Dynamic vacuum seal system for physical vapor deposition sputter applications
GB202500054D0Pending Publication Date: 2025-02-19TOSOH SMD INC
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Patent Information
- Application Number
- GB2025000054
- Authority / Receiving Office
- GB · GB
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2023-07-10
- Filing Date
- 2023-07-10
- Publication Date
- 2025-02-19
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