Vacuum Processing Systems and Process Control

Abstract

A vacuum processing system (1), comprising a vacuum chamber (10), a controllable fluid application device (30) connected to the vacuum chamber (10) and configured to provide inflow of fluid into the vacuum chamber (10) in a controlled manner, and a control and / or regulation unit (40) for controlling at least the controllable fluid application device (30). The vacuum processing system (1) comprises an atmosphere analysis device (50) arranged and configured to determine atmosphere information inside the vacuum chamber (10) and to provide the atmosphere information as a respective atmosphere signal, and the control and / or regulation unit (40) configured to control the controllable fluid application device (30) in response to the atmosphere signal.

Description

[Technical field]

[0001] The present invention relates to a vacuum processing system including at least a vacuum chamber, a fluid application unit, a control unit, and an atmosphere analysis device.

[0002] Known vacuum processing systems are widely used, for example, in the field of IC, semiconductor or substrate manufacturing, which must be carried out in a protective atmosphere as free as possible from the presence of contaminating particles.

[0003] Such a type of vacuum chamber system in particular comprises at least one evacuable vacuum chamber, which is provided for accommodating a semiconductor element or substrate to be processed or manufactured, and has at least one vacuum chamber opening, through which the semiconductor element or other substrate can be introduced into the vacuum chamber and led out of the vacuum chamber. Typically, at least one vacuum pump for evacuating the vacuum chamber and at least one gas inlet valve for applying a process gas are provided. For example, in a manufacturing plant for semiconductor wafers or liquid crystal substrates, highly sensitive semiconductor elements or liquid crystal elements pass in sequence through several process vacuum chambers, in which the parts placed inside these process vacuum chambers are each time processed by a processing device. Both during the processing process inside the process vacuum chambers and during the transfer from chamber to chamber, the highly sensitive semiconductor elements or substrates must always be placed in a protective atmosphere, in particular in an air-free environment.

[0004] The substrates to be produced by the aforementioned systems are of very sensitive quality, so that for example particle generation - caused in particular by the operation of the vacuum or inlet valves or the transport system - and the number of loose particles in the vacuum chamber must be kept as low as possible. Particle generation is typically the result of friction, for example as a result of metal / metal contact, and as a result of ablation.

[0005] To that end, specially designed vacuum valves, such as vacuum regulator valves or transfer valves, are applied in the manufacture of sensitive semiconductor devices.

[0006] Vacuum regulating valves are used for the purpose of setting a defined process environment (e.g. pressure) in the process chamber. A closed-loop control can be performed based on a pressure signal that provides information about the internal pressure of the chamber and based on a target variable to be obtained by this closed-loop control, i.e. the nominal pressure. The position of the valve shutter (valve disk) is then changed within the closed-loop control in such a way that the nominal pressure is obtained within a certain time period.

[0007] Processing of substrates, for example for the production of semiconductors, must be carried out under well-defined and controlled conditions. Such processing may include, inter alia, the deposition of atomic or molecular layers onto the substrate.

[0008] Chemical vapour deposition (CVD) is a vacuum deposition method that is applicable to the production of highly sensitive substrates. The process is often used to produce thin films in the semiconductor industry. In a typical CVD, a wafer (substrate) is exposed to one or more volatile precursors that react and / or decompose on the substrate surface to produce the desired deposit.

[0009] Atomic layer epitaxy, or more commonly known as atomic layer deposition (ALD), is a thin film deposition technique based on the sequential use of gas-phase chemical processes. This process is also often used to produce thin films in the semiconductor industry. Most ALD reactions use two chemicals called precursors (also called reactants). These precursors react with the surface of the material, one at a time, in a sequential and self-limiting manner. Thin films are slowly deposited by repeated exposure to different precursors. ALD has become a key process in the production of semiconductor devices and is also used for the synthesis of nanomaterials.

[0010] During atomic layer deposition, a film is grown on a substrate by exposing its surface to alternating gas species (typically referred to as precursors). In contrast to chemical vapor deposition, these precursors are not present simultaneously in the reactor, but are inserted as a series of consecutive, non-overlapping pulses. In each of these pulses, the precursor molecules react with the surface in a self-limiting manner, which terminates when all reactive sites on the surface are consumed. The maximum amount of material deposited on a surface after one exposure to all precursors (a so-called ALD cycle) is determined by the nature of the precursor-surface interaction. By varying the number of cycles, it is possible to grow materials uniformly and with high precision on arbitrarily complex and large substrates.

[0011] Atomic layer deposition's sister technology, molecular layer deposition (MLD), is used when it is desired to use organic precursors. By combining ALD / MLD techniques, it is possible to produce highly conformal, pure, hybrid films for many applications.

[0012] A further surface treatment technique is referred to as atomic layer etching (ALE), which can be understood to provide the opposite effect to the deposition of material. Atomic layer etching is performed to remove material from a substrate, where reactants are used to attack the surface or material being removed.

[0013] One requirement for reliably performing one of the above deposition processes or any other process inside a vacuum chamber is to provide an atmosphere inside the vacuum volume (chamber) that matches the nominal (target) atmospheric conditions for the respective process.

[0014] For example, during deposition cycles utilizing the application of a plasma in a chamber, volatile by-products may be generated, and furthermore, the first precursor may still be (partially) present when starting a subsequent processing step in which a second precursor should be used (exclusively).

[0015] Typically, attempts are made to avoid such process-related contamination by removing undesired fluids (e.g., precursors) by a gas flow passing through the reaction chamber for a defined time period. A first process cycle is performed by flooding the vacuum chamber with the first precursor. After the end of the first process cycle, a defined time period is allowed to pass while the vacuum chamber is actively flushed with a flushing fluid (such as nitrogen) or the first precursor is extracted via downstream. The vacuum volume is then considered clean for the next process cycle, and the next cycle is started.

[0016] ALD steps such as those described above are typically performed in a timed manner, i.e., each cycle is carried out for a predefined period of time.

[0017] As a result, any faults that may occur during processing, resulting in product failures, are rarely recognized when they occur, but most often at some later time. Such faults may be caused by the presence of the first precursor due to insufficient extraction downstream when starting the second processing step, or by damage to an inlet valve resulting in an insufficient concentration of the required precursor, etc. Furthermore, the time interval may not be selected optimally (as short as possible while still providing a reliable processing step), but may be set with unnecessary errors.

[0018] SUMMARY OF THE PRESENT EMBODIMENT It is therefore an object of the present invention to provide an improved vacuum processing system that overcomes the above-mentioned drawbacks.

[0019] In particular, it is an object of the present invention to provide an improved vacuum processing system that performs multiple successive processing steps more efficiently (less time consuming).

[0020] It is another object of the present invention to provide an improved vacuum processing system that more reliably processes substrates over a relatively large number of process cycles.

[0021] These objects are achieved by implementing the features recited in the characterizing parts of the independent claims. Further alternative or advantageous developments of the invention emerge from the dependent claims.

[0022] The basic idea of ​​the invention is to provide a unit for determining status information about the internal atmosphere of a vacuum chamber (also called vacuum volume, process volume, process chamber or processing chamber). The status information may be, but is not limited to, chemical information about the internal atmosphere. Such a unit may be an atmosphere analyzer used to determine the concentration and / or composition of fluids (e.g. gases or liquids) present in the vacuum chamber. Naturally, the atmosphere analyzer can also be used to check whether a defined fluid or a defined chemical species is present.

[0023] The atmosphere analyzer is arranged to obtain the respective information from inside the vacuum chamber, for which purpose the atmosphere analyzer may be arranged inside the vacuum chamber or may be arranged to receive the respective data from inside, for example via a tube, via an optical fiber and / or via a transmission window.

[0024] The atmosphere analyzer is part of a vacuum processing system, which additionally includes a control and / or regulation unit and a fluid application device. The fluid application device applies at least one defined fluid, such as a precursor, into the processing chamber. The fluid application device can be designed to be controllable by the control and / or regulation unit.

[0025] The control and / or regulation unit is connected (by wire or wirelessly) to the atmosphere analysis device and to the fluid application device, the control and / or regulation unit being further configured to be able to control the fluid application device depending on information that can be provided by the atmosphere analysis device.

[0026] The present invention therefore relates to a vacuum treatment system comprising a vacuum chamber and a controllable fluid application device connected to the vacuum chamber and configured to provide inflow of at least one fluid into the vacuum chamber in a controlled manner. In particular, the vacuum treatment system may comprise a downstream unit, which is connected to the vacuum chamber and configured to extract a fluid or gas from the vacuum chamber.

[0027] The vacuum treatment system also includes a control and / or regulation unit for controlling at least the controllable fluid application device.

[0028] Further, the vacuum processing system includes an atmosphere analyzer arranged and configured to determine atmosphere information from the interior of the vacuum chamber and to provide a respective atmosphere signal, and the control and / or regulation unit is configured to control the controllable fluid application device in response to the atmosphere signal.

[0029] Advantageously, the vacuum processing system allows to control the inflow of fluids into the chamber based on the determination of the actual atmospheric conditions inside the chamber, thereby optimizing the process cycle in terms of time consumption for one or more processing steps, in other words preventing the start of a subsequent processing step until a predefined atmospheric condition has been reached.

[0030] Alternatively or additionally, the vacuum processing system allows for checking the proper operation of the system itself. Such a check can be achieved by measuring or monitoring the concentration of fluids or chemical species inside the chamber and comparing such measurement data with expected data of the monitored fluid inflow. If the compared data are in agreement, e.g. within predefined tolerance limits, the system, or in particular its fluid application device, can be considered to be operating properly.

[0031] In an embodiment of the vacuum treatment system, the control and / or regulation unit may include a pre-treatment or checking function which, when executed, is configurable such that an inflow of a defined fluid into the vacuum chamber is provided by the controllable fluid application device and that during the inflow of the defined fluid a concentration of the defined fluid inside the vacuum chamber is determined by the atmosphere analysis device, the concentration of the defined fluid representing the atmosphere information.

[0032] The controlled application of fluids and the respective identification of the associated chemical concentrations provides the basis for an optimized control of the process steps, in particular for the stopping of a current process step or the initiation of a subsequent process step.

[0033] In one embodiment of the invention, the execution of the pre-processing function further comprises determining a concentration of the defined fluid at least once after a defined time interval, the time interval beginning with the start of flow of the defined fluid into the vacuum chamber, the determined concentration of the defined fluid being compared to a pre-threshold value, and the pre-processing information being provided in response to the comparison.

[0034] According to one embodiment of the invention, - as the pre-treatment function is performed - the concentration of the prescribed fluid is continuously determined, the determined concentration of the prescribed fluid is compared with a nominal concentration change for applying the prescribed fluid by the controllable fluid application device, and pre-treatment information is provided in response to the comparison.

[0035] The comparison and / or provision of the pre-processing information may be based on the atmosphere signal, for example processed on the side of the control and / or regulation unit, or directly on the atmosphere information, for example processed on the side of the atmosphere analysis device. In the latter case, the pre-processing information may be represented by the atmosphere signal. In other words, the control and / or regulation unit may be implemented in the atmosphere analysis device or may be embodied as a separate unit. The same may also be true for any other functions provided by the control and / or regulation unit.

[0036] In one embodiment of the present invention, the pre-processing information may provide information regarding the status of the controllable fluid application device, the operational reliability (proper operation) of the controllable fluid application device, and / or trigger points for initiating subsequent processing steps.

[0037] Thus, the pre-treatment function can provide a clearly defined control of the process steps or a check on the integrity of the system. On the one hand, the pre-treatment function makes it possible to check whether the fluid application unit, e.g. a gas inlet valve or a mass flow controller arranged to control the inflow of the precursors, is operating within defined limits, i.e. whether the fluid application unit is damaged or contains a malfunction. Such a check can also be applied to determine the operating time or remaining life of the fluid application unit. This allows for predictive maintenance of the fluid application device, i.e. the fluid application device does not have to be replaced or maintained after a defined time or cycle interval, but can be replaced or maintained on demand.

[0038] On the other hand, the pre-treatment function allows the initiation of a treatment step, for example the application of an electric discharge or the ignition of a plasma, to be controlled in time as soon as a desired particle concentration is reached inside the chamber, which allows the desired treatment step to be started as quickly as possible in order to reliably obtain the required product quality while avoiding any unnecessary application times, for example to guarantee a minimum particle concentration based on a defined inflow time for each precursor, which allows for faster treatment and shorter treatment cycles while maintaining product quality.

[0039] In one embodiment of the present invention, a controllable fluid applicator can be controlled in response to the pre-processing information to reduce and / or stop the inward flow of a defined fluid into the vacuum chamber, in other words, for example, an inlet valve or mass flow controller can be controlled to reduce the flow of gas (precursor) through the valve when, for example, a target concentration is reached.

[0040] The pre-threshold may be a pre-defined value for the concentration of a defined chemical species or may be given by a concentration range, which may typically include a tolerance band around an optimal (desired) concentration value. The pre-threshold may be represented by the change or progression of particle (molecule) concentration over a defined period of time. The pre-threshold may be set or measured before performing a particular processing step and / or may be measured during the performance of a particular processing step under well-defined nominal processing conditions.

[0041] According to one embodiment of the invention, the control and / or regulation unit may include a post-treatment function, whereby atmospheric characteristics inside the vacuum chamber are determined by an atmospheric analyzer, the determined atmospheric characteristics are compared to a post-treatment threshold, and the controllable fluid applicator is controlled in response to the comparison of the determined atmospheric characteristics with the post-treatment threshold.

[0042] The post-processing thresholds may be predefined values ​​for the concentration of a defined chemical species or may be given by a concentration range, which may typically include a tolerance band around an optimal (desired) concentration value. The post-processing thresholds may be represented by the change or progression of particle (molecular) concentrations over a defined time period. The post-processing thresholds may be set or measured before performing a particular processing step and / or may be measured during the performance of a particular processing step under well-defined nominal processing conditions. The post-processing thresholds may represent the ratio of certain chemical elements (atoms, molecules, or chemical species) to each other. The post-processing thresholds may include a list of chemical species that are allowed to be present in the vacuum chamber (white list). Conversely, the post-processing thresholds may alternatively or additionally include a list of chemical species that are not allowed to be present in the vacuum chamber (black list).

[0043] The atmosphere characteristics may be represented by the concentration of a defined fluid, the chemical composition of the interior atmosphere of the vacuum chamber, and / or specific concentrations or ratios of chemical elements or molecules that are part of the chemical composition.

[0044] In one embodiment, the controllable fluid application device is controlled (depending on a comparison of the determined atmospheric properties with a post-treatment threshold) to reduce and / or stop the inward flow of a defined fluid into the vacuum chamber and / or to provide an inward flow of a further defined (another, different) fluid into the vacuum chamber, so that a subsequent processing step requiring application of another precursor can be initiated as soon as the concentration of the first precursor falls below a defined level (the post-treatment threshold).

[0045] Thus, in one embodiment, when a post-processing function is performed, subsequent processing steps are triggered depending on a comparison of the identified atmospheric characteristics to a post-processing threshold value.

[0046] In particular, when the post-treatment function is performed, the downstream unit can be controlled depending on a comparison between the determined atmospheric characteristic and a post-treatment threshold value, and the flow rate for extracting the fluid from the vacuum chamber is increased or decreased depending on the comparison. This can be done to increase the fluid extraction rate, i.e. to reduce the time (delay) between two successive processing steps. The downstream unit can include a controllable vacuum pump and / or a controllable vacuum valve, in particular a vacuum control valve.

[0047] According to one embodiment, the execution of the post-processing function can be triggered by the initiation and / or execution of a defined processing step, thus making it possible to monitor the defined processing step and to initiate subsequent processing steps in an optimized manner (in terms of time consumption) as described above.

[0048] In one embodiment of the invention, the concentration is: -molar concentration of chemical species, Mass per unit volume, ·Mass concentration, Volume concentration, the number density of molecules, and / or Percentage of substance amount It may be at least one of the following:

[0049] In one embodiment, the controllable fluid application device includes at least two gas inlet valves or at least two mass flow controllers (MFCs). In one embodiment, the controllable fluid application device includes at least one gas inlet valve and at least one mass flow controller (MFC). For example, the MFC can be used to inject a gas and the inlet valve can be used to inject a liquid precursor.

[0050] The present invention also relates to a method for adjusting a vacuum processing cycle in a vacuum chamber, the method comprising performing a first processing step, the first processing step comprising at least: Providing a substrate having defined surface properties to be processed in a vacuum chamber; increasing the concentration of a first precursor designed to deposit on a surface within the vacuum chamber; In particular, applying a plasma inside the vacuum chamber; reducing a concentration of the first precursor within the vacuum chamber after a defined period of time; Includes.

[0051] Regarding the application of a plasma, this can be used for the activation of the precursor. Alternatively, activation can be performed by heat or by increasing the temperature.

[0052] According to the method, the first process step is repeated or a second process step is initiated.

[0053] The method also includes continuously determining a concentration of the first precursor within the vacuum chamber and triggering a step of repeating the first processing step or initiating a second processing step in response to the determined concentration of the first precursor.

[0054] In one embodiment of the present invention, the second processing step can be initiated as soon as it is determined that the concentration of the first precursor inside the vacuum chamber has fallen below a defined lower threshold (post-processing threshold) representing an acceptable residual concentration of the first precursor.

[0055] In particular, the second processing step can include flowing into the vacuum chamber a second precursor that is different from the first precursor.

[0056] The invention also relates to a method for checking the proper operation of a vacuum processing system according to any one of the above embodiments, said method comprising the steps of: providing a signal to a controllable fluid application device to initiate a defined flow of fluid into the vacuum chamber; - continuously determining the concentration of the fluid inside the vacuum chamber by means of an atmospheric analyzer; - comparing the determined concentration with a reference concentration, the reference concentration representing a relationship between the inflow of fluid to be performed by the fluid application device and the duration of the inflow of fluid to be performed; Providing information about the actual operating status of the fluid application device based on a comparison of the identified concentrations with reference concentrations; Includes.

[0057] Thus, information about the actual operating conditions can provide information about proper operation within given limits, or about the occurrence of a malfunction.

[0058] The present invention also relates to a computer program product, the computer program product including program code stored on a machine readable medium or embodied by electromagnetic waves including program code segments, in particular having computer executable instructions for performing and / or controlling any of the methods described above when executed in the vacuum processing system described above.

[0059] In the following, the device and method according to the invention will be described or explained in more detail, by way of example only, with reference to an embodiment illustrated diagrammatically in the drawings. [Brief description of the drawings]

[0060] [Figure 1] 1 is a schematic diagram of a first embodiment of a vacuum processing system according to the present invention; [Diagram 2] FIG. 2 illustrates another embodiment of a vacuum processing system according to the present invention. [Diagram 3] FIG. 2 illustrates another embodiment of a vacuum processing system according to the present invention.

[0061] FIG. 1 illustrates one embodiment of a vacuum processing system 1 according to the present invention.

[0062] The system 1 includes a vacuum process chamber 10. The process chamber 10 is configured and designed to accommodate a substrate 11 or workpiece to be processed, for example using an automated transport system such as a robot. The substrate 11 is loaded into the vacuum chamber 10, a defined processing step is performed, and then the processed substrate 11 is removed from the vacuum chamber 10.

[0063] The system 1 also includes a downstream unit 20 connected to the vacuum chamber 10. The downstream unit 20 is arranged relative to and connected to the vacuum volume 10 for adjusting the gas pressure inside the vacuum volume 10. According to the present embodiment, the downstream unit 20 includes a vacuum pump 21 and a vacuum regulating valve 22. The vacuum pump 21 and / or the vacuum regulating valve 22 are designed as controllable components, which means that the actual suction power of the vacuum pump 21 and / or the actual cross-sectional area of ​​the valve opening can be changed based on the application of respective control signals. By such adjustment, the outflow speed of the fluid from the vacuum chamber 10 and the cavity pressure can be changed and set.

[0064] Furthermore, the system 1 comprises a set of controllable inlet valves (here three), which constitute a fluid application device 30. The fluid application device 30 is connected to the vacuum chamber 10 and is configured to provide a controlled inflow of at least one fluid into the vacuum chamber 10. In this embodiment, the fluid application device 30 is configured to control the application of three different fluids, in particular three different precursors. Each of the inlet valves is individually controllable, for example to inject the respective precursor in a pulsed manner over a defined period of time.

[0065] The precursor may be a gas or vapor of a material carried by a carrier gas. Thus, a precursor in the context of the present invention should be understood to be a fluid.

[0066] A control and / or regulation unit 40 is also provided, which is connected to the controllable fluid application device 30 and to the downstream unit 20. This allows for controlling the amount of defined precursor flowing into the vacuum chamber 10 and the defined time point for such flow during the process cycle. The vacuum pressure inside the vacuum volume 10 can be controlled as well.

[0067] The vacuum processing system 1 includes an atmosphere analysis device 50. The atmosphere analysis device 50 is arranged and configured to be able to determine atmosphere information inside the vacuum chamber 10. The analysis device 50 is able to provide a respective atmosphere signal. As can be seen, the atmosphere analysis device 50 is connected to the control and / or regulation unit 40. Alternatively, the control and / or regulation unit 40 is configured to receive information or signals provided by the atmosphere analysis device 50.

[0068] The ambient analyzer 50 can be constructed to specifically determine the chemical composition and / or concentrations of chemical elements or species of fluids or gases present within the process chamber 10 .

[0069] The atmosphere analyzer 50 may be an optical emission spectrometer (OES), a residual gas analyzer (RGA), or a resonance spectrometer (RES).

[0070] The operating principle of the atmosphere analyzer 50 can be based on infrared (IR) or Raman spectroscopy, gas chromatography (GC), or another principle that uses electromagnetic waves or electromagnetic signals (e.g., electronic resonance) for analytical purposes.

[0071] The vacuum processing system 1 can be configured to check for proper operation of at least one component of the vacuum processing system 1. The component to be checked can preferably be the fluid application device 30. Proper operation can be understood as an accurate control of the inflow of a defined amount of fluid into the vacuum chamber 10, where the amount of inflowing fluid corresponds to a known reference amount (target amount) for the fluid application device 30 or for at least one gas inlet valve of the fluid application device 30. In other words, the fluid application device 30 is designed to provide a precise amount of fluid into the vacuum chamber 10, and the vacuum processing system 1 can be configured to check whether the amount provided corresponds to the amount that should be provided.

[0072] To check such proper operation, the control unit 40 includes respective check functions which, when executed, provide and / or control the following steps: controlling a defined inflow of a defined fluid into the chamber 10, measuring, in particular continuously, the concentration of the inflowing fluid, and comparing the measured concentration with a respective reference concentration.

[0073] The checking function is preferably implemented as an algorithm and can be stored directly in the control unit 40, can be provided on a computer readable medium, or can be provided remotely (as electromagnetic waves), for example over a network or the internet. The same may be true for any other functions provided by the control unit 40.

[0074] If the measured concentrations match the respective reference concentrations, the fluid application device 30 is deemed to be operating properly.

[0075] The reference concentration may be a range of concentrations, i.e., may include a particular tolerance range of concentrations.

[0076] If the measured concentrations do not match the respective reference concentrations, the fluid application device 30 is deemed not to be operating properly, i.e., the application device 30 is damaged or malfunctioning.

[0077] One advantage of this checking function relates to enabling improved quality and / or yield supervision of the system 1. The concentration supervision sensor 50 (ambient analyzer) can directly detect whether a fluid (e.g., gas precursor) is present in the process. If no fluid is detected (no fluid or only a low concentration of fluid is detected), this may be caused by the failure of one gas inlet valve. This information can then be directly fed to the control unit 40 or the main tool controller, which can stop the processing in the vacuum chamber 10 to prevent loss of product.

[0078] Such types of process failures are typically very difficult to detect. Standard ALD inlet valves can only directly supervise the valve actuator (driver) and not the respective membrane (which provides the internal sealing of the valve) moved by the actuator, i.e., information is available about the actuator but not about the state of the sealing element (membrane). If such a sealing element is defective (e.g., due to sticking and due to not allowing gas injection into the process chamber), the resulting gas damage problem is not easily detected, especially if a carrier gas is used to transport the precursors. Unless such defects are detected, defective products (wafers) may be produced.

[0079] The control and / or regulation unit 40 may further comprise a regulation function for controlling the processing of the substrate in the processing chamber 10. The regulation function, when executed, provides and / or controls the following steps: providing a substrate with defined surface properties to be processed in the vacuum chamber, increasing the concentration inside the vacuum chamber of a first precursor designed to deposit on the surface, and - after a defined time period - decreasing the concentration of the first precursor inside the vacuum chamber. After carrying out the above steps, subsequent processing steps can be carried out.

[0080] To ensure that no undesired interactions occur between two different fluids (precursors) used in different process steps, the regulation function provides control of the fluid concentration and / or fluid composition of a first process step and initiates a subsequent process step depending on the detected concentration and / or composition. This separation of process steps may be essential for reliable production of substrates by ALE / ALD.

[0081] This allows for high yields and high productivity of such cyclic processes (ALD / ALE). Knowledge of the precursor concentrations and / or compositions allows for optimizing (e.g. shortening) the process time of each compounding step (to increase throughput) and avoiding undesired (accidental) fluid mixing (e.g. of two or more precursors) to prevent particle issues. Functions can be realized by respective algorithms.

[0082] If a precursor to be used for a second process step is introduced before the concentration of the precursor to be used for the first process step is low enough or acceptable, this may result in undesired chemical reactions. This may lead to the generation of particles harmful to the semiconductor device (e.g., affecting the yield and resulting in scrapping of the wafer / chip). Thus, the regulation function supervises the concentration of each precursor, allowing the next process step to start only when the previous precursor reactant has been removed and / or reduced below a defined concentration that does not pose any risk to the planned manufacturing process.

[0083] On the other hand, the controller no longer needs to supervise the time duration of each processing step in order to reach a given concentration of precursor at the end of each step, which means that the control of the cyclic processing steps can be switched from a time-based open-loop control of the processing device (such as fluid application device 30) to a concentration-driven closed-loop control.

[0084] This results in a process sequence that is optimized in terms of time: a number of cycles can be completed more quickly (as soon as the measured concentration reaches a sufficient level), eliminating overhead and allowing for higher throughput.

[0085] The atmosphere analyzer 50 can be used to detect the concentration of several different precursors. The output signal of the analyzer 50 can also be applied to the adaptive control of the vacuum control valve 22 (via the controller 40). The strength of the sensor signal can be directly related to the concentration of the precursor type species. As soon as the concentration of the precursor species falls below a certain threshold allowed by the process parameters, the next process step can be started. If necessary, another fluid can be introduced to allow for more rapid dilution and evacuation of the precursor.

[0086] FIG. 2 shows another embodiment of a vacuum processing system 1 according to the invention.

[0087] 1 in terms of the design and location of the atmosphere analyzer 50. The atmosphere analyzer 50 is located outside the vacuum chamber 10. In this embodiment, the atmosphere analyzer 50 is an optical sensor configured to determine the chemical composition and / or chemical concentration of specific species by optical effects, such as scattering or absorption of light and emission of light by atoms or molecules.

[0088] The system 1 includes an optical coupler 51 that connects the atmosphere analyzer 50 to the process chamber 10 and provides bidirectional transmission of an electromagnetic signal, which may be, for example, measurement radiation, measurement light, a light beam, collimated light, measurement laser light, etc. The optical coupler 51 may include optical fibers or optical elements, such as collimators, lenses, apertures, etc., that provide the desired guidance of the electromagnetic signal.

[0089] In particular, the vacuum chamber 10 includes a transmissive window that allows bidirectional transmission of electromagnetic radiation of at least a particular measurement wavelength (of an electromagnetic signal). In particular, measurement light can be transmitted into the chamber 10 and reflection or interaction of the measurement light can be detected outside the chamber 10 by the transmissive window.

[0090] FIG. 3 shows another embodiment of a vacuum processing system 1 according to the invention.

[0091] The vacuum processing system 1 of Fig. 3 differs from the vacuum processing system of Fig. 1 at least in the arrangement of the atmosphere analysis device 50. The atmosphere analysis device 50 is arranged between the vacuum chamber 10 and the downstream unit 20.

[0092] The atmosphere analyzer 50 is designed to analyze a fluid flowing through the analyzer 50. The atmosphere analyzer 50 is preferably embodied as a residual gas analyzer (RGA), i.e. configured as a type of mass spectrometer. The atmosphere analyzer 50 is thus designed to detect, for example, impurities or defined chemical species.

[0093] Although the invention has been illustrated above in part with reference to certain specific embodiments, it should be understood that numerous modifications and combinations of different features of the embodiments can be made and that different features can be combined with each other or with vacuum applications known from the prior art.

Claims

1. A vacuum processing system (1), comprising: A vacuum chamber (10); a controllable fluid application device (30) connected to the vacuum chamber (10) and configured to provide a controlled flow of fluid into the vacuum chamber (10); a control and / or regulation unit (40) for controlling at least said controllable fluid application device (30); A vacuum processing system (1), comprising: The vacuum processing system (1) includes an atmosphere analysis device (50), the atmosphere analyzer (50) is arranged and configured to determine atmosphere information within the vacuum chamber (10) and to provide the atmosphere information as a respective atmosphere signal; The control and / or regulation unit (40) is configured to control the controllable fluid application device (30) in response to the atmospheric signal. A vacuum processing system (1).

2. The control and / or regulation unit (40) includes a pre-processing function, Once the pre-processing function has been performed, A defined flow of fluid into the vacuum chamber (10) is provided by the controllable fluid application device (30); During the flow of the specified fluid, a concentration of the specified fluid inside the vacuum chamber (10) is determined by the atmosphere analyzer (50), the concentration of the specified fluid representing the atmosphere information. The vacuum processing system (1) according to claim 1.

3. Once the pre-processing function has been performed, the concentration of the defined fluid is determined at least once after a defined time interval, the time interval beginning with the initiation of flow of the defined fluid into the vacuum chamber; The determined concentration of the defined fluid is compared to a pre-defined threshold value; and providing pre-processing information in response to said comparing. The vacuum processing system (1) according to claim 2.

4. Once the pre-processing function has been performed, The concentration of the defined fluid is continuously determined; The determined concentration of the defined fluid is compared to a nominal concentration change for applying the defined fluid by the controllable fluid application device; and providing pre-processing information in response to said comparing. The vacuum processing system (1) according to claim 2.

5. The pre-processing information is a state of the controllable fluid application device (30); the operational reliability of said controllable fluid application device (30); and / or Trigger points for starting subsequent processing steps Provide information about The vacuum processing system (1) according to claim 3.

6. When the pre-treatment function is performed, the controllable fluid application device (30) is controlled in response to the pre-treatment information to reduce and / or stop an inward flow of the defined fluid into the vacuum chamber (10). The vacuum processing system (1) according to claim 3.

7. said control and / or regulation unit (40) including post-processing functions; Once the post-processing function has been performed, The atmospheric characteristics inside the vacuum chamber are determined by the atmospheric analyzer (50); The determined atmospheric characteristics are compared to post-processing thresholds; the controllable fluid applicator (30) is controlled in response to the comparison of the determined atmospheric characteristic to the post-treatment threshold value. The vacuum processing system (1) according to claim 1.

8. The controllable fluid application device (30) comprises: the inward flow of the defined fluid into the vacuum chamber (10) is controlled to be reduced and / or stopped; and / or a controlled inward flow of a further defined fluid into said vacuum chamber (10); The vacuum processing system (1) according to claim 7.

9. When the post-treatment function is performed, a downstream unit (20) is controlled in response to the comparison between the identified atmospheric characteristic and the post-treatment threshold, and a flow rate for extracting gas from the vacuum chamber (10) is increased or decreased in response to the comparison. The vacuum processing system (1) according to claim 7.

10. When the post-processing function is executed, a subsequent processing step is triggered in response to the comparison of the identified atmospheric characteristic with the post-processing threshold. The vacuum processing system (1) according to claim 7.

11. the execution of said post-processing functions is triggered by the initiation and / or execution of a defined processing step; The vacuum processing system (1) according to claim 7.

12. The atmospheric characteristics are: the concentration of said defined fluid, the chemical composition of the internal atmosphere of the vacuum chamber (10); and / or A particular concentration of a chemical element or molecule that is part of the chemical composition Represented by, The vacuum processing system (1) according to claim 7.

13. The concentration is Molar concentration of the chemical species, Mass per unit volume, mass concentration, Volume concentration, the number density of molecules, and / or Percentage of substance amount At least one of The vacuum processing system (1) according to claim 2.

14. The controllable fluid application device (30) comprises: at least one gas inlet valve and at least one mass flow controller; or At least two gas inlet valves or at least two mass flow controllers Including, The vacuum processing system (1) according to claim 1.

15. The vacuum processing system (1) comprises a downstream unit (20), the downstream unit (20) is connected to the vacuum chamber (10) and configured to extract a fluid from the vacuum chamber; The vacuum processing system of claim 1 .

16. A method for adjusting a vacuum processing cycle in a vacuum chamber (10), comprising the steps of: The method comprises: performing a first processing step, the first processing step comprising: providing a substrate having defined surface properties to be processed in said vacuum chamber (10); Increasing the concentration of a first precursor designed to deposit on the surface inside the vacuum chamber (10); In particular, applying a plasma inside the vacuum chamber (10); reducing the concentration of the first precursor within the vacuum chamber after a defined period of time; and repeating the first processing step or initiating a second processing step. A method comprising: continuously determining a concentration of the first precursor within the vacuum chamber (10); triggering a step of repeating the first process step or initiating a second process step in response to the determined concentration of the first precursor. A method comprising:

17. The second processing step is initiated as soon as the concentration of the first precursor inside the vacuum chamber (10) falls below a defined lower threshold value representing an acceptable residual concentration of the first precursor.

17. The method of claim 16.

18. The second process step includes flowing a second precursor into the vacuum chamber (10), the second precursor being different from the first precursor.

20. The method of claim 17.

19. 2. A method for checking the proper operation of a vacuum processing system (1) according to claim 1, said method comprising the steps of: providing a signal to a controllable fluid application device (30) to initiate a defined flow of fluid into the vacuum chamber (10); continuously determining the concentration of said fluid inside said vacuum chamber (10) by an atmosphere analyzer (50); comparing the determined concentration with a reference concentration, the reference concentration representing a relationship between an inflow of fluid to be performed by the fluid application device and a duration of the inflow of fluid to be performed; providing information regarding an actual operating condition of the fluid application device (30) based on a comparison of the determined concentration with the reference concentration; A method comprising:

20. A computer program product, comprising a program code stored on a machine-readable medium or embodied by electromagnetic waves containing program code segments, in particular having computer-executable instructions for performing and / or controlling the method according to any of claims 16 to 19 when executed in a vacuum processing system (1) according to any of claims 1 to 15.

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