating outputs of the temperature control elements 7, 8, 9 or to equalize the heating outputs of the temperature control elements 7, 8, 9.

[0065] For the sake of completeness, Fig. 5 shows a variant of the temperature control device 6, which has only the first and second temperature control elements 7, 8, which, unlike in Fig. 3, are designed here as Fibonacci spirals. Preferably, the first connection areas 10 are arranged at an angle of 180°. 0 arranged twisted to each other.

[0066] It is also possible for the tempering elements 7, 8, 9 to be configured with multiple nesting, particularly in the form of Fibonacci spirals. To illustrate these embodiments, Figs. 6 and 7 show six-fold and sixteen-fold nesting, respectively, in which the tempering elements 7, 8, 9 are arranged in a nested configuration with six or thirteen additional tempering elements 18, respectively, in accordance with the above embodiments, and in particular can also have a common core point 12.

[0067] In general, different temperature control levels or switching levels can be realized with the multiple nested temperature control elements 7, 8, 9, 18, so that the temperature control elements 7, 8, 9, 18 can have different temperature levels or so that an area adaptation to different sized exceptions for the material is possible, so for example if necessary only an inner ring of the temperature control device 6 can be used for temperature control.

[0068] The exemplary embodiments show or describe possible embodiments of the temperature control device 1 or the temperature control unit 6, wherein it should be noted at this point that combinations of the individual embodiments are also possible.

[0069] For the sake of clarity, it should finally be pointed out that for a better understanding of the structure of the temperature control device 1 or the temperature control unit 6, these are not necessarily shown to scale.

[0070] Reference symbol list

[0071] T empering device

[0072] crucible

[0073] Floor area

[0074] opening

[0075] Housing

[0076] T emperator

[0077] T empering element

[0078] T empering element

[0079] T empering element

[0080] Connection area

[0081] Connection area

[0082] Stem point

[0083] Width

[0084] Height

[0085] Distance

[0086] Reflector element

[0087] Load sharing control

[0088] T empering element

Claims

patent claims 1. Temperature control device (6) comprising a first temperature control element (7) which has a spiral profile at least in sections, characterized in that the temperature control device (6) has at least a second temperature control element (8) which also has a spiral profile at least in sections, wherein the first and the second temperature control element (7, 8) are arranged at least partially nested within each other.

2. Temperature control device (6) according to claim 1, characterized in that the spiral profiles of the first and second temperature control elements (7, 8) are designed as Fibonacci spirals.

3. Temperature control device (6) according to claim 1 or 2, characterized in that it has at least a third temperature control element (9) and optionally at least one further temperature control element (18) which is arranged at least partially nested within itself with the first and the second temperature control element (7, 8).

4. Temperature control device (6) according to claim 3, characterized in that the spiral progression of the third temperature control element (9) and optionally of the further temperature control element (18) or the further temperature control elements (18) is or are formed as a Fibonacci spiral, optionally nested multiple times.

5. Temperature control device (6) according to claim 3 or 4, characterized in that the first, second and third temperature control element (7, 8, 9) each have a first and a second connection area (10, 11) for electrical contacting, wherein the first connection areas are spaced 120° apart. 0are arranged offset from each other.

6. Temperature control device (6) according to one of claims 3 to 5, characterized in that all temperature control elements (7, 8, 9, 18) have a common second connection area (11).

7. Temperature control device (6) according to claim 5, characterized in that the first and a second connection areas (10, 11) form a three-phase connection.

8. Temperature control device (6) according to claim 7, characterized in that the three-phase connection is designed as a star connection, wherein the second connection areas (11) of the first, second and third temperature control element (7, 8, 9) form the star point (12) of the star connection.

9. Temperature control device (6) according to one of claims 1 to 8, characterized in that the first and the second temperature control element (7, 8) are at least partially formed in a flat wire shape.

10. Temperature control device (6) according to one of claims 3 to 9, characterized in that the third temperature control element (9) and the optionally present further temperature control element (18) or the optionally present further temperature control elements (18) are formed at least partially in a flat wire shape.

11. Temperature control device (6) according to one of claims 1 to 10, characterized in that a distance (15) between the first and the second temperature control element (7, 8) is a maximum of 50 mm.

12. Temperature control device (6) according to one of claims 3 to 11, characterized in that a distance (15) between the first and the third temperature control element (7, 9) and / or between the second and the third temperature control element (8, 9) is a maximum of 50 mm.

13. Temperature control device (1) with a receptacle for a material to be heated and with a temperature control device (6) for heating the material, characterized in that the temperature control device (6) is designed according to one of claims 1 to 12.

14. Temperature control device (1) according to claim 13, characterized in that the temperature control device (6) is arranged between at least one reflector element (16) and the receptacle for the material to be heated.

15. Tempering device (1) according to claim 13 or 14, characterized in that the receptacle for the material to be heated is designed as a crucible (2).

16. Temperature control device (1) according to one of claims 13 to 14, characterized in that the first, the second and the third temperature control element (7, 8, 9) of the temperature control device (6) are connected to a load distribution control (17).

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