Device for homogenizing dispersion gas in treatment chamber

Abstract

To provide a device for homogenizing a dispersion gas in a treatment chamber.SOLUTION: A device (1) comprises: a shield screen (3); and a linear driving apparatus (4) reciprocating the shield screen (3) to mutually opposite two linear motion directions (5) between two terminal positions. The shield screen (3) can be heated by at least one heating apparatus (6) of the device (1). The shield screen (3) is coupled with the linear driving apparatus (4) via at least one adjustment member (7) of the device (1). Each adjustment member (7) enables a relative motion between the shield screen (3) and the linear driving apparatus (4) in at least one direction (8) of a transverse direction, preferably, an orthogonal direction with respect to the linear driving directions (5) of the shield screen (3).SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a device for homogenizing a dispersed gas in a processing chamber, the device having a shielding screen and a linear drive for reciprocating the shielding screen in two opposite linear movement directions between two end positions.

[0002] In a process where a workpiece to be processed needs to be processed using a gas atmosphere set in the processing chamber or adapted to each process, the device described in the superordinate concept is used to sufficiently ensure the homogenization or uniformity of the gas composition.

[0003] The object of the present invention is to further improve the device described in the superordinate concept in this sense, so that the device can ensure the best possible homogenization of the dispersed gas in the processing chamber.

[0004] To solve this problem, the present invention proposes a device according to claim 1.

[0005] That is, according to the present invention, the shielding screen can be heated by at least one heating device of the device, the shielding screen is coupled to the linear drive via at least one adjusting member of the device, and the adjusting member enables the relative movement between the shielding screen and the linear drive in at least one direction transverse, preferably orthogonal, to the linear movement direction of the shielding screen.

[0006] By means of the heating device, the shielding screen can be accurately heated to the temperature desired for each process and temperature-adjusted. Thereby, convective movements caused by the temperature in the gas atmosphere in the processing chamber can be avoided. To avoid mechanical stresses caused by temperature between the shielding screen and the linear drive, the device according to the present invention has an adjusting member that enables the relative movement between the heated shielding screen and the usually unheated linear drive in at least one direction transverse to the linear movement direction of the shielding screen.

[0007] In other words, the apparatus according to the present invention particularly effectively homogenizes or highly homogenizes the gas atmosphere in the processing chamber by preventing turbulence and flow in the gas atmosphere through the shielding screen.

[0008] A shielding screen is distinct from a valve closing mechanism. While a closing mechanism is designed to seal a chamber wall opening airtight and pressurized, a shielding screen is used to cover, or in other words, conceal, the chamber wall opening at most. That is, a shielding screen does not seal the chamber wall opening airtight or pressurized. In short, unlike a closing mechanism, a shielding screen is used solely for homogenizing the dispersed gas within the processing chamber.

[0009] In preferred embodiments of the present invention, the shielding screen is movable exclusively in two opposite linear directions. That is, the shielding screen cannot perform any other movements in these preferred embodiments. Typically, the shielding screen is intended to cover, or in other words, conceal, the chamber at one end position, and to open the chamber opening at the other end position. When the chamber opening is open, a workpiece can be introduced into and / or removed from the chamber space through the opening.

[0010] The heating device can be formed in various ways. However, in a preferred embodiment, it is an electric heating device, particularly an electric resistance heater or induction heater.

[0011] The adjustment member allows for a predetermined relative motion between the linear drive unit and the heated shielding screen. This is preferred to avoid heat-induced stress within the device.

[0012] In a preferred embodiment of the present invention, the adjustment member is assumed to have a sleeve and a head movably supported in the sleeve in a direction lateral, preferably perpendicular, to the linear motion direction of the shielding screen. In another preferred embodiment, it is assumed that an elastically deformable body, preferably an elastomer, is disposed between the sleeve and the head. The head can have virtually any shape, insofar as it is correspondingly movably supported within the sleeve. The elastically deformable body disposed between the sleeve and the head eliminates play between the sleeve and the head. Additionally, the elastically deformable body may also provide a return force that acts against thermal stress and returns accordingly once the stress is relieved. The method of incorporating the adjustment member between the linear drive and the shielding screen is left to those skilled in the art. For example, the sleeve may be coupled to the linear drive and the head to the adjustment member. However, the reverse arrangement is equally good. Importantly, in this regard, it should also be noted that the adjustment member may be directly coupled to the linear drive and the shielding screen on the other, or indirectly. In other words, for example, it may be assumed that at least one connecting rod is fixed to the shielding screen, and the adjustment member is positioned between the linear drive unit and this connecting rod. In a particularly preferred embodiment, in this case, the adjustment member is coupled to the connecting rod via a guided member provided on a guide rail. The guide rail may also be fixed to the device casing of the device.

[0013] In a particularly preferred embodiment, at least two connecting rods are fixed to the shielding screen, and the device has at least one adjustment member for each connecting rod to enable relative motion between the shielding screen and the linear drive in at least one direction lateral to, preferably perpendicular to, the linear motion direction of the shielding screen, and a transverse member is fixed to the linear drive, in which case each connecting rod is coupled to the transverse member via at least one adjustment member. In this case, again particularly preferred, the transverse member is formed to extend lateral to, preferably perpendicular to, the linear motion direction of the shielding screen, and the adjustment members are coupled to the transverse member at intervals from each other. A heating device for heating the shielding screen may be located within the connecting rods or within at least one of the connecting rods. In the case of multiple connecting rods, it is preferably assumed that one heating device for heating the shielding screen is located within each connecting rod.

[0014] In a preferred embodiment of the present invention, the apparatus is assumed to have an apparatus casing and at least one guide rail fixed to the apparatus casing, in which case at least one connecting rod is preferably supported on at least one guide rail via a guided member so as to be slidable parallel to the linear motion direction of the shielding screen.

[0015] In a preferred embodiment, in order to achieve the best possible homogenization of the dispersed gas within the processing chamber, the shielding screen is assumed to be at least partially annular in shape, enclosing the internal screen space containing the workpiece to be processed in an annular manner. The term annular may refer to a circular shape, but is not limited to an annular shape. Rather, the term annular can be understood as the internal screen space being enclosed and surrounded in the circumferential direction by the shielding screen when viewed in plan. In this case, a particularly well-homogenized or uniform dispersed gas can be brought into the internal screen space, thereby prevailing conditions that are optimal for processing the workpiece.

[0016] In addition to the apparatus itself, the present invention also relates to a processing chamber comprising an interior space and a chamber wall surrounding the interior space, wherein at least one chamber wall opening is provided within the chamber wall for bringing at least one workpiece into the interior space and / or removing a workpiece from the interior space. The processing chamber is characterized in that a shielding screen of the apparatus according to the present invention is arranged within the interior space so as to be able to reciprocate between each terminal position, and the shielding screen covers the chamber opening at one terminal position and leaves the chamber opening open at the other terminal position.

[0017] Here, as explained at the beginning, it is necessary to distinguish between covering the room wall opening with a shielding screen, or in other words, concealing it, and closing the room wall opening with a valve closing mechanism.

[0018] The following illustrates, based on several embodiments, other features and details of preferred embodiments of the present invention. [Brief explanation of the drawing]

[0019] [Figure 1] This is a schematic side view of a processing chamber equipped with the apparatus and valve according to the present invention. [Figure 2] This is a schematic external view of the processing chamber rotated 90° and the apparatus according to the present invention. [Figure 3] This is a cross-sectional view along the cross-sectional line A-A shown in Figure 1, where the end position of the shielding screen covering the room opening is indicated. [Figure 4] This figure shows the same terminal position as in Figure 3, along the cross-sectional line BB shown in Figure 2. [Figure 5] This figure shows the same terminal position as in Figure 3, along the cross-sectional line CC shown in Figure 2. [Figure 6] This is a cross-sectional view along the section line A-A, showing the end position where the shielding screen is open to the room opening. [Figure 7] This figure shows the same terminal position as in Figure 6, along the cross-sectional line BB shown in Figure 2. [Figure 8] This is a view showing the same end position as in FIG. 6 along the section line C-C shown in FIG. 2. [Figure 9] This is an enlarged view of the detail D shown in FIG. 6. [Figure 10] This is a cross-sectional view along the section line E-E shown in FIG. 6. [Figure 11] This is a cross-sectional view along the section line F-F shown in FIG. 2.

[0020] FIG. 1 shows a schematic external view of the processing chamber 2 in which the device Ⅰ according to the present invention is arranged, seen from the side. On the side of the device Ⅰ opposite to the processing chamber 2, a valve 21 is located together with its valve casing 23. The device Ⅰ is incorporated into the processing chamber 2 such that a shielding screen 3 is located inside the processing chamber 2, that is, inside the chamber internal space 18, and a device casing 14 inside which a linear drive device 4 of the device Ⅰ is located follows the processing chamber 2.

[0021] The valve 21 is known per se in the prior art and may be any valve suitable for each application. This is only for the sake of completeness and should be considered irrelevant to the present invention. In FIG. 1, the section line A-A is also drawn. The corresponding section along the section line A-A is shown in FIGS. 3 and 6.

[0022] FIG. 2 shows a schematic external view of the processing chamber and the device Ⅰ. FIG. 2 is substantially used to specifically show the positions of the section lines B-B, C-C and F-F. The section along the section line B-B is shown in FIGS. 4 and 7. The section along the section line C-C is shown in FIGS. 5 and 8. The section along the section line F-F is shown in FIG. 11.

[0023] Figure 11 shows that the shielding screen 3 realized in this embodiment is at least partially formed in an annular shape, and surrounds the screen internal space 16 that houses the work 17 to be processed in an annular manner. The shielding screen 3 and the screen internal space 16 are located within the chamber internal space 18 surrounded by the chamber wall 19. The work 17 is held or supported within the chamber internal space 18 by a holding device (not shown here) well-known per se.

[0024] However, alternatively to the embodiment shown here, the shielding screen 3 may be formed, for example, as a flat or curved plate, which is arranged in front of the chamber wall opening 20 at one end position, thereby covering but not closing the chamber wall opening 20. At the other end position, the shielding screen 3 may open the chamber wall opening 20.

[0025] The cross-sectional views in FIGS. 3, 4 and 5 show the end positions of the shielding screen 3 that covers or conceals the chamber wall opening 20. FIGS. 6 to 8 show the end positions of the shielding screen 3 that opens the chamber wall opening 20 of the chamber wall 19. At the end positions shown in FIGS. 6, 7 and 8, the work 17 to be processed within the chamber internal space 18 can be introduced into the chamber internal space 18 through the chamber wall opening 20, and conversely, it can also be taken out from the chamber internal space 18 through the chamber wall opening 20. In contrast, at the end positions shown in FIGS. 3, 4 and 5, the work 17 is located within the screen internal space 16 in this embodiment. This position is selected when the work 17 is to be processed in a correspondingly uniform gas atmosphere. The shielding screen 3 assists in the desired homogenization or uniformization of the dispersed gas within the processing chamber 2 and particularly within the screen internal space 16 at this end position.

[0026] In particular, as can be seen in Figures 3 and 6, the shielding screen 3 of the device 1 is fixed to two connecting rods in this embodiment. A heating device 6 is located within each connecting rod 12. The heating devices 6 are preferably electrically operated. They may be resistance heaters or induction heaters. Current is supplied via an electrical cable 24 (shown here in abbreviated form). The connecting rods 12 are themselves guided through corresponding openings in the device casing 14 and chamber wall 19 via well-known through-guide means 25, so that the chamber space 18 is pressure-tight and airtightly sealed from the outside when the chamber wall opening 20 is correspondingly closed by the closing mechanism 22 of the valve 21.

[0027] In the illustrated embodiment, each connecting rod 12 is attached to a guided member 26. Each guided member 26 is also supported so as to be linearly slidable on a guide rail 15. In this embodiment, the guide rail 15 is fixed to the device casing 14. Based on the present invention, it is assumed here that the shielding screen 3 is coupled to the linear drive unit 4 via at least one adjustment member 7, and in this embodiment, via two adjustment members 7. In the embodiment shown here, this is resolved by attaching a horizontal member 13 to the linear drive unit 4. Two adjustment members 7 are arranged on this horizontal member 13 at intervals from each other. Each of these adjustment members 7 is also coupled to one of the guided members 26. Each guided member 26 is also coupled to the shielding screen 3 via a connecting rod 12. Of course, the coupling between the shielding screen 3 and the linear drive unit 4 via at least one adjustment member 7 may be configured differently. The number of intervening components or members may vary. In any case, the important point is that at least one adjustment member 7 is interposed between the shielding screen 3 and the linear drive unit 4, and in this case, the adjustment member 7 enables relative motion between the shielding screen 3 and the linear drive unit 4 in at least one direction that is lateral to, or in this case perpendicular to, the linear motion direction 5 of the shielding screen 3. Both direction 8 and motion direction 5 are shown in Figures 3 and 6. The linear drive unit 4 causes the shielding screen 3 to move in two opposite motion directions 5. In the preferred embodiment shown here, the shielding screen 3 is movable via the linear drive unit 4 exclusively in two opposite motion directions 5.

[0028] By heating the shielding screen 3 using the heating device 6, the shielding screen 3 can be brought to the optimal temperature for the processing to be carried out on the workpiece 17. Advantageously, the temperature of the shielding screen 3 is precisely adjusted to correspond to the temperature of the gas atmosphere in the chamber space 18. This also achieves particularly good homogenization of the dispersed gas in the processing chamber 2 and, in this embodiment, in the screen internal space 16, because thermal and other methods of gas flow, turbulence, etc., are avoided. However, on the other hand, heating the shielding screen 3 and connecting rod 12 creates a temperature gradient in the direction toward the cross member 13 and the linear drive unit 4, because these components are not heated. The adjustment member 7 provided according to the present invention avoids stress that may be generated in the apparatus 1 due to the temperature gradient by enabling relative motion between the linear drive unit 4 or the cross member 13 and the connecting rod 12 and shielding screen 3 in the lateral direction 8 or a direction perpendicular to the direction of motion 5.

[0029] Figure 9 shows an enlarged view of part D shown in Figure 6, and thus an embodiment of the adjustment member 7 according to the present invention used herefor illustratively. The adjustment member 7 comprises a sleeve 9, sometimes called a bushing, and a head 10 movably supported in the sleeve 9 in direction 8. In the illustrated embodiment, the sleeve 9 is attached to a first connecting member 27, for example, by screwing or crimping, and the first connecting member 27 is attached to a cross member 13 by screws 28. The head 10 is connected in this embodiment to a guided member 26 and thus to each connecting rod 12 via a second connecting member 29. This may, of course, be done in reverse. In either case, it is advantageous when an elastically deformable body 11 is placed between the sleeve 9 and the head 10, as is realized here. The elastically deformable body 11 can, on the one hand, eliminate play between the head 10 and the sleeve 9, and on the other hand, provide an elastic return force. Particularly preferably, the deformable body 11 is an elastomer.

[0030] Of course, the adjustment member 7 according to the present invention may be configured differently. However, what is important in this case is that the adjustment member 7 enables relative motion between the shielding screen 3 and the linear drive unit 4 in at least one direction 8 that is lateral or perpendicular to the linear motion direction 5 of the shielding screen 3. However, of course, it is also desirable that the adjustment member 7 is suitable for transmitting motion in the motion direction 5 from the linear drive unit 4 to the shielding screen 3.

[0031] Figure 10 further shows a cross-section along the cross-sectional line EE shown in Figure 6. Here, the linear drive unit 4, the horizontal member 13, and the guide for the guided member 26 are clearly visible, along with the connecting rod 12 on the guide rail 15 fixed to the device casing 14.

[0032] The linear drive unit 4 may be formed, for example, as a pneumatic or hydraulic piston-cylinder unit, as schematically suggested herein. However, of course, other linear drive units, such as an electrically operated linear drive unit, which are also known, can also be used within the framework of the present invention. [Explanation of Symbols]

[0033] 1 device 2 Processing Room 3. Shielding screen 4. Linear drive system 5 Direction of motion 6 Heating device 7 Adjustment Member 8 directions 9 sleeves 10 heads 11 bodies 12 Connecting rod 13 Crosspiece 14. Equipment casing 15 Guide rails 16 Screen internal space 17 Work 18 Indoor space 19 Chamber wall 20 Chamber wall opening 21 valves 22 Closing mechanism 23 Valve casing 24 Electrical Cables 25 Through-guide means 26 Guided member 27 First connecting member 28 screws 29 Second connecting member

Claims

1. An apparatus (1) for homogenizing a dispersed gas in a treatment chamber (2), the apparatus (1) comprising a screening screen (3) and a linear drive (4) for reciprocating the screening screen (3) in two opposite linear directions (5) between two end positions, The device (1) is characterized in that the shielding screen (3) can be heated by at least one heating device (6) of the device (1), and the shielding screen (3) is connected to the linear drive device (4) via at least one adjustment member (7) of the device (1), the adjustment member (7) allowing a relative movement between the shielding screen (3) and the linear drive device (4) in at least one direction (8) transverse to, preferably perpendicular to, the linear movement direction (5) of the shielding screen (3).

2. 2. The device (1) according to claim 1, wherein the adjusting member (7) comprises a sleeve (9) and a head (10) supported on the sleeve (9) so as to be movable transversely (8), preferably perpendicularly, to the linear motion direction (5) of the shielding screen (3).

3. 3. Device (1) according to claim 2, characterized in that an elastically deformable body (11), preferably an elastomeric body, is arranged between the sleeve (9) and the head (10).

4. 3. The device (1) according to claim 1 or 2, wherein at least one connecting rod (12) is fixed to the shielding screen (3), and the adjusting member (7) is arranged between the linear drive (4) and the connecting rod (12).

5. 3. The device (1) according to claim 1 or 2, wherein at least two connecting rods (12) are fixed to the shielding screen (3), and the device (1) has at least one adjusting element (7) for each connecting rod (12) to enable relative movement between the shielding screen (3) and the linear drive device (4) in at least one direction (8) transverse, preferably perpendicular, to the linear movement direction (5) of the shielding screen (3), and a cross member (13) is fixed to the linear drive device (4), and each connecting rod (12) is connected to the cross member (13) via at least one adjusting element (7).

6. 6. The device (1) according to claim 5, wherein the cross member (13) is formed to extend in a direction transverse to, preferably perpendicular to, the linear motion direction (5) of the shielding screen (3), and the adjustment members (7) are connected to the cross member (13) at intervals from each other.

7. 5. The device (1) according to claim 4, wherein a heating device (6) for heating the shielding screen (3) is arranged in the connecting rod (12) or in at least one of the connecting rods (12), and preferably one heating device (6) for heating the shielding screen (3) is arranged in each of the connecting rods (12).

8. The device (1) according to claim 4, comprising a device casing (14) and at least one guide rail (15) fixed to the device casing (14), and the at least one connecting rod (12) is supported on the at least one guide rail (15), preferably via a guided member (26), so as to be slidable parallel to the linear movement direction (5) of the shielding screen (3).

9. 3. The device (1) according to claim 1 or 2, wherein the shielding screen (3) is at least partially annularly formed and annularly surrounds an internal space (16) of the screen for accommodating the workpiece (17) to be processed.

10. A treatment chamber (2) comprising an internal space (18) and a chamber wall (19) surrounding the internal space (18), wherein at least one chamber wall opening (20) is arranged in the chamber wall (19) for introducing at least one workpiece (17) into the internal space (18) and / or removing the workpiece (17) from the internal space (18), The treatment chamber (2) is characterized in that the shielding screen (3) of the apparatus (1) according to claim 1 or 2 is arranged in the interior space (18) of the chamber so as to be reciprocable between respective end positions, and the shielding screen (3) covers the chamber wall opening (20) in one end position and opens the chamber wall opening (20) in the other end position.

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