Cutting spindle structure

Abstract

A cutting spindle structure includes a frame 1, two support rollers 2 and at least one spacing adjustment assembly 3 which includes a main slide 31, a connecting member 32, an eccentric block 33, a ro

Description

TECHNICAL FIELD

[0001] The present invention relates to the field of semiconductor technology, and more specifically, to a cutting spindle structure. BACKGROUND

[0002] Monocrystalline silicon wafer cutting machines are mainly used in the production of solar silicon wafers and the processing of semiconductor materials. They are ideal equipment for efficient and precise wafer cutting.

[0003] The actual cutting capability of a monocrystalline silicon wafer cutting machine is primarily related to the width of the cutting zone wire mesh. The smaller the wire mesh width, the smaller the size of the hard and brittle materials that can be cut. Conversely, the larger the wire mesh width, the larger the size of the hard and brittle materials that can be cut. However, when the size of the hard and brittle material is small, under the condition that cutting is satisfied, the narrower the wire mesh width, the better the cutting yield. As the wire mesh width increases, the yield will correspondingly decrease. Therefore, different sizes of hard and brittle materials require wire meshes of corresponding widths to achieve the best yield. In existing monocrystalline silicon wafer cutting machines, the cutting spindle structure is designed to allow the center distance between the support rollers to be adjustable. This is typically achieved by eccentrically mounting the support rollers on the frame. When the support rollers rotate around the eccentric axis, their axes also rotate around the eccentric axis. As the axes of the support rollers trace a circular path, the center distance between the two support rollers changes, thus making the center distance adjustable. However, during this eccentric rotation, the axes of the support rollers move in a rotational manner, causing the support rollers to move up and down. This results in vertical displacement of the diamond wire on the support rollers. After adjusting the center distance between the support rollers, when the workpiece above the cutting zone moves downward to approach the diamond wire in the cutting zone, it is necessary to adjust the non-cutting travel distance of the workpiece as it feeds into the cutting zone, which is cumbersome.

[0004] Therefore, it is necessary to provide a new type of cutting spindle structure. SUMMARY

[0005] In view of the above-mentioned problems existing in the prior art, the purpose of the present invention is to provide a cutting spindle structure that can solve the problem of vertical displacement of the diamond wire when adjusting the center distance between the support rollers in the prior art.

[0006] To achieve the above purpose, the technical solution adopted by the present invention is to provide a cutting spindle structure, which includes a frame, two support rollers, and at least one spacing adjustment assembly. The spacing adjustment assembly includes a main slide, a connecting member, an eccentric block, a rotating frame, and a sliding frame. The eccentric block is connected to the connecting member. The eccentric block is rotatably mounted at an eccentric position on the rotating frame. The rotating frame is rotatably mounted on the sliding frame. The sliding frame is slidably mounted on the main slide. The main slide is slidably mounted on the frame. The connecting member of the spacing adjustment assembly is connected to one end of one of the two support rollers. The support roller is rotatably mounted on the main slide. A rotational axis of the support roller coincides with a support roller axis of the support roller, and the support roller axis of the support roller is offset from the center of the eccentric block. The main slide can slide linearly relative to the frame along the line connecting the axes of the two support rollers, and the sliding frame can be locked to the frame.

[0007] Further, the support roller includes a first bearing housing, a second bearing housing, and a main shaft. The first and second bearing housings are aligned in a line. The main shaft is installed between the first and second bearing housings. The support roller is rotatably mounted on the main slide through the first bearing housing. The connecting member is connected to an outer end of the first bearing housing, and the second bearing housing can slide relative to the frame.

[0008] Further, a linear sliding path of the sliding frame relative to the main slide is parallel to a linear sliding path of the main slide relative to the frame.

[0009] Further, two spacing adjustment assemblies are provided, and the connecting members of the two spacing adjustment assemblies are connected to the two support rollers, respectively.

[0010] Further, a positioning block is installed on the frame between the two support rollers. A locking rod is provided on the side of the sliding frame away from the positioning block, and the locking rod is threadedly engaged with the frame.

[0011] Further, a locking slide block is provided between the main slide and the frame.

[0012] Further, the support roller can be locked to the main slide.

[0013] Further, guide rods are provided on opposite sides of the sliding frame, and the sliding frame is slidably mounted on the main slide through the guide rods.

[0014] Further, the two spacing adjustment assemblies are arranged in a centrally symmetrical manner.

[0015] Further, a handle is installed on an outer side of the connecting member, and the handle extends along a radial direction of the support roller.

[0016] Further, a bearing hole is provided on the main slide, and the first bearing housing of the support roller is rotatably installed in the bearing hole.

[0017] Further, an eccentric hole is provided on the rotating frame at a position offset from the axis of the rotating frame, and the eccentric block is rotatably mounted in the eccentric hole of the rotating frame.

[0018] The beneficial effects of the present invention are as follows:

[0019] The cutting spindle structure provided in the present invention includes a frame, two support rollers, and at least one spacing adjustment assembly. The spacing adjustment assembly includes a main slide, a connecting member, an eccentric block, a rotating frame, and a sliding frame. The eccentric block is connected to the connecting member. The eccentric block is rotatably mounted at an eccentric position on the rotating frame. The rotating frame is rotatably mounted on the sliding frame. The sliding frame is slidably mounted on the main slide. The main slide is slidably mounted on the frame. The connecting member of the spacing adjustment assembly is connected to one end of one of the two support rollers. The support roller is rotatably mounted on the main slide, wherein the rotational axis of the support roller coincides with the support roller axis of the support roller, allowing the support roller to rotate around its own support roller axis.

[0020] The support roller axis of the support roller is offset from the center of the eccentric block. When the support roller rotates around its own support roller axis, the eccentric block performs an eccentric swing around the rotational center of the support roller. Since the distance between the support roller axis and the axis of the rotating frame is constantly changing, the rotating frame is driven to rotate relative to the sliding frame to adapt to the change in the distance between the support roller axis and the axis of the rotating frame. At the same time, when the support roller and the eccentric block rotate to change the distance between the support roller axis and the axis of the rotating frame, the eccentric block pushes the rotating frame and the sliding frame to translate relative to the main slide.

[0021] The main slide can slide linearly relative to the frame along the line connecting the axes of the two support rollers. When the support roller is rotated to drive the eccentric block to push the rotating frame and the sliding frame to translate relative to the main slide, the support roller axis follows the main slide to perform linear translation. This ensures that the support roller axis always remains on the line connecting the axes of the two support rollers. As a result, no matter how the support roller rotates, the line connecting the axes of the two support rollers always lies in the same plane. Thus, the diamond wire wound around the two support rollers will not shift vertically with the change in the center distance, thereby solving the problem of vertical displacement of the diamond wire when adjusting the center distance between the support rollers in existing wafer cutting machines.

[0022] The sliding frame can be locked to the frame. When the sliding frame is locked to the frame, the sliding frame pushes the main slide and the support roller axis to translate linearly relative to the frame, thereby adjusting the center distance between the two support rollers. The main slide can be locked to the frame, and by locking the main slide, the center distance between the two support rollers can be fixed. BRIEF DESCRIPTION OF DRAWINGS

[0023] The following is a further description of the present invention in conjunction with the accompanying drawings and embodiments.

[0024] FIG. 1 is a three-dimensional structural diagram of the cutting spindle structure provided in the embodiment of the present invention.

[0025] FIG. 2 is a three-dimensional structural diagram of the spacing adjustment assembly provided in the embodiment of the present invention.

[0026] FIG. 3 is a front view of the spacing adjustment assembly provided in the embodiment of the present invention.

[0027] FIG. 4 is an exploded view of the spacing adjustment assembly provided in the embodiment of the present invention.

[0028] FIG. 5 is a schematic diagram of the first working state of the cutting spindle structure provided in the embodiment of the present invention.

[0029] FIG. 6 is a schematic diagram of the second working state of the cutting spindle structure provided in the embodiment of the present invention.

[0030] FIG. 7 is a schematic diagram of the third working state of the cutting spindle structure provided in the embodiment of the present invention.

[0031] In the drawings, the reference numerals are as follows:

[0032] 1-frame; 2-support roller; 21-first bearing housing; 22-second bearing housing; 23-main shaft; 3-spacing adjustment assembly; 31-main slide; 311-bearing hole; 32-connecting member; 33-eccentric block; 34-handle; 35-rotating frame; 351-eccentric hole; 36-sliding frame; 361-guide rod; 4-locking rod; 5-positioning block; G1-support roller axis. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0033] In order to make the technical problem to be solved by the present invention, the technical solution and the beneficial effects clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention and are not intended to limit the present invention.

[0034] It should be noted that when an element is referred to as being “connected to” or “mounted on” another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being “connected to” another element, it can be directly connected to the other element or indirectly connected to the other element.

[0035] In the description of the present invention, it should be noted that unless otherwise expressly defined and limited, the terms “mounted,” “connected,” and “coupled” should be broadly understood. For example, they can be fixed connections, detachable connections, or integrated connections; they can be mechanical connections or electrical connections; they can be direct connections or indirect connections through intermediate media; they can be internal connections between two elements or interactive relationships between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to the specific situation.

[0036] It should be understood that the terms “length,” “width,” “top,” “bottom,” “front,” “back,” “left,” “right,” “vertical,” “horizontal,” “upper,” “lower,” “inner,” “outer,” etc., which indicate the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings. They are only used for the convenience of describing the present invention and simplifying the description, and should not be understood as indicating or implying that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention.

[0037] Throughout the specification, reference to “an embodiment,” “some embodiments,” or “certain embodiments” means that a particular feature, structure, or characteristic described in conjunction with the embodiment is included in at least one embodiment of the present application. Therefore, the phrases “in an embodiment,” “in some embodiments,” or “in certain embodiments” appearing in various places throughout the specification do not all refer to the same embodiment. Moreover, specific features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

[0038] Please refer to FIGS. 1 to 7, the following is a description of the cutting spindle structure provided in the present invention. The cutting spindle structure includes a frame 1, two support rollers 2, and at least one spacing adjustment assembly 3. The spacing adjustment assembly 3 includes a main slide 31, a connecting member 32, an eccentric block 33, a rotating frame 35, and a sliding frame 36. The eccentric block 33 is connected to the connecting member 32. The eccentric block 33 is rotatably mounted at an eccentric position on the rotating frame 35. The rotating frame 35 is rotatably mounted on the sliding frame 36. The sliding frame 36 is slidably mounted on the main slide 31. The main slide 31 is slidably mounted on the frame 1. The connecting member 32 of the spacing adjustment assembly 3 is connected to one end of one of the two support rollers 2. The support roller 2 is rotatably mounted on the main slide 31, wherein the rotational axis of the support roller 2 coincides with the support roller axis G1 of the support roller 2, allowing the support roller 2 to rotate around its own support roller axis G1.

[0039] As shown in FIG. 3, the support roller axis G1 of the support roller 2 is offset from the center of the eccentric block 33. When the support roller 2 rotates around its own support roller axis Gl, the eccentric block 33 performs an eccentric swing around the rotational center of the support roller 2. Since the distance between the support roller axis G1 and the axis of the rotating frame 35 is constantly changing, the rotating frame 35 is driven to rotate relative to the sliding frame 36 to adapt to the change in the distance between the support roller axis G1 and the axis of the rotating frame 35. At the same time, when the support roller 2 and the eccentric block 33 rotate to change the distance between the support roller axis G1 and the axis of the rotating frame 35, the eccentric block 33 pushes the rotating frame 35 and the sliding frame 36 to translate relative to the main slide 31.

[0040] The main slide 31 can slide linearly relative to the frame 1 along the line connecting the axes of the two support rollers 2. When the support roller 2 is rotated to drive the eccentric block 33 to push the rotating frame 35 and the sliding frame 36 to translate relative to the main slide 31, the support roller axis G1 follows the main slide 31 to perform linear translation. This ensures that the support roller axis G1 always remains on the line connecting the axes of the two support rollers 2. As a result, no matter how the support roller 2 rotates, the line connecting the axes of the two support rollers 2 always lies in the same plane. Thus, the diamond wire wound around the two support rollers 2 will not shift vertically with the change in the center distance, thereby solving the problem of vertical displacement of the diamond wire when adjusting the center distance between the support rollers 2 in existing wafer cutting machines.

[0041] The sliding frame 36 can be locked to the frame 1. When the sliding frame 36 is locked to the frame 1, the sliding frame 36 pushes the main slide 31 and the support roller axis G1 to translate linearly relative to the frame 1, thereby adjusting the center distance between the two support rollers 2. The main slide 31 can be locked to the frame 1, and by locking the main slide 31, the center distance between the two support rollers 2 can be fixed.

[0042] As shown in FIG. 2, in some embodiments, the support roller 2 includes a first bearing housing 21, a second bearing housing 22, and a main shaft 23. The first and second bearing housings 21, 22 are aligned in a line, and the main shaft 23 is installed between the first and second bearing housings 21, 22. The support roller 2 is rotatably mounted on the main slide 31 through the first bearing housing 21. The connecting member 32 is connected to the outer end of the first bearing housing 21. The second bearing housing 22 can slide relative to the frame 1 to adapt to the movement of the support roller 2 relative to the frame 1. In this embodiment, a secondary slide (not labelled) is installed on the second bearing housing 22, the secondary slide is slidably mounted on the frame 1, and the secondary slide is stationary relative to the main slide 31.

[0043] As shown in FIGS. 5 and 6, in some embodiments, the linear sliding path of the sliding frame 36 relative to the main slide 31 is parallel to the linear sliding path of the main slide 31 relative to the frame 1. Thus, when the sliding frame 36 slides a certain distance relative to the main slide 31, if the sliding frame 36 is locked to the frame 1 and cannot move relative to the frame 1, the sliding frame 36 will push the main slide 31 to slide the same distance relative to the frame 1.

[0044] As shown in FIG. 2, in some embodiments, two spacing adjustment assemblies 3 are provided. The connecting members 32 of the two spacing adjustment assemblies 3 are connected to the two support rollers 2, respectively. This allows the two spacing adjustment assemblies 3 to drive the two support rollers 2 to simultaneously adjust the position of the support roller axis G1 relative to the frame 1, thereby increasing the range of adjustment for the spacing between the two support roller axes G1.

[0045] As shown in FIG. 6, in some embodiments, the two spacing adjustment assemblies 3 are arranged in a centrally symmetrical manner.

[0046] As shown in FIG. 5, in some embodiments, to enable the sliding frame 36 to be locked to the frame 1, a positioning block 5 is installed on the frame 1 between the two support rollers 2. A locking rod 4 is provided on the side of the sliding frame 36 away from the positioning block 5. The locking rod 4 is threadedly engaged with the frame 1. By rotating the locking rod 4, the locking rod 4 can be driven to move towards or away from the sliding frame 36. By moving the locking rod 4 towards the sliding frame 36, the sliding frame 36 can be locked between the positioning block 5 and the locking rod 4, such that the sliding frame 36 is locked to the frame 1 and cannot move.

[0047] In some embodiments, to enable the main slide 31 to be locked to the frame 1, a locking slide block (not shown) is provided between the main slide 31 and the frame 1 to achieve locking between the main slide 31 and the frame 1 freely.

[0048] In some embodiments, the support roller 2 can be locked to the main slide 31 to further stably lock the support roller 2 to the main slide 31. Specifically, a fastening structure (not shown) is provided between the first bearing housing 21 of the support roller 2 and the main slide 31 to lock the first bearing housing 21 to the main slide 31. This fastening structure can be, but is not limited to, a bolt-type fastening structure.

[0049] As shown in FIGS. 2, 3, and 4, in some embodiments, guide rods 361 are provided on opposite sides of the sliding frame 36, and the sliding frame 36 is slidably mounted on the main slide 31 through the guide rods 361. Specifically, the positioning block 5 and the locking rod 4 are arranged opposite to the two guide rods 361 on the sliding frame 36. By abutting the outer ends of the guide rods 361 against the positioning block 5 and the locking rod 4, the position of the sliding frame 36 is restricted.

[0050] As shown in FIGS. 2 and 3, in some embodiments, a handle 34 is installed on the outer side of the connecting member 32, and the handle 34 extends along a radial direction of the support roller 2. Thus, when the support roller 2 is driven to rotate, the handle 34 extends the lever arm to achieve a force-saving effect.

[0051] As shown in FIG. 4, in some embodiments, a bearing hole 311 is provided on the main slide 31, and the first bearing housing 21 of the support roller 2 is rotatably installed in the bearing hole 311.

[0052] As shown in FIG. 4, in some embodiments, the rotating frame 35 is of a rotary structure. An eccentric hole 351 is provided on the rotating frame 35 at a position offset from the axis of the rotating frame 35. The eccentric block 33 is rotatably mounted in the eccentric hole 351 of the rotating frame 35, allowing the eccentric block 33 to rotate relative to the rotating frame 35 within the eccentric hole 3 51.

[0053] As shown in FIGS. 5 and 6, in some embodiments, preferably, when it is necessary to adjust the spacing between the support roller axes G1 of the support rollers 2, the sliding frame 36 can first be locked to the frame 1 by the locking rod 4 and the positioning block 5, while keeping the main slide 31 in a freely slidable state. Subsequently, by rotating the support roller 2 using the handle 34, the main slide 31 can be driven to move the support roller axis G1 towards or away from the support roller axis G1 of the other support roller 2. Finally, the first bearing housing 21 of the support roller 2 is locked to the main slide 31. In this embodiment, the translation of the main slide 31 is driven by the rotation of the handle 34. The long lever arm of the handle 34 makes the rotational operation more labor-saving compared to directly pushing the main slide 31 to slide. Therefore, this embodiment is preferred.

[0054] As shown in FIG. 7, in some other embodiments, when it is necessary to adjust the spacing between the support roller axes G1 of the support rollers 2, the locking rod 4 can first be removed from the sliding frame 36. Then, the main slide 31 is slid to move the sliding frame 36 between the positioning block 5 and the locking rod 4. Subsequently, by rotating the support roller 2 using the handle 34, the sliding frame 36 will translate left or right relative to the main slide 31. After adjusting the position of the sliding frame 36, the sliding frame 36 is locked to the frame 1 by the locking rod 4 and the positioning block 5. Finally, the first bearing housing 21 of the support roller 2 is locked to the main slide 31. Since this embodiment requires the main slide 31 to be translated, it is more labor-intensive compared to the direct rotation of the handle 34 as shown in FIGS. 5 and 6.

[0055] The above description is only preferred embodiments of the present invention and is not intended to limit the present invention. Therefore, any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A cutting spindle structure comprising a frame, two support rollers, and at least one spacing adjustment assembly, wherein the spacing adjustment assembly comprises a main slide, a connecting member, an eccentric block, a rotating frame, and a sliding frame, wherein the eccentric block is connected to the connecting member, the eccentric block is rotatably mounted at an eccentric position on the rotating frame, the rotating frame is rotatably mounted on the sliding frame, the sliding frame is slidably mounted on the main slide, the main slide is slidably mounted on the frame, the connecting member of the spacing adjustment assembly is connected to one end of one of the two support rollers, the support roller is rotatably mounted on the main slide, wherein a rotational axis of the support roller coincides with a support roller axis of the support roller, and the support roller axis of the support roller is offset from the center of the eccentric block, the main slide can slide linearly relative to the frame along the line connecting the axes of the two support rollers, and the sliding frame can be locked to the frame.

2. The cutting spindle structure according to claim 1, wherein the support roller comprises a first bearing housing, a second bearing housing, and a main shaft, the first and second bearing housings are aligned in a line, the main shaft is installed between the first and second bearing housings, the support roller is rotatably mounted on the main slide through the first bearing housing, the connecting member is connected to an outer end of the first bearing housing, and the second bearing housing can slide relative to the frame.

3. The cutting spindle structure according to claim 1, wherein a linear sliding path of the sliding frame relative to the main slide is parallel to a linear sliding path of the main slide relative to the frame.

4. The cutting spindle structure according to claim 1, wherein two spacing adjustment assemblies are provided, and the connecting members of the two spacing adjustment assemblies are connected to the two support rollers, respectively.

5. The cutting spindle structure according to claim 1, wherein a positioning block is installed on the frame between the two support rollers, a locking rod is provided on the side of the sliding frame away from the positioning block, and the locking rod is threadedly engaged with the frame.

6. The cutting spindle structure according to claim 1, wherein a locking slide block is provided between the main slide and the frame.

7. The cutting spindle structure according to claim 1, wherein the support roller can be locked to the main slide.

8. The cutting spindle structure according to claim 1, wherein guide rods are provided on opposite sides of the sliding frame, and the sliding frame is slidably mounted on the main slide through the guide rods.

9. The cutting spindle structure according to claim 4, wherein the two spacing adjustment assemblies are arranged in a centrally symmetrical manner.

10. The cutting spindle structure according to claim 1, wherein a handle is installed on an outer side of the connecting member, and the handle extends along a radial direction of the support roller.

11. The cutting spindle structure according to claim 2, wherein a bearing hole is provided on the main slide, and the first bearing housing of the support roller is rotatably installed in the bearing hole.

12. The cutting spindle structure according to claim 1, wherein an eccentric hole is provided on the rotating frame at a position offset from the axis of the rotating frame, and the eccentric block is rotatably mounted in the eccentric hole of the rotating frame.T +44(0)30 0300 2000A

Images