Substrate
JP2024149729A5Pending Publication Date: 2025-06-18CANON KK
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Patent Information
- Application Number
- JP2024133380
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2021-07-12
- Filing Date
- 2024-08-08
- Publication Date
- 2025-06-18
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Abstract
To provide a method for producing a substrate formed with an alignment mark on the substrate itself.SOLUTION: A substrate including an alignment mark has formed therein: an alignment mark that does not penetrate the substrate and has a bottom part having an infrared transmittance lower than those of a first surface and a second surface when arranging predetermined places of the first surface and the second surface of the substrate, and an infrared camera orthogonally; and a concavity.SELECTED DRAWING: Figure 2
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