Images for Wafer Surface Inspection System

Abstract

This image is for displaying data from a system that inspects and analyzes particles (fine particles) adhering to the wafer surface, and displays information such as the location of the detected particles and the cause of particle generation. As shown in the reference diagram showing the usage state, a map showing the location of particles adhering to the wafer surface is placed on the left side, and a periodic table is placed on the right side. By selecting any element from the periodic table, particles composed of the element selected on the map can be identified.

Images