Measuring device

Abstract

To provide a measuring device with which it is possible to suppress the effect of the ambient temperature exerted on measurement results even when part of a constituent member (measurement unit) of the measuring device such as a probe unit or a detector has been replaced.SOLUTION: A measuring device (1) comprises: a detector (10) including a probe unit (14) which is provided with a probe for measuring a surface of a measurement object and attached so as to be capable of swinging around the swing center in accordance with the surface shape of the measurement object; a temperature gauge (80) for measuring the temperature at measurement time by the probe unit; a temperature correction parameter holding unit (108) that holds a temperature correction parameter corresponding to the type of probe unit, the temperature at the time of the measurement by the temperature gauge and the temperature at calibration time; and a temperature correction unit (102) that detects the type of probe unit used for the measurement, acquires from the temperature correction parameter holding unit the temperature correction parameter corresponding to the type of probe unit, the temperature at the time of the measurement by the temperature gauge, and the temperature at the calibration time, and corrects measurement results on the basis of the temperature correction parameter.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a measuring device, and more particularly to a measuring device for measuring the shape, roughness, contour, etc. of the surface of a measuring object. [Background technology]

[0002] There is known a measuring device for measuring the shape, roughness, contour, etc. of the surface of a measurement object. For example, Patent Document 1 discloses a surface texture measuring device that measures the surface texture of a measurement object by scanning a stylus protruding from the tip of a measurement arm while contacting the measurement object surface of the measurement object and detecting minute vertical movements of the stylus. In the surface texture measuring device described in Patent Document 1, a measurement arm is supported so as to be able to swing (move in an arc) in the vertical direction with a rotation axis as a fulcrum. Then, a scale having a scale graduation along the swing direction of the measurement arm is used to detect the rotation angle caused by the swing of the measurement arm.

[0003] In the above-mentioned measuring device, when the environmental temperature changes, the length of the measuring arm changes due to thermal expansion, and therefore the measurement result of the displacement of the stylus fluctuates due to the environmental temperature.

[0004] Regarding the above problem, Patent Document 2 discloses that the thermal expansion coefficients of the stylus, scale, and connection parts of the measuring device are adjusted to satisfy certain conditions, thereby suppressing the effect of the environmental temperature on the measurement results. Patent Document 2 also discloses that the thermal expansion coefficient of the stylus is adjusted to satisfy the above conditions by forming the stylus by joining together a plurality of members made of materials with different thermal expansion coefficients. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2020-003436 A [Patent Document 2] JP 2021-173719 A Summary of the Invention [Problem to be solved by the invention]

[0006] Incidentally, in a measuring device with a replaceable stylus, a long stylus part may be used to expand the movable range of the tip of the stylus and thereby expand the measurement range. When a long stylus part is used, the measurement pressure applied to the tip of the stylus increases, which may cause wear of the tip of the stylus and scratches on the measurement object. For this reason, when a long stylus part is used, it is preferable to form the stylus part from a single material with a light mass per unit volume in order to suppress an increase in the measurement pressure. However, if the material constituting the stylus part is limited, it becomes difficult to adjust the thermal expansion coefficient of the stylus part by connecting multiple members as in Patent Document 2.

[0007] In addition, in a measuring device with replaceable detectors, when the detector is replaced, the arm length of the lever on the detector side (the part from the center of oscillation to the scale side) changes. When the arm length of the lever on the detector side changes, it is difficult to perform high-precision measurements, even if a stylus part with an adjusted thermal expansion coefficient is used.

[0008] The present invention has been made in consideration of the above circumstances, and aims to provide a measuring device that can suppress the effect of environmental temperature on measurement results even when some of the components (measuring parts) of the measuring device, such as the stylus part or detector, are replaced. [Means for solving the problem]

[0009] In order to solve the above problem, a measuring device according to a first aspect of the present invention is provided with a stylus for measuring the surface of a measured object, and comprises a detector including a stylus section mounted so as to be swingable around a swing center according to the shape of the surface of the measured object, a thermometer for measuring the temperature during measurement by the stylus section, a temperature correction parameter storage unit for storing temperature correction parameters according to the type of stylus section and the temperature during measurement measured by the thermometer and the temperature during calibration, and a temperature correction unit for detecting the type of stylus section used in the measurement, obtaining from the temperature correction parameter storage unit the temperature correction parameters according to the type of stylus section and the temperature during measurement measured by the thermometer and the temperature during calibration, and correcting the measurement results based on the temperature correction parameters.

[0010] In the measurement device of the second aspect of the present invention, in the first aspect, the temperature correction parameter storage unit stores temperature correction parameters corresponding to the type of detector, the temperature at the time of measurement measured by a thermometer, and the temperature at the time of calibration, and the temperature correction unit detects the type of detector used in the measurement, obtains temperature correction parameters corresponding to the type of detector, the temperature at the time of measurement measured by a thermometer, and the temperature at the time of calibration from the temperature correction parameter storage unit, and corrects the measurement results based on the temperature correction parameters.

[0011] A measuring device according to a third aspect of the present invention is the first or second aspect, wherein when the stylus portion measures a calibrator for calibrating the measuring device, the temperature correction unit calculates the amount of thermal expansion of the calibrator based on the temperature measured by the thermometer, and corrects the measurement results based on the amount of thermal expansion. Effect of the Invention

[0012] According to the present invention, even when a part of a component (measurement unit) of a measurement device such as a stylus unit or a detector is replaced, the influence of the environmental temperature on the measurement result can be suppressed. [Brief description of the drawings]

[0013] [Figure 1] FIG. 1 is a diagram showing a measurement device according to an embodiment of the present invention. [Diagram 2]2 is a block diagram showing a control system of the measurement device according to the embodiment of the present invention. FIG. [Diagram 3] 4 is a flow chart showing an overall flow of temperature correction. [Figure 4] FIG. 13 is a diagram showing a measurement device during calibration. [Diagram 5] FIG. 2 is an enlarged side view of the calibrator. [Figure 6] 11 is a diagram for explaining the influence of temperature changes in a measurement unit. FIG. [Figure 7] 13 is a graph showing an example of calculation results of an error in the detector (Z-axis) indication precision. [Figure 8] FIG. 13 is a diagram illustrating an example of temperature correction. [Figure 9] FIG. 13 is a diagram showing an example of a GUI for temperature correction. [Figure 10] 4 is a flowchart showing a procedure for calibrating the measurement device. [Figure 11] 4 is a flowchart showing a procedure for measuring a measurement target W in the measurement device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] Hereinafter, an embodiment of a measuring device according to the present invention will be described with reference to the accompanying drawings.

[0015] [Measuring equipment] 1 is a diagram showing a measuring device according to an embodiment of the present invention. In the following description, a three-dimensional orthogonal coordinate system is used in which the XY plane is the horizontal plane and the Z direction is the vertical direction (perpendicular direction).

[0016] The measuring device 1 is a device for measuring the shape, roughness, contour, etc. of the surface of a measuring object W placed on a measuring object placement section (hereinafter referred to as a stage) 50.

[0017] 1, the stage 50 is placed on a base plate 52, and the surface of the stage 50 (the surface on which the measurement target W is placed) is parallel to the XY plane. A column (Z-axis) 54 extending approximately perpendicular to the surface of the stage 50 is placed on the base plate 52. A carriage (X-axis) 56 is attached to the column 54, and the carriage 56 is movable in the Z direction along the column 54 by an actuator (not shown).

[0018] The detector 10 is attached to the carriage 56, and the detector 10 is movable in the X direction relative to the carriage 56 by an actuator (not shown). A scale 58 for detecting the X direction position of the detector 10 is attached to the carriage 56. The scale 58 is, for example, a linear scale (linear position scale) having scale graduations formed along its length.

[0019] In this embodiment, the detector 10 is movable with respect to the column 54, but the present invention is not limited to this. For example, the column 54 may be movable along the X direction relative to the stage 50, or the stage 50 may be movable along the X or Z direction relative to the column 54. In other words, it is sufficient that the measurement target W and the detector 10 placed on the stage 50 are configured to be relatively movable in the XZ directions.

[0020] Furthermore, the detector 10 may be movable relatively to the measurement object W placed on the stage 50 not only in the X direction but also in the Y direction.

[0021] As shown in FIG. 1, the detector 10 includes a stylus portion 14, an arm portion 16, a swing shaft 20, a scale 22, and a scale head 24.

[0022] The stylus part 14 is fixed so as to be approximately in a straight line with the arm part 16, and the stylus part 14 and the arm part 16 are attached to the detector housing 26 so as to be able to swing integrally around the swing axis 20. The mounting angle of the detector 10 with respect to the carriage 56 is adjusted so that the swing axis 20 is approximately parallel to the XY plane. Hereinafter, the stylus part 14 attached to the arm part 16 is also referred to as the swing part 18.

[0023] The configuration of the oscillating part 18 is not limited to the substantially linear example shown in FIG. 1. For example, the stylus part 14 or the arm part 16 may have an L-shaped bent part, and the stylus part 14 and the arm part 16 may be attached so as to be substantially parallel to each other.

[0024] A stylus 12 is provided at the tip of the stylus section 14. The stylus 12 extends downward (in the -Z direction) in the figure. When the stylus 12 is brought into contact with the surface of the measurement object W placed on the stage 50 with a predetermined pressure, the oscillating section 18 oscillates around the oscillating axis 20 according to the height and unevenness of the surface of the measurement object W at the contact position.

[0025] The configuration of the stylus unit 14 is not limited to the example shown in Fig. 1. For example, the stylus unit 14 may be a T-shaped stylus with styluses provided in the vertical direction in the figure, or an L-shaped stylus with a stylus protruding downward in the figure longer than the example shown in Fig. 1.

[0026] The scale 22 is fixed to the detector housing 26 so as to face the base end of the arm portion 16. The detector housing 26 is a member that connects the oscillation center 20C of the oscillation shaft 20 and the scale 22 (defines the distance between the oscillation center 20C of the oscillation shaft 20 and the scale 22).

[0027] The scale 22 is, for example, a linear scale (linear position scale) with scale graduations formed along the length direction of the scale 22. The scale 22 is attached so that its length direction (displacement detection direction) is approximately perpendicular to the length direction of the oscillating portion 18.

[0028] The scale head 24 is fixed to the base end of the arm portion 16 and is capable of swinging integrally with the swinging portion 18. The scale head 24 is a device that reads the scale (hereinafter referred to as the indicated value) at the opposing position of the scale 22 fixed to the detector housing 26. The type of the scale head 24 is not particularly limited, but the scale head 24 may be, for example, a photoelectric sensor for reading the scale of the scale 22 or a non-contact sensor equipped with an imaging element and an illumination light source (for example, an LED (Light-Emitting Diode)).

[0029] The reading of the graduations of the scale 22 read by the scale head 24 is output to the control device 100 (see FIG. 2).

[0030] The control device 100 controls the actuators provided on the column 54 and the carriage 56 to move the measurement object W and the stylus 12 of the detector 10 relatively, while obtaining the readings of the graduations of the scale 22 for each position on the surface of the measurement object W. This makes it possible to measure the shape, roughness, contour, etc. of the surface of the measurement object W.

[0031] In this embodiment, the scale 22 is fixed to the detector housing 26, and the scale head 24 is fixed to the base end of the arm section 16, but the present invention is not limited to this. For example, the scale head 24 may be fixed to the detector housing 26, and the scale 22 may be fixed to the base end of the arm section 16. In addition, the scale 22 is not limited to a linear scale, and may be, for example, an arc scale (angle scale) formed in an arc shape along the swing direction of the arm section 16.

[0032] Fig. 2 is a block diagram showing a control system of the measurement device 1. As shown in Fig. 2, the control device 100 includes a control unit 102, an input unit 104, and a display unit .

[0033] The control unit 102 includes a processor (e.g., a CPU (Central Processing Unit) or an MPU (Micro-Processing Unit)) for controlling each part of the measuring device 1, and a memory (e.g., a ROM (Read Only Memory), a RAM (Random Access Memory)). In response to an operation input from the input unit 104, the control unit 102 outputs control signals for controlling the control device 100 and the measuring device 1, and control signals for controlling an actuator for moving the detector 10, etc.

[0034] The control unit 102 has a function of detecting the type of the measurement unit when a part of the components (measurement unit) of the measurement device 1, such as the stylus unit 14 or the detector 10, is replaced, and a function of correcting temperature based on the type of the measurement unit and the temperatures at the time of calibration and measurement. The control unit 102 is an example of a temperature correction unit.

[0035] The input unit 104 is a device for receiving operational input from an operator, and includes, for example, a keyboard, a mouse, a touch panel, and the like.

[0036] The display unit 106 is a device for displaying images, and includes, for example, an LCD (Liquid Crystal Display). The display unit 106 displays, for example, a GUI (Graphical User Interface) for operating the control device 100, the measuring device 1, the actuator, and the like, as well as measurement results such as the shape, roughness, or contour of the surface of the measurement target W.

[0037] Storage 108 is a device that stores programs for controlling measurement device 1 and data of measurement results, and includes, for example, a hard disk drive (HDD) or a solid state drive (SSD), etc. Storage 108 is an example of a temperature correction parameter storage unit that stores temperature correction parameters described below.

[0038] The detector driving mechanism 60 includes an X-axis driving section and a Z-axis driving section (for example, actuators, not shown in FIG. 1) for moving the detector 10 in the X and Z directions, respectively.

[0039] The thermometer 80 is a thermometer capable of measuring the environmental temperature in the vicinity of the stage 50. In the example shown in Fig. 1, the thermometer 80 is disposed in the vicinity of the stage 50, but the location of the thermometer 80 is not particularly limited. For example, instead of the environmental temperature measured by the thermometer 80, it is also possible to use the temperature of a drive unit such as the detector drive mechanism 60. Note that the thermometer 80 may be, for example, a radiation temperature sensor or a color temperature sensor for measuring the temperature of the measurement object W, the calibrator M (see Fig. 4) or the detector 10.

[0040] The control unit 102 receives an input of the reading of the graduations of the scale 22 by the scale head 24, and performs calculations of the shape, roughness, contour, etc. of the surface of the measurement object W from the reading of the graduations of the scale 22.

[0041] As shown in FIG. 3, the control unit 102 performs temperature correction, which will be described later, based on temperatures T1 and T2 measured by the thermometer 80 when the measurement device 1 is calibrated and when the measurement target W is measured, respectively.

[0042] [Calibration of measuring device 1] When measuring a measurement target W using the measuring device 1, calibration is performed to check the accuracy of the measuring device 1, etc. Fig. 4 is a diagram showing the measuring device 1 during calibration. As shown in Fig. 4, during calibration, a calibrator (master) M is placed on the stage 50 of the measuring device 1. During calibration, temperature correction is performed taking into account the effect of temperature change (amount of thermal expansion) in the calibrator M, as described below.

[0043] (Temperature change at calibrator M) Fig. 5 is an enlarged side view of the calibrator M. As shown in Fig. 5, a rectangular block gauge G1 and a hemispherical ball G2 are formed on the upper part of the base part of the calibrator M. Parameters that indicate the surface shape of the calibrator M at a reference temperature T0 (20°C in one example), that is, the height H of the block gauge G1 (height from the base surface of the calibrator M) and the radius R of the ball G2 at the reference temperature T0, are known.

[0044] When the temperature of the calibrator M changes (rises) from T0 to T1 (=T0+ΔT) during calibration, the calibrator M expands as shown in Figure 5. The height of the block gauge G1 at temperature T1 is H+ΔH, and the radius of the ball G2 is R+ΔR.

[0045] Here, if the thermal expansion coefficient of the block gauge G1 is α and the thermal expansion coefficient of the ball G2 is β, the height of the block gauge G1 and the radius of the ball G2 at temperature T1 are expressed by the following equations.

[0046] Height of block gauge G1: H+α*ΔT …(1) Radius of ball G2: R+β*ΔT …(2) The thermal expansion coefficient α of the block gauge G1 and the thermal expansion coefficient β of the ball G2 are known values ​​determined according to the material and shape of the calibrator M. Therefore, the height of the block gauge G1 and the radius of the ball G2 at the time of calibration can be calculated from the difference ΔT between the temperature (environmental temperature) T1 measured by the thermometer 80 at the time of calibration and the reference temperature T0.

[0047] (Temperature change at the measurement point) Fig. 6 is a diagram for explaining the influence of temperature changes in the measurement part. In Fig. 6, the oscillating part 18 (probe part 14 and arm part 16) at the calibration temperature T1 and the measurement temperature T2 are simplified and shown by solid and dashed straight lines, respectively, and the stylus 12 is omitted because it is short compared to the length of the oscillating part 18 and can be ignored.

[0048] As shown in Fig. 6, the distance from the tip of the probe portion 14 to the oscillation center 20C at the reference temperature T0 is defined as L1, and the distance from the oscillation center 20C to the base end of the arm portion 16 is defined as L2. The indicated value of the graduations on the scale 22 at the measurement height Z is defined as Z2. Note that the connection between the probe portion 14 and the arm portion 16 is omitted in Fig. 6, but as shown in Fig. 1, the distance L1 corresponds to the sum of the length of the probe portion 14 and the length of the portion from the tip of the arm portion 16 to the oscillation center 20C, and the distance L2 corresponds to the sum of the length of the portion from the oscillation center 20C to the base end of the arm portion 16.

[0049] When the temperature changes (rises) from calibration temperature T1 to measurement temperature T2 (>T1), the oscillating part 18 expands as shown by the dashed line in Fig. 6. The distance from the stylus part 14 to the oscillation center 20C at temperature T2 after the temperature expansion is taken as L1a, and the distance from the oscillation center 20C to the base end of the arm part 16 is taken as L2a. In this case, in the measuring device 1 after the temperature expansion, the indication value Z2a at the measurement height Z is expressed by the following formula.

[0050] Z2a=(L1*L2a) / (L2*L1a)*Z2 From the above formula, when the measurement height Z is the same, the indication value Z2a at the temperature T2 after the temperature expansion is proportional to the indication value Z2 at the calibration temperature T1. Therefore, the indication value Z2a after the temperature expansion can be expressed by the following formula (3) using a constant C.

[0051] Z2a = Z2 × C … (3) Here, the distances L1 and L2 at the calibration temperature T1 are known, and the distances L1a and L2a at the temperature T2 can be calculated from the difference ΔT between the thermal expansion coefficients of the stylus portion 14 and the arm portion 16, which is determined according to the material and shape, etc., of the stylus portion 14 and the arm portion 16, as in the case of equations (1) and (2).

[0052] As described above, constant C is a value determined by the types of stylus portion 14 and arm portion 16 or detector 10 and the difference T2-T1 between the temperature at the time of calibration and the temperature at the time of measurement. Constant C is stored in storage 108 as a temperature correction parameter (temperature correction coefficient) in association with information on the components of measuring device 1 used in measurement (for example, the type of stylus portion 14 or detector 10).

[0053] Fig. 7 is a graph showing an example of calculation results for error in detector (Z-axis) indication accuracy. The horizontal axis of Fig. 7 indicates the stylus stroke (stroke position Z2 at reference temperature T1), and the vertical axis indicates the detector (Z-axis) indication accuracy (Z2a-Z2). Fig. 7 shows graphs of calculation results when the temperature changes by ±10°C from the calibration temperature T1, and the slope (C-1) of each graph corresponds to the temperature correction parameter C.

[0054] 8, in this embodiment, the detector indication accuracy (Z2a-Z2) becomes zero by performing temperature correction using a temperature correction parameter C prepared for each type of stylus part 14 or detector 10. This makes it possible to suppress the effect of the environmental temperature on the measurement result.

[0055] The temperature correction parameter C used during measurement may be stored as a table (lookup table) corresponding to the temperature T1 during calibration and the temperature T2 during measurement, or may be stored as a function (e.g., an approximation curve obtained by least squares approximation or polynomial approximation) calculated from the temperature correction parameter C corresponding to the temperature T1 during calibration and the temperature T2 during measurement. When the temperature correction parameter C is stored as a table, the temperature correction parameter C corresponding to any temperatures T1 and T2 can be obtained by performing an interpolation calculation, an internal interpolation calculation, or an extrapolation calculation based on the temperature T1 during calibration and the temperature T2 during measurement.

[0056] Then, when measuring the measurement object W, the temperature correction parameter C is acquired from the storage 108, so that the measurement result of the measurement object W can be corrected.

[0057] [Example 1] The measuring device 1 according to the first embodiment is a device in which the stylus part 14, i.e., the part from the fixed part fixed to the arm part 16 to the stylus 12 at the tip, is removable and replaceable. In the first embodiment, the control unit 102 has a function of acquiring information for identifying the stylus part 14 (e.g., an ID (identifier)) or information regarding the type of the stylus part 14 (e.g., the length or material of the arm, etc.). Specific modes for acquiring information regarding the type of the stylus part 14 include, for example, the following (1-1) or (1-2). (1-1) A unique ID (for example, an identification code) is provided to the stylus portion 14, and a table of temperature correction parameters unique to each stylus portion 14 is provided on the measurement device 1 side (inside the storage 108). (1-2) The stylus portion 14 is provided with information on its length and material, and the measuring device 1 (control portion 102) is provided with a function for calculating temperature correction parameters.

[0058] [Example 2] The measuring device 1 according to the second embodiment is a device in which the detector 10 can be detached and replaced from the carriage 56 and the detector driving mechanism 60. In the second embodiment, the control unit 102 has a function of acquiring information for identifying the detector 10 (e.g., an ID (identifier)) or information regarding the type of the detector 10 (e.g., the length or material of an arm provided on the detector 10). Specific aspects for acquiring information regarding the type of the detector 10 may be, for example, any of the following (2-1) to (2-3). (2-1) A unique ID (for example, an identification code) is provided to the detector 10, and a table of temperature correction parameters unique to each detector 10 is provided on the measurement device 1 side (in the storage 108). (2-2) The detector 10 is provided with information regarding the length or material of its internal arm, and the measuring device 1 (control unit 102) is provided with a function for calculating temperature correction parameters. (2-3) It has a function of calculating a temperature correction parameter from a combination of the ID of the stylus part 14 and the ID of the detector 10.

[0059] In the first and second embodiments, the means by which the control unit 102 detects the type of the stylus unit 14 or the detector 10 may be, for example, a user inputting an ID from the input unit 104, or the ID of the stylus unit 14 or the detector 10 may be stored in a two-dimensional code or a non-contact tag (for example, an IC (Integrated Circuit) tag or an RFID (Radio Frequency IDentification) tag) and read by the control device 100.

[0060] Fig. 9 is a diagram showing an example of a GUI for temperature correction. In the example shown in Fig. 9, it is possible to input temperatures (environmental temperatures) measured by a thermometer 80 at the time of calibration and measurement. In addition, it is possible to select by a check box whether or not to use the temperature of a driving unit such as the detector driving mechanism 60 for temperature correction during measurement. These numerical values ​​may be manually input by the input unit 104, or may be automatically input by the control unit 102 acquiring the values ​​from the thermometer 80 or the thermometer of the driving unit.

[0061] 9, it is possible to input the thermal expansion coefficients of the block gauge G1, ball G2, and stylus part 14. These values ​​may be manually input using the input unit 104, or the thermal expansion coefficients α and β corresponding to the block gauge G1 and ball G2 of the calibrator M may be stored in advance in the storage 108, and the values ​​read out by the control unit 102 during calibration may be automatically input. This makes it possible to easily perform temperature correction.

[0062] In the example shown in FIG. 9, whether or not to perform temperature correction of the calibrator M and the stylus part 14 can be selected by check boxes.

[0063] [Temperature correction method] FIG. 10 is a flowchart showing the procedure for calibrating the measurement device 1.

[0064] During calibration, first, as shown in FIG. 4, the calibrator M is placed on the stage 50 of the measurement device 1 (step S10).

[0065] Next, the control unit 102 acquires information about the measurement unit (eg, the type of the stylus unit 14 or the detector 10) attached to the measurement device 1 (step S12).

[0066] Next, the measurement device 1 measures the surface shape of the calibrator M (step S14). The control unit 102 acquires the measurement result of the surface shape of the calibrator M and the temperature T1 during calibration measured by the thermometer 80 (step S16).

[0067] Next, the control unit 102 calculates the amount of thermal expansion of the calibrator M at the time of calibration based on the type information of the measurement unit and the temperature T1 at the time of calibration (step S18).Then, the control unit 102 corrects the measurement result of the calibrator M using the amount of thermal expansion of the calibrator M and stores it (step S20).

[0068] In step S20, first, the control unit 102 calculates the dimensions of the calibrator M after thermal expansion, i.e., the height H+ΔH of the block gauge G1 and the radius R+ΔR of the ball G2. Then, the control unit 102 calculates the distances L1 and L2 using the height H+ΔH of the block gauge G1 and the radius R+ΔR of the ball G2. This allows temperature correction of the calibration of the measurement device 1.

[0069] Therefore, according to this embodiment, by calculating the dimensions of the calibrator M after thermal expansion according to the temperature T1 measured by the thermometer 80 during calibration, the measurement results of the calibrator M can be corrected.

[0070] FIG. 11 is a flowchart showing the procedure for measuring the measurement target W in the measurement device 1.

[0071] During measurement, first, as shown in FIG. 1, a measurement target W is placed on the stage 50 of the measurement device 1 (step S30).

[0072] Next, the control unit 102 acquires information about the measurement unit (eg, the type of the stylus unit 14 or the detector 10) attached to the measurement device 1 (step S32).

[0073] Next, the measurement device 1 measures the surface shape of the measurement object W (step S34). The control unit 102 acquires the measurement result of the surface shape of the measurement object W and the temperature T2 measured by the thermometer 80 during the measurement (step S36).

[0074] Next, the control unit 102 acquires a temperature correction parameter from the storage 108 based on the type information of the measurement unit, the temperature T1 at the time of calibration, and the temperature T2 at the time of measurement (step S38), and corrects and stores the measurement results of the measurement object W using the temperature correction parameter (step S40).

[0075] In step S40, the temperature correction coefficient C and the indication value Z2a at temperature T2 are used to calculate the indication value Z2 that eliminates the influence of the temperature expansion of the stylus part 14 (see formula (4)). This makes it possible to accurately determine the measurement result of the measurement object W at temperature T2.

[0076] According to this embodiment, even when some of the components (measurement section) of the measurement device 1, such as the stylus section 14 or the detector 10, are replaced, the effect of the environmental temperature on the measurement results can be suppressed. [Explanation of symbols]

[0077] 1...measuring device, 10...detector, 12...probe, 14...probe section, 16...arm section, 18...oscillating section, 20...oscillating axis, 22...scale, 24...scale head, 26...detector housing, 50...measurement object placement section, 52...base plate, 54...column, 56...carriage, 58...scale, 60...detector drive mechanism, 80...thermometer, 100...control device, 102...control section, 104...input section, 106...display section, 108...storage

Claims

1. a detector including a stylus for measuring the surface of the object to be measured, the stylus part being attached so as to be swingable around a swing center in accordance with the shape of the surface of the object to be measured; a thermometer for measuring the temperature when the stylus part is used for measurement; a temperature correction parameter storage unit that stores temperature correction parameters according to the type of the stylus unit, the temperature measured by the thermometer at the time of measurement, and the temperature at the time of calibration; a temperature correction unit that detects the type of the stylus used in the measurement, acquires temperature correction parameters corresponding to the type of the stylus, the temperature measured by the thermometer at the time of measurement, and the temperature at the time of calibration from the temperature correction parameter storage unit, and corrects the result of the measurement based on the temperature correction parameters; A measuring device comprising:

2. the temperature correction parameter storage unit stores temperature correction parameters according to the type of the detector, the temperature measured by the thermometer at the time of measurement, and the temperature at the time of calibration; 2. The measurement device according to claim 1, wherein the temperature correction unit detects the type of the detector used in the measurement, acquires from the temperature correction parameter storage unit temperature correction parameters corresponding to the type of the detector, the temperature measured by the thermometer at the time of measurement, and the temperature measured at the time of calibration, and corrects the result of the measurement based on the temperature correction parameters.

3. 3. The measuring device according to claim 1, wherein the temperature correction unit calculates the amount of thermal expansion of the calibrator based on the temperature measured by the thermometer when the stylus unit measures a calibrator for calibrating the measuring device, and corrects the result of the measurement based on the amount of thermal expansion.

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