Measuring device

Abstract

To provide a measuring device with which it is possible to suppress the effect on measurement results of a temperature change due to the internal heating member of a detector.SOLUTION: A measuring device (1) comprises: a detector (10) including an arm unit accommodated in a containing space of a detector housing (30) and attached so as to be capable of swinging around the swing center; a probe unit (14) which is provided with a probe for measuring a surface of a measurement object, and which is attached to the arm unit so as to be capable of swinging integrally with the arm unit in accordance with the surface shape of the measurement object; a first temperature sensor for measuring the temperature of the containing space; and a temperature correction unit (102) that corrects a measurement result from the measurement object on the basis of the temperature of the containing space at the time of the measurement by the first temperature sensor.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a measuring device, and more particularly to a measuring device for measuring the shape, roughness, contour, etc. of the surface of a measuring object. [Background technology]

[0002] There is known a measuring device for measuring the shape, roughness, contour, etc. of the surface of a measurement object. For example, Patent Document 1 discloses a surface texture measuring device that measures the surface texture of a measurement object by scanning a stylus protruding from the tip of a measurement arm while contacting the measurement object surface of the measurement object and detecting minute vertical movements of the stylus. In the surface texture measuring device described in Patent Document 1, a measurement arm is supported so as to be able to swing (move in an arc) in the vertical direction with a rotation axis as a fulcrum. Then, a scale having a scale graduation along the swing direction of the measurement arm is used to detect the rotation angle caused by the swing of the measurement arm. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2020-003436 A [Patent Document 2] JP 2021-173719 A [Patent Document 3] JP 2002-071347 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the above-mentioned measuring device, when power is supplied to the detection head and the board for reading the scale graduations arranged inside the measuring device (detector), the power supply destination becomes a heat source (heating element) and the temperature inside the detector fluctuates. This temperature fluctuation inside the detector causes the length of the arm part near the detection head to change over time, which causes the measurement results to fluctuate, which is an issue.

[0005] Patent Document 2 discloses that the influence of environmental temperature on the measurement results is suppressed by adjusting the thermal expansion coefficients of the stylus part, scale, and connection part of the measuring device so as to satisfy certain conditions. Patent Document 2 also discloses that the temperature expansion coefficient of the stylus part is adjusted to satisfy the above-mentioned conditions by joining together a plurality of members made of materials with different thermal expansion coefficients to form the stylus part. The adjustment using the thermal expansion coefficient of the stylus part described in Patent Document 2 cannot sufficiently suppress the fluctuation of the measurement results when temperature expansion occurs only in the part of the arm part near the detection head.

[0006] Patent Document 3 discloses an example in which a temperature detector is provided near a displacement detector (Z-axis detector). Even with the technology described in Patent Document 3, it is not possible to sufficiently suppress the fluctuation of the measurement result when thermal expansion occurs only in the part of the arm near the detection head.

[0007] The present invention has been made in consideration of the above circumstances, and aims to provide a measurement device that can suppress the effect on measurement results of temperature fluctuations caused by a heating element inside the detector. [Means for solving the problem]

[0008] In order to solve the above problem, a measuring device according to a first aspect of the present invention comprises a detector that is accommodated in an internal space of a detector housing and includes an arm portion that is attached so as to be swingable around a swing center, a stylus portion having a stylus for measuring the surface of an object to be measured, the stylus portion being attached to the arm portion and swingable integrally with the arm portion in accordance with the shape of the surface of the object to be measured, a first temperature sensor that measures the temperature of the internal space, and a temperature correction portion that corrects the measurement result of the object to be measured based on the temperature of the internal space at the time of measurement measured by the first temperature sensor.

[0009] A measuring device according to a second aspect of the present invention is the first aspect, wherein the detector housing includes a heat insulating material for suppressing conduction of heat from the internal space to the stylus portion.

[0010] A measuring device according to a third aspect of the present invention is the first or second aspect, wherein the detector housing has an opening for introducing air from the outside into the contained space and discharging heat from the contained space.

[0011] A measuring device according to a fourth aspect of the present invention, in any of the first to third aspects, is provided with a second temperature sensor for measuring the temperature of the stylus portion, and the temperature correction unit corrects the measurement result of the object to be measured based on the temperature of the contained space at the time of measurement measured by the first temperature sensor and the temperature of the stylus portion at the time of measurement measured by the second temperature sensor. Effect of the Invention

[0012] According to the present invention, by providing the detector housing, it is possible to suppress the heat conduction from the detector to the stylus part. Then, the measurement result of the measurement object can be corrected according to the temperature of the space inside the detector housing at the time of measurement measured by the first temperature sensor. This makes it possible to suppress the influence of temperature fluctuations caused by the heating element inside the detector on the measurement result. [Brief description of the drawings]

[0013] [Figure 1] FIG. 1 is a diagram showing a measurement device according to an embodiment of the present invention. [Diagram 2] 2 is a block diagram showing a control system of the measurement device according to the embodiment of the present invention. FIG. [Diagram 3] FIG. 2 is an enlarged side view (partial cross-sectional view) showing the detector. [Figure 4] FIG. 13 is a diagram for explaining the influence of temperature change on a detector. [Diagram 5] 13 is a graph showing an example of calculation results of an error in the detector (Z-axis) indication precision. [Figure 6] FIG. 13 is a diagram illustrating an example of temperature correction. [Figure 7] 4 is a flowchart showing a procedure for measuring a measurement target W in the measurement device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] Hereinafter, an embodiment of a measuring device according to the present invention will be described with reference to the accompanying drawings.

[0015] [Measuring equipment] 1 is a diagram showing a measuring device according to an embodiment of the present invention. In the following description, a three-dimensional orthogonal coordinate system is used in which the XY plane is the horizontal plane and the Z direction is the vertical direction (perpendicular direction).

[0016] The measuring device 1 is a device for measuring the shape, roughness, contour, etc. of the surface of a measuring object W placed on a measuring object placement section (hereinafter referred to as a stage) 50.

[0017] 1, the stage 50 is placed on a base plate 52, and the surface of the stage 50 (the surface on which the measurement target W is placed) is parallel to the XY plane. A column (Z-axis) 54 extending approximately perpendicular to the surface of the stage 50 is placed on the base plate 52. A carriage (X-axis) 56 is attached to the column 54, and the carriage 56 is movable in the Z direction along the column 54 by an actuator (not shown).

[0018] The detector 10 is attached to the carriage 56, and the detector 10 is movable in the X direction relative to the carriage 56 by an actuator (not shown). A scale 58 for detecting the X direction position of the detector 10 is attached to the carriage 56. The scale 58 is, for example, a linear scale (linear position scale) having scale graduations formed along its length.

[0019] In this embodiment, the detector 10 is movable with respect to the column 54, but the present invention is not limited to this. For example, the column 54 may be movable along the X direction relative to the stage 50, or the stage 50 may be movable along the X or Z direction relative to the column 54. In other words, it is sufficient that the measurement target W and the detector 10 placed on the stage 50 are configured to be relatively movable in the XZ directions.

[0020] Furthermore, the detector 10 may be movable relatively to the measurement object W placed on the stage 50 not only in the X direction but also in the Y direction.

[0021] As shown in FIG. 1, the detector 10 includes a stylus portion 14, an arm portion 16, a swing shaft 20, a scale 22, and a scale head 24.

[0022] The stylus part 14 is fixed to be approximately in a straight line with the arm part 16, and the stylus part 14 and the arm part 16 are attached to a fixed part 26 so as to be able to swing integrally around a swing axis 20. The mounting angle of the stylus part 14 with respect to the carriage 56 of the detector 10 is adjusted so that the swing axis 20 is approximately parallel to the XY plane. Hereinafter, the stylus part 14 attached to the arm part 16 is also referred to as a swing part 18.

[0023] The configuration of the oscillating part 18 is not limited to the substantially linear example shown in FIG. 1. For example, the stylus part 14 or the arm part 16 may have an L-shaped bent part, and the stylus part 14 and the arm part 16 may be attached so as to be substantially parallel to each other.

[0024] A stylus 12 is provided at the tip of the stylus section 14. The stylus 12 extends downward (in the -Z direction) in the figure. When the stylus 12 is brought into contact with the surface of the measurement object W placed on the stage 50 with a predetermined pressure, the oscillating section 18 oscillates around the oscillating axis 20 according to the height and unevenness of the surface of the measurement object W at the contact position.

[0025] The configuration of the stylus unit 14 is not limited to the example shown in Fig. 1. For example, the stylus unit 14 may be a T-shaped stylus with styluses provided in the vertical direction in the figure, or an L-shaped stylus with a stylus protruding downward in the figure longer than the example shown in Fig. 1.

[0026] The scale 22 is fixed to the fixed part 26 so as to face the base end of the arm part 16. The fixed part 26 is a member that connects the oscillation center 20C of the oscillation shaft 20 and the scale 22 (that is, that defines the distance between the oscillation center 20C of the oscillation shaft 20 and the scale 22).

[0027] The scale 22 is, for example, a linear scale (linear position scale) with scale graduations formed along the length direction of the scale 22. The scale 22 is attached so that its length direction (displacement detection direction) is approximately perpendicular to the length direction of the oscillating portion 18.

[0028] The scale head 24 is fixed to the base end of the arm portion 16 and is capable of swinging integrally with the swinging portion 18. The scale head 24 is a device that reads the scale (hereinafter referred to as the indicated value) at the opposing position of the scale 22 fixed to the fixed portion 26. The type of the scale head 24 is not particularly limited, but the scale head 24 may be, for example, a photoelectric sensor for reading the scale of the scale 22 or a non-contact sensor equipped with an imaging element and an illumination light source (for example, an LED (Light-Emitting Diode)).

[0029] The reading of the graduations of the scale 22 read by the scale head 24 is output to the control device 100 (see FIG. 2).

[0030] The control device 100 controls the actuators provided on the column 54 and the carriage 56 to move the measurement object W and the stylus 12 of the detector 10 relatively, while obtaining the readings of the graduations of the scale 22 for each position on the surface of the measurement object W. This makes it possible to measure the shape, roughness, contour, etc. of the surface of the measurement object W.

[0031] In this embodiment, the scale 22 is fixed to the fixed portion 26, and the scale head 24 is fixed to the base end of the arm portion 16, but the present invention is not limited to this. For example, the scale head 24 may be fixed to the fixed portion 26, and the scale 22 may be fixed to the base end of the arm portion 16. In addition, the scale 22 is not limited to a linear scale, and may be, for example, an arc scale (angle scale) formed in an arc shape along the swing direction of the arm portion 16.

[0032] Fig. 2 is a block diagram showing a control system of the measurement device 1. As shown in Fig. 2, the control device 100 includes a control unit 102, an input unit 104, and a display unit .

[0033] The control unit 102 includes a processor (e.g., a CPU (Central Processing Unit) or an MPU (Micro-Processing Unit)) for controlling each part of the measuring device 1, and a memory (e.g., a ROM (Read Only Memory), a RAM (Random Access Memory)). In response to an operation input from the input unit 104, the control unit 102 outputs control signals for controlling the control device 100 and the measuring device 1, and control signals for controlling an actuator for moving the detector 10, etc.

[0034] The control unit 102 has a function of detecting the type of the measurement unit when a part of the components (measurement unit) of the measurement device 1, such as the stylus unit 14 or the detector 10, is replaced, and a function of correcting temperature based on the type of the measurement unit and the temperatures at the time of calibration and measurement. The control unit 102 is an example of a temperature correction unit.

[0035] The control unit 102 receives an input of the reading of the graduations of the scale 22 by the scale head 24, and performs calculations of the shape, roughness, contour, etc. of the surface of the measurement object W from the reading of the graduations of the scale 22.

[0036] The input unit 104 is a device for receiving operational input from an operator, and includes, for example, a keyboard, a mouse, a touch panel, and the like.

[0037] The display unit 106 is a device for displaying images, and includes, for example, an LCD (Liquid Crystal Display). The display unit 106 displays, for example, a GUI (Graphical User Interface) for operating the control device 100, the measuring device 1, the actuator, and the like, as well as measurement results such as the shape, roughness, or contour of the surface of the measurement target W.

[0038] The storage 108 is a device that stores programs for controlling the measurement device 1, data on measurement results, and the like, and includes, for example, a hard disk drive (HDD) or a solid state drive (SSD).

[0039] The detector driving mechanism 60 includes an X-axis driving section and a Z-axis driving section (for example, actuators, not shown in FIG. 1) for moving the detector 10 in the X and Z directions, respectively.

[0040] [Configuration of detector 10] FIG. 3 is an enlarged side view of the detector 10 (a cross-sectional view of the detector housing 30).

[0041] As shown in Figure 3, in the detector 10 of this embodiment, the fixed portion 26 to which the oscillating portion 18 is attached is disposed inside the detector housing 30 (hereinafter also referred to as the internal space), and the stylus portion 14 is exposed to the outside through an opening 32 formed in the detector housing 30.

[0042] As described above, the scale head 24 includes an illumination light source for illuminating the graduations of the scale 22 when reading the graduations, and this illumination light source serves as a heating element in the detector 10. The detector housing 30 suppresses the heat generated from the heating element in the detector 10 from being conducted to the outside of the detector housing 30. That is, since the arm portion 16 is accommodated in the internal space of the detector housing 30, it is affected by temperature changes in the internal space of the detector housing 30. In contrast, the stylus portion 14 is exposed to the outside of the detector housing 30, and is less susceptible to temperature changes in the internal space of the detector housing 30. This makes it possible to suppress temperature expansion caused by the heating element in the detector 10 being conducted to the stylus portion 14.

[0043] The material of the detector housing 30 is not particularly limited, and may be made of metal, for example. At least one of the inner and outer surfaces of the detector housing 30 may be provided with a heat insulating material having heat insulating properties. The detector housing 30 itself may be made of a heat insulating material. Examples of the heat insulating material that can be used include heat insulating materials containing resin (including, for example, a porous layer), urethane, rubber, carbon fiber, glass wool, slag wool, etc., and heat insulating materials made of metal films (including, for example, aluminum, etc.) sandwiching a porous layer. This can further enhance the effect of suppressing heat conduction.

[0044] The shape of the detector housing 30 is not particularly limited as long as it can accommodate at least the portion that serves as a heating element therein. In the example shown in Fig. 3, the detector housing 30 is substantially rectangular parallelepiped in shape, but it may also be tubular, cylindrical, or polyhedral in shape.

[0045] In the example shown in FIG. 3, the detector housing 30 is formed with openings 34 and 36 in addition to the opening 32 for the stylus part 14. The openings 34 and 36 are located diagonally at the lower part (lower surface) and upper part (upper surface) of the detector housing 30, which is substantially rectangular. The air (AIR) heated inside the detector housing 30 flows out from the opening 36 at the upper part of the detector housing 30 to the outside. On the other hand, the outside air (AIR) is introduced (flows in) from the lower opening 34 and flows (circulates) throughout the inside of the detector housing 30. This allows the heat inside the detector housing 30 to be discharged to the outside, thereby suppressing the accumulation and rise of the temperature inside the detector housing 30.

[0046] Here, it is desirable to provide one of the openings 34 and 36 at the upper part (+Z side) of the internal space of the detector housing 30, and the other near or below the scale head 24, which is a heat generating body. This allows air to flow uniformly inside the detector housing 30, and allows the internal heat to be discharged.

[0047] In addition, in this embodiment, the illumination light source of the scale head 24 is exemplified as a heating element in the detector 10, but the type of heating element is not limited to this. Since the circuit board or driving mechanism in the detector 10 can also be a heating element, openings may be provided in accordance with the positions of these heating elements. In other words, the number and arrangement of openings are not limited to the example in FIG. 3.

[0048] Since it is sufficient for the detector housing 30 to have the effect of suppressing heat conduction toward the stylus part 14, it is preferable that the openings 34 and 36 are arranged so that heated air does not easily flow toward the stylus part 14. The openings 34 and 36 may be formed, for example, on a surface of the detector housing 30 other than the surface facing the stylus part 14.

[0049] [Temperature correction] 3, the measurement device 1 includes temperature sensors 80 and 82. The temperature sensors 80 and 82 are examples of a first temperature sensor and a second temperature sensor, respectively.

[0050] The temperature sensor 80 is disposed in the internal space of the detector housing 30, and measures the temperature of the internal space of the detector housing 30 or the temperature of the space in the vicinity of the scale 22. The temperature sensor 82 is disposed outside the detector housing 30, and measures the temperature of the stylus part 14 or the environmental temperature of the stylus part 14. In this embodiment, the temperature measured by the temperature sensor 80 is used to perform temperature correction of the measurement results of the measurement object W.

[0051] 3, the temperature sensor 80 is attached to the fixed portion 26, and the temperature sensor 82 is attached near the stylus portion 14, but the arrangement of the temperature sensors 80 and 82 is not limited to this. The temperature sensor 80 may be, for example, a radiation temperature sensor or a color temperature sensor for measuring the temperature of the scale 22 or the scale head 24. The temperature sensor 82 may be, for example, a radiation temperature sensor or a color temperature sensor for measuring the temperature of the stylus portion 14.

[0052] Fig. 4 is a diagram for explaining the influence of temperature changes on the detector 10. In Fig. 4, the oscillating part 18 (the stylus part 14 and the arm part 16) at the reference temperature T0 (20°C in one example) and the temperature during measurement are shown simplified by solid and dashed straight lines, respectively, and the stylus 12 is omitted because it is short compared to the length of the oscillating part 18 and can be ignored.

[0053] The distance from the tip of the stylus portion 14 to the oscillation center 20C at the reference temperature T0 is defined as L1, and the distance from the oscillation center 20C to the base end of the arm portion 16 is defined as L2. Furthermore, the indicated value of the scale 22 when the reference temperature is T0 and the measurement height is Z is defined as Z2.

[0054] In addition, in Figure 4, the connection portion between the probe portion 14 and the arm portion 16 is omitted, but as shown in Figure 3, the distance L1 corresponds to the sum of the length of the probe portion 14 and the length of the portion from the tip end of the arm portion 16 to the swing center 20C, and the distance L2 corresponds to the sum of the length of the portion from the swing center 20C of the arm portion 16 to the base end.

[0055] As described above, in this embodiment, the arm portion 16 included in the internal space of the detector housing 30 expands due to the effect of temperature changes within the detector housing 30. The temperature of the space inside the detector housing 30 measured by the temperature sensor 80 is T 80 (>T0), and the temperature of the probe portion 14 measured by the temperature sensor 82 changes (rises) to T 82 When the temperature T changes (increases) to T0, the oscillation part 18 expands as shown by the dashed line in FIG. 80 and T 82 The distance from the stylus portion 14 to the oscillation center 20C in the state shown in FIG.

[0056] At this time, the indicated value Z2a when the measurement height is Z in the measuring device 1 after the thermal expansion is expressed by the following formula.

[0057] Z2a=(L1*L2a) / (L2*L1a)*Z2 From the above formula, when the measurement height Z is the same, the temperature T after thermal expansion 80 and T 82 The indication value Z2a at the reference temperature T0 is proportional to the indication value Z2 at the reference temperature T0. Therefore, the indication value Z2a after the temperature expansion can be expressed by the following equation using a constant C.

[0058] Z2a = Z2 × C … (1) Here, the distances L1 and L2 at the reference temperature T0 are known. Also, the distance L2a after the temperature change is 80 and the difference between the reference temperature T0 (T 80 The distance L1a after the temperature change can be calculated from the temperature T 82 and the difference between the reference temperature T0 (T 82 -T0) and the length of the probe part 14 after thermal expansion calculated from the thermal expansion coefficient of the probe part 14, and the temperature T 80 and the difference between the reference temperature T0 (T 80 −T0) and the length of the portion of the arm portion 16 to the left of the swing center 20C in the figure after thermal expansion calculated from the thermal expansion coefficient of the arm portion 16.

[0059] As mentioned above, the constant C is the temperature T when the measurement object W is measured. 80 and T 82 The temperature T 80 and T 82 The constant C for each temperature is stored in the storage 108 as a temperature correction parameter (temperature correction coefficient).

[0060] When measuring the object W, the control unit 102 detects the temperatures T 80 and T 82 and obtain the temperature T 80 and T 82 The control unit 102 then reads out the temperature correction coefficient C corresponding to the temperature T 80 and T 82 and the temperature correction coefficient C corresponding to temperature T 80 and T 82 The indication value Z2 is calculated by eliminating the effects of the temperature expansion of the stylus portion 14 and the arm portion 16 using the indication value Z2a at C. Here, the indication value Z2 can be calculated by using the relational expression Z2=Z2a / C (see equation (1)), for example.

[0061] According to this embodiment, the temperatures T 80 and T 82 By acquiring the temperature correction parameter C from the storage 108 in response to the temperature, the measurement result of the measurement object W can be corrected.

[0062] In the case of a measuring device in which the stylus part 14 or the detector 10 is replaceable, the constant C also depends on the components of the measuring device 1 used in the measurement (for example, the type of the stylus part 14 or the detector 10). In this case, the constant C may be prepared for each component of the measuring device 1 used in the measurement and stored in the storage 108 in association with information on the relevant components.

[0063] In addition, in this embodiment, two temperature sensors 80 and 82 are provided to measure the temperature of the contained space of the detector housing 30 and the probe part 14, but the present invention is not limited to this. For example, the temperature change on the probe part 14 side that is open to the outside air is smaller than the temperature change in the contained space, and it is considered that the effect of the temperature expansion of the probe part 14 on the measurement result is relatively small. For this reason, the temperature sensor 82 on the probe part 14 side may be omitted, and only the temperature expansion in the contained space may be considered.

[0064] [Temperature correction example] FIG. 5 is a graph showing an example of the calculation result of the error of the detector (Z-axis) indication accuracy. The horizontal axis of FIG. 5 indicates the stylus stroke (stroke position Z2 at the reference temperature T0), and the vertical axis indicates the detector (Z-axis) indication accuracy (Z2a-Z2). FIG. 5 shows the relationship between the temperature T 80 The graphs show the calculation results when the temperature of the probe portion 14 changes by ±10° C., and the slope (C-1) of each graph corresponds to the temperature correction parameter C. For the sake of simplicity, the temperature T 82 is assumed not to change from the reference temperature T0.

[0065] 6, in this embodiment, the detector indication accuracy (Z2a-Z2) becomes zero by performing temperature correction using the temperature correction parameter C. This makes it possible to suppress the influence of the environmental temperature on the measurement result.

[0066] [Temperature correction method] FIG. 7 is a flowchart showing the procedure for measuring the measurement target W in the measurement device 1.

[0067] During measurement, first, as shown in FIG. 1, a measurement target W is placed on the stage 50 of the measurement device 1 (step S10).

[0068] Next, the measurement device 1 measures the surface shape of the measurement object W (step S12). The control unit 102 receives the measurement result of the surface shape of the measurement object W and the temperature T 80and the temperature T of the space contained in the detector housing 30. 82 and are acquired (step S14).

[0069] Next, the control unit 102 detects the temperature T 80 and T 82 Based on this, a temperature correction parameter is obtained from the storage 108, and the measurement result of the measurement object W is corrected using the temperature correction parameter and stored (step S16).

[0070] In step S16, the temperature T 80 and T 82 and the temperature correction coefficient C corresponding to temperature T 80 and T 82 The indication value Z2a at the time of measurement and the indication value Z2b at the time of measurement are used to calculate the indication value Z2 that is free of the effects of the temperature expansion of the stylus portion 14 and the arm portion 16. 80 and T 82 The measurement result of the object W can be obtained with high accuracy.

[0071] In the above embodiment, the temperature correction of the measurement results of the measurement object W has been described, but the above temperature correction can also be applied to the measurement results of the calibrator when calibrating the measurement device 1. [Explanation of symbols]

[0072] 1...measuring device, 10...detector, 12...probe, 14...probe section, 16...arm section, 18...oscillating section, 20...oscillating axis, 22...scale, 24...scale head, 26...fixed section, 30...detector housing, 50...measurement object placement section, 52...base plate, 54...column, 56...carriage, 58...scale, 60...detector drive mechanism, 80, 82...temperature sensor, 100...control device, 102...control section, 104...input section, 106...display section, 108...storage

Claims

1. A detector that is accommodated in an internal space of a detector housing and includes an arm portion that is swingably attached around a swing center; a stylus unit provided with a stylus for measuring a surface of a measurement object, the stylus unit being attached to the arm unit and swingable integrally with the arm unit in accordance with the shape of the surface of the measurement object; A first temperature sensor for measuring a temperature of the contained space; a temperature correction unit that corrects a result of the measurement of the object to be measured based on a temperature of the contained space at the time of measurement measured by the first temperature sensor; A measuring device comprising:

2. The measuring device according to claim 1 , wherein the detector housing includes a thermal insulator for suppressing conduction of heat from the contained space to the stylus portion.

3. The measurement device according to claim 1 , wherein the detector housing is formed with an opening for introducing air from the outside into the contained space and discharging heat from the contained space.

4. a second temperature sensor for measuring a temperature of the stylus portion; The measuring device according to any one of claims 1 to 3, wherein the temperature correction unit corrects the result of the measurement of the object to be measured based on the temperature of the contained space at the time of the measurement measured by the first temperature sensor and the temperature of the stylus part at the time of the measurement measured by the second temperature sensor.

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