Burn-in testing device

Abstract

To provide a burn-in testing device the occupied area of which is relatively small.SOLUTION: The burn-in testing device includes two combinatorial sets 10, 11 in which test chambers 3a, 3b, power conduction device arrangement chambers 21a, 21b, and a cooling device that adjusts the temperature in the test chambers constitute one set. Each combinatorial set includes body regions 13a, 13b in which the power conduction device arrangement chambers 21a, 21b are arranged in the rear of the test chambers, and cooling device regions 15a, 15b in which at least the compressors of the cooling device are arranged, with the body region 13a belonging to one combinatorial set 10 and the body region 13b belonging to the other combinatorial set 11 being arranged with a space therebetween, the cooling device region 15a belonging to one combinatorial set and the cooling device region 15b belonging to the other combinatorial set being arranged in a longitudinally swapped state between the body regions 13a, 13b of both.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a burn-in test apparatus for placing electronic devices or the like in a predetermined environment and conducting a test by passing electricity through the electronic devices or the like in this state. [Background technology]

[0002] A test called burn-in testing is sometimes performed on electronic devices such as ICs and LSIs. Burn-in testing is a test in which the electronic device is placed in a specified environment, such as at high temperature, and a power supply voltage and specified signals are input to the electronic device.

[0003] Burn-in testing requires that electronic devices be placed in a specified environment, so a test room capable of maintaining the specified environment is provided. In the burn-in test, the electronic device under test is placed in a test room and the test room is maintained at a specified environment using heaters and cooling devices. In other words, the electronic device under test is placed in the test room and exposed to a specified environment, and in this state, power and signals are input from an external source to the electronic device to test the functionality of the electronic device. A specific burn-in test device is disclosed in, for example, Patent Document 1. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 2-184778 Summary of the Invention [Problem to be solved by the invention]

[0005] Burn-in test equipment is a combination of three components: a test chamber in which electronic devices as test specimens are placed and the interior can be maintained at a specified environment; an electrical device that supplies power and signals to the test specimens; and air conditioning equipment such as heaters and cooling devices. However, there are users who manufacture a large amount of electronic equipment and require multiple burn-in test devices. Conventionally, such users have often purchased, for example, two burn-in test devices with the same structure and installed the two burn-in test devices side by side.

[0006] Because multiple burn-in test devices were installed side by side in this way, a large installation space was required. The present invention provides a burn-in test apparatus that occupies a relatively small area. [Means for solving the problem]

[0007] An embodiment for solving the above-mentioned problems is a burn-in test apparatus having a test chamber for placing a test specimen and a cooling device for adjusting the temperature within the test chamber, the burn-in test apparatus having two combination sets each including the test chamber, an energization device arrangement chamber for installing an energization device that supplies power to the test specimen in the test chamber, and the cooling device for adjusting the temperature within the test chamber, the cooling devices of each of the combination sets having a compressor, a condenser, an expansion means, and an evaporator, each of the combination sets having a main body area in which the energization device arrangement chamber is arranged at the back of the test chamber, and a cooling device area in which at least the compressor is arranged, the main body area belonging to one combination set and the main body area belonging to the other combination set are arranged with a gap between them, and the cooling device area belonging to one combination set and the cooling device area belonging to the other combination set are arranged in a staggered manner in the front-to-rear direction between the two main body areas.

[0008] The burn-in test apparatus of this embodiment has two combination sets each including a test chamber, a current supply device installation room for installing a current supply device that supplies power to a test specimen in the test chamber, and a cooling device for adjusting the temperature in the test chamber. Therefore, the burn-in test apparatus of this embodiment has a configuration equivalent to that of two burn-in test apparatuses. The burn-in test apparatus of this embodiment is characterized by the layout of the devices. In the burn-in test device of this embodiment, the main body region belonging to one combination set and the main body region belonging to the other combination set are arranged with a gap between them. And between them, the cooling device region belonging to one combination set and the cooling device region belonging to the other combination set are arranged in a staggered manner in the front-to-back direction. Therefore, the width required to install the burn-in test device of this embodiment is the width of two main body regions and the width of one cooling device region. Therefore, the burn-in test device of this embodiment occupies a smaller area than a conventional layout in which two burn-in test devices are arranged in parallel.

[0009] In the above-mentioned aspect, it is preferable that each of the combination sets is unitized and separable.

[0010] In the burn-in test apparatus of this embodiment, the combination set is unitized and separable, so that it can be easily shipped from the manufacturing factory to the user.

[0011] In the above aspect, it is preferable that the test chambers belonging to each combination set are capable of independently controlling the temperature.

[0012] The burn-in test apparatus of this embodiment can create different environments in the two test chambers, making the burn-in test apparatus of this embodiment easy to use and versatile.

[0013] In the above aspect, it is preferable that each of the cooling device regions is divided into at least two regions, an upper region and an lower region, and that the compressor is provided in the lower region and the control device is provided in the upper region.

[0014] The burn-in test device of this embodiment utilizes space three-dimensionally and occupies a small area.

[0015] In the above-mentioned aspect, it is desirable that the cooling device region has an openable opening on at least one side, one of the combination sets having the open opening on the front side and the other combination set having the open opening on the back side.

[0016] The burn-in test apparatus of this embodiment has open areas on the front and back sides of the apparatus, facilitating maintenance of the cooling device and the like. As described above, in the burn-in test apparatus of this embodiment, the cooling device region belonging to one combination set and the cooling device region belonging to the other combination set are arranged in a staggered manner in the front-to-rear direction between the two main body regions. According to this layout, the devices that make up the cooling system are arranged front to back when viewed from the front. Therefore, if there was an open area only on the front side, it would be difficult to reach the devices at the back and perform maintenance. The burn-in test device of this embodiment solves this problem, with one combination set having an opening on the front side and the other combination set having an opening on the back side, so that the cooling devices belonging to one combination set can be maintained from the front side, and the cooling devices belonging to the other combination set can be maintained from the back side.

[0017] In the above-described aspect, it is desirable that the cooling device has a water-cooled condenser, one of the combination sets has a cooling water inlet port, and piping is branched in the one combination set so that cooling water is supplied to the condenser of the one combination set and the condenser of the other combination set.

[0018] In the burn-in test apparatus of this embodiment, one of the combination sets has a cooling water inlet, and the piping is branched internally to supply cooling water to the two condensers, so that external piping for cooling water can be easily connected. Effect of the Invention

[0019] The burn-in test device of the present invention occupies a small area. [Brief description of the drawings]

[0020] [Figure 1] 1 is a perspective view of a burn-in test apparatus according to an embodiment of the present invention, as viewed from the front side; [Diagram 2]2 is a perspective view of the burn-in test apparatus shown in FIG. 1, as viewed from the rear side. [Diagram 3] 2 is a perspective view showing a state in which the burn-in test apparatus shown in FIG. 1 is divided into units. [Figure 4] FIG. 2 is a cross-sectional view taken along line AA in FIG. 1, and shows a schematic overview of the main body region. [Diagram 5] FIG. 2 is a cross-sectional view taken along line BB in FIG. 1, and shows a schematic overview of the cooling device region. [Figure 6] 2A is a cross-sectional view taken along line CC in FIG. 1, and shows a schematic planar layout of each component of the burn-in test apparatus, and FIG. 2B shows the apparatus divided into units. [Figure 7] FIG. 2 is a perspective view showing a schematic view of a cooling device area in FIG. [Figure 8] 2 is a front view (or a back view) conceptually illustrating the cooling device area in FIG. 1 with the lower opening on the front side (or back side) opened. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] Hereinafter, an embodiment of the present invention will be described. In the following description, the front side and the back side follow the indications of "front side" and "back side" in Fig. 1 and Fig. 2. The front side may also be called the front and the back side may also be called the back. The left and right relationships are all observed from the front side. The burn-in test equipment 1 of this embodiment, as shown in Figures 1, 2, and 6(a), appears to have a single housing 2, and within the housing 2, a first test chamber 3a and a second test chamber 3b, a first current supply device installation chamber 21a and a second current supply device installation chamber 21b, and a first air conditioning unit 6a and a second air conditioning unit 6b are provided. As described later, a number of first current-appliance devices 5a that supply electric power to the specimen 100 in the first test chamber 3a are arranged in the first current-appliance device arrangement chamber 21a. Similarly, a number of second current-appliance devices 5b that supply electric power to the specimen 100 in the second test chamber 3b are arranged in the second current-appliance device arrangement chamber 21b.

[0022] 1, there is a first environment setting device 7a for setting the temperature etc. of the first test chamber 3a, and a second environment setting device 7b for setting the temperature etc. of the second test chamber 3b. Furthermore, as shown in Fig. 5, there is a first current control device 8a for controlling the current to the test specimen 100 in the burn-in test on the test specimen 100 in the first test chamber 3a, and a second current control device 8b for controlling the current to the test specimen 100 in the burn-in test on the test specimen 100 in the second test chamber 3b.

[0023] The general layout of the burn-in test apparatus 1 is as shown in Figures 1, 2, 4, and 6. As shown in Figures 1 and 2, the burn-in test apparatus 1 is divided into a right area 200, a middle area 201, and a left area 202 when viewed from the front. The first environment setting device 7a is located at the right end of the right area 200, and the first test room 3a is located at the center of the right area 200. As shown in Figures 4 and 6, the first current application device installation room 21a is located at the back of the first test room 3a. The first current application device 5a is installed in the first current application device installation room 21a.

[0024] The second environment setting device 7b is located at the left end of the left area 202, and the second test room 3b is located at the center of the left area. As shown in Fig. 6, the second current application device installation room 21b is located at the back of the second test room 3b. The second current application device 5b is installed in the second current application device installation room 21b.

[0025] The intermediate area 201 is divided into a front and a back as shown in FIG. 5, with most of the first air conditioner 6a and the first energization control device 8a on the front side, and most of the second air conditioner 6b and the second energization control device 8b on the rear side.

[0026] The burn-in test apparatus 1 of this embodiment is structurally divided into a first combination set 10 and a second combination set 11 as shown in FIG. 3 and FIG. 6(b), and the two combination sets 10, 11 appear to be integrated. Moreover, the first combination set 10 and the second combination set 11 are each formed as a unit, and can be separated from each other.

[0027] The first combination set 10 is a combination of at least the first test room 3a, the first current supply device installation room 21a, and the first air conditioner 6a. The first combination set 10 is further combined with the first environment setting device 7a and the first control device installation room 33a (see FIG. 5). The first current supply device installation room 21a is a location where the first current supply device 5a is installed, and the first control device installation room 33a is a location where the first current supply control device 8a is installed. The second combination set 11 is a combination of at least the second test room 3b, the second current supply device installation room 21b, and the second air conditioner 6b. The second combination set 11 is further combined with the second environment setting device 7b and the first control device installation room 33b. The second current supply device installation room 21b is a location where the second current supply device 5ab is installed, and the second control device installation room 33b is a location where the second current supply control device 8b is installed.

[0028] In this embodiment, the first combination set 10 is externally divided into a first main body region 13a and a first cooling device region 15a. The first main body area 13a is an area where the first test chamber 3a, the first energization device installation room 21a, the first environment setting device 7a, etc. are arranged. The first cooling device area 15a is an area where at least a part of the first air conditioner 6a and the first control device installation room 33b are arranged.

[0029] The first test chamber 3a is a thermally insulated storage space in which a specimen 100 such as an electronic device is placed, as shown in Fig. 4. The first test chamber 3a is provided with an opening and closing door 18a on the front side. As shown in Fig. 4, the back wall 12 of the first test chamber 3a is provided with a number of slots 20 for connecting terminals of the specimen 100. The first test chamber 3a is provided with a shelf (not shown) for holding the specimen 100. A blower 27 is provided on the top surface 37 of the first testing chamber 3a. The first testing chamber 3a is constructed with heat-insulating walls including an opening / closing door 18a.

[0030] The first main body region 13a, located at the rear of the first test chamber 3a, is the first current application device placement chamber 21a. In the first current application device placement chamber 21a, a number of first current application devices 5a that supply power and the like to the specimen 100 in the first test chamber 3a are placed. The first current application devices 5a are motherboards that can input currents and signals to the specimen 100, and the above-mentioned slots 20 are provided on a part of the motherboard.

[0031] The upper region of the first main body region 13a is the first control device placement room 23a. Electronic devices for adjusting the environment of the first test room 3a are placed in the first control device placement room 23a. The electronic devices in the first control device placement room 23a are well known, so a description thereof will be omitted. A first environment setting device 7a is provided at the right end of the first main body area 13a. The first environment setting device 7a sets the environment (temperature, humidity, etc.) to be created in the first test chamber 3a.

[0032] The first cooling device area 15a is an area that accommodates at least a part of the first air conditioner 6a that adjusts the temperature inside the first test room 3a. The first air conditioner 6a has a heater (not shown) and a first cooling device 30a. The first cooling device 30a has a first compressor 25a, a first condenser 16a, an expansion means (not shown) and an evaporator (not shown), which are connected by piping in a ring shape and a refrigerant that changes phase is enclosed inside. The first compressor 25a employed in this embodiment is a hermetic compressor, and the first condenser 16a is a water-cooled condenser. The first cooling device 30a is equipped with instruments such as a pressure gauge 40.

[0033] The first cooling device region 15a is divided into two sections, an upper section and an lower section, in the height direction. The lower section is a first compressor arrangement chamber 17a, in which the first compressor 25a and the first condenser 16a are arranged. The first compressor placement chamber 17a has a first open section 31a on the front side thereof, and is provided with a first lid (front lid) 50a. The first lid 50a can be removed by a predetermined operation. Therefore, the first open section 31a can be opened by removing the first lid 50a. Multiple small fans 32 are attached to the first lid 50a, and the fans 32 are driven to ventilate the first compressor placement chamber 17a, preventing the temperature inside the first compressor placement chamber 17a from rising excessively and affecting the electronic devices in the upper section. In this embodiment, as shown in Figures 5 and 6, the first compressor 25a is disposed at the back of the first cooling device region 15a, and the first condenser 16a is disposed at the front. Instruments such as the pressure gauge 40 are installed facing the first open portion 31a.

[0034] 5, the upper level of the first cooling device area 15a is a first control device placement room 33a, which houses a first current control device 8a that controls the burn-in test. The first current control device 8a controls the current and signals supplied to the specimen 100. The first control device placement room 33a has an opening 35a, into which a monitor screen 36 of the first energization control device 8a is fitted. In front of the first cooling device area 15a, there is a shelf 38a for placing a keyboard and the like.

[0035] An air conditioning flow path (not shown) is connected to the first test chamber 3a, and an evaporator (not shown) and a heater (not shown) of the first air conditioner 6a are built into the air conditioning flow path. In this embodiment, air circulates between the air conditioning flow path and the first test chamber 3a, and the inside of the first test chamber 3a is maintained at a desired temperature environment.

[0036] The planar layout of the first body region 13a and the first cooling device region 15a in the first combination set 10 is as shown in Fig. 6(b), with the first cooling device region 15a located to the left of the first body region 13a and closer to the front. In terms of the relationship between the first test chamber 3a and the first current application device arrangement chamber 21a, the first cooling device region 15a is located to the side of the first test chamber 3a. The length of the first cooling device region 15a in the depth direction is approximately half that of the first body region 13a, so the first cooling device region 15a is located to the left of the first body region 13a in the region half the depth direction closer to the front. As described above, the first cooling device region 15a is located near the front surface, and the upper opening 35a and the lower first open portion 31a of the first cooling device region 15a are both located on the front surface side of the first combination set 10.

[0037] Looking generally at the first combination set 10, it has a shape in which a large rectangular first main body region 13a is combined with a small rectangular first cooling device region 15a, and the small rectangular first cooling device region 15a is located closer to the front. The first combination set 10 has outer walls on the front side, back side, top side and right side, but has no outer wall on the left side.

[0038] Next, a description will be given of the second combination set 11. The second combination set 11 is externally divided into a second main body area 13b in which the second test chamber 3b, the second energization device arrangement chamber 21b, and the second environment setting device 7b are arranged, and a second cooling device area 15b in which at least a part of the second air conditioner 6b and the second energization control device 8b are arranged. The individual shapes and functions of the components of the second combination set 11 are the same as those of the first combination set 10, so the same numbers are used for the same components and the alphabet attached to the numbers is changed to "b", and detailed explanations are omitted, and only the differences between the two sets are explained.

[0039] The individual components of the second combination set 11 are the same as those of the first combination set 10 described above, and only the arrangement of the components is different. The planar layout of the second body region 13b and the second cooling device region 15b in the second combination set 11 is as shown in Fig. 6(b), with the second cooling device region 15b located to the right of the second body region 13b and closer to the back surface. In terms of the relationship between the second test chamber 3b and the second current application device arrangement chamber 21b, the second cooling device region 15b is located to the side of the second current application device arrangement chamber 21b. The length of the second cooling device region 15b in the depth direction is approximately half that of the second body region 13b, so the second cooling device region 15b is located to the right of the second body region 13b in the half of the depth direction closer to the back surface. The upper opening 35b and the lower second open portion 31b of the second cooling device region 15b are both located on the back surface side of the second combination set 11.

[0040] Looking generally at the second combination set 11, it has a shape in which a large rectangular second main body region 13b is combined with a small rectangular second cooling device region 15b, and the small rectangular second cooling device region 15b is located closer to the back side. The second combination set 11 has outer walls on the front side, back side, top side, and left side. The second combination set 11 has an outer wall 53 on at least a part of the right side.

[0041] The burn-in test device 1 of this embodiment is a combination of a first combination set 10 and a second combination set 11. As described above, the first combination set 10 has a shape in which a large rectangular first main body region 13a is combined with a small rectangular first cooling device region 15a, and the small rectangular first cooling device region 15a is located closer to the front side. On the other hand, the second combination set 11 has a shape in which a second main body region 13b is combined with a second cooling device region 15b, and the second cooling device region 15b is located closer to the back side. The burn-in test equipment 1 of this embodiment is formed by combining the left side surface of the first combination set 10 and the right side surface of the second combination set 11, and in the intermediate area 201, the first cooling device region 15a and the second cooling device region 15b are arranged in a staggered manner in the front-to-rear direction. The first combination set 10 and the second combination set 11 are connected by a plurality of fasteners 49. In this embodiment, a base portion 51a of the first combination set 10 and a base portion 51b of the second combination set 11 are connected by the fasteners 49. A top surface 52a of the first combination set 10 and a top surface 52b of the second combination set 11 are connected by the fasteners 49.

[0042] The first compressor 25a and the second compressor 25b are both disposed at a central position in the front-rear direction between the first cooling device region 15a and the second cooling device region 15b, and the two compressors 25 are positioned back-to-back as shown in Figures 5 and 6. In other words, the two compressors 25 are disposed symmetrically with respect to the joint surface between the first cooling device region 15a and the second cooling device region 15b. Similarly, instruments such as the pressure gauge 40 are also arranged symmetrically with respect to the mating surface between the first cooling device region 15a and the second cooling device region 15b. That is, the instruments such as the pressure gauge 40 are installed facing the first opening 31a or the second opening 31b, and the instruments such as the pressure gauge 40 can be easily viewed by opening the first opening 31a or the second opening 31b as shown in FIG.

[0043] When the first combination set 10 and the second combination set 11 are combined, the entire periphery is covered with an outer wall.

[0044] The assembled burn-in test equipment 1 has two combination sets 10, 11, each of which comprises a test chamber 3, an energization device placement room 21 for installing an energization device 5 that supplies power to a test specimen 100 in the test chamber 3, and a cooling device 30 that adjusts the temperature in the test chamber 3, and each of the cooling devices 30 of the combination sets 10, 11 has a compressor 25, a condenser 16, an expansion means, and an evaporator. Each of the combination sets 10 and 11 has a main body region 13 in which an energizer arrangement chamber 21 is arranged at the rear of the test chamber 3, and a compressor arrangement chamber 17 in which at least a compressor 25 is arranged. A first body region 13a belonging to one combination set 10 and a second body region 13b belonging to the other combination set 11 are arranged with a gap between them, and a cooling device region 15 belonging to one combination set 10, 11 and a cooling device region 15 belonging to the other combination set 10, 11 are arranged in a staggered manner in the front-to-rear direction between the two body regions 13a, 13b.

[0045] In the burn-in test apparatus 1 of this embodiment, the first combination set 10 and the second combination set 11 are both independent and are individually unitized burn-in test apparatuses, and the environment of each test chamber 3 can be set individually. Specifically, the temperature and other parameters in the first test chamber 3a can be set by the first environment setting device 7a, and the temperature and other parameters in the second test chamber 3b can be set by the second environment setting device 7b. In the burn-in test apparatus 1 of this embodiment, the first open portion 31a of the first cooling device area 15a is located on the front side, and the first open portion 31a of the first cooling device area 15a can be opened by removing the first lid (front lid) 50a. As a result, the main parts of the first air conditioner 6a can be touched, and the gauges such as the pressure gauge 40 can be visually observed from the front side. On the other hand, in the burn-in test apparatus 1 of this embodiment, the second open portion 31b of the second cooling device area 15b is located on the back side, and the second open portion 31b of the second cooling device area 15b can be opened by removing the second lid (front side lid) 50b. As a result, the main parts of the second air conditioner 6b can be touched, and the gauges such as the pressure gauge 40 can be visually observed from the back side. In this way, the burn-in test device 1 of this embodiment is easy to maintain.

[0046] The burn-in test apparatus 1 of this embodiment is assembled as a whole in a factory and an operation test is performed, and then the assembly is separated into a first combination set 10 and a second combination set 11 and transported to the destination. In the burn-in test apparatus 1 of this embodiment, the first combination set 10 and the second combination set 11 are both formed as independent units. Therefore, it is easy to separate the first combination set 10, which is the first unit, from the second combination set 11, which is the second unit. Each separated unit is smaller than the unit before separation, and therefore easy to transport. In particular, in this embodiment, since the refrigerant piping is also included in the unit, the first combination set 10 and the second combination set 11 can be easily separated from each other when shipped from the factory.

[0047] Furthermore, installation work is easy at the destination. That is, in this embodiment, each unit has an independent cooling device 30a, 30b, and the respective refrigerant piping is built into each unit. Specifically, in each unit, piping is already installed between the compressor 25, the condenser 16, the expansion means (not shown), and the evaporator (not shown). Therefore, there is no need to connect the refrigerant piping at the destination, and installation work is easy. Furthermore, at the transport destination, the first combination set 10 serving as the first unit and the second combination set 11 serving as the second unit can be combined to assemble the burn-in test apparatus 1. Therefore, the burn-in test apparatus 1 of this embodiment is easy to transport and install.

[0048] In the burn-in test apparatus 1 of this embodiment, the first condenser 16a and the second condenser 16b of the cooling device are both water-cooled condensers. Therefore, it is necessary to connect the cooling device, such as a cooling tower, to the first condenser 16a and the second condenser 16b by piping. Here, in the burn-in test apparatus 1 of this embodiment, as shown in FIG. 7, one of the combination sets has a cooling water inlet section 41 and a cooling water outlet section 42, and piping is branched within one of the combination sets so that cooling water is supplied to the condenser 16b of that combination set and the condenser 16a of the other combination set.

[0049] In this embodiment, the cooling water inlet 41 and the cooling water outlet 42 are provided on the back surface side of the second combination set 11. Specifically, the cooling water inlet 41 and the cooling water outlet 42 are provided on the back surface side of the burn-in test apparatus 1, in the second cooling device area 15b. The water supply pipe 45 connected to the cooling water introduction part 41 is connected to a water supply port of the first condenser 16a. A water supply branch pipe 46 branches off from the water supply pipe 45 and is connected to a water supply port of the second condenser 16b. A drain pipe 47 is connected to the drain port of the first condenser 16a, and the drain pipe 47 is connected to the cooling water discharge section 42. A drain branch pipe 48 is connected to the drain port of the second condenser 16b, and the drain branch pipe 48 is connected to the drain pipe 47 between the drain port of the first condenser 16a and the cooling water discharge section 42. Therefore, cooling water is supplied to the first condenser 16a through a water supply pipe 45 and drained through a drain pipe 47. Cooling water is supplied to the second condenser 16b through a water supply branch pipe 46 branched off from the water supply pipe 45 and drained through a drain pipe 47 which merges with a drain branch pipe 48. In this respect, the burn-in test device 1 of this embodiment is easy to transport and install.

[0050] When a burn-in test is performed using the burn-in test apparatus 1 of this embodiment, the specimen 100 is placed in the first test chamber 3a or the second test chamber 3b, and the terminals of the specimen 100 are engaged with the slots 20 to electrically connect the specimen 100 to the first current supply device 5a or the second current supply device 5b. The first air conditioner 6a or the second air conditioner 6b is then started to maintain the first test chamber 3a or the second test chamber 3b in a desired environment, and currents and signals are input from the first current supply device 5a or the second current supply device 5b to the specimen 100 to observe changes in the specimen 100.

[0051] In the burn-in test apparatus 1 described above, the first combination set 10 and the second combination set 11 are unitized and can be easily separated. However, this configuration is not essential, and the first combination set 10 and the second combination set 11 may be inseparable. The burn-in test apparatus 1 described above can set the environment of the first test chamber 3a and the environment of the second test chamber 3b separately, but may be one that can only set them to the same environment.

[0052] Looking at the joint surface between the first combination set 10 and the second combination set 11 of the burn-in test apparatus 1 described above, there is an outer wall 53 on the second combination set 11 side, and there is no outer wall on the first combination set 10. In the burn-in test apparatus 1, the outer wall 53 on the right side of the second combination set 11 serves as a partition wall between the first combination set 10 and the second combination set 11. The presence or absence of a partition wall on the joint surface is optional, and the partition wall may be omitted. In the burn-in test device 1, the outer wall 53 on the right side surface of the second combination set 11 serves as a partition wall, but an outer wall may be provided on the first combination set 10 and used as the partition wall. Both the first combination set 10 and the second combination set 11 may have outer walls.

[0053] In the embodiment described above, the first combination set 10 and the second combination set 11 are the same except for the layout, etc. That is, both have current control devices 8a, 8b, and can individually control the current and signal supplied to the test specimen 100 in each test chamber 3a, 3b. The burn-in test device 1 can input different currents and different signals to the test specimen 100 in the first test chamber 3a and the test specimen 100 in the second test chamber 3b, so that it can handle a variety of burn-in tests. However, in reality, there are many cases where the same current or signal is input to the specimen 100 in the first test chamber 3a and the specimen 100 in the second test chamber 3b.

[0054] Therefore, as one of the modified examples, a structure in which the energization control device 8 is provided in only one combination set and not in the other is also recommended. For example, only the first combination set 10 has the current control device 8a, and the current control device 8a controls the current supplied to the specimen 100 in the first test chamber 3a and the specimen 100 in the second test chamber 3b. When this structure is adopted, many of the members are omitted from the upper stage of the second cooling device region 15b of the second combination set 11 compared to the upper stage of the first cooling device region 15a of the first combination set . Specifically, in the first combination set 10, the upper stage is the first control device placement chamber 33a, which houses the first energization control device 8a that controls the burn-in test, but there is no energization control device in the upper stage of the second cooling device area 15b. Also, there is no control device placement chamber 33 itself, and there is no opening corresponding to the opening 35a of the first combination set 10, or any member corresponding to the monitor screen 36 or shelf 38a on the back side.

[0055] As described above, the burn-in test is a test that is performed by placing an electronic device in a predetermined environment such as high temperature and inputting a power supply voltage and a predetermined signal to the electronic device, and in the burn-in test apparatus 1 described above, the environment setting devices 7a and 7b set the temperature and the like in the test chambers 3a and 3b, and the current control devices 8a and 8b control the current and signal supplied to the test piece 100. In this manner, in the burn-in test apparatus 1, the environment setting and the input setting of the supply current and the like are performed by different devices, but they may be configured to be performed by one device. For example, the function of setting the environment and / or the control function may be added to the current control devices 8a and 8b, and the temperature and the like in the test chambers 3a and 3b may be controlled by the current control devices 8a and 8b.

[0056] The burn-in test apparatus 1 includes a first test chamber 3a and a second test chamber 3b, a first current supply device 5a and a second current supply device 5b, a first air conditioner 6a and a second air conditioner 6b, a first environment setting device 7a and a second environment setting device 7b, and a first current supply control device 8a and a second current supply control device 8b. Here, the first energization device 5a and the second energization device 5b, and the first energization control device 8a and the second energization control device 8b may be installed by a user at the delivery destination. Therefore, the burn-in test apparatus 1 at the stage of shipping from the factory may not have the first energization device 5a and the second energization device 5b, the first energization control device 8a and the second energization control device 8b, etc. Therefore, in the above case, the burn-in test apparatus 1 shipped from the factory is a burn-in test apparatus 1 having test chambers 3a, 3b for arranging the test specimen 100 and a cooling device for adjusting the temperature in the test chambers 3a, 3b, and has two combination sets 10, 11 each including the test chambers 3a, 3b, energizing device arrangement chambers 21a, 21b for installing energizing devices for supplying power to the test specimen 100 in the test chambers 3a, 3b, and a cooling device for adjusting the temperature in the test chambers 3a, 3b. Each of the cooling devices of the combination sets 10, 11 includes a compressor 25a, 25b, a condenser 16a, 16b, an expansion means, Each combination set 10, 11 has a main body area 13a, 13b in which the power supply device arrangement chambers 21a, 21b are arranged at the rear of the test chambers 3a, 3b, and a cooling device area 15a, 15b in which at least the compressors 25a, 25b are arranged, and the main body area 13a belonging to one combination set 10 and the main body area 13b belonging to the other combination set 11 are arranged with a gap between them, and the cooling device area 15a belonging to one combination set 10 and the cooling device area 15b belonging to the other combination set 11 are arranged in a staggered manner in the front-to-rear direction between the two main body areas 13a, 13b. [Explanation of symbols]

[0057] 1 Burn-in test equipment 2. Chassis 3a Test Room 1 3b Second Examination Room 5a 1st energizing device 5b Second energizing device 6a 1st air conditioner 6b 2nd air conditioner 8a First current control device 8b Second current control device 10 First combination set 11 2nd combination set 13a 1st body area 13b 2nd body area 15a 1st cooling device area 15b 2nd cooling system area 16a Condenser 16b Condenser 25a First compressor 25b Second compressor 30 Cooling device 31a 1st opening 31b 2nd opening 41 Cooling water inlet 100 specimen

Claims

1. 1. A burn-in test apparatus having a test chamber for placing a test specimen and a cooling device for adjusting a temperature within the test chamber, The test chamber, a current supply device arrangement room for installing a current supply device that supplies power to the test specimen in the test chamber, and two combination sets of the cooling device are provided, The cooling device of each of the combination sets includes a compressor, a condenser, an expansion means, and an evaporator, Each of the combination sets includes a main body region in which the test chamber located at the front side and the current-carrying device arrangement chamber located at the rear side of the test chamber are arranged, and a cooling device region located on a side of the main body region, and at least a compressor is arranged in the cooling device region, A burn-in test device characterized in that a main body region belonging to one combination set and a main body region belonging to the other combination set are arranged with a gap between them, and a cooling device region belonging to the one combination set and a cooling device region belonging to the other combination set are arranged in a staggered manner in the front-to-back direction between the two main body regions.

2. 2. The burn-in test apparatus according to claim 1, wherein each of the combination sets is unitized and can be separated into individual combination sets.

3. 2. The burn-in test apparatus according to claim 1, wherein the test chambers belonging to each combination set are capable of independently controlling temperatures.

4. 2. The burn-in test apparatus according to claim 1, wherein each of the cooling device areas is divided into at least two areas, an upper area and an lower area, the compressor being provided in the lower area and a control device being provided in the upper area.

5. 2. The burn-in test apparatus according to claim 1, wherein the cooling device area has an openable opening on at least one side, one of the combination sets has the open opening on the front side, and the other combination set has the open opening on the back side.

6. 2. The burn-in test apparatus according to claim 1, wherein the cooling device has a water-cooled condenser, one of the combination sets has a cooling water inlet, and piping is branched in the one of the combination sets to supply cooling water to the condenser of the one combination set and the condenser of the other combination set.

7. A combination set comprising a test chamber for placing a test specimen, a cooling device for regulating the temperature within the test chamber, and an energization device placement room for installing an energization device that supplies power to the test specimen within the test chamber, which combination set, when combined with other combination sets, constitutes a burn-in test apparatus described in any one of claims 1 to 6.

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