Pedestal for substrate processing system

JP1795957SActive Publication Date: 2025-04-14LAM RES CORP
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Patent Information

Application Number
JP2024000126D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Priority Date
2023-07-07
Filing Date
2024-01-09
Publication Date
2025-04-14
Estimated Expiration
2049-01-09

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Abstract

The article according to the present application (hereinafter referred to as "the article") is a pedestal for use in a substrate processing system.
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