Adhesive transfer method and adhesive transfer device

Abstract

To shorten time required for transferring an adhesive when an adhesive is transferred onto an object by sticking and peeling a film formed with the adhesive to / from the object.SOLUTION: An adhesive transfer method for transferring an adhesive formed on the surface of a film onto an object is provided, including a pressurization step of pressurizing the film to the object from the rear face side by a pressurizing member, and a moving step of moving the pressurizing member in a fixed moving direction from one end to the other end of the object, wherein in the moving step, the film is held in a state in which the downstream portion on the downstream side of a pressurized portion pressurized by the pressurizing member in the moving direction is separated from the object and the upstream side on the upstream side of the pressurized portion in the moving direction is separated from the object, and a part of the adhesive formed on the downstream portion is peeled from the upstream portion, consequently a part of the adhesive is transferred onto the object.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to an adhesive transfer method and an adhesive transfer device. [Background technology]

[0002] In today's microfabrication industry, various structures in which multiple substrates are stacked are known. In such structures, the structure (shape) of the substrate is devised so as to obtain a desired function. A liquid ejection head mounted on various inkjet recording devices is a type of structure in which multiple substrates are stacked. In the liquid ejection head, the structure of the substrate is devised so as to obtain the function of ejecting ink. For example, a liquid ejection head has a piezoelectric element and a pressure chamber inside, and the piezoelectric element is deformed by applying a voltage to the piezoelectric element, and the pressure chamber is contracted by the deformation of the piezoelectric element. Then, the ink in the pressure chamber is ejected from an ejection port formed at one end of the pressure chamber by the contraction of the pressure chamber. Structures such as liquid ejection heads are manufactured by bonding (joining) substrates together with an adhesive. As a method of applying an adhesive to a substrate to be used for bonding such substrates together, Patent Document 1 describes a method in which a film on which an adhesive is spread is attached to the entire surface of a substrate, and then the film is peeled off from the entire surface of the substrate at high speed, thereby transferring the adhesive from the film to the substrate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 8-309271 Summary of the Invention [Problem to be solved by the invention]

[0004] In the method of Patent Document 1, the adhesive is applied to the substrate surface while the film is unwound at a low speed from one end to the other end of the substrate, and after the film is applied to the entire substrate, the film is peeled off at a high speed from the other end to the other end of the substrate, leaving a part of the adhesive on the substrate surface. Therefore, it takes time for the film to move back and forth between one end and the other end of the substrate from the start of application of the film to the completion of peeling. Therefore, there is a possibility of adverse effects occurring due to the long time from the start of application of the film to the completion of peeling. For example, assume a case where the adhesive 204 is transferred only to the surface of the convex part 302 of the substrate 301 having an uneven surface as shown in FIG. 13 by cohesive failure transfer, which transfers by destroying the adhesive layer inside and leaving a part of it on the transfer target object using a low-viscosity adhesive. When a thermoplastic adhesive is used as the adhesive 204, for example, heating is performed by the stage 102 supporting the substrate 301, but if the adhesive 204 continues to be heated for a long time from application to peeling, the adhesive 204 may drip into the concave part due to the effect of gravity. This may result in a film 501 of adhesive being formed on the recessed portion, or in adhesive 502 filling the recessed portion.

[0005] The present invention aims to shorten the time required to transfer adhesive in an adhesive transfer method and adhesive transfer device, in which a film on which an adhesive has been formed is attached to an object and the film is peeled off from the object to transfer the adhesive to the object. [Means for solving the problem]

[0006] The present invention provides an adhesive transfer method for transferring an adhesive formed on a surface of a film to an object, comprising the steps of: a pressing step of pressing the film against the object from a back surface side by a pressing member; a moving step of moving the pressing member from one end of the object to the other end in a constant moving direction; having This is an adhesive transfer method characterized in that, in the moving process, the downstream portion of the film, which is downstream in the moving direction from the pressed portion pressed by the pressing member, is separated from the object, and the upstream portion, which is upstream from the pressed portion in the moving direction, is maintained in a state separated from the object, and a portion of the adhesive formed in the downstream portion is peeled off in the upstream portion, thereby transferring a portion of the adhesive to the object.

[0007] The present invention is an adhesive transfer device that transfers an adhesive formed on a surface of a film to an object, a frame to which one end and the other end of the film are fixed; a first frame support portion that supports a first fixing portion of the frame to which the one end of the film is fixed; a second frame support portion that supports a second fixing portion of the frame to which the other end of the film is fixed; a stage for placing the object opposite the surface of the film; a pressing member capable of pressing the film against the object from a back surface side; a moving mechanism that moves the pressing member from one end of the object to the other end in a fixed moving direction while pressing the film against the object; having This adhesive transfer device is characterized in that a first support height, which is a height at which the first frame support portion supports the first fixed portion, and a second support height, which is a height at which the second frame support portion supports the second fixed portion, are determined so that when the pressing member moves while pressing the film against the object, a downstream portion of the film that is downstream in the movement direction from the pressed portion pressed by the pressing member is separated from the object, and an upstream portion of the film that is upstream from the pressed portion in the movement direction is maintained in a state separated from the object. Effect of the Invention

[0008] According to the present invention, in an adhesive transfer method and adhesive transfer device in which a film on which an adhesive is formed is attached to an object and then peeled off to transfer the adhesive to the object, the time required to transfer the adhesive can be shortened. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a perspective view showing an adhesive transfer device of a first embodiment. [Diagram 2] FIG. 2 is a plan view of the frame jig of the first embodiment. [Figure 3(A)] FIG. 1 is a plan view showing an adhesive transfer device of a first embodiment. [Figure 3(B)] FIG. 1 is a plan view showing an adhesive transfer device of a first embodiment. [Figure 3(C)] FIG. 2 is a cross-sectional view showing the adhesive transfer device of the first embodiment. [Figure 4(A)] 1 is a cross-sectional view showing an adhesive transfer method according to a first embodiment. [Figure 4(B)] 1 is a cross-sectional view showing an adhesive transfer method according to a first embodiment. [Figure 4(C)] 1 is a cross-sectional view showing an adhesive transfer method according to a first embodiment. [Figure 4(D)] 1 is a cross-sectional view showing an adhesive transfer method according to a first embodiment. [Diagram 5] 1 is a cross-sectional view showing an adhesive transfer method according to a first embodiment. [Figure 6(A)] FIG. 11 is a cross-sectional view showing an adhesive transfer device of a second embodiment. [Figure 6(B)] FIG. 11 is a cross-sectional view showing a modified adhesive transfer device of the second embodiment. [Figure 7] FIG. 11 is a schematic diagram of a second frame support part of the third embodiment. [Figure 8(A)] 11 is a cross-sectional view showing an adhesive transfer method according to a third embodiment. FIG. [Figure 8(B)] 11 is a cross-sectional view showing an adhesive transfer method according to a third embodiment. FIG. [Figure 8(C)] 11 is a cross-sectional view showing an adhesive transfer method according to a third embodiment. FIG. [Figure 8(D)] 11 is a cross-sectional view showing an adhesive transfer method according to a third embodiment. FIG. [Figure 9] FIG. 11 is a diagram for explaining the effect of the third embodiment. [Figure 10(A)] FIG. 13 is a schematic diagram of a second frame support part of the fourth embodiment. [Figure 10(B)] FIG. 13 is a schematic diagram of a second frame support part of the fourth embodiment. [Figure 10(C)] FIG. 13 is a schematic diagram of a second frame support part of the fourth embodiment. [Figure 11(A)] FIG. 13 is a schematic diagram of a second frame support part of a modified example of the fourth embodiment. [Figure 11(B)] FIG. 13 is a schematic diagram of a second frame support part of a modified example of the fourth embodiment. [Figure 12] FIG. 13 is a schematic diagram of a second frame support part of a modified example of the fourth embodiment. [Figure 13] 1 is a cross-sectional view illustrating a problem to be solved by the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, an embodiment of the adhesive transfer device and adhesive transfer method of the present invention will be described with reference to the drawings. Note that the following description is an exemplary description of the embodiment of the present invention, and the scope of the present invention is not limited to the contents described below. The dimensions, shapes, positional relationships, directions, materials, etc. in the following description can be changed as appropriate within the scope of the present invention.

[0011] (Embodiment 1) FIG. 1 is a perspective view showing an adhesive transfer device 101 of the first embodiment. FIG. 2 is a plan view of the frame jig 201 of the first embodiment viewed vertically upward. FIGS. 3(A) and 3(B) are plan views of the adhesive transfer device 101 viewed vertically downward. In FIG. 3(A), the pressure roller 107, the roller shaft 108, the frame 202, and the film 203 are not shown for simplicity. FIG. 3(C) is a cross-sectional view shown by the line AA in FIG. 3(B). In the following description, the direction from the first side 206 to the second side 207 of the frame 202 is the X direction, the direction in which the first side 206 and the second side 207 extend is the Y direction, and the direction perpendicular to the first side 206 and the second side 207 (the vertical direction in the first embodiment) is the Z direction. In the first embodiment, the direction intersecting the surface of the object 104 is the Z direction, and the directions along the surface of the object 104 are the X direction and the Y direction (directions along the XY plane).

[0012] The adhesive transfer device 101 includes a frame jig 201, a frame support device 100, a pressure roller 107, a stage 102 that supports an object 104 to which an adhesive 204 is to be transferred, an auxiliary stage 103 that distributes the pressure from the pressure roller 107, and a control unit 112.

[0013] The frame jig 201 has a film 203 having an adhesive 204 formed on its surface (lower surface), a frame-shaped frame 202 to which one end and the other end of the film 203 are fixed, and a fixing portion 205 that fixes the film 203 to the frame 202. The frame 202 is rectangular, and a pair of sides that face each other in the X direction among the four sides are referred to as a first side 206 and a second side 207. The fixing portion 205 is provided along the first side 206 and the second side 207. The first side 206 to which one end of the film 203 is fixed by the fixing portion 205 is a first fixing portion of the frame 202, and the second side 207 to which the other end of the film 203 is fixed by the fixing portion 205 is a second fixing portion of the frame 202.

[0014] The frame support device 100 has a first frame support portion 105 and a second frame support portion 106 which support a first side 206 and a second side 207 of a frame 202 that face each other, and supports a frame jig 201 .

[0015] The first frame support part 105 supports the frame jig 201 at a position upstream in the scanning direction b (movement direction, +X direction) of the pressure roller 107 from one end of the object 104 (end on the first frame support part 105 side, end in the -X direction) of the pressure roller 107, and at a position higher than the object 104. The second frame support part 106 supports the frame jig 201 at a position downstream in the scanning direction b (+X direction) of the pressure roller 107 from the other end of the object 104 (end on the second frame support part 106 side, end in the +X direction).

[0016] As a result, the film 203 is held in a state in which a downstream portion 209 located downstream in the scanning direction b from a pressed portion 208 pressed by the pressure roller 107 and an upstream portion 210 located upstream are separated from the object 104. The film 203 is supported at a position downstream in the scanning direction b from the other end of the object 104, at a position higher than the surface of the object 104, and a downstream angle θ1, which is an angle between the downstream portion 209 of the film 203 and the surface of the object 104, is greater than 0°. In addition, the film 203 is supported at a position upstream in the scanning direction b from one end of the object 104, at a position higher than the surface of the object 104, and an upstream angle θ2, which is an angle between the upstream portion 210 of the film 203 and the surface of the object 104, is greater than 0°.

[0017] The pressure roller 107 is a pressing member capable of pressing the film 203 from the back side (upper side) against the object 104. The pressure roller 107 has a roller shaft 108, which is rotatably supported by a roller support device 110. The roller support device 110 is a moving mechanism capable of moving the pressure roller 107 in a direction intersecting the surface of the object 104 and in a direction along the surface of the object 104. In the first embodiment, the roller support device 110 raises and lowers the pressure roller 107 in the Z direction (vertical direction), and also moves the pressure roller 107 from one end of the object 104 to the other end in a fixed moving direction (+X direction; scanning direction indicated by arrow b) while pressing the film 203 against the object 104. The roller support device 110 supports and moves the pressure roller 107 so that the pressure roller 107 presses the film 203 from the back side (the side opposite to the side on which the adhesive 204 is formed) against the target object 104. Note that the detailed structure of the roller support device 110 is omitted to avoid complicating the drawings, but a known support mechanism and drive mechanism can be appropriately adopted.

[0018] Stage 102 has an adsorption member that adsorbs object 104, can place object 104 facing the surface of film 203, and supports object 104 so that object 104 does not shift during the transfer process. Stage 102 also has heater 111, which is a heating member that heats adhesive 204, and can heat adhesive 204 via object 104 placed on stage 102. In embodiment 1, object 104 is circular, and stage 102 that supports it is a cylindrical member having a circular placement surface with an area larger than that of object 104.

[0019] The auxiliary stage 103 is disposed between the stage 102 and the first frame support 105, and between the stage 102 and the second frame support 106. The auxiliary stage 103 has a first portion 103A disposed so as to face the outer peripheral surface of the cylindrical stage 102 on the -X direction side, and a second portion 103B disposed so as to face the outer peripheral surface of the stage 102 on the +X direction side. The auxiliary stage 103 has a shape that is close to a rectangle as a whole in a plan view (shape in the XY plane). This suppresses the variation in the pressing force due to the pressing position in the X direction when the pressure roller 107, whose roller shaft 108 extends in the Y direction, scans the circular object 104 in a plan view in the X direction while pressing the film 203 through the film 203. In addition, since the pressure roller 107 can roll on the first portion 103A of the auxiliary stage 103, the pressure roller 107 can start moving from a position upstream in the scanning direction from the end of the object 104 on the first frame support 105 side. Furthermore, since the pressure roller 107 can roll on the second portion 103B of the auxiliary stage 103, the pressure roller 107 can move to a position downstream in the scanning direction from the end of the object 104 on the second frame support portion 106 side. In other words, the auxiliary stage 103 can be used as a place to let the pressure roller 107 escape at the start and end of transfer. This allows the attachment process and the peeling process to be performed under the same conditions at the end of the object 104 (the positions at which transfer starts and ends) as at other positions (for example, the center in the scanning direction).

[0020] At least one of the stage 102 and the auxiliary stage 103 is provided on the stage 102. The stage 103 may have a mechanism capable of adjusting the height of the surface so that the height of the surface to which the adhesive is transferred of the placed object 104 is the same as the height of the upper surface of the auxiliary stage 103. This makes it possible to reduce variation in the pressure applied by the pressure roller 107 to the film 203, the adhesive 204, and the object 104 depending on the position in the X direction (transfer position).

[0021] The control unit 112 is a computer that controls the operation of the adhesive transfer device 101. The control unit 112 controls the operation of the roller support device 110 and the heater 111 of the stage 102. In addition, in the first embodiment in which the frame support device 100 has a driving device such as a motor, the control unit 112 controls the operation of the frame support device 100.

[0022] Examples of materials that can be used to form the frame 202 include metals such as stainless steel, glass, and chemically resistant resins (such as fluororesins, chlorinated polyethers, and furans).

[0023] Examples of materials that can be used for the film 203 include polyethylene terephthalate, tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), polychlorotrifluoroethylene (PCTFE), cycloolefin polymer (COP), and tetrafluoroethylene-ethylene copolymer (ETFE).

[0024] A thermoplastic material that softens when heated and hardens when cooled is preferable as the adhesive 204. For example, epoxy, acrylic, urethane, silicone, benzocyclobutene, polyimide, polyamide, polyamideimide, cyanoacrylate, phenol, melamine, styrene, cyclized rubber, or a mixture of these can be used.

[0025] The target object 104 may be, for example, a silicon substrate.

[0026] <Transfer process> The adhesive transfer method of embodiment 1 will be described with reference to Figures 4(A) to 4(D) and 5. Figures 4(A) to 4(D) and 5 are cross-sectional views taken at the same position as line AA in Figure 3(B) of a part of adhesive transfer device 101 for explaining the adhesive transfer method.

[0027] 4(A), the target object 104 is placed on the stage 102, a film 203 having an adhesive 204 formed on its surface is fixed to the frame 202, and the frame jig 201 is placed on the frame support device 100. The pressure roller 107 is lowered vertically downward (in the -Z direction, as indicated by the arrow a) from the back side of the film 203 toward the target object 104 by the roller support device 110.

[0028] 4(B), a pressing step is performed in which the roller support device 110 is controlled so that the pressure roller 107 presses the film 203 from the back side against the object 104. Here, the pressure roller 107 is supported and moved by the roller support device 110 so as to press the film 203 with such a pressure that the adhesive 204 formed on the surface of the film 203 comes into contact with and adheres to the surface of the object 104. In this way, the adhesive 204 is attached to the surface of the object 104.

[0029] 4(C), a moving step is performed in which the pressure roller 107 is moved from one end of the object 104 to the other end in a fixed moving direction (scanning direction, +X direction, indicated by arrow b). In the first embodiment, one end of the object 104 is the end in the -X direction (first frame support section 105 side), which is the upstream end in the scanning direction b. The other end of the object 104 is the end in the +X direction (second frame support section 106 side), which is the downstream end in the scanning direction b.

[0030] As described above, film 203 is held in a state in which downstream portion 209, which is downstream of pressed portion 208 pressed by pressure roller 107, and upstream portion 210, which is upstream of pressed portion 208 in the scanning direction b, are separated from object 104. Further, downstream angle θ1, which is the angle between downstream portion 209 of film 203 and the surface of object 104, is greater than 0°, and upstream angle θ2, which is the angle between upstream portion 210 of film 203 and the surface of object 104, is greater than 0°.

[0031] The V-shaped shape, in which downstream portion 209 and upstream portion 210 separated from object 104 exist on both sides of pressed portion 208 of film 203 in scanning direction b, moves in scanning direction b with the movement of pressure roller 107. Therefore, when focusing on a certain point on film 203, as pressure roller 107 approaches from the upstream side of the point, the point descends in the -Z direction (vertically downward, as shown by arrow d) from a position separated from object 104 and approaches object 104. Then, when pressure roller 107 reaches the point, it is pressed by pressure roller 107, and the point becomes pressed portion 208. As pressure roller 107 passes the point and moves away from the downstream side, the point rises in the +Z direction (vertically upward, as shown by arrow c) and moves away from object 104.

[0032] In this way, the adhesive 204 formed in the downstream portion 209 adheres to the object 104 in the pressed portion 208, and a part of the adhesive 204 peels off from the film 203 in the upstream portion 210 and remains on the surface of the object 104. As a result, in conjunction with the pressure roller 107 moving in the scanning direction b while pressing the film 203 in the moving step, a part of the adhesive 204 formed on the surface of the film 203 is transferred to the object 104.

[0033] Next, as shown in FIG. 4(D), the pressure roller 107 moves to the other end of the target object 104, whereby the transfer of the adhesive 204 to the entire surface of the target object 104 is completed.

[0034] In this way, according to the adhesive transfer method of the first embodiment, the film 203 located upstream and downstream of the portion 208 pressed by the pressure roller 107 in the scanning direction b is lifted. Then, the bonding process of the adhesive 204 is performed in the pressed portion 208, and the peeling process is performed upstream of the pressed portion 208. That is, the bonding process and the peeling process of the adhesive 204 are performed simultaneously in the vicinity of the pressure roller 107 moving in the scanning direction b. Therefore, the transfer of the adhesive 204 to the entire surface of the object 104 is completed by one scan of the pressure roller 107 in one direction (scanning direction b) from one end (upstream end) of the object 104 to the other end (downstream end) of the object 104. Therefore, it is possible to shorten the time required for the transfer of the adhesive, compared to the case where the bonding process is performed in the first scan on the outward path and the peeling process is performed in the second scan on the return path.

[0035] <Transfer to uneven surfaces> In the adhesive transfer method of the first embodiment, the adhesive 204 is transferred by contacting the surface of the object 104. Therefore, as shown in FIG. 5, when the object is a substrate 301 having a concave-convex structure on its surface according to its function, the adhesive 204 that contacts the surface of the convex portion 302 is transferred to the substrate 301. The adhesive 204 at the position of the concave portion 303 that does not contact the substrate 301 is not transferred. In the adhesive transfer method of the first embodiment, since the time from the attachment step to the peeling step is short, it is possible to suppress the phenomenon that the adhesive 204 that is not transferred between the attachment step and the peeling step drips into the concave portion 303. In addition, when a thermoplastic adhesive is used as the adhesive 204 and heating is performed by the heater 111 in the transfer step of the adhesive 204, since the time from the attachment step to the peeling step is short, the adhesive 204 peels off before it thermally expands. Therefore, it is possible to suppress transfer failures such as the thermally expanded adhesive 204 filling the concave portion 303 that has become a closed space by the attachment step.

[0036] (Modification) In the adhesive transfer method of the first embodiment described above, the downstream angle θ1 between the downstream portion 209 of the film 203 and the surface of the object 104 and the upstream angle θ2 between the upstream portion 210 of the film 203 and the surface of the object 104 may be smaller than 70°. This makes it possible to prevent the pressure roller 107 from floating up and the film 203 from peeling off from the frame 202. Other examples of measures to prevent the film 203 from peeling off from the frame 202 will be described later with reference to FIG. 8.

[0037] Also, during the scanning of the pressure roller 107 (movement process), the downstream angle θ1 between the downstream portion 209 of the film 203 and the surface of the object 104 and the upstream angle θ2 between the upstream portion 210 of the film 203 and the surface of the object 104 may be constant. By making the downstream angle θ1 and the upstream angle θ2 constant, the force in the +Z direction (indicated by arrow c) that the film 203 applies to the pressure roller 107 becomes constant. As a result, the force of the film 203 trying to lift the pressure roller 107 becomes constant, so that the state of the adhesive 204 can be stabilized over the entire surface of the object 104. Also, the upstream angle θ2 is an angle that affects the peeling of the adhesive 204, and by making the upstream angle θ2 constant, the state of the adhesive 204 can be stabilized over the entire surface of the object 104.

[0038] Furthermore, the viscosity of the adhesive 204 may be 237 Pa·s or less when the film 203 is peeled off from the object 104 during the scanning of the pressure roller 107 (movement step). The following method can be exemplified as a method for setting the viscosity of the adhesive 204 to approximately 237 Pa·s or less. That is, a method using a thermoplastic adhesive 204 and having a heating step of heating the adhesive 204 in contact with the object 104 via the object 104 by heating with the heater 111 of the stage 102. This makes it possible to suitably perform cohesive failure transfer in which the adhesive 204 layer is broken internally in the peeling step and a portion of it remains on the object 104 for transfer.

[0039] (Embodiment 2) <Auxiliary roller> FIG. 6(A) is a cross-sectional view of the adhesive transfer device 101 of the second embodiment at the same position as the AA line in FIG. 3(B). In the second embodiment, an auxiliary roller 109, which is an auxiliary pressing member, is disposed upstream of the pressure roller 107 in the scanning direction b of the pressure roller 107. The auxiliary roller 109 is supported and moved by a roller support device 110. A second roller support device that supports and moves the auxiliary roller 109 may be provided separately from the roller support device 110. The auxiliary roller 109 of the second embodiment adjusts the distance between the upstream portion 210 and the object 104 by pressing the upstream portion 210 of the film 203, which is located upstream of the pressed portion 208 in the scanning direction b, toward the object 104. The roller support device 110 adjusts the position of the auxiliary roller 109 in the Z direction up and down so that the bending of the film 203 after the peeling step is suppressed and the upstream angle θ2 between the film 203 and the object 104 is an appropriate angle. This makes it possible to stably transfer the adhesive 204 to the entire surface of the object 104 .

[0040] (Modification) FIG. 6(B) is a cross-sectional view of the adhesive transfer device 101 of the modified embodiment of the second embodiment at the same position as the AA line in FIG. 3(B). The adhesive transfer device 101 of the modified embodiment of the second embodiment has an auxiliary roller 109, as in the second embodiment. Explanation of matters common to the second embodiment will be omitted. The auxiliary roller 109 of the modified embodiment of the second embodiment moves in the scanning direction b while pressing the upstream portion 210 of the film 203 against the object 104, similar to the pressure roller 107. As a result, the portion of the upstream portion 210 of the film 203 from the portion 208 pressed by the pressure roller 107 to the upstream portion 211 pressed by the auxiliary roller 109 is stuck to the object 104 in a tight contact state. In addition, the portion upstream of the upstream portion 211 is peeled off from the object 104 and separated from it. The roller support device 110 may have a configuration capable of changing the distance between the pressure roller 107 and the auxiliary roller 109 in the scanning direction (X direction). This This allows for arbitrary control of the time from when the adhesive 204 on the film 203 adheres to the object 104 until it is peeled off. For example, in an adhesive transfer method in which the thermoplastic adhesive 204 is heated by the heater 111 to reduce the viscosity and then transferred, the heating time is the time from when the adhesive 204 adheres to the object 104 until it is peeled off. This makes it possible to adjust the heating time so as to obtain an optimal viscosity.

[0041] (Embodiment 3) <Lifting mechanism (spring)> An adhesive transfer device according to a third embodiment of the present invention will be described. In the adhesive transfer device 101 according to the third embodiment, the first frame support section 105 has a first lifting mechanism 400A that changes the height (first support height) at which the first side 206 (first fixed section) of the frame 202 is supported. The first lifting mechanism 400A is configured so that the first support height increases as the pressure roller 107 moves in the scanning direction b during the transfer process of the adhesive 204. The second frame support section 106 has a second lifting mechanism 400B that changes the height (second support height) at which the second side 207 (second fixed section) of the frame 202 is supported. The second lifting mechanism 400B is configured so that the second support height decreases as the pressure roller 107 moves in the scanning direction b during the transfer process of the adhesive 204.

[0042] In detail, the height (upstream support height) at which the upstream end of the film 203 is supported at a position upstream in the scanning direction b from one end (upstream end) of the object 104 is changed according to the position of the pressure roller 107. The upstream support height is determined by the height (first support height) at which the first frame support section 105 supports the first side 206 of the frame 202. Also, the height (downstream support height) at which the downstream end of the film 203 is supported at a position downstream in the scanning direction b from the other end (downstream end) of the object 104 is changed according to the position of the pressure roller 107. The downstream support height is determined by the height (second support height) at which the second frame support section 106 supports the second side 207 of the frame 202. In the following description, the descriptions of the upstream support height and the downstream support height can be appropriately replaced with descriptions of the first support height and the second indicated height.

[0043] 7 is a diagram for explaining the second lifting mechanism 400B of the second frame support section 106 of the adhesive transfer device 101 of the third embodiment, and is a schematic diagram seen from the scanning direction (X direction) of the pressure roller 107. Note that the description and illustration of the first lifting mechanism 400A having a similar configuration will be omitted.

[0044] As shown in FIG. 7, the second frame support section 106 has a frame installation bar 401 that supports the second side 207 of the frame 202, and a second lifting mechanism 400B that raises and lowers the frame 202. The second lifting mechanism 400B has an axis member 402 that supports the frame installation bar 401, a housing 407 through which the axis member 402 is inserted, and a coil-shaped spring 406 through which the axis member 402 is inserted. The axis member 402 can move in the Z direction within the housing 407. The spring 406 is an elastic member that expands and contracts due to a vertical downward force applied to the second frame support section 106, and applies an elastic force to the frame installation bar 401 and the housing 407 according to the distance in the Z direction between the frame installation bar 401 and the housing 407. The frame installation bar 401 comes to rest at a position where the vertical downward force acting on the frame installation bar 401 via the frame 202 and the elastic force of the spring 406 are balanced. The height at which the second frame support part 106 supports the second side 207 of the frame 202, and therefore the downstream support height, is determined by the rest position of the frame installation bar 401. The vertical downward force acting on the frame installation bar 401 is determined by the weights of the frame 202 and the film 203, the pressing force of the pressure roller 107, the downstream angle θ1 and upstream angle θ2 between the film 203 and the object 104, and the position of the pressure roller 107 in the X direction.

[0045] <Movement of lift mechanism> An adhesive transfer method using the adhesive transfer device 101 of embodiment 3 will be described with reference to Fig. 8. Figs. 8(A) to 8(D) are cross-sectional views of a part of the adhesive transfer device 101 taken at the same position as line AA in Fig. 3(B) for explaining the adhesive transfer method. Note that descriptions common to the adhesive transfer method explained with reference to Figs. 4(A) to 4(D) will be omitted as appropriate.

[0046] First, as shown in FIG. 8(A), the object 104 is placed on the stage 102, the film 203 having the adhesive 204 formed on its surface is fixed to the frame 202, and the frame jig 201 is placed on the frame support device 100. The first frame support section 105 has a first lifting mechanism 400A, and the second frame support section 106 has a second lifting mechanism 400B. Note that the first lifting mechanism 400A and the second lifting mechanism 400B are omitted in FIG. 8(B) to FIG. 8(D) to avoid complication of the drawings. The first part 103A of the auxiliary stage 103 is placed between the stage 102 and the first frame support section 105, and the second part 103B of the auxiliary stage 103 is placed between the stage 102 and the second frame support section 106. Pressurizing roller 107 is lowered vertically downward (−Z direction, as indicated by arrow a) from the back surface side of film 203 toward first portion 103A of auxiliary stage 103 by roller support device 110.

[0047] 8(A), pressure roller 107 is not yet in contact with film 203, and therefore no pressing force from pressure roller 107 is applied to film 203, frame 202 to which film 203 is fixed, or frame jig 201. Therefore, only the weight of frame jig 201 is evenly applied to first frame support portion 105 and second frame support portion 106, and the upstream support height and downstream support height are approximately equal.

[0048] Next, as shown in Fig. 8(B), pressure roller 107 is lowered to a position where film 203 is pressed from the back side against first portion 103A of auxiliary stage 103 by pressure roller 107. As a result, the pressing force of pressure roller 107 is applied to the portion of film 203 closest to first frame support portion 105, and the vertically downward force applied to first frame support portion 105 becomes greater than the vertically downward force applied to second frame support portion 106. In the state of Fig. 8(B), pressure roller 107 is closest to first frame support portion 105, and the vertically downward force applied to first frame support portion 105 is the greatest. Therefore, the upstream support height is at its lowest.

[0049] Thereafter, the pressure roller 107 is moved in the scanning direction b. When the pressure roller 107 reaches the upstream end of the object 104, the film 203 is pressed from the back side against the object 104 by the pressure roller 107. Here, the pressure roller 107 is supported and moved by the roller support device 110 so as to press the film 203 with such a pressure that the adhesive 204 formed on the surface of the film 203 comes into contact with and adheres to the surface of the object 104. In this way, the adhesive 204 is attached to the surface of the object 104.

[0050] 8(C), a moving step is performed in which the pressure roller 107 is moved in a constant moving direction (scanning direction b) from the upstream end to the downstream end of the object 104. As the position of the pressure roller 107 moves away from the first frame support part 105 and closer to the second frame support part 106, the force applied to the first frame support part 105 decreases and the force applied to the second frame support part 106 increases. Therefore, the upstream support height gradually increases and the downstream support height gradually decreases.

[0051] In conjunction with the movement of the pressure roller 107 in the scanning direction b while pressing the film 203, the second lifting mechanism 400B of the second frame support section 106 moves in the -Z direction (indicated by the arrow d). As a result, the adhesive 204 formed on the film 203 is attached to the target object 104. In addition, the pressure roller 107 moves in the scanning direction b while pressing the film 203. In conjunction with this movement, the first lifting mechanism 400A of the first frame support part 105 moves in the +Z direction (indicated by the arrow c). As a result, the first side 206 of the frame 202 is lifted, and the film 203 is peeled off so that a portion of the adhesive 204 remains on the target object 104.

[0052] Next, as shown in FIG. 8(D), the pressure roller 107 is moved in the scanning direction b to the second portion 103B of the auxiliary stage 103 installed on the downstream side of the stage 102. This completes the transfer of the adhesive 204 to the entire surface of the target object 104. At this time, the pressing force of the pressure roller 107 is applied to the portion of the film 203 closest to the second frame support portion 106, and the vertically downward force applied to the second frame support portion 106 becomes greater than the vertically downward force applied to the first frame support portion 105. In the state shown in FIG. 8(D), the pressure roller 107 is closest to the second frame support portion 106, and the vertically downward force applied to the second frame support portion 106 is the largest. Therefore, the downstream support height is at its lowest.

[0053] Fig. 9 is a diagram for explaining the effect of the third embodiment. Fig. 9(A) and Fig. 9(B) are diagrams, similar to Fig. 3(C) and Fig. 8, that show a schematic cross section of a part of the adhesive transfer device 101 at the same position as the line AA in Fig. 3(B). Fig. 9(A) and Fig. 9(B) show the change in the downstream angle θ1 and the upstream angle θ2 between the film 203 and the object 104 depending on the position in the scanning direction (X direction) of the pressure roller 107. For simplicity, components other than the first frame support part 105, the second frame support part 106, the film 203, and the object 104 are omitted.

[0054] 9A shows the case where the upstream support height and the downstream support height are constant (embodiment 1). As the pressure roller 107 moves from position X1 close to the first frame support part 105 to position X4 close to the second frame support part 106, the upstream angle θ2 becomes smaller and the downstream angle θ1 becomes larger.

[0055] 9(B) shows a case (third embodiment) in which the upstream support height and the downstream support height are variable depending on the position (transfer position) of the pressure roller 107. As described with reference to FIGS. 8(B) to 8(D), as the pressure roller 107 moves from position X1 to position X4, the upstream support height rises from position 1051 to position 1054. On the other hand, the downstream support height falls from position 1061 to position 1064.

[0056] 9(B), reference numerals 1051 and 1061 respectively indicate the first frame support portion 105 and the second frame support portion 106 when the pressure roller 107 is at position X1. Reference numerals 1052 and 1062 respectively indicate the first frame support portion 105 and the second frame support portion 106 when the pressure roller 107 is at position X2. Reference numerals 1053 and 1063 respectively indicate the first frame support portion 105 and the second frame support portion 106 when the pressure roller 107 is at position X3. Reference numerals 1054 and 1064 respectively indicate the first frame support portion 105 and the second frame support portion 106 when the pressure roller 107 is at position X4.

[0057] As shown in Fig. 9(B), the changes in the downstream angle θ1 and the upstream angle θ2 accompanying the movement of the pressure roller 107 from position X1 to position X4 are smaller than those in the case where the upstream support height and the downstream support height are constant regardless of the position of the pressure roller 107 (Fig. 9(A)). Therefore, the behavior of the adhesive 204 and the film 203 in the process of adhering the film 203 to the object 104 and the process of peeling the film 203 from the object 104 are stable regardless of the position of the pressure roller 107, and it becomes possible to transfer the adhesive 204 uniformly to the entire surface of the object 104. In addition, since the magnitude of the vertical downward force acting on the film 203 in the direction of peeling it off from the frame 202 is stable regardless of the position of the pressure roller 107, it is possible to keep the load on the film 203 constant and to suppress peeling of the film 203.

[0058] (Embodiment 4) <Lifting mechanism (2 types of springs)> An adhesive transfer device according to a fourth embodiment of the present invention will be described. The main difference between the fourth embodiment and the third embodiment is that the second lifting mechanism 400B has a plurality of springs with different repulsive forces (spring constants, elastic coefficients). Other configurations common to the third embodiment will not be described.

[0059] 10(A) to 10(C) are schematic diagrams of the second lifting mechanism 400B of the second frame support section 106 of the adhesive transfer device 101 of the fourth embodiment, as viewed from the scanning direction (X direction) of the pressure roller 107. The first lifting mechanism 400A of the first frame support section 105 may have a similar configuration. Fig. 10(A) corresponds to the case where the pressure roller 107 is in the position shown in Fig. 8(B), Fig. 10(B) corresponds to the case where the pressure roller 107 is in the position shown in Fig. 8(C), and Fig. 10(C) corresponds to the case where the pressure roller 107 is in the position shown in Fig. 8(D).

[0060] 10(A) to 10(C), the second lifting mechanism 400B of the second frame support section 106 of the fourth embodiment has a strong resilience spring 403 having a relatively large spring constant, and a weak resilience spring 404 having a relatively small spring constant. In the fourth embodiment, the weak resilience spring 404 is provided below the strong resilience spring 403 (in the -Z direction).

[0061] As shown in Figures 8(B) and 9(B), in the early stage of the transfer process (for example, when pressure roller 107 is at position X1 from the upstream end of target object 104), the downstream support height is relatively high. In such an early stage of the transfer process, weak-rebound spring 404 is compressed quickly, so the downstream support height descends quickly. If the downstream support height is high, a large load in the peeling direction is applied to film 203 fixed to second edge 207. By decreasing the downstream support height quickly, it is possible to suppress the application of a load in the peeling direction to film 203.

[0062] As shown in FIG. 8(D) and FIG. 9(B), at the end of the transfer process (for example, when the pressure roller 107 is at the downstream end of the object 104 from the position X4), the downstream support height is relatively low. At such an end of the transfer process, the strong repulsion spring 403 is compressed as the downstream support height decreases. Therefore, the downstream support height decreases slowly. Therefore, even if the pressure roller 107 approaches the downstream end of the object 104, the downstream support height is maintained at a certain height. This makes it possible to suppress a force acting on the film 203 to stick to the object 104 when the pressure roller 107 approaches the downstream end of the object 104. Therefore, it is possible to suppress the film 203 from unintentionally sticking to the object 104 in front of the pressure roller 107, and the time from when the film 203 sticks to the object 104 to when it is peeled off from the object 104 becoming unintentionally long.

[0063] Thus, according to embodiment 4, as the pressure roller 107 moves from the upstream end to the downstream end of the target object 104, the descent speed of the downstream support height slows down, so that the transfer of the adhesive 204 can be performed stably.

[0064] (Modification) <Regulation material> An adhesive transfer device according to a modified example of the fourth embodiment of the present invention will be described. The main difference between this modified example and the fourth embodiment is that the second lifting mechanism 400B has a regulating member 405 that regulates the descent of the shaft member 402. Other configurations common to the fourth embodiment will not be described.

[0065] FIG. 11 is a schematic diagram of the second lifting mechanism 400B of the second frame support section 106 of the adhesive transfer device 101 according to a modified example of the fourth embodiment, as viewed from the scanning direction (X direction) of the pressure roller 107. The first lifting mechanism 400A of the first frame support portion 105 may have a similar configuration. Fig. 11(A) corresponds to the case where the pressure roller 107 is in the position shown in Fig. 8(B), and Fig. 11(B) corresponds to the case where the pressure roller 107 is in the position shown in Fig. 8(D).

[0066] Movement of the shaft member 402 in the -Z direction is restricted by a restricting member 405. The position of the restricting member 405 defines the lowermost position of the shaft member 402. The restricting member 405 can restrict the lowering of the shaft member 402 at any height. Examples of methods for installing the restricting member 405 include inserting a pin-shaped jig below the shaft member 402 and installing a rod-shaped jig below the shaft member 402.

[0067] 11(B), the descent of the shaft member 402 can be restricted and stopped at the position of the restricting member 405. This makes it possible to prevent the downstream support height from becoming too low when the pressure roller 107 approaches the downstream end of the target object 104, thereby making it possible to prevent transfer defects.

[0068] <Lifting mechanism (motor)> An adhesive transfer device according to a modified example of the fourth embodiment of the present invention will be described. In the fourth embodiment, a configuration having a spring is exemplified as an elevation mechanism that changes the upstream support height and downstream support height according to the position (transfer position) of the pressure roller 107. However, the configuration of the elevation mechanism is not limited to this example as long as it can achieve the same function. For example, a configuration using a driving means such as a motor to actively control the upstream support height and downstream support height is also acceptable. Below, as a modified example of the fourth embodiment, an adhesive transfer device that differs from the fourth embodiment in that the upstream support height and downstream support height can be changed by the driving force of a motor will be described. Other configurations common to the fourth embodiment will not be described.

[0069] 12 is a schematic diagram of the second lifting mechanism 400B of the second frame support section 106 of the adhesive transfer device 101 according to a modified example of the fourth embodiment, as viewed from the scanning direction (X direction) of the pressure roller 107. Note that the description and illustration of the first lifting mechanism 400A of the first frame support section 105 having a similar configuration will be omitted.

[0070] The motor 408 is a driving means controlled by the control unit 112. The driving force of the motor 408 is transmitted to the shaft member 402 via a drive transmission mechanism such as a gear. Since the drive transmission mechanism can be a known configuration, detailed description and illustration are omitted. The shaft member 402 can be moved up and down in the Z direction by the driving force transmitted from the motor 408. The control unit 112 controls the output of the motor 408, such as the rotation direction and rotation speed, so that the downstream support height is at an appropriate position according to the position (transfer position) of the pressure roller 107 and moves up and down at an appropriate speed. This makes it possible to realize operations such as changing the downstream support height and the upstream support height according to the position of the pressure roller 107 as shown in FIG. 9(B) and restricting the lower limit position of the downstream support height as shown in FIG. 11, similar to the fourth embodiment.

[0071] Specific examples and comparative examples will be described below.

[0072] Example 1 A frame made of SUS material with outer dimensions of 320×290 mm, opening dimensions of 270×240 mm, and thickness of 1.2 mm was used as the frame 202. A PET film with a thickness of 100 μm was fixed to the frame 202 as the film 203 on the first side 206 and the second side 207 facing each other with double-sided tape as the fixing portion 205. Benzocyclobutene resin was applied as the adhesive 204 to an average thickness of 10 μm by spin coating in a circular area of ​​Φ210 mm as shown in FIG. 2. An 8-inch circular silicon wafer with an uneven surface was used as the object 104. The object 104 was heated by setting the temperature of the heater 111 to 100° C. The film 203 was placed on a stage 102 and heated for a sufficient time. As a transfer process of the adhesive 204, first, the frame 202 to which the film 203 on which the adhesive 204 was formed was fixed was placed on the frame support device 100 as shown in Fig. 8(A). Next, the pressure roller 107 was lowered vertically downward (-Z direction, shown by arrow a) onto the portion of the film 203 on the first frame support part 105 side, and a pressure of 0.2 MPa was applied as shown in Fig. 8(B). At this time, the first frame support part 105 was set to be in a lowered state, and the second frame support part 106 was set to be in a raised state.

[0073] Next, as shown in FIG. 8(C), the pressure roller 107 was moved in the scanning direction b from the first frame support portion 105 toward the second frame support portion 106, and the first frame support portion 105 was set to rise and the second frame support portion 106 was set to descend in conjunction with the movement.

[0074] The benzocyclobutene resin used as the adhesive 204 has a steady flow viscosity of about 237 Pa·s at 100°C. The pressure roller 107 was moved in the +X direction at a speed of 3 mm / sec in a range from the upstream end at a position of -120 mm in the X direction to the downstream end at a position of +120 mm, with the center of the object 104 as the reference. The first lifting mechanism 400A of the first frame support part 105 raised the object 104 in the +Z direction from 0 mm to a height of 60 mm at a speed of 0.75 mm / sec, with the surface of the object 104 as the reference. Meanwhile, the second lifting mechanism 400B of the second frame support part 106 had a configuration including a strong resilience spring 403 and a weak resilience spring 404 provided below it, as shown in Figs. 11(A) and 11(B). Furthermore, a pin-shaped jig was installed as a regulating member 405 so that the height of the frame installation bar 401 was stopped at a position +5 mm in the Z direction with the surface of the target object 104 as the reference.

[0075] When transfer experiments were carried out multiple times, it was found that the adhesive 204 could be stably transferred without dripping into the recesses on the silicon wafer surface.

[0076] Example 2 The downstream angle θ1 and the upstream angle θ2 were set to 0°<θ1<70° and 0°<θ2<70°, respectively. Other conditions were set to the same as in Example 1, and multiple transfer experiments were performed. As a result, stable adhesive transfer was possible.

[0077] Example 3 Of the springs that control the descent speed of the second lifting mechanism 400B of the second frame support part 106, a spring with a descent speed of about 5 mm / s was used as the weak resilience spring 404, and a spring with a descent speed of about 1 mm / s was used as the strong resilience spring 403. Other conditions were set similarly to those in Example 1, and multiple transfer experiments were carried out, whereby stable adhesive transfer was possible.

[0078] Example 4 The descent of the second lifting mechanism 400B of the second frame support portion 106 was driven and controlled by a motor 408, and the descent speed from the start of the transfer process to a position that is 1 / 3 of the dimension of the object 104 in the X direction was set to 5 mm / s. The descent speed from a position that is 1 / 3 of the dimension of the object 104 to a position that is 2 / 3 of the dimension in the X direction was set to 2 mm / s. The descent speed from a position that is 2 / 3 of the dimension of the object 104 in the X direction to the end of the transfer process was set to 1 mm / s. When the transfer experiment was carried out multiple times with the other conditions set to the same as in Example 1, stable adhesive transfer was possible.

[0079] Comparative Example 1 The pressure roller 107 was lowered in the -Z direction toward the portion of the film 203 on the second frame support portion 106 side, and a pressure of 0.2 MPa was applied. At this time, the first frame support portion 105 was raised. The height of the second frame support part 106 was fixed from this state, and the pressure roller 107 was moved from the second frame support part 106 towards the first frame support part 105. In conjunction with this movement, the first frame support part 105 was lowered, thereby applying the adhesive 204.

[0080] Next, the height of the second frame support part 106 was fixed, and the pressure roller 107 was moved from the first frame support part 105 towards the second frame support part 106, and the first frame support part 105 was raised in conjunction with the movement, thereby peeling off the adhesive 204. When the transfer experiment was carried out multiple times with the other conditions set to the same as in Example 1, dripping of the adhesive 204 occurred into the recessed parts on the silicon wafer surface.

[0081] Comparative Example 2 The temperature of the heater 111 of the stage 102 was set to 80° C. CYCLOTENE 3022 used as the adhesive 204 has a steady flow viscosity of about 2972 ​​Pa s at 80° C. Other conditions were set similarly to those in Example 1, and multiple transfer experiments were performed. However, due to the high viscosity of the adhesive 204, cohesive failure transfer due to breakdown within the adhesive layer did not occur, and the transfer stopped midway.

[0082] Comparative Example 3 The downstream angle θ1 was set to 80°<θ1, and the upstream angle θ2 was set to 0°<θ2<70°. When the transfer experiment was carried out multiple times under the same conditions as in Example 1, peeling occurred at the interface between the double-sided tape and the film 203 fixed to the second side 207 of the frame 202 with the double-sided tape.

[0083] Comparative Example 4 The upstream angle θ2 was set to 80°<θ2, and the downstream angle θ1 was set to 0°<θ1<70°. When the transfer experiment was carried out multiple times under the same conditions as in Example 1, peeling occurred at the interface between the double-sided tape and the film 203 fixed to the first side 206 of the frame 202 with the double-sided tape.

[0084] The disclosure of the present embodiment includes the following methods and configurations. (Method 1) An adhesive transfer method for transferring an adhesive formed on a surface of a film to an object, comprising the steps of: a pressing step of pressing the film against the object from a back surface side by a pressing member; a moving step of moving the pressing member from one end of the object to the other end in a constant moving direction; having The adhesive transfer method is characterized in that, in the moving process, a downstream portion of the film, which is downstream in the moving direction from the pressed portion pressed by the pressing member, is separated from the object, and an upstream portion, which is upstream from the pressed portion in the moving direction, is maintained in a state separated from the object, and a portion of the adhesive formed in the downstream portion is peeled off in the upstream portion, thereby transferring a portion of the adhesive to the object. (Method 2) An adhesive transfer method as described in method 1, in which, in the moving process, an upstream support height, which is the height at which the upstream end of the film in the moving direction is supported, and a downstream support height, which is the height at which the downstream end of the film in the moving direction is supported, change depending on the position of the pressing member in the moving direction. (Method 3) The adhesive transfer method according to Method 2, wherein as the pressing member moves in the moving direction, the upstream support height increases and the downstream support height decreases. (Method 4) The adhesive transfer method according to Method 3, wherein the speed at which the downstream support height is lowered varies depending on the position of the pressing member in the moving direction. (Method 5) 5. The adhesive transfer method according to claim 4, wherein the rate at which the downstream support height decreases slows as the pressing member moves from the one end of the object to the other end. (Method 6) In the pressing step, in addition to the pressing member, an auxiliary pressing member is used to press the film from the back surface side toward the object upstream of the pressing member in the moving direction, The adhesive transfer method according to any one of methods 1 to 5, wherein in the moving step, the auxiliary pressing member is moved in the moving direction together with the pressing member to adjust the distance between the upstream portion of the film and the object. (Method 7) In the pressing step, in addition to the pressing member, an auxiliary pressing member is used to press the film against the object from the back surface side upstream of the pressing member in the moving direction, The adhesive transfer method according to any one of methods 1 to 5, wherein in the moving step, the auxiliary pressing member is moved in the moving direction together with the pressing member, so that the upstream portion of the film from the pressed portion to the upstream pressed portion pressed by the auxiliary pressing member is adhered to the object, and the portion of the film that is upstream of the upstream pressed portion in the moving direction is maintained in a state spaced apart from the object. (Method 8) The adhesive transfer method according to Method 6 or 7, wherein in the pressing step, the distance between the pressing member and the auxiliary pressing member in the movement direction is changeable. (Method 9) An adhesive transfer method described in any one of methods 1 to 8, wherein, in the moving step, an upstream end of the film in the moving direction is supported at a position higher than the surface of the object, and an upstream angle between the upstream part of the film and the surface of the object is greater than 0°. (Method 10) 10. The adhesive transfer method of method 9, wherein the upstream angle is less than 70°. (Method 11) 11. The adhesive transfer method according to claim 9 or 10, wherein in the moving step, the upstream angle is constant. (Method 12) An adhesive transfer method described in any one of methods 1 to 11, wherein, in the moving step, a downstream end of the film in the moving direction is supported at a position higher than the surface of the object, and a downstream angle between the downstream part of the film and the surface of the object is greater than 0°. (Method 13) 13. The adhesive transfer method of method 12, wherein the downstream angle is less than 70°. (Method 14) 14. The adhesive transfer method according to claim 12 or 13, wherein in the moving step, the downstream angle is constant. (Method 15) 15. The adhesive transfer method according to any one of Methods 1 to 14, wherein the viscosity of the adhesive in the transferring step is 237 Pa·s or less. (Method 16) the adhesive is a thermoplastic adhesive; 16. The adhesive transfer method according to any one of methods 1 to 15, further comprising a heating step of heating the adhesive. (Method 17) The adhesive transfer method according to method 16, wherein in the heating step, the adhesive in contact with the object is heated via the stage by a heating member provided on a stage on which the object is placed. (Configuration 18) An adhesive transfer device that transfers an adhesive formed on a surface of a film to an object, comprising: a frame to which one end and the other end of the film are fixed; a first frame support portion that supports a first fixing portion of the frame to which the one end of the film is fixed; a second frame support portion that supports a second fixing portion of the frame to which the other end of the film is fixed; a stage for placing the object opposite the surface of the film; a pressing member capable of pressing the film against the object from a back surface side; a moving mechanism that moves the pressing member from one end of the object to the other end in a fixed moving direction while pressing the film against the object; having an adhesive transfer device characterized in that a first support height, which is a height at which the first frame support portion supports the first fixed portion, and a second support height, which is a height at which the second frame support portion supports the second fixed portion, are determined such that, when the pressing member moves while pressing the film against the object, a downstream portion of the film that is downstream in the movement direction from the pressed portion pressed by the pressing member is separated from the object, and an upstream portion of the film that is upstream from the pressed portion in the movement direction is maintained in a state separated from the object. (Configuration 19) a first lifting mechanism that changes the first support height in accordance with a position of the pressing member in the moving direction; a second lifting mechanism that changes the second support height in accordance with a position of the pressing member in the moving direction; 19. The adhesive transfer device of claim 18, comprising: (Configuration 20) the first lifting mechanism increases the first support height as the pressing member moves in the movement direction; 20. The adhesive transfer device according to configuration 19, wherein the second support height is lowered as the pressing member is moved in the movement direction by the second lifting mechanism. (Configuration 21) 21. The adhesive transfer device according to configuration 20, wherein the speed at which the second lifting mechanism lowers the second support height is variable depending on the position of the pressing member in the movement direction. (Configuration 22) 22. The adhesive transfer device according to configuration 21, wherein the speed at which the second support height is lowered by the second lifting mechanism slows as the pressing member moves from the one end to the other end of the object. (Configuration 23) an auxiliary pressing member that is located upstream of the pressing member in the moving direction and presses the film from a back surface side toward the object; 23. The adhesive transfer device according to any one of configurations 18 to 22, wherein the movement mechanism moves the auxiliary pressing member together with the pressing member in the movement direction. (Configuration 24) an auxiliary pressing member that is located upstream of the pressing member in the moving direction and presses the film from a back surface side against the object; 23. The adhesive transfer device according to any one of configurations 18 to 22, wherein the movement mechanism moves the auxiliary pressing member together with the pressing member in the movement direction. (Configuration 25) 25. The adhesive transfer device according to configuration 23 or 24, wherein the movement mechanism is capable of changing a distance between the pressing member and the auxiliary pressing member in the movement direction. (Configuration 26) An adhesive transfer device described in any one of configurations 18 to 25, wherein the first support height is determined so that when the pressing member moves while pressing the film against the object, the one end of the film is supported at a position higher than the surface of the object, and an upstream angle between the upstream portion of the film and the surface of the object is greater than 0°. (Configuration 27) 27. The adhesive transfer apparatus of claim 26, wherein the upstream angle is less than 70°. (Configuration 28) The adhesive transfer device of configuration 26 or 27, wherein the first support height and the second support height are determined so that the upstream angle is constant when the pressing member moves while pressing the film against the object. (Configuration 29) The adhesive transfer device of any one of configurations 18 to 28, wherein the second support height is determined so that when the pressing member moves while pressing the film against the object, the other end of the film is supported at a position higher than the surface of the object, and a downstream angle between the downstream portion of the film and the surface of the object is greater than 0°. (Configuration 30) 30. The adhesive transfer apparatus of claim 29, wherein the downstream angle is less than 70°. (Configuration 31) An adhesive transfer device as described in configuration 29 or 30, wherein the first support height and the second support height are determined so that the downstream angle is constant when the pressing member moves while pressing the film against the object. (Configuration 32) 32. The adhesive transfer device according to any one of configurations 18 to 31, wherein the adhesive has a viscosity of 237 Pa·s or less when the pressing member moves while pressing the film against the object. (Configuration 33) The adhesive transfer device according to any one of configurations 18 to 32, further comprising a heating member for heating the adhesive. (Configuration 34) 34. The adhesive transfer device according to configuration 33, wherein the heating member is provided on the stage and heats the adhesive in contact with the object via the stage. (Configuration 35) 35. The adhesive transfer device according to any one of configurations 19 to 34, wherein the first lifting mechanism is a mechanism that changes the first support height in response to a vertically downward force applied to the first frame support portion. (Configuration 36) 36. The adhesive transfer device according to any one of configurations 19 to 35, wherein the second lifting mechanism is a mechanism that changes the second support height in response to a vertically downward force applied to the second frame support section. (Configuration 37) 37. The adhesive transfer device according to any one of configurations 19 to 36, wherein the first lifting mechanism has an elastic member that expands and contracts due to a vertically downward force applied to the first frame support portion. (Configuration 38) 38. The adhesive transfer device according to claim 37, wherein the first lifting mechanism has a plurality of the elastic members having different elastic coefficients. (Configuration 39) 39. The adhesive transfer device according to any one of configurations 19 to 38, wherein the second lifting mechanism has an elastic member that expands and contracts due to a vertically downward force applied to the second frame support portion. (Configuration 40) 40. The adhesive transfer device according to claim 39, wherein the second lifting mechanism has a plurality of the elastic members having different elastic coefficients. (Configuration 41) 41. The adhesive transfer device according to any one of configurations 19 to 40, wherein the first lifting mechanism has a regulating member that regulates a lower limit of the first support height. (Configuration 42) 42. The adhesive transfer device according to any one of configurations 19 to 41, wherein the second lifting mechanism has a regulating member that regulates a lower limit of the second support height. (Construction 43) 43. The adhesive transfer device according to any one of configurations 19 to 42, wherein the first lifting mechanism has a drive means and changes the first support height by a drive force output by the drive means. (Configuration 44) 44. The adhesive transfer device according to any one of configurations 19 to 43, wherein the second lifting mechanism has a drive means and changes the second support height by a drive force output by the drive means. [Explanation of symbols]

[0085] 102: stage, 104: object, 105: first frame support part, 106: second frame support part, 107: pressure roller, 110: roller support device, 202: frame, 203: film, 204: adhesive, 205: fixing part, 206: first side, 207: second side, 208: pressed part, 209: downstream part, 210: upstream part

Claims

1. An adhesive transfer method for transferring a thermoplastic adhesive formed on a surface of a film to an object, comprising: a heating step of heating the adhesive; a pressing step of pressing the film against the object from the back side by a pressing member; a moving step of moving the pressing member from one end of the object to the other end in a fixed moving direction; and In the moving process, the downstream portion of the film, which is downstream of the pressed portion pressed by the pressing member in the moving direction, is separated from the object, and the upstream portion, which is upstream of the pressed portion in the moving direction, is maintained in a state separated from the object, and a portion of the adhesive formed in the downstream portion is peeled off in the upstream portion, thereby transferring a portion of the adhesive to the object.

2. 2. The adhesive transfer method according to claim 1, wherein in the moving process, an upstream support height, which is a height at which the upstream end of the film in the moving direction is supported, and a downstream support height, which is a height at which the downstream end of the film in the moving direction is supported, change depending on the position of the pressing member in the moving direction.

3. 3. The adhesive transfer method according to claim 2, wherein as the pressing member moves in the movement direction, the upstream support height increases and the downstream support height decreases.

4. 4. The adhesive transfer method according to claim 3, wherein the speed at which the downstream support height is lowered varies depending on the position of the pressing member in the movement direction.

5. 5. The adhesive transfer method according to claim 4, wherein the speed at which the downstream support height is lowered decreases as the pressing member moves from the one end to the other end of the object.

6. In the pressing step, in addition to the pressing member, an auxiliary pressing member is used to press the film from the back surface side toward the object on the upstream side of the pressing member in the movement direction. 、 The adhesive transfer method according to any one of claims 1 to 5, wherein in the moving step, the auxiliary pressing member is moved in the moving direction together with the pressing member to adjust the distance between the upstream portion of the film and the object.

7. In the pressing step, in addition to the pressing member, an auxiliary pressing member is used to press the film against the object from the back surface side, the auxiliary pressing member being located upstream of the pressing member in the movement direction; 6. The adhesive transfer method according to claim 1, wherein in the moving step, the auxiliary pressing member is moved in the moving direction together with the pressing member, so that the upstream portion of the film from the pressed portion to the upstream pressed portion pressed by the auxiliary pressing member is held in close contact with the object, and the portion of the film upstream of the upstream pressed portion in the moving direction is held spaced apart from the object.

8. The adhesive transfer method according to claim 6, wherein the distance between the pressing member and the auxiliary pressing member in the movement direction is changeable in the pressing step.

9. An adhesive transfer method according to any one of claims 1 to 5, wherein in the moving process, the upstream end of the film in the moving direction is supported at a position higher than the surface of the object, and the upstream angle formed between the upstream part of the film and the surface of the object is greater than 0°.

10. The adhesive transfer method of claim 9, wherein the upstream angle is less than 70°.

11. The adhesive transfer method according to claim 9 , wherein the upstream angle is constant during the moving step.

12. An adhesive transfer method according to any one of claims 1 to 5, wherein in the moving process, the downstream end of the film in the moving direction is supported at a position higher than the surface of the object, and the downstream angle formed between the downstream part of the film and the surface of the object is greater than 0°.

13. The adhesive transfer method of claim 12, wherein the downstream angle is less than 70°.

14. The adhesive transfer method of claim 12, wherein the downstream angle is constant during the moving step.

15. The adhesive transfer method according to any one of claims 1 to 5, wherein the viscosity of the adhesive in the transferring step is 237 Pa·s or less.

16. 2. The adhesive transfer method according to claim 1, wherein in the heating step, the adhesive in contact with the object is heated via the stage by a heating member provided on a stage on which the object is placed.

17. An adhesive transfer device that transfers a thermoplastic adhesive formed on a surface of a film to an object, a frame to which one end and the other end of the film are fixed; a first frame support portion that supports a first fixing portion of the frame to which the one end of the film is fixed; a second frame support portion that supports a second fixing portion of the frame to which the other end of the film is fixed; a stage for placing the object so as to face the surface of the film; a heating element for heating the adhesive; a pressing member capable of pressing the film against the object from the back side; a moving mechanism that moves the pressing member in a predetermined direction from one end of the object to the other end while pressing the film against the object; and The adhesive transfer device is characterized in that the first support height, which is the height at which the first frame support portion supports the first fixed portion, and the second support height, which is the height at which the second frame support portion supports the second fixed portion, are determined so that when the pressing member moves while pressing the film against the object, the downstream portion of the film, which is downstream in the movement direction from the pressed portion pressed by the pressing member, is separated from the object, and the upstream portion, which is upstream in the movement direction from the pressed portion, is maintained in a state separated from the object.

18. a first lifting mechanism that changes the first support height in accordance with a position of the pressing member in the movement direction; a second lifting mechanism that changes the second support height in accordance with a position of the pressing member in the movement direction; 20. The adhesive transfer device of claim 17, comprising:

19. the first lifting mechanism increases the first support height as the pressing member moves in the movement direction; The adhesive transfer device according to claim 18 , wherein the second support height is lowered as the pressing member moves in the movement direction by the second lifting mechanism.

20. 20. The adhesive transfer device according to claim 19, wherein the speed at which the second lifting mechanism lowers the second support height varies depending on the position of the pressing member in the movement direction.

21. 21. The adhesive transfer device according to claim 20, wherein the speed at which the second lifting mechanism lowers the second support height slows as the pressing member moves from the one end to the other end of the object.

22. an auxiliary pressing member that is located upstream of the pressing member in the movement direction and presses the film from the back surface toward the object; 22. The adhesive transfer device according to claim 17, wherein the movement mechanism moves the auxiliary pressing member together with the pressing member in the movement direction.

23. an auxiliary pressing member that is located upstream of the pressing member in the movement direction and presses the film from the back surface against the object; 22. The adhesive transfer device according to claim 17, wherein the movement mechanism moves the auxiliary pressing member together with the pressing member in the movement direction.

24. The adhesive transfer device according to claim 22, wherein the movement mechanism is capable of changing the distance between the pressing member and the auxiliary pressing member in the movement direction.

25. The adhesive transfer device according to any one of claims 17 to 21, wherein the first support height is determined so that when the pressing member moves while pressing the film against the object, the one end of the film is supported at a position higher than the surface of the object, and the upstream angle between the upstream portion of the film and the surface of the object is greater than 0°.

26. 26. The adhesive transfer device of claim 25, wherein the upstream angle is less than 70 degrees.

27. The first support height and the second support height are set to a value at which the pressing member presses the film against the object.

26. The adhesive transfer device according to claim 25, wherein the upstream angle is determined to be constant when the adhesive transfer device moves while pressing against the upstream angle.

28. The adhesive transfer device according to any one of claims 17 to 21, wherein the second support height is determined so that when the pressing member moves while pressing the film against the object, the other end of the film is supported at a position higher than the surface of the object, and the downstream angle between the downstream portion of the film and the surface of the object is greater than 0°.

29. 30. The adhesive transfer device of claim 28, wherein the downstream angle is less than 70 degrees.

30. 29. The adhesive transfer device of claim 28, wherein the first support height and the second support height are determined so that the downstream angle is constant when the pressing member moves while pressing the film against the object.

31. 22. The adhesive transfer device according to claim 17, wherein the adhesive has a viscosity of 237 Pa·s or less when the pressing member moves while pressing the film against the object.

32. The adhesive transfer device according to claim 18, wherein the heating member is provided on the stage and heats the adhesive in contact with the object via the stage.

33. The adhesive transfer device according to any one of claims 18 to 21, wherein the first lifting mechanism is a mechanism that changes the first support height in response to a vertical downward force applied to the first frame support portion.

34. The adhesive transfer device according to any one of claims 18 to 21, wherein the second lifting mechanism is a mechanism that changes the second support height in response to a vertical downward force applied to the second frame support portion.

35. 22. The adhesive transfer device according to claim 18, wherein the first lifting mechanism has an elastic member that expands and contracts due to a vertically downward force applied to the first frame support portion.

36. The adhesive transfer device according to claim 35 , wherein the first lifting mechanism has a plurality of elastic members having different elastic moduli.

37. 22. The adhesive transfer device according to claim 18, wherein the second lifting mechanism has an elastic member that expands and contracts due to a vertically downward force applied to the second frame support portion.

38. 38. The adhesive transfer device according to claim 37, wherein the second lifting mechanism has a plurality of elastic members having different elastic moduli.

39. 22. The adhesive transfer device according to claim 18, wherein the first lifting mechanism has a regulating member that regulates a lower limit of the first support height.

40. 22. The adhesive transfer device according to claim 18, wherein the second lifting mechanism has a regulating member that regulates a lower limit of the second support height.

41. 22. The adhesive transfer device according to claim 18, wherein the first lifting mechanism has a drive means, and changes the first support height by a drive force output by the drive means.

42. The adhesive transfer device according to any one of claims 18 to 21, wherein the second lifting mechanism has a drive means, and changes the second support height by a drive force output by the drive means.

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