Method and apparatus for producing a carrying structure, carrying structure and optical device having a carrying structure
Patent Information
- Application Number
- EP2023768177
- Authority / Receiving Office
- EP · EP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2022-09-02
- Filing Date
- 2023-09-01
- Publication Date
- 2025-07-09
Smart Images
Figure 1.1
Abstract
Description
[0001] METHOD AND DEVICE FOR PRODUCING A SUPPORTING STRUCTURE, SUPPORTING STRUCTURE AND OPTICAL DEVICE WITH A SUPPORTING STRUCTURE
[0002] DESCRIPTION
[0003] The present invention is in the field of coating methods and relates to an apparatus and a method for producing a support structure, a support structure and an optical device with a support structure.
[0004] Coating processes in the form of physical and chemical coating methods are known in numerous variants and applications from the state of the art. For example, the term "physical vapor deposition" refers to a group of coating processes that take place in a vacuum environment. In this process, a starting material is converted into the gaseous state, i.e., the gas phase, using physical processes and then applied to a substrate or object to be coated. The gaseous starting material then condenses, and a coating consisting of the starting material in its solid state forms on the substrate or object. Such processes are used, for example, in microelectronics and are used to coat electronic components made of semiconductor materials.
[0005] So-called "chemical vapor deposition" refers to a group of coating processes in which a solid gaseous starting material is deposited and formed on the surface of a substrate or object due to chemical reactions. In other words, at least one chemical reaction takes place on the surface of the substrate or object. Typically, a solid layer of the gaseous material is deposited under specific pressure and temperature conditions or in specific pressure and temperature ranges.
[0006] Coating processes are also known from the patent literature of the prior art.
[0007] US patent application No. US 2003 / 0223135 A1 describes a method for manufacturing a parabolic membrane mirror. A liquid contained in a cylindrical container is rotated over the cylindrical container to create a parabolic inverted mandrel. A rapidly curing liquid polymer is then poured into the inverted mandrel to form a substrate for the membrane mirror. After the substrate has cured, a reflective coating is formed by applying a curing and reflective substrate.
[0008] US patent application No. US 2002 / 0126726 A1 describes a method for fabricating an optical membrane device ("MEMS membrane") with an integral mirror and an optically curved surface. The substrate is a silicon-based disc ("silicon wafer"), which is oxidized to form an insulating sacrificial / separation layer and further define an electrostatic cavity. A curved optical layer is deposited onto the sacrificial / separation layer by deposition through a silicon wafer material, which is then selectively removed. The formation of the curved surface can further be achieved by polishing or, alternatively, by etching.
[0009] Published European Patent No. EP 1 672 394 B1 discloses a method for producing a selective membrane made of parylene. The method comprises providing a container containing a liquid, for example, oil. The liquid and the rim of the container are covered with a homogeneous, continuous thin film of parylene using a low-pressure deposition process. The parylene layer forms the membrane and adheres to the container. After the layer has formed, the liquid is drained from the container, leaving the thin film in its original position, thus forming a parylene film stretched between the walls of the container. The film is then provided with micro-holes by laser ablation to form the selective membrane. The film can also be made porous by ion etching. The selective membrane serves as a filter for a gas or other fluid.
[0010] It is an object of the present invention to provide an improved method and an improved device for producing a support structure for supporting at least one functional unit, preferably in the form of an optically active coating or at least one optically active layer. Furthermore, it is an object of the present invention to provide a support structure for supporting the at least one functional unit, the preferably mechanical-structural and / or geometric properties of which are improved. In addition, it is an object of the present invention to provide an optical device with such a support structure. It is a further object of the present invention to provide a mirror, in particular a parabolic mirror or spherical mirror or membrane mirror, with a predetermined focal length, and a method for producing the same.
[0011] The object is achieved by the features of claims 1, 10, 13, 14, 19 and 20. Further embodiments and applications of the present invention emerge from the dependent claims and are explained in more detail in the following description with partial reference to the figures.
[0012] According to a first general aspect, the present invention relates to a method for producing a support structure for supporting at least one functional unit, preferably for an optical device, in a reaction chamber, comprising: providing a liquid medium for shaping the support structure during production and / or in a production state, preferably in a receiving device which is at least partially semi-open; setting the liquid medium in motion and / or moving it and creating a shaping surface of the liquid medium, preferably by driving the receiving device by means of a drive device or by driving a device which comprises a reaction chamber in which the receiving device is arranged;Providing a reaction material for forming the support structure, preferably by means of or via at least one inlet device, wherein the at least one inlet device and the receiving device are arranged spaced apart from one another in the reaction chamber; applying, preferably depositing, the reaction material onto the shaping surface; building the support structure using the applied, preferably deposited, reaction material.
[0013] The method according to the present invention preferably represents a coating method in which the coating material, and thus the reaction material, forms the support structure. Furthermore, the method according to the present invention is characterized in that a moving liquid medium, and thus a liquid, serves as the mold for the support structure to be produced. In particular, the moving surface of the liquid medium contributes to the shaping of the support structure during its production using the reaction material.
[0014] Deposition preferably comprises a direct and / or immediate transition or conversion of the reaction material from a gaseous state to a solid state. A liquid state is thus omitted. With the present method, for example, a substantially rotationally symmetrical support structure can be formed from a reaction material, which is furthermore, for example, substantially homogeneous over its entire extent. The support structure can preferably be a domed or curved support structure. The support structure can be sufficiently dimensionally stable to support the at least one functional unit. The at least one functional unit can preferably be a coating or at least one layer and ensure a specific functionality. For example, the at least one functional unit can be a layer made of a light-reflecting metallic material, for example aluminum or gold.
[0015] The method according to the present invention may be characterized by further features, which will be described in more detail below.
[0016] The reaction material can be formed as a gaseous and / or depositable reaction material, at least prior to the construction of the support structure. Additionally or alternatively, the reaction material can be formed as a solid reaction material, at least after the construction of the support structure. The manufactured support structure can thus preferably be characterized by defined geometric dimensions after production and, for example, have a substantially constant thickness. The reaction material within the meaning of the present invention is preferably a reactive material which builds up the support structure, preferably continuously or preferably steadily, only by application, preferably deposition, onto the shaping surface.In other words, the reaction material is a self-reacting, preferably chemically reactive, material during application and / or construction, which builds the supporting structure by creating chemical bonds. The reaction material is preferably a sublimable and / or resublimable material.
[0017] According to a further aspect of the present invention, the method may comprise: evaporating the reaction material, preferably by heating it to a specific temperature or a specific temperature range, and / or converting the reaction material from a solid state to a gaseous state, preferably in an evaporation device, and / or pyrolyzing and thus fragmenting the reaction material, preferably in a pyrolysis device and at specific pressure and temperature conditions or in specific pressure and temperature ranges. The reaction material may be such that it sublimates under specific temperature conditions and / or pressure conditions, i.e., changes or transitions from a solid state directly to a gaseous state and vice versa.The reaction material can be brought into a reactive state, especially by pyrolysis, in order to produce the supporting structure by appropriate construction.
[0018] Building the support structure can comprise: enriching, preferably adsorbing, the reaction material on the shaping surface, and / or creating chemical bonds in the reaction material, and / or building the support structure in the form of at least one layer and / or at least one membrane, which preferably has a substantially constant thickness and / or is substantially homogeneous.
[0019] The construction of the supporting structure preferably comprises a solidification of the reaction material by creating chemical bonds in order to achieve a defined or sufficient dimensional stability.
[0020] Setting the liquid medium in motion and / or moving it can comprise: rotating the liquid medium or causing the liquid medium to rotate at an adjustable speed, preferably by means of the drive device and / or depending on at least one operating condition and / or geometric size of the support structure; and / or forming the shaping surface, which is at least partially arched or curved, preferably paraboloid-shaped and / or concave and thus in the shape of a paraboloid. Preferably, the speed (rotational / angular speed of the receiving device and the liquid medium in the state in which the liquid medium has assumed the rotational speed of the receiving device) is adjusted depending on a focal length of the mirror to be produced.In other words, the following can be provided: adjusting a speed, preferably a rotational speed, of the receiving device and / or the liquid medium as a function of a focal length of a mirror to be produced, wherein the liquid medium preferably has essentially assumed the speed, preferably the rotational speed, of the receiving device. The rotational movement advantageously forms the at least partially curved or arched surface.
[0021] According to a further aspect of the present invention, the method may comprise: generating a negative pressure and / or preferably a vacuum in the reaction chamber at least before providing the reaction material, preferably by means of or via at least one outlet device and a pumping device, wherein the pumping device is arranged outside the reaction chamber, and / or wherein the at least one outlet device and the receiving device are arranged at a distance from one another in the reaction chamber.
[0022] By creating a negative pressure, preferably a vacuum, a reaction chamber can be created that is, for example, essentially free of foreign matter. Furthermore, this can ensure a substantially uniform distribution of the reaction material in the reaction chamber.
[0023] By generating, preferably continuously generating, and / or providing a vacuum, preferably a high vacuum, in the reaction space, an improved build-up of the support structure by the reaction material is thus realized, for example, preferably by deposition from the gaseous state.
[0024] It is possible for the method to comprise: directed distribution of the reaction material at at least one defined location in the reaction chamber, preferably in each case in the direction of the shaping surface, preferably by means of at least one distribution device, wherein the at least one distribution device is connected to the at least one inlet device. The distribution device can, for example, comprise at least one nozzle device and / or at least one guide device in order to guide the reaction material in a defined direction at least in the region of or at the distribution device.
[0025] According to a further aspect of the present invention, the method may comprise: detecting a geometric size, preferably a thickness, of the support structure during the application of the reaction material and / or construction of the support structure, preferably by means of at least one measuring device for detecting the geometric size, wherein the at least one measuring device is arranged in the reaction space, and / or wherein the at least one measuring device and the receiving device are arranged at a distance from one another in the reaction space.
[0026] This can, for example, ensure more or less continuous monitoring of the construction of the support structure. Depending on the detected thickness of the support structure, the volume flow of the reaction material into the reaction chamber can, for example, be regulated or controlled. The method can comprise: setting at least one operating condition of the method, preferably by means of a control device, wherein the at least one operating condition comprises at least one of the following: a temperature in the reaction chamber, a temperature of the reaction material before being provided in the reaction chamber, a pressure in the reaction chamber, a temperature of the liquid medium; a period of time for providing the reaction material, a volume flow of the reaction material, and / or a drive speed of the receiving device, and / or a volume flow of the reaction material.
[0027] According to a second general aspect, the present invention relates to a support structure for supporting at least one functional unit, preferably for an optical device, wherein the support structure is manufactured according to a method as disclosed herein, wherein the support structure is dimensionally stable at least in sections, at least in the state of manufacture, and / or wherein the support structure is reversibly foldable and / or reversibly rollable.
[0028] In other words, the supporting structure can be folded and / or rolled up due to its geometric and / or mechanical-structural properties and can return to its original geometric shape after being unfolded or rolled out.
[0029] As already described, the support structure can be arched or curved, preferably paraboloidal and thus in the shape of a paraboloid, at least in sections, and / or the support structure can be formed from a reaction material comprising a parylene and / or at least one parylene-based derivative. In other words, the reaction material can comprise at least one material from the group of poly-p-xylylenes and / or their derivatives.
[0030] Preferably, the at least one functional unit is formed on a concave surface of a curved or arched support structure such that the support structure and the at least one functional unit formed thereon form a mirror, in particular a parabolic mirror, spherical mirror or membrane mirror, with a predetermined focal length.
[0031] The support structure can support at least one functional unit, wherein the at least one functional unit comprises at least one coating or at least one layer which is formed essentially from a metallic material and / or from a light-reflecting material.
[0032] According to a third general aspect, the present invention relates to an optical device, preferably an optical telescope or an optical membrane mirror, having at least one support structure for supporting at least one functional unit, wherein the support structure is manufactured and / or configured as disclosed herein, and wherein the at least one functional unit is configured and / or configured as disclosed herein. The optical device can be used, for example, in a vacuum environment and / or in a low-temperature environment, for example in space.
[0033] According to a fourth general aspect, the present invention relates to a device for producing a support structure for supporting at least one functional unit, preferably for an optical device, wherein the device is preferably configured to carry out a method as disclosed herein, comprising: a reaction space which is formed by a reaction container and in which the support structure can be produced; a receiving device for receiving a liquid medium serving for shaping or for shaping the support structure during production and / or in a production state, wherein the receiving device is arranged in the reaction space and / or is designed to be semi-open at least in sections;at least one inlet device for providing a reaction material into the reaction chamber and forming the support structure, wherein the at least one inlet device and the receiving device are preferably arranged at a distance from one another in the reaction chamber; wherein the receiving device comprises a drive device or is coupled to a drive device in order to set a received liquid medium in motion and / or move it and thus to create a shaping surface of the liquid medium, wherein the reaction chamber and / or at least the at least one inlet device is configured to apply the reaction material to the shaping surface in order to build the support structure thereby.
[0034] The drive device can be configured to drive the receiving device in a rotational manner, i.e., rotating manner, at an adjustable speed, preferably depending on at least one operating condition when the device is in operation. The receiving device can be semi-open, preferably semi-open cylindrical, plate-shaped, or bowl-shaped. It is possible for the receiving device to be arched or curved, at least in sections. The receiving device can have a circumferential edge or a circumferential rim, which serves to limit the amount and thus the volume of liquid medium received.Preferably, a defined amount of liquid medium can be accommodated in the receiving device, so that the surface of the liquid medium transitions substantially flush and / or substantially continuously to the peripheral edge or the peripheral rim during the movement of the receiving device and thus during the movement of the liquid medium. This prevents, for example, the formation of undesirable bulges on the support structure.
[0035] According to a further aspect of the present invention, the device can comprise at least one bearing device for supporting the receiving device, wherein the at least one bearing device is configured for substantially vibration-free or sufficiently vibration-free mounting of the receiving device, preferably comprising at least one magnetic bearing or at least one hydrostatic bearing. This can, for example, further improve the quality of the manufactured support structure, since no or at least hardly any harmful disturbances can occur due to time-dependent mechanical loads during production.
[0036] It is possible for the device to comprise at least one barrier device for protecting the at least one storage device in order to prevent penetration of the reaction material into the at least one storage device, wherein the at least one barrier device encloses the at least one storage device and / or comprises at least one labyrinth seal and / or at least one liquid seal.
[0037] According to a further aspect of the present invention, it can be provided that the device comprises a coating device for coating the support structure with a coatable material, that is to say a coating material, preferably based on a metallic material, in order to form the at least one functional unit on the support structure.
[0038] According to a fifth general aspect, the present invention relates to a method for producing a mirror, in particular a parabolic or spherical mirror, which has at least one support structure for supporting at least one functional unit, comprising: producing the support structure as disclosed herein, and applying or coating at least one functional unit on a concave side of a curved or arched surface of the at least one support structure, wherein the at least one functional unit comprises at least one coating or at least one layer which is formed from a metallic material and / or from a light-reflecting material.
[0039] According to a sixth general aspect, the present invention relates to a mirror, preferably a parabolic or spherical mirror, which is preferably manufactured according to the method as disclosed herein, comprising: at least one support structure, wherein the at least one support structure is manufactured and / or formed as disclosed herein, and at least one functional unit which is formed on a concave side of a curved or arched surface of the support structure, wherein the at least one functional unit preferably comprises a coating or at least one layer which is formed from a metallic material and / or from a light-reflecting material.
[0040] To avoid repetition, features directed purely to the device according to the invention and / or disclosed in connection therewith shall also be deemed to be disclosed in accordance with the method and be claimable, and vice versa.
[0041] The previously described embodiments and features of the present invention can be combined with one another as desired. Further or other details and advantageous effects of the present invention are explained in more detail below with reference to the accompanying figures.
[0042] They show:
[0043] Fig. 1 shows a first embodiment of the device for producing the supporting structure according to the present invention in a schematic representation and in a sectional view;
[0044] Fig. 2 shows a section of the supporting structure from Figure 1 (section Z in Figure 1) in an enlarged view;
[0045] Fig. 3 shows an example of a support structure according to the present invention in a schematic representation;
[0046] Fig. 4 shows a flowchart for an example of the method for manufacturing the support structure according to the present invention. Identical or functionally equivalent components or elements are identified by the same reference numerals in the figures. For their explanation, reference is sometimes also made to the description of other embodiments and / or figures to avoid repetition.
[0047] The following detailed description of the embodiments shown in the figures serves to further illustrate or clarify and is not intended to limit the scope of the present invention in any way.
[0048] Figure 1 shows a first embodiment of the device 1 for producing the support structure 10 according to the invention or a mirror according to the invention with a predetermined focal length in a schematic representation. The device 1 is shown in a sectional view for illustrative purposes.
[0049] The device 1 comprises a reaction chamber 30. In the reaction chamber 30, the support structure 10 can be manufactured from a reaction material W according to the method of the present invention as disclosed herein under respective operating conditions. The support structure 10 serves to support a functional unit 20, wherein the functional unit 20 preferably comprises a coating or at least one layer of a light-reflecting material.
[0050] In the following, the reaction material W and the device 1 are first described with reference to Figures 1 and 2.
[0051] The reaction material W for forming the support structure 10 is preferably a depositable reaction material W. Preferably, the reaction material W is a material or a mixture of several different materials by means of which the support structure 10 can be formed using and / or according to the principle of so-called chemical vapor deposition (CVD). Preferably, the reaction material W has good dielectric properties and / or a low thermal expansion coefficient and / or a low vapor pressure. Preferably, the reaction material W comprises at least one material from the group of poly-p-xylylenes and / or their derivatives (also referred to as "parylenes").
[0052] To form the reaction chamber 30, the device 1 comprises a reaction vessel 50. The reaction vessel 50 separates the reaction chamber 30 from the surroundings and / or the atmosphere, so that corresponding operating conditions in the reaction chamber 30 can be changed before and / or during the production of the support structure 10, preferably adjusted in a defined manner by means of a control system. In other words, the reaction vessel 50 isolates the reaction chamber 30 from the surroundings. This creates a reaction chamber 30 for producing the support structure 10, which can be adjusted in a targeted, i.e., defined, manner with regard to the operating conditions.
[0053] The reaction vessel 50 comprises at least a first vessel housing part 50.1 and a second vessel housing part 50.2 with corresponding walls. Both the first vessel housing part 50.1 and the second vessel housing part 50.2 are substantially rotationally symmetrical and / or at least partially hollow-cylindrical in shape. A maximum and / or resulting inner diameter of the first vessel housing part 50.1 and / or the second vessel housing part 50.2 can, for example, be approximately 40 centimeters or more. It is possible for the vessel housing 50 to be constructed in multiple parts and / or non-rotationally symmetrical. The first vessel housing part 50.1 and / or the second vessel housing part 50.2 can each be made of a metallic material and / or with insulation.
[0054] The two container housing parts 50.1 and 50.2 are connected to each other, preferably via a flange with a corresponding circumferential seal (not shown in Figure 1 for reasons of clarity), and adequately seal the reaction chamber 30. In other words, the second container housing part 50.2 can be disassembled from the first container housing part 50.1. The two container housing parts 50.1 and 50.2 together form a reaction vessel.
[0055] To avoid mechanical stresses, for example in the form of vibrations / oscillations or shocks, which could be introduced into the structure of the reaction vessel 50 and thus into the reaction chamber 30 and would disrupt the manufacturing process of the support structure 10, the device 1 can comprise at least one damping device 57. The at least one damping device 57 is preferably arranged on an outer side (outer side) of the bottom wall of the first vessel housing part 50.1 relative to the reaction chamber 30 and can support the reaction vessel 50, for example, relative to a foundation or a mounting structure and at the same time reduce or preferably avoid the introduction or transmission of mechanical stresses as described above. This ensures, for example, a manufacturing process of the support structure 10 that is free from disruptions due to external mechanical stresses.Within the reaction chamber 30, a receiving device 53 for receiving a liquid medium 40 is arranged. According to the invention, the liquid medium 40, and preferably the surface 40.1 of the liquid medium 40, serves in a specific state to shape the support structure 10 during production and / or in a production state of the support structure 10, which will be described in more detail below.
[0056] The receiving device 53 is semi-open and thus ensures accessibility to the liquid medium 40, in particular the surface 40.1. The receiving device 53 is preferably substantially plate-shaped or substantially bowl-shaped and / or preferably substantially rotationally symmetrical with respect to a rotation axis (see the dashed line in Figure 1). With respect to the present embodiment of the device 1 according to the present invention, the receiving device 53 is preferably designed as a turntable with an external and / or circumferential edge 53.2. The edge 53.2 delimits a surface 53.1 of the receiving device 53, which comes into contact with the liquid medium 40 and / or receives it. The surface 53.1 of the receiving device 53 is essentially circular, apart from a section in the region of the edge 53.2 is substantially arched and / or substantially curved. For example, the surface 53.1 can be substantially parabolic in shape, at least in sections. The receiving device 53, and preferably the circumferential edge 53.2, can have, for example, an inner diameter of approximately 30 centimeters or more. This makes it possible to produce a support structure 10 with, for example, at least approximately 30 centimeters in diameter or more. Preferably, the surface 53.1 of the receiving device 53 is substantially smooth. In an alternative exemplary embodiment of the present invention, it is possible for ribs and / or beads to be arranged on the surface 53.1 of the receiving device 53, at least in sections, which ribs and / or beads extend radially inwardly and serve to set the liquid medium 40 into rotational movement as a result of a rotational movement of the receiving device 53 and thus to move the liquid medium 40.
[0057] Preferably, the receiving device 53 comprises a coating on its outer sides, i.e., on its outer surfaces, preferably at least away from the surface 53.1 of the received liquid medium 40, which coating is non-adherent to the reaction material W. For example, the receiving device 53 is coated with a paraffin or, particularly preferably, with polytetrafluoroethylene (abbreviated to "PTFE"). In this context, it is possible for the inner sides of the container housing parts 50.1 and 50.2, and thus the respective inner surfaces of the container housing parts 50.1 and 50.2, as well as the components and elements of the device 1 within the reaction container 50, to be coated with a paraffin or, preferably, with polytetrafluoroethylene (abbreviated to "PTFE"). This ensures, for example, that the reaction material W, which is located away from the liquid medium 40, i.e., away from the surface 40.1 of the liquid medium 40 has deposited or distributed in the reaction space 30 can be removed in a simpler manner.
[0058] The receiving device 53 is rotatably and drivably mounted on an inner side of the bottom wall of the first container housing part 50.1 and thus within the reaction container 50. During the manufacture of the support structure 10, it can be set in motion using a closed-loop and / or open-loop control system depending on at least one operating condition. For this purpose, the receiving device 53 can be connected to a drive device 54 or mounted on the drive device 54.
[0059] The drive device 54 can, for example, be designed as an electric motor or comprise an electric motor. Alternatively, the drive device 54 can, for example, be designed as a magnetic drive unit or comprise a magnetic drive unit driven by a moving magnetic field, preferably a rotating magnetic field, within the reaction vessel 50 or outside the reaction vessel 50.
[0060] The drive device 54 is preferably configured to provide a substantially constant rotational movement and thus a substantially constant speed per time interval during a regulation and / or control over a defined period of time, in order to in turn ensure a substantially constant rotational movement of the receiving device 53. In other words, a substantially constant rotational speed n53 of the receiving device 53 is realized by means of the drive device 54. As already described above, the receiving device 53 serves, on the one hand, to receive the liquid medium 40. The receiving device 53 comprises the surface 53.1, which is in contact with the liquid medium 40. Due to the rotational movement of the receiving device 53, the liquid medium 40 received therein is in turn set in motion.In other words, when the receiving device 53 is driven, a rotating and thus moving liquid medium 40 is created, the resulting and / or idealized speed of which is simply designated "n40" in Figure 1. A resulting axis of rotation of the receiving device 53 can be aligned and / or arranged substantially parallel to gravity, i.e., the gravitational force. This is preferably ensured by a bearing device 55 of the receiving device 53, which will be described in more detail below. Due to the rotational movement of the receiving device 53, the liquid medium 40 is at least partially "pressed" towards the edge 53.2 of the receiving device 53 due to its mass and the centrifugal forces acting thereon, and a shaping, arched or curved surface 40.1 of the liquid, moving medium 40 is formed, preferably substantially in the shape of a paraboloid.The shape of the paraboloid depends in particular on the rotational speed n53. In particular, the rotational speed n53 (rotational / angular speed) is adjusted depending on the focal length of a mirror to be produced using the device 1. In other words, the rotation of the mass of the liquid medium 40 in the receiving device 53 under the influence of gravity and centrifugal force as a result of the rotational movement results in a substantially parabolic surface 40.1 of the liquid medium 40 as the shaping surface 40.1 for the support structure 10 to be produced.
[0061] In an alternative embodiment of the present invention, instead of the receiving device 53, the device 1 and preferably the reaction vessel 50, together with the components and elements arranged within the reaction vessel 50, may be set into a rotational movement. A resulting axis of rotation may be aligned and / or arranged substantially parallel to gravity, i.e., the gravitational force.
[0062] The liquid medium 40 is preferably a liquid medium 40 with a comparatively high density and / or high viscosity. This allows, for example, mechanical stresses or disturbances, preferably on the surface 40.1 for shaping the support structure 10, to be reduced or substantially avoided. Furthermore, the formation of the support structure 10 by the reaction material W on the surface 40.1 is simplified or facilitated, which will be described in more detail below.
[0063] For example, the liquid medium 40 can be an ionic liquid, a liquid polymer, a paraffinic hydrocarbon, or, for example, a polyphenyl ether in the liquid state. The liquid medium 40 can preferably have a low vapor pressure at room temperature, wherein the room temperature within the meaning of the present invention is approximately 293.15 Kelvin, i.e., approximately 20 degrees Celsius.
[0064] Within the reaction vessel 50, the receiving device 53 can preferably have a bearing device 55, which, in addition to or alternatively to the at least one damping device 57 of the device 1, reduces or preferably avoids mechanical loads. The bearing device 55 can, for example, be designed as at least one hydrostatic bearing or as at least one magnetic bearing, or can comprise at least one hydrostatic bearing or at least one magnetic bearing. The working medium of the hydrostatic bearing can preferably be an oil or be oil-based. In other words, the device 1 comprises a bearing device 55 for supporting the receiving device 53, wherein the bearing device 55 is configured for the essentially vibration-free mounting of the receiving device 53.
[0065] In order to protect the bearing device 55, in particular from penetration of the reaction material W and thus to avoid wear and / or damage to the bearing device 55, the device 1 comprises a barrier device 56 for protecting the bearing device 55. The barrier device 56 preferably encloses the bearing device 55 in such a way that contact with the reaction material W is avoided or not possible. In other words, the barrier device 56 can be configured to seal off the bearing device 55 from the reaction chamber 30. For this purpose, the barrier device 56 can comprise at least one labyrinth seal and / or at least one liquid seal. The liquid seal can, as a liquid barrier, for example, at least partially absorb the reaction material W that did not contribute to the formation of the support structure 10 and has accordingly distributed itself in the reaction chamber 30.The liquid of the liquid barrier can then be pumped out, for example, and easily removed from the interior of the reaction vessel 50, i.e., from the reaction chamber 30. It is understood that the barrier device 56 is also configured to protect the drive device 54 from the reaction material W.
[0066] For supplying the reaction material W into the reaction chamber 30, the reaction vessel 50 of the device 1, and in this case the second vessel housing part 50.2, comprises at least one inlet device 51. The inlet device 51 is preferably spaced from the receiving device 53, i.e. arranged at a certain distance, in order to ensure a substantially homogeneous distribution of the reaction material W during the production of the support structure 10. In order to achieve an improved distribution of the reaction material W in the reaction chamber 30 and towards the surface 40.1 of the liquid medium 40, a distribution device 100 can be located in the reaction chamber 30 at the inlet device 51 and thus in the interior of the reaction vessel 50 and can be connected to the inlet device 51, i.e. can be fluid-mechanically connected.The distribution device 100 can, for example, be tubular and extend essentially linearly up to a certain length. Additionally or alternatively, the distribution device 100 can be curved at least in sections. The distribution device 100 has at least one inlet opening, preferably a plurality of inlet openings, through which the reaction material W can flow into the reaction chamber 30 at a specific point ST during the production of the support structure 10. The plurality of inlet openings in the distribution device 100 are shown in simplified form as black dots in Figure 1 and are not identified in more detail.It is possible for the distribution device 100 to have, at least partially or entirely, valve devices and / or propeller devices instead of the inlet openings, which contribute to changing the kinetic energy of the reaction material W before and / or after entering the reaction chamber 30 and / or to a targeted distribution of the reaction material W in the reaction chamber 30.
[0067] Outside the reaction vessel 50, the inlet device 51 is fluidically connected to an evaporation device 60 and preferably to a pyrolysis device 70. The pyrolysis device 70 is fluidically arranged between the evaporation device 60 and the inlet device 51. The evaporation device 60 serves to heat and evaporate, and in particular to sublimate, the reaction material W, i.e., to directly convert the reaction material W from a solid state to a gaseous state.
[0068] The reaction material W is based on or preferably comprises, as already described above, a material from the group of parylenes and can be processed, for example, according to the so-called Gorham process in order to form the support structure 10.
[0069] At the beginning of the production of the support structure 10, the reaction material W is preferably present in the evaporation device 60 as a solid, granular raw material. This raw material is also referred to as a "dimer" and, from a chemical perspective, refers to largely stable "dimer molecules" of the reaction material W. In the evaporation device 60, the reaction material W is preferably converted from the solid state to the gaseous state. In other words, the evaporation device 60 is configured to treat the reaction material W with heat so that the reaction material W sublimates. This can take place, for example, in a temperature range between approximately 120 degrees Celsius and approximately 180 degrees Celsius, at approximately one bar ambient pressure. For this purpose, the evaporation device 60 has a correspondingly configured heating unit, which is not shown or labeled in Figure 1 for reasons of clarity.The reaction material W thus evaporates into a dimeric gas.
[0070] The pyrolysis device 70 is configured to pyrolyze the reaction material W, and preferably the vaporized and / or gaseous reaction material W, i.e., to thermochemically decompose it and convert it into a highly reactive monomeric form. In other words, the pyrolysis device 70 comprises a high-temperature zone for generating so-called reactive monomers of the reaction material W from the gaseous reaction material W. The temperature in the pyrolysis device 70 can be, for example, approximately 690 degrees Celsius.
[0071] The reaction material W then enters the reaction chamber 30 of the reaction vessel 50 in an activated gaseous state via the inlet device 51.
[0072] In a further or alternative embodiment of the device 1, it is possible for at least one controllable and / or adjustable valve device to be arranged between the evaporation device 60 and the pyrolysis device 70, which valve device is fluidically connected to the evaporation device 60 and to the pyrolysis device 70. The at least one valve device can be configured, in particular, to set the volume flow of the reaction material W in a defined manner as a function of at least one operating condition and / or during the regulation and / or control of the device 1. For example, the valve device can be used to regulate and / or control a so-called growth rate of the support structure 10 by enriching the reaction material W and preferably to start production of the support structure 10 at a defined rate, i.e., at a defined volume flow of reaction material W.
[0073] In an alternative embodiment of the device 1 according to the present invention, it is possible that, in addition to an inlet device 51, a second inlet device 51 or more than two further inlet devices 51 are formed on the reaction container 50 and here preferably on the second container housing part 50.2.
[0074] In addition to at least one inlet device 51, the device 1 according to the present invention comprises at least one outlet device 52. The outlet device 52 is formed on the reaction vessel 50 and here preferably on the first vessel housing part 50.1. In other words, the at least one outlet device 52 is arranged on the reaction vessel 50 on a side opposite the at least one inlet device 51 with respect to the receiving device 53. Via the outlet device 52, a negative pressure and preferably a vacuum is generated in the reaction vessel 50 and thus in the reaction chamber 30 during the production of the support structure 10. The outlet device 52 is connected to a pumping device 80 in the form of a vacuum pump. The pumping device 80 is configured to generate a negative pressure and preferably a vacuum in the reaction vessel 50, i.e., in the reaction chamber 30.In other words, the pumping device 80 is configured to sufficiently evacuate the reaction chamber 30 at least before and preferably during the production of the support structure 10, so that at least the proper and / or intended functionality and safety of the device 1 for producing the support structure 10 is ensured. Thus, the reaction chamber 30 is largely or substantially freed of foreign substances that could disrupt the production, i.e., the manufacturing process, and thus negatively influence the quality of the support structure 10. Furthermore, the continuous formation of a vacuum in the reaction vessel 50 ensures a substantially uniform and / or homogeneous distribution of the reaction material W over the shaping surface 40.1 of the moving liquid medium 40.For example, pressures of less than 100 Pascal, preferably less than 10 Pascal, and particularly preferably less than 0.1 Pascal, can be generated in the reaction chamber 30 by means of the pump device 80. For further processing and / or machining of the manufactured support structure 10 in the form of coating the support structure 10 with a coating material B to form the functional unit 20, the pump device 80 can be configured to generate a pressure in the reaction chamber 30 that is preferably in a range between approximately 0.0001 Pascal and approximately 0.001 Pascal.
[0075] A cooling device 130 is preferably arranged between the outlet device 52 and the pump device 80 and is fluidically connected to the outlet device 52 and the pump device 80. The cooling device 130 is configured to cool the reaction material W exiting via the at least one outlet device 52, for example, to less than -50 degrees Celsius, and to convert it into a solid state, so that the reaction material W is prevented from flowing further to the pump device 80, penetrating the pump device 80, and wearing and / or damaging it. In other words, the cooling device 130 serves to protect the pump device 80 from the reaction material W.
[0076] The device 1 further comprises a coating device 120. The coating device 120 is preferably arranged on the second container housing part 50.2 and / or configured to introduce a coating material B into the reaction chamber 30 after the production of the support structure 10 in order to apply the coating material B to the support structure 10, i.e., to coat the support structure 10 with the coating material B and thus form the at least one functional unit 20 on the support structure 10. The functional unit 20 preferably comprises a coating or at least one layer made of a substantially metallic and / or light-reflecting material. The coating material B for forming the functional unit 20 preferably comprises aluminum or an aluminum-based alloy. It is also possible for the coating material B to preferably comprise gold or a gold-based alloy.To prevent the coating device 120 from becoming contaminated by the reaction material W during the production of the support structure 10 and / or clogged by the deposition of reaction material W, the coating device 120 comprises a so-called shutter solution in the form of a closable aperture or a closable lid, which opens and / or closes the coating device 120 with respect to the reaction chamber 30. The aluminum can be applied as coating material B in the reaction chamber 30 and, under appropriately set operating conditions, onto the support structure 10 by evaporation and / or sputtering.
[0077] To realize the production of the support structure 10 and thus to carry out the method according to the present invention, the device 1 according to the present invention comprises a control device 110 for controlling and / or regulating at least respective components and elements of the device 1 as disclosed herein. In other words, the control device 110 serves for the defined adjustment of, in particular, the drive device 54, the evaporation device 60, the pyrolysis device 70, the pumping device 80, and / or the cooling device 130 during the production of the support structure 10. The control device 110 is connected to the components and elements of the device 1 for control and / or regulation, preferably via a signal communication network, which serves to transmit corresponding signals S and thus information (see the dashed lines in Figure 1).In other words, the components and elements of the device 1 can be controlled and / or regulated at least before and / or during the production of the support structure 10. The control is characterized in particular by a closed-loop control system and preferably ensures that certain operating conditions, such as respective temperatures, rotational speeds, and / or pressures, remain essentially defined, preferably essentially constant, over a defined period of time in order to implement the production process of the support structure 10 as intended and / or properly.
[0078] In order for a support structure 10 with defined and thus desired dimensions, for example with a defined thickness 10.2 (see, for example, Figure 2), to be produced by means of the device 1, the device 1 preferably comprises a plurality of measuring devices with respective sensors or sensor units for detecting respective operating conditions of the components and elements of the device 1 inside the reaction vessel 50 and outside the reaction vessel 50, as well as for detecting dimensions of the support structure 10, preferably at least before and during its production. For example, in Figure 1, the measuring device 90 for detecting geometric dimensions and / or the homogeneity of the support structure 10 being formed, for example the thickness 10.2 of the support structure 10, is arranged in the reaction chamber 30 and preferably on the second container housing part 50.2.The measuring device 90 is shown in Figure 1 as representative of further measuring devices of the device 1 according to the invention, which serve to detect at least one operating condition and / or at least one geometric dimension (growth rate) or physical property of the support structure 10, preferably at least before and during the production of the support structure 10.
[0079] In a further embodiment of the device 1, it is possible for the receiving device 53, for example, to be connected to and / or arranged on an adjusting device for adjusting the position and thus the orientation of the receiving device 53 (not shown in the figures) within the reaction chamber 30. For this purpose, the adjusting device can, for example, comprise at least one actuatable actuator unit in the form of a double-acting cylinder, which, when actuated accordingly by means of a working medium, is capable of adjusting and thus changing the position of the receiving device 53 within the reaction chamber 30. Thus, for example, a distance between the receiving device 53 and the inlet device 53 and / or the distribution device 100 can be changed.Furthermore, it is possible, for example, for the receiving device 53 to comprise an integrated cooling device, for example in the form of a spirally arranged line system, through which a cooling medium preferably flows at least during the production of the support structure 10, in order to thus set a specific temperature in the liquid medium 40 and to ensure that the support structure 10 is built up.
[0080] In a further embodiment of the device 1 according to the present invention, the device 1 may comprise a plasma device for generating an ionized gas to process the support structure 10. This allows, for example, the quality of the support structure 10, i.e., the quality of at least one layer of the support structure 10 and / or the surface 10.1 of the support structure 10, to be improved. The plasma device is preferably arranged in the reaction chamber 30, i.e., within the reaction vessel 50 of the device 1. The ionized gas may comprise, for example, argon as the working medium.
[0081] The support structure 10 is formed by the solidifying reaction material W, which preferably transforms from a gaseous state into a solid state by deposition and forms chemical bonds, which will be described in more detail below. The support structure 10 is preferably a supporting structure that is substantially rotationally symmetrical with respect to a rotational axis and / or sufficiently dimensionally stable to support and / or carry the functional unit 20.
[0082] Preferably, a specific volume, i.e. a defined amount of liquid medium 40, is accommodated in the receiving device 53, so that a substantially flush and / or continuous transition to the circumferential edge 53.2 of the receiving device 53 is provided, preferably during the rotational movement of the receiving device 53 and thus during the movement of the liquid medium 40.
[0083] Figure 2 shows a section of the supporting structure 10 from Figure 1 (section / in Figure 1) in an enlarged view.
[0084] The liquid medium 40 wets the surface 53.1 of the receiving device 53 as a contact surface. The reaction material W is deposited on the surface 40.1 of the liquid medium 40 as a shaping surface for the reaction material W during the movement of the liquid medium 40, whereby the support structure 10 is formed from the deposited reaction material W with a corresponding thickness 10.2.
[0085] Figure 3 shows an example of a support structure 10 according to the present invention in a schematic representation, which supports a functional unit 20 in the form of a coating or at least a layer of a specific material. The functional unit 20 is preferably made of a substantially metallic material and / or of a light-reflecting material by means of at least one coating process on the surface.
[0086] 10.1 of the supporting structure 10. The metallic and / or light-reflecting material can be, for example, aluminum or an aluminum-based alloy, as already described above.
[0087] The support structure 10 is formed substantially homogeneously across its dimensions from the solidified reaction material W. Furthermore, the support structure 10 has a substantially circular outer contour due to its production. The support structure 10 has a substantially membrane-shaped configuration overall and is characterized by a curved shape. Furthermore, the support structure 10 can be substantially rotationally symmetrical with respect to a rotation axis and have a substantially constant thickness 10.2 in the radial direction and in the circumferential direction. The thickness 10.2 of the support structure 10, together with a thickness 20.2 of the functional unit 20, which supports the support structure 10, can be, for example, 140 micrometers. The thickness 10.2 of the manufactured support structure 10, together with a thickness
[0088] 20.2 of the functional unit 20, for example, lies in a range between approximately 100 micrometers and approximately 1000 micrometers.
[0089] Figure 4 shows a flow chart for an embodiment of the method for producing the support structure 10 according to the present invention.
[0090] Method steps are described below. The method for producing the support structure 10 can be carried out using the device 1 as disclosed herein. Therefore, the description of components and elements of the device 1 according to the invention is at least partially omitted to avoid repetition. The following will focus in particular on method steps of the method according to the invention.
[0091] In section S10, the method for producing the support structure 10 can begin with the provision of the liquid medium 40 for shaping the support structure 10 during the production of the support structure 10 and / or in a manufacturing state of the support structure 10 in a defined amount. The provided liquid medium 40 is, as already described above, received in the rotatably drivable receiving device 53 and functions as a shaping structure for the production of the support structure 10 through a self-adjusting, curved surface 40.1 of the liquid medium 40. Preferably, a defined amount of provided liquid medium 40 is located in the receiving device 53, so that the surface 40.1 of the liquid medium 40 is substantially flush with a peripheral edge 53.2 of the receiving device 53, preferably during the operating state of the device 1, in which the liquid medium 40 is moved through the receiving device 53 (see Figure 1).
[0092] In section S10, the provision of the liquid medium 40 can be preceded or parallel to the generation of a negative pressure, preferably a vacuum, in the reaction chamber 30 by means of the pumping device 80. This can, for example, prevent or significantly reduce the formation of turbulent flows of the reaction material W in the reaction chamber 30.
[0093] Preferably, during the provision of the liquid medium 40 and when a corresponding vacuum pressure is generated, outgassing of the liquid medium 40 can be provided. This prevents, for example, the subsequent formation of bubbles in the liquid medium 40 and / or the occurrence of splashes in the liquid medium 40. As already described, the liquid medium 40 is preferably characterized by a comparatively high viscosity and / or a comparatively high density and / or a comparatively low vapor pressure.
[0094] In section S20, the liquid medium 40 is moved and thus set in motion by moving the receiving device 53. In other words, the liquid medium 40, and in particular the shaping surface 40.1 of the liquid medium 40, is set into a rotary motion or rotational motion by the receiving device 53. Preferably, a defined rotational speed n53 is set on the receiving device 53, and the receiving device 53 is operated at least for a period of time until a substantially identical resulting and / or idealized rotational speed n40 is established for the liquid medium 40 as the rotational speed n53 of the receiving device 53. The liquid medium 40 is preferably in a quasi-stationary (rotational motion) state in which, for example, no acceleration of particles (molecules) of the liquid medium 40 to a specific speed occurs.
[0095] In a further alternative embodiment of the device 1 according to the invention and of the method according to the invention, it is possible that in section S20, instead of the receiving device 53, the reaction container 50 of the device 1 is set into a rotary movement in order to achieve a corresponding movement of the liquid medium 40 and in particular of the shaping surface 40.1.
[0096] In section S30, the reaction material W is provided for forming the support structure 10. The provision of the reaction material W in the reaction chamber 30 is realized in the device 1 via the at least one inlet device 51 and / or preferably the distribution device 100. Before being provided into the reaction chamber 30, the reaction material W can be brought into a reactive monomeric state by evaporation through heating in the evaporation device 60 and / or by pyrolysis in the pyrolysis device 70, and thus by cracking, and is preferably in a reactive gaseous state upon entering the reaction chamber 30 at the latest.
[0097] The reactive aggregate state of the reaction material W preferably characterizes an operating condition, i.e., a state in which the construction of the support structure 10 on the moving, shaping surface 40.1 of the liquid medium 40 is possible. As already described, the reaction material W is preferably a depositable reaction material W from the group of poly-p-xylylenes and / or their derivatives (also referred to as "parylenes"). The reaction material W is distributed accordingly in the reaction chamber 30.
[0098] In section S40, the reaction material W is applied to the shaping surface 40.1 of the moving liquid medium 40. Initially, the first particles of the reaction material W adhere to the surface 40.1 of the liquid medium 40 after the transition from the gaseous state to the solid state. As already described, the surface 40.1 of the liquid medium 40 serves as the shaping surface 40.1 for the support structure 10 to be produced due to the rotational movement of the liquid medium 40. The liquid medium 40 is preferably characterized by a resulting substantially constant speed n40 with respect to its movement. In section S50, the support structure 10 is built up and thus grown, preferably continuously and / or steadily, by particles of the reaction material W on already existing particles of the reaction material W on the surface 40.1.The construction of the support structure 10 can preferably comprise: enriching, preferably adsorbing, the reaction material W on the shaping surface 40.1 and / or on the reaction material W already present on the shaping surface 40.1 in a solid aggregate state, and generating chemical bonds in the reaction material W, i.e. chemical bonds between particles (molecules) of the reaction material W. In other words, a construction and solidification of the support structure 10, i.e. the enriched reaction material W in the form of at least one layer and / or at least one membrane made of the reaction material W, takes place.
[0099] Preferably, the enrichment and / or adsorption of the reaction material W relates to or comprises at least partially a chemical vapor deposition of the reaction material W for producing the support structure 10. The produced support structure 10 is sufficiently dimensionally stable to support a functional unit 20. The support structure 10 is preferably dimensionally stable at least in sections in the as-manufactured state and / or reversibly foldable and / or reversibly rollable. Thus, the support structure 10 is capable of assuming or forming its original state, preferably its as-manufactured state, after folding and / or rolling. This is ensured in particular by sufficient dimensional stability of the support structure 10.
[0100] It is understood that in section S50, a more or less continuous measurement of the thickness 10.2 of the support structure 10 constructed up to a particular point in time takes place by the measuring device 90, parallel to the construction of the support structure 10. Detecting geometric dimensions of the support structure 10 can be achieved, for example, using a spectral reflection method.
[0101] In order to build up, preferably deposit, the reaction material W on the surface 40.1 in a targeted manner, i.e., in a defined manner, at different locations or regions, the distribution device 100 can be coupled within the reaction chamber 30 in a positionally adjustable manner to at least one actuatable actuator device in order to change the position and / or orientation of the distribution device 100 relative to the surface 40.1 and / or the receiving device 53. In section S60, after the support structure 10 has been manufactured, the support structure 10, i.e., the surface 10.1 of the support structure 10, can be coated with a coating material B. The coating material B can be applied via the coating device 120, preferably by evaporation and / or sputtering, into the reaction chamber 30 and further onto the support structure 10, i.e., onto the surface 10.1 of the support structure 10, under appropriate operating conditions.Preferably, a sufficient vacuum prevails in the reaction chamber 30, at least during the coating of the support structure 10 with the coating material W, which allows the formation of the coating and thus of the functional unit 20 on the support structure 10. Furthermore, appropriate regulation and / or control of a valve device between the evaporation device 60 and the pyrolysis device 70 can also contribute to the formation of a defined thickness 10.2 of the support structure 10.
[0102] It is possible or understood that certain process steps can run in parallel, for example, generating a negative pressure and / or a vacuum and evaporating and / or pyrolyzing the reaction material W. Furthermore, it is possible that in a first embodiment of the process, a first process step takes place before a second process step, and in a further, alternative embodiment of the process, the first process step takes place after the second process step. It is understood that respective or specific process steps can be combined with one another as desired, provided this contributes to the formation of the support structure 10.For example, in one embodiment, the generation of a vacuum may begin before moving the liquid medium, while in another alternative embodiment of the method according to the invention, moving the liquid medium may take place before generating a vacuum.
[0103] Thus, by the method according to the invention and / or by the device 1 according to the invention, a support structure 10 can be provided which is designed to support a functional unit 20, wherein the support structure 10 is preferably characterized by a substantially constant thickness 10.2 and / or homogeneous distribution of the reaction material W, as well as by sufficient dimensional stability.
[0104] The support structure 10, together with the functional unit 20, can be configured for use in and / or with an optical device as disclosed herein. The present invention further relates to an optical device having at least one support structure as disclosed herein. The optical device can be configured as an optical telescope or as an optical membrane mirror, or can comprise an optical telescope or an optical membrane mirror.
[0105] The present invention is not limited to the exemplary embodiments described above. Rather, a multitude of variants and modifications are possible, which also utilize the inventive concept and therefore fall within the scope of protection. Preferably, the present invention also claims protection for the subject matter and features of the subclaims, independent of the claims referenced.
[0106] List of reference symbols
[0107] 1 device
[0108] 10 Supporting structure
[0109] 10.1 Surface of the supporting structure
[0110] 10.2 Thickness of the supporting structure
[0111] 20 functional unit
[0112] 20.2 Thickness of the functional unit
[0113] 30 Reaction chamber
[0114] 40 liquid medium
[0115] 40.1 Surface of the liquid medium
[0116] 50 reaction vessels
[0117] 50.1 Container housing part
[0118] 50.2 Container housing part
[0119] 51 Inlet device
[0120] 52 Outlet device
[0121] 53 Recording facility
[0122] 53.1 Surface of the receiving device
[0123] 53.2 Edge of the receiving device
[0124] 54 Drive device
[0125] 55 Storage facility
[0126] 56 Barrier device
[0127] 57 Damping device
[0128] 60 Evaporation device
[0129] 70 Pyrolysis plant
[0130] 80 Pumping device
[0131] 90 measuring device
[0132] 100 distribution device
[0133] 110 Control device
[0134] 120 coating device
[0135] 130 Cooling device
[0136] B Coating material n40 Speed n53 Speed (rotational / angular speed) S Signal
[0137] W Reaction material
[0138] 5
Claims
CLAIMS Method for producing a support structure (10) for supporting at least one functional unit (20), preferably for an optical device, in a reaction space (30), comprising: • Providing a liquid medium (40) for shaping the support structure (10) during production and / or in a production state, preferably in a receiving device (53) which is at least partially semi-open; • Moving the liquid medium (40) and creating a shaping surface (40.1) of the liquid medium (40), preferably by driving the receiving device (53) by means of a drive device (54); • Providing a reaction material (W) for forming the support structure (10), preferably by means of at least one inlet device (51), wherein the at least one inlet device (51) and the receiving device (53) are arranged at a distance from one another in the reaction space (30); • Depositing the reaction material (W) onto the shaping surface (40.1); • Building the support structure (10) by means of the deposited reaction material (W). Method according to claim 1, wherein the reaction material (W) is formed as a gaseous and / or depositable reaction material (W) at least before the construction of the support structure (10), and / or wherein the reaction material (W) is formed as a gaseous and / or depositable reaction material (W) at least after the construction of the support structure (10) is formed as a solid reaction material (W). Method according to claim 1 or 2, comprising: Evaporating, preferably by heating, the reaction material (W) and / or converting the reaction material (W) from a solid state into a gaseous state, preferably in an evaporation device (60), and / or Pyrolyzing, preferably dividing, the reaction material (W), preferably in a pyrolysis device (70).
4. Method according to one of the preceding claims, wherein constructing the support structure (10) comprises: • Enriching, preferably adsorbing, the reaction material (W) on the shaping surface (40.1), and / or • Creating chemical bonds in the reaction material (W), and / or • Constructing the support structure (10) in the form of at least one layer and / or at least one membrane, which preferably has a substantially constant thickness (10.1) and / or is substantially homogeneous.
5. Method according to one of the preceding claims, wherein moving the liquid medium (40) comprises: • Rotating the liquid medium (40) at an adjustable speed (n40), preferably by means of the drive device (54) and / or depending on at least one operating condition and / or geometric size of the support structure (10); and / or • Forming the shaping surface (40.1), which is at least partially arched or curved, preferably paraboloidal and concave.
6. Method according to one of the preceding claims, comprising: • Generating a negative pressure and / or a vacuum in the reaction chamber (30) at least before providing the reaction material (W), preferably by means of at least one outlet device (52) and a pumping device (80), wherein the pumping device (80) is arranged outside the reaction chamber (30), and / or wherein the at least one outlet device (52) and the receiving device (53) are arranged at a distance from one another in the reaction chamber (30).
7. Method according to one of the preceding claims, comprising: • Directed distribution of the reaction material (W) at least at one defined location (ST) in the reaction chamber (30), preferably in each case in the direction of the shaping surface (40.1), preferably by means of at least one distribution device (100), wherein the at least one distribution device (100) is connected to the at least one inlet device (51).
8. Method according to one of the preceding claims, comprising: • Recording a geometric size, preferably a thickness (10.2), of the supporting structure (10) during the deposition of the reaction material (W) and / or construction of the support structure (10), preferably by means of at least one measuring device (90) for detecting the geometric size, wherein the at least one measuring device (90) is arranged in the reaction chamber (30), and / or wherein the at least one measuring device (90) and the receiving device (53) are arranged spaced apart from one another in the reaction chamber (30). Method according to one of the preceding claims, comprising: • Setting at least one operating condition of the process, preferably by means of a Control device (110), wherein the at least one operating condition comprises at least one of the following: a temperature in the reaction chamber (30), a temperature of the reaction material (W) prior to being provided in the reaction chamber (30), a pressure in the reaction chamber (30), a temperature of the liquid medium (40), a period of time for providing the reaction material (W), a volume flow of the reaction material (W), and / or a drive speed of the receiving device (53). Support structure (10) for supporting at least one functional unit (20), preferably for an optical device, wherein the support structure (10) is manufactured according to a method according to at least one of the preceding claims, wherein the support structure (10) is dimensionally stable at least in sections, at least in the manufactured state, and / or wherein the support structure (10) is reversibly foldable and / or reversibly rollable.Support structure (10) according to claim 10, wherein the support structure (10) is curved at least in sections, preferably paraboloid-shaped, and / or wherein the support structure (10) is formed from a reaction material (W) which comprises a material from the group of poly-p-xylylenes and / or derivatives thereof. Support structure (10) according to claim 10 or 11. wherein the support structure (10) carries at least one functional unit (20), wherein the at least one functional unit (20) comprises at least one coating or at least one layer which is formed from a metallic material and / or from a light-reflecting material.
13. Optical device, preferably an optical telescope or optical mirror, with at least one support structure (10) for supporting at least one functional unit (20) according to one of the preceding claims 10 to 12.
14. Device (1) for producing a support structure (10) for supporting at least one functional unit (20), preferably for an optical device, wherein the device (1) is configured to carry out a method according to one of the preceding claims 1 to 9, comprising: a reaction chamber (30) which is formed by a reaction container (50) and in which the support structure (10) can be produced; a receiving device (53) for receiving a liquid medium (40) for shaping the support structure (10) during production and / or in a production state, wherein the receiving device (53) is arranged in the reaction chamber (30) and / or is designed to be semi-open at least in sections;at least one inlet device (51) for providing a reaction material (W) into the reaction chamber (30) and forming the support structure (10), wherein the at least one inlet device (51) and the receiving device (53) are preferably arranged at a distance from one another in the reaction chamber (30); wherein the receiving device (53) comprises a drive device (54) or is coupled to a drive device (54) in order to move a received liquid medium (40) and to create a shaping surface (40.1) of the liquid medium (40), wherein the reaction chamber (30) and / or at least the at least one inlet device (51) is configured to apply the reaction material (W) to the shaping surface (40.1) in order to build up the support structure (10) thereby.
15. Device (1) according to claim 14, wherein the drive device (54) is configured to drive the receiving device (53) rotationally at an adjustable speed (n53), preferably depending on at least one operating condition when the device (1) is in operation.
16. Device (1) according to claim 14 or 15, wherein the device (1) comprises at least one bearing device (55) for supporting the receiving device (53), wherein the at least one bearing device (55) is configured for vibration-free mounting of the receiving device (53), preferably comprising at least one magnetic bearing or at least one hydrostatic bearing.
17. Device (1) according to claim 16, wherein the device (1) comprises at least one barrier device (56) for protecting the at least one bearing device (55) in order to prevent penetration of the reaction material (W) into the at least one bearing device (55), wherein the at least one barrier device (56) encloses the at least one bearing device (55) and / or comprises at least one labyrinth seal and / or at least one liquid seal.
18. Device (1) according to one of the preceding claims 14 to 17, wherein the device (1) comprises a coating device (120) for coating the support structure (10) with a coatable material (B), preferably based on a metallic material, in order to form the at least one functional unit (20) on the support structure (10).
19. A method for producing a mirror, in particular a parabolic or spherical mirror, which has a support structure (10) for supporting at least one functional unit (20), comprising: • Producing the support structure (10) according to one of claims 1 to 9, and • Applying or coating at least one functional unit (20) on a concave Side of a curved or arched surface (10.1) of the support structure (10), wherein the at least one functional unit (20) comprises at least one coating or at least one layer formed from a metallic material and / or from a light-reflecting material. Mirror, preferably parabolic or spherical mirror, which is preferably arranged according to the Method according to claim 19, comprising: a support structure (10), wherein the support structure (10) is designed according to one of claims 10 to 12, and at least one functional unit (20) which is formed on a concave side of a curved or arched surface (10.1) of the support structure (10), wherein the at least one functional unit (20) preferably comprises a coating or at least one layer which is formed from a metallic material and / or from a light-reflecting material. * * * *