Fluid Delivery System

Abstract

Fluid delivery systems are critical component assemblies used in semiconductor manufacturing. These fluid delivery systems rely on the assembly of components, requiring seals that must be installed and replaced during assembly and maintenance of the fluid delivery system. The seals are arranged as seal rings that engage the substrate block or active components, and the seal rings have seal retention features that aid in assembly. These seal retention features can increase the retention force of the seal within the seal cavity or reduce the force required to retain the seal. In other configurations, the seal cavities of the substrate block or active components can have seal retention features built into them.

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims priority to U.S. Provisional Patent Application No. 63 / 282,761, filed November 24, 2021, the contents of which are incorporated by reference in their entirety herein. Technical Field The present invention relates to a fluid delivery system. [Background technology]

[0002] Fluid delivery is a critical component of semiconductor chip manufacturing tools. Fluid delivery systems are important for delivering process fluids at known flow rates for semiconductor manufacturing and other industrial processes. Such devices are used to measure and precisely control the flow of a wide range of fluids in a variety of applications. This control relies on the assembly of active and passive components that are sealed by seals to provide a fluid-tight connection.

[0003] As chip manufacturing technology improves, so do the demands on fluid delivery systems. Higher performance fluid delivery systems need to be packaged more densely, require better seals, and be more efficiently maintained. The time required to assemble and maintain the fluid delivery systems needs to be reduced. Ease of assembly and maintenance of the liquid delivery systems is paramount. Improved fluid delivery systems are desired to provide superior process performance. Summary of the Invention

[0004] The present technology is directed to a fluid delivery system incorporating one or more devices for controlling the flow of gas or liquid to a processing chamber. The fluid delivery system can be used in a wide range of processes such as semiconductor chip manufacturing, solar panel manufacturing, etc.

[0005] In one embodiment, the invention is a fluid delivery system comprising a substrate block, an active component, and a seal ring. The substrate block comprises a top surface, a first substrate port on the top surface, a second substrate port on the top surface, a substrate fluid passage extending between the first substrate port and the second substrate port, a substrate ring defining the second substrate port, and a substrate seal passage formed in the top surface and surrounding the substrate ring, with an outer surface of the substrate ring forming an inner surface of the substrate seal passage. The active component comprises a bottom surface, a first component port on the bottom surface, a component fluid passage extending from the first component port, a component ring defining the first component port, and a component seal passage formed in the bottom surface and surrounding the first component port, with an outer surface of the component ring forming an inner surface of the component seal passage. The seal ring has an inner sleeve defining a sleeve fluid passage and an outer ring connected to the inner sleeve and surrounding the inner sleeve, whereby an annular upper sleeve groove is formed between an upper portion of the outer ring and an upper ring of the inner sleeve. The outer ring of the seal ring further comprises an annular lower sleeve groove formed between a lower portion of the outer ring and a lower portion of the inner sleeve, the outer ring comprising an inner surface, an outer surface, and a seal retention mechanism. The seal retention mechanism is formed on the outer surface of the outer ring. The active component is mounted to the substrate block such that the second substrate port and the first component port are aligned and the seal ring fits into the substrate seal passage and the component seal channel, respectively, such that the seal ring fluidly seals the substrate fluid passage and the component fluid passage.

[0006] In another embodiment, the invention is a seal ring comprising an inner sleeve and an outer ring, the inner sleeve defining a sleeve fluid passageway, the outer ring connected to and surrounding the inner sleeve such that an annular upper sleeve groove is formed between an upper portion of the outer ring and an upper portion of the inner sleeve, and an annular lower sleeve groove is formed between a lower portion of the outer ring and a lower portion of the inner sleeve, the outer ring having an inner surface, an outer surface, and a seal retention feature formed on the outer surface of the outer ring.

[0007] In yet another embodiment, the invention is a method of assembling a fluid delivery system. In step a), a substrate block is provided, the substrate block comprising a top surface, a first substrate port on the top surface, a second substrate port on the top surface, and a substrate fluid passage extending between the first substrate port and the second substrate port, a substrate ring defining the second substrate port, a substrate seal passage formed on the top surface and surrounding the substrate ring, an outer surface of the substrate ring forming an inner surface of the substrate seal passage. In step b), a seal ring is inserted into the first substrate port on the top surface of the substrate block, the seal ring comprising an inner sleeve and an outer ring defining a sleeve fluid passage, the outer ring connected to the inner sleeve and surrounding the inner sleeve, whereby an annular upper sleeve groove is formed between an upper portion of the outer ring and an upper portion of the inner sleeve, and an annular lower sleeve groove is formed between a lower portion of the outer ring and a lower portion of the inner sleeve, the outer ring comprising an inner surface, an outer surface, and a seal retention mechanism, the seal retention mechanism being formed on the outer surface of the outer ring, and the seal annular lower sleeve groove receives the substrate ring of the first substrate port. In step c), an active component is bonded to the substrate block, the active component having an underside, a first component port on the underside, a component fluid passage extending from the first component port, a component ring defining the first component port, and a component seal passage formed in the underside and surrounding the component ring, an outer surface of the component ring forming an inner surface of the component seal passage, and an annular upper sleeve groove of the seal ring receiving the component ring of the active component.

[0008] In another embodiment, the invention is a fluid delivery system comprising a substrate block, an active component, and a seal ring. The substrate block comprises a top surface, a first substrate port on the top surface, a second substrate port on the top surface, a substrate fluid passage extending between the first substrate port and the second substrate port, a substrate ring defining the second substrate port, a substrate seal passage formed on the top surface and surrounding the substrate ring, an outer surface of the substrate ring forming an inner surface of the substrate seal passage, and a substrate seal retention mechanism formed on the outer surface of the substrate seal passage, the outer surface being opposite the inner surface of the substrate seal passage. The active component comprises a bottom surface, a first component port on the bottom surface, a component fluid passage extending from the first component port, a component ring defining a first component port, and a component seal passage formed on the bottom surface and surrounding the component ring, the outer surface of the component ring forming an inner surface of the component seal passage. The seal ring comprises an inner sleeve defining a sleeve fluid passage and an outer ring connected to the inner sleeve and surrounding the inner sleeve, whereby an annular upper sleeve groove is formed between an upper portion of the outer ring and an upper ring of the inner sleeve. The outer ring of the seal ring further comprises an annular lower sleeve groove formed between a lower portion of the outer ring and a lower portion of the inner sleeve. The active component is mounted to the substrate block such that the second substrate port and the first component port are aligned and the seal ring fits into the substrate seal passage and the component seal passage, respectively, such that the seal ring fluidly seals the substrate fluid passage and the component fluid passage.

[0009] In yet another embodiment, the invention is a method of assembling a fluid delivery system. In step a), a substrate block is provided, the substrate block comprising a top surface, a first substrate port on the top surface, a second substrate port on the top surface, a substrate fluid passage extending between the first substrate port and the second substrate port, a substrate ring defining the second substrate port, a substrate seal passage formed on the top surface and surrounding the substrate ring, an outer surface of the substrate ring forming an inner surface of the substrate seal passage, and a substrate seal retention mechanism formed on the outer surface of the substrate seal passage, the outer surface being opposite the inner surface of the substrate seal passage. In step b), a seal ring is inserted into the first substrate port on the top surface of the substrate block, the seal ring comprising an inner sleeve and an outer ring defining a sleeve fluid passage, the outer ring being connected to the inner sleeve and surrounding the inner sleeve, whereby an annular upper sleeve groove is formed between an upper portion of the outer ring and an upper portion of the inner sleeve, and an annular lower sleeve groove is formed between a lower portion of the outer ring and a lower portion of the inner sleeve, the seal annular lower sleeve groove receiving the substrate ring of the first substrate port. In step c), an active component is bonded to the substrate block, the active component having an underside, a first component port on the underside, a component fluid passage extending from the first component port, a component ring defining the first component port, and a component seal passage formed in the underside and surrounding the component ring, an outer surface of the component ring forming an inner surface of the component seal passage, and an annular upper sleeve groove of the seal ring receiving the component ring of the active component.

[0010] Further areas of applicability of the present technology will become apparent from the detailed description provided hereinafter. It should be understood that the detailed description and specific examples, while indicating preferred embodiments, are intended for purposes of illustration only and are not intended to limit the scope of the present technology. [Brief description of the drawings]

[0011] The invention of this disclosure will become more fully understood from the detailed description and the accompanying drawings, in which:

[0012] [Figure 1] FIG. 1 is a schematic diagram of a system for manufacturing semiconductor devices utilizing one or more apparatus for controlling flow.

[0013] [Diagram 2] FIG. 2 is a perspective view of a fluid delivery system including multiple devices for controlling flow that may be utilized in the process of FIG. 1.

[0014] [Diagram 3] FIG. 3 is a perspective view of the fluid delivery system of FIG. 2 shown with one fluid flow component removed.

[0015] [Figure 4A] 3 is a perspective view of an active component mounted on a pair of substrate blocks that may be utilized in the fluid delivery system of FIG. 2.

[0016] [Figure 4B] 4B is a cross-sectional view of one of the components and substrate blocks of FIG. 4A taken along line 4B-4B.

[0017] [Figure 4C] FIG. 4B is a detail view of FIG. 4A showing the bonding interface between the component and one of the substrate blocks.

[0018] [Figure 4D] FIG. 4B is a top view of the substrate block of FIG. 4A.

[0019] [Figure 4E] FIG. 4B is a bottom view of the components of FIG. 4A.

[0020] [Figure 5A] 1 is a perspective view of a first embodiment of a sealing ring that may be used in the fluid delivery system of the present invention.

[0021] [Figure 5B]5B is a cross-sectional view of the seal ring of FIG. 5A taken along line 5B-5B.

[0022] [Figure 5C] FIG. 5B is a detailed view of a portion of the seal ring and substrate block of FIG. 5A, where the seal ring is disposed over a seal cavity in the substrate block.

[0023] [Figure 5D] FIG. 5D is a detailed view of a portion of the seal ring and substrate block shown in FIG. 5C, with the seal ring partially inserted into the seal cavity of the substrate block.

[0024] [Figure 5E] FIG. 5D is a detailed view of a portion of the seal ring and substrate block shown in FIG. 5C, with the seal ring fully inserted into the seal cavity of the substrate block.

[0025] [Figure 5F] FIG. 5D is a detailed view of a portion of the seal ring and substrate block shown in FIG. 5C with active components coupled to the substrate block.

[0026] [Figure 6A] 11 is a perspective view of a second embodiment of a sealing ring that may be used in the fluid delivery system of the present invention. FIG.

[0027] [Figure 6B] 6B is a cross-sectional view of the seal ring of FIG. 6A taken along line 6B-6B.

[0028] [Figure 6C] FIG. 6B is a detailed view of a portion of the seal ring and substrate block of FIG. 6A, where the seal ring is disposed over a seal cavity in the substrate block.

[0029] [Figure 6D]FIG. 6D is a detailed view of a portion of the seal ring and substrate block shown in FIG. 6C, with the seal ring partially inserted into the seal cavity of the substrate block.

[0030] [Figure 6E] FIG. 6D is a detailed view of a portion of the seal ring and substrate block shown in FIG. 6C, with the seal ring fully inserted into the seal cavity of the substrate block and active components coupled to the substrate block.

[0031] [Figure 6F] FIG. 6D is a detailed view of a portion of the substrate block shown in FIG. 6C with the seal ring removed from the substrate block.

[0032] [Figure 7A] 11 is a perspective view of a third embodiment of a sealing ring that may be used in the fluid delivery system of the present invention. FIG.

[0033] [Figure 7B] 7B is a cross-sectional view of the seal ring of FIG. 7A taken along line 7B-7B.

[0034] [Figure 7C] FIG. 7B is a detailed view of the seal ring of FIG. 7A assembled between a portion of the substrate block and an active component.

[0035] [Figure 8A] 13 is a perspective view of a fourth embodiment of a sealing ring that may be used in the fluid delivery system of the present invention. FIG.

[0036] [Figure 8B] 8B is a cross-sectional view of the seal ring of FIG. 8A taken along line 8B-8B.

[0037] [Figure 8C] FIG. 8B is a detailed view of the seal ring of FIG. 8A assembled between a portion of the substrate block and an active component.

[0038] [Figure 9A] 1 is a perspective view of a first embodiment of a substrate block that may be used in the fluid delivery system of the present invention.

[0039] [Figure 9B] 9B is a cross-sectional view of the substrate block of FIG. 9A taken along line 9B-9B.

[0040] [Figure 9C] FIG. 9B is a detailed view of the substrate block of FIG. 9A assembled with a seal ring and active components.

[0041] [Figure 10A] 11 is a perspective view of a second embodiment of a substrate block that may be used in the fluid delivery system of the present invention. FIG.

[0042] [Figure 10B] 10B is a cross-sectional view of the substrate block of FIG. 10A taken along line 10B-10B.

[0043] [Figure 10C] FIG. 10B is a detailed view of the substrate block of FIG. 10A assembled with a seal ring and active components.

[0044] [Figure 11A] 13 is a perspective view of a fifth embodiment of a sealing ring that may be used in the fluid delivery system of the present invention. FIG.

[0045] [Figure 11B] FIG. 11B is a cross-sectional view of the seal ring of FIG. 11A taken along line 11B-11B.

[0046] [Figure 11C] FIG. 11B is a detailed view of the seal ring of FIG. 11A assembled between a portion of the substrate block and an active component.

[0047] [Figure 12A]13 is a perspective view of a sixth embodiment of a sealing ring that may be used in the fluid delivery system of the present invention. FIG.

[0048] [Figure 12B] 12B is a cross-sectional view of the seal ring of FIG. 12A taken along line 12B-12B.

[0049] [Figure 12C] FIG. 12B is a detailed view of the seal ring of FIG. 12A assembled between a portion of the substrate block and an active component.

[0050] All drawings are schematic and not necessarily to scale. Features that are numbered in a particular drawing and that appear unnumbered in other drawings are the same features unless otherwise noted herein. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0051] The description of exemplary embodiments according to the principles of the invention is intended to be read in conjunction with the accompanying drawings, which should be considered as part of the entire written description. In the description of the embodiments of the invention disclosed herein, any reference to direction or orientation is intended for convenience of description only and is not intended to limit the scope of the invention in any way. Relative terms such as "lower," "upper," "horizontal," "vertical," "about," "below," "upper," "lower," "left," "right," "top," and "bottom," along with their derivatives (e.g., "horizontally," "downward," "upward," etc.), should be construed as referring to the orientation then being described or as shown in the drawings being described. These relative terms are for convenience of description only and do not require that the device be configured or operated in a particular orientation unless expressly indicated as such. Terms such as "attached," "affixed," "connected," "coupled," "interconnected," and similar terms refer to a relationship in which structures are fixed or attached to one another directly or indirectly through attachments or relationships, both movable and immovable, with intervening structures, unless expressly stated otherwise. Furthermore, the features and advantages of the present invention are described by reference to preferred embodiments. It is therefore expressly intended that the present invention should not be limited to such preferred embodiments, which illustrate some possible non-limiting combinations of features that may exist alone or in other combinations of features, and the scope of the present invention is defined by the claims appended hereto.

[0052] The present invention is directed to a fitting assembly for use in a fluid delivery system comprising at least one device for controlling the flow of a fluid. In some embodiments, the fluid delivery system can comprise a mass flow controller for providing a known mass flow rate of fluid to a semiconductor process or a similar process. Semiconductor manufacturing is one of the industries that require high performance in controlling the flow of fluid. As semiconductor manufacturing technology advances, customers have recognized the need for more complex and sophisticated flow control devices. Modern semiconductor processes require that the cost of the fluid delivery system be reduced and that the interchangeability of parts be maximized. The present invention provides a modular fitting assembly that can be utilized for various applications within the fluid delivery system.

[0053] FIG. 1 shows a schematic diagram of an exemplary processing system 1000. The processing system 1000 may utilize multiple devices for controlling flow 100 fluidly coupled to a processing chamber 1300. The multiple devices for controlling flow 100 are used to supply one or more different processing fluids to the processing chamber 1300. The fluids are provided by multiple fluid supplies, i.e., fluid sources. Collectively, the multiple devices for controlling flow 100 belong to one fluid delivery system 1400. Optionally, two or more fluid delivery systems 1400 may be utilized in the processing system 100. The multiple devices for controlling flow 100 are connected to the processing chamber 1300 by an outlet manifold 400. Articles such as semiconductors and integrated circuits may be processed in the processing chamber 1300.

[0054] The valve 1100 isolates each of the plurality of devices 100 for controlling flow from the processing chamber 1300, allowing each of the plurality of devices 100 for controlling flow to be selectively connected or isolated from the processing chamber 1300 to facilitate a wide variety of different processing steps. The processing chamber 1300 may be equipped with an applicator for applying the process fluid delivered by the plurality of devices 100 for controlling flow, allowing selective or diffusive distribution of the fluid provided by the plurality of devices 100 for controlling flow. Optionally, the processing chamber 1300 may be a vacuum chamber or a tank or bath for immersing an article in the fluid provided by the plurality of devices 100 for controlling flow. Fluid supply lines are formed by flow paths from the respective fluid supplies to the processing chamber 1300.

[0055] In addition, the processing system 1000 may further comprise a drain 1200, which is isolated from the processing chamber 1300 by the valve 1100, allowing drainage of processing fluids or facilitating purging of one or more devices 100 for controlling flow and allowing switching between processing fluids in the same device 100 for controlling flow. Optionally, the drain 1200 may be a vacuum source or a liquid drain configured to remove liquid from the processing chamber 1300. Optionally, the device 100 for controlling flow may be a mass flow controller, a flow splitter, or any other device for controlling the flow of processing fluids in a processing system. Furthermore, if desired, the valve 1100 may be integrated into the device 100 for controlling flow.

[0056] Processes that may be performed in the processing system 1000 include wet cleaning, photolithography, ion implantation, dry etching, atomic layer etching, wet etching, plasma ashing, rapid thermal annealing, furnace annealing, thermal oxidation, chemical vapor deposition, atomic layer deposition, physical vapor deposition, molecular beam epitaxy, laser lift-off, electrochemical deposition, chemical mechanical polishing, wafer testing, electroplating, or any other process that utilizes a fluid.

[0057] 2 and 3 show schematic diagrams of an exemplary fluid delivery system 1400. In this embodiment, the fluid delivery system 1400 comprises a plurality of devices 100 for controlling flow having a plurality of inlets 101 and a plurality of outlets 102. In some embodiments, the plurality of inlets 101 do not correspond one-to-one to the plurality of outlets 102. Instead, the plurality of inlets 101 may be joined to a single outlet 102, or the single inlet 101 may be split into a plurality of outlets 102. This may be done to achieve mixing or combination of different fluids before providing them to the processing chamber 1300. Nevertheless, at least one flow passage extends from one of the inlets 101 to one of the outlets 102, the flow passage being formed by various components of the fluid delivery system 1400.

[0058] As can be seen, each of the devices 100 for controlling flow are generally arranged in a row, with multiple devices 100 in parallel rows. This need not be the case, and any packaging configuration may be used. The fluid delivery system 1400 comprises a substrate panel 1402. The substrate panel 1402 serves as a support structure for the fluid delivery system 1400, but may simply be used for ease of assembly. Other support structure configurations are contemplated. A plurality of substrate blocks 104 are mounted on the substrate panel 1402 and include fluid ports therein for directing flow to one or more fluid flow components 200 with corresponding fluid ports, as described in more detail below. The fluid flow components 200 may be considered active components, while the substrate blocks 104 may be considered passive components.

[0059] The fluid flow components 200 may be one or more of a valve, a flow controller, a pressure transducer, a flow measurement sensor, a pressure regulator, a flow restrictor, an actuator, an inlet 101 or an outlet 102, or any other known flow control components. In other embodiments, a substrate block 104 may be used on top and the fluid flow components 200 may be supported on the substrate panel 1402. This may be done to increase packaging efficiency, to increase flexibility in the design of the device 100 for controlling flow, or for other reasons. The substrate block 104 is not necessarily in contact with the substrate panel 1402, but is referred to as a substrate block for ease of explanation, with the understanding that the names of each component do not necessarily indicate its location or orientation.

[0060] A number of anchors are used to couple the fluid flow component 200 to the substrate block 104. The anchors may be threaded inserts or threads in the substrate block 104, threaded inserts or threads in the substrate panel 1402, nuts, or other anchoring features that allow for secure fastening of the fluid flow component 200. Component fasteners 250 are used to fasten the fluid flow component 200 to the substrate block 104. Optionally, the component fasteners 250 extend through the substrate block 104 to attach the fluid flow component 200 and substrate block 104 to the substrate panel 1402. In an alternative configuration, additional fasteners are used to fasten the substrate block 104 to the substrate panel 1402. The component fasteners 250 may be used for fastening as well as alignment and may be replaced with any suitable type of fastener capable of fastening the fluid flow component 200 to the substrate block 104. The component fasteners 250 may be fasteners such as bolts, screws, pins, or other known fasteners. However, in other embodiments, the component fasteners 250 may be separate from the alignment features. For example, dowel pins or other pins may be used to align the fluid flow component 200 to the substrate block 104. In that case, separate component fasteners may be used to secure the fluid flow component 200 to the substrate block 104.

[0061] 2 and 3, the fluid delivery system 1400 of FIG. 3 has the fluid flow component 200 removed. Removal of the fluid flow component 200 exposes portions of the two substrate blocks 104. A component mounting location 106 is formed by portions of the two substrate blocks 104. The size of the component mounting location 106 may vary depending on the dimensions of the component 200 to be mounted at the component mounting location 106. Thus, different component mounting locations 106 may be formed by different portions of the same substrate block 104. Each component 200 comprises a component mounting location 106 within the fluid delivery system 1400. More than two substrate blocks 104 may be used to form the component mounting location 106. Alternatively, only one substrate block 104 may be used to form the component mounting location 106. This depends on the type of component 200 to be mounted at the component mounting location 106.

[0062] 4A-D, a portion of a fluid delivery system 1400 is shown. Specifically, a fluid flow component 200 is shown mounted to a pair of substrate blocks 104 at a component location 106. As best seen in FIG. 4B, a seal ring 300 is disposed between the fluid flow component 200 and the substrate blocks 104. The seal ring 300 forms a fluid-tight connection between the fluid flow component 200 and the substrate blocks 104. Each of the substrate blocks 104 includes a fluid passageway 108 extending from a first substrate port 109 to a second substrate port 109. Each of the first substrate ports 109 is formed in the top surface 112 of the substrate block 104. Similarly, the fluid flow component 200 includes a fluid passageway 208 extending from a first component port 209 formed in the bottom surface 214 to a second component port 209 formed in the bottom surface 214. The substrate port 109 of the substrate block 104 is surrounded by a seal cavity 110 that houses a seal ring 300. The component port 209 of the fluid flow component 200 is surrounded by a seal cavity 210 that houses the seal ring 300.

[0063] The seal ring 300 includes an inner sleeve 302 and an outer ring 304 formed in a generally annular configuration. The inner sleeve 302 of the seal ring 300 has a sleeve fluid passage 308 formed through the center of the seal ring 300. The sleeve fluid passage 308 extends along a longitudinal axis AA. The inner sleeve 302 and the outer ring 304 are symmetrical about the longitudinal axis AA. The sleeve fluid passage 308 allows for fluid flow through the seal ring 300, while other features of the seal ring 300 provide an air-tight seal between the coupled fluid flow component 200 and the substrate block 104. In some embodiments, the inner sleeve 302 and the outer ring 304 may not be symmetrical about the longitudinal axis AA.

[0064] The inner sleeve 302 includes a passage surface 320 that forms the wall of the sleeve fluid passage 308. The passage surface 320 includes an intermediate surface 321, an upper inclined surface 322, and a lower inclined surface 323. The upper inclined surface 322 connects the component port 209 to the sleeve fluid passage 308. The lower inclined surface 323 connects the substrate port 109 to the sleeve fluid passage 308. The intermediate surface 321 connects the upper inclined surface 322 and the lower inclined surface 323. The upper inclined surface 322 and the lower inclined surface 323 may have a linear profile (i.e., straight with a constant slope), as shown in Figures 4B and 4C, or may have a curved profile. The curved profile may be convex, concave, or any other desired shape. Similarly, the intermediate surface 321 may be straight and parallel to the longitudinal axis, straight and inclined relative to the longitudinal axis, or curved with a convex or concave profile.

[0065] The inner sleeve 302 also includes a first mating surface 330 that engages corresponding features of the seal cavities 110, 210 of the substrate block 104 and the fluid flow component 200, as will be described in more detail below. The first mating surface 330 includes an upper mating surface 331 and a lower mating surface 332. The upper mating surface 331 mates with features of the seal cavity 210 of the fluid flow component 200, and the lower mating surface 332 mates with features of the seal cavity 110 of the substrate block 104. The upper and lower mating surfaces 331, 332 may have a linear, convex, or concave shape. In this embodiment, the upper mating surface 331 and the lower mating surface 332 have a linear shape.

[0066] The outer ring 304 has an inner surface 340 and an outer surface 350. The inner surface 340 is adjacent to the inner sleeve 302 and faces the first mating surface 330. The outer surface 350 is opposite the inner surface 340. The inner surface 340 may be divided into an upper inner surface 341 and a lower inner surface 342.

[0067] The inner sleeve 302 is coupled to the outer ring 304 by a web 306 which separates the upper and lower inner surfaces 341, 342 from the upper and lower abutment surfaces 331, 332. The web 306 has an upper web surface 361 and a lower web surface 362. The upper web surface 361, together with the upper inner surface 341 of the inner surface 340 of the outer ring 304 and the upper abutment surface 331 of the first abutment surface 330, form an annular upper sleeve groove 365. Similarly, the lower web surface 362, together with the lower inner surface 342 of the inner surface 340 of the outer ring 304 and the lower abutment surface 332 of the first abutment surface 330, form an annular lower sleeve groove 366. The outer ring 304 further comprises an upper end surface 370 and a lower end surface 372.

[0068] The seal cavity 110 of the substrate block 104 surrounds the substrate port 109 as described above. The seal cavity 110 includes a second mating surface 120, a substrate ring 126, and a substrate seal passage 130. The second mating surface 120 forms part of the substrate port 109 and receives a lower mating surface 332 of the first mating surface 330 of the seal ring 300. The second mating surface 120 is straight and angled with respect to the longitudinal axis AA. However, in other embodiments, the second mating surface 120 may be convex or concave or any other shape. In alternative embodiments, the second mating surface 120 may be formed as a separate surface from the substrate port 109.

[0069] The substrate ring 126 defines a substrate port 109. The substrate port 109 terminates in and is surrounded by the substrate ring 126. The substrate ring 126 is recessed relative to the top surface 112 of the substrate block 104. A substrate seal passage 130 surrounds the substrate ring 126. The substrate seal passage 130 is recessed relative to the substrate ring 126 and the top surface 112 of the substrate block 104. The substrate ring 126 therefore protrudes above the substrate seal passage 130. The substrate ring 126 may have any desired shape. The substrate seal passage 130 has a passage inner surface 131, a passage floor 132, and a passage outer surface 133. The passage inner surface 131 is adjacent to the substrate ring 126 and forms an outer surface of the substrate ring 126. The passage outer surface 133 is opposite the passage inner surface 131 and is radially outward from the passage inner surface 131. The passageway floor 132 joins the passageway inner surface 131 and the passageway outer surface 133 .

[0070] The seal cavity 210 of the fluid flow component 200 surrounds the component port 209 as described above. The seal cavity 210 includes a second mating surface 220, a component ring 226, and a component seal passage 230. The second mating surface 220 forms a portion of the component port 209 and receives an upper mating surface 331 of a first mating surface 330 of the seal ring 300. The second mating surface 220 is straight and angled relative to the longitudinal axis AA. However, in other embodiments, the second mating surface 220 may be convex or concave, or any other shape. In alternative embodiments, the second mating surface 220 may be formed as a separate surface from the component port 209.

[0071] The component ring 226 defines a component port 209. The component port 209 terminates in and is surrounded by the component ring 226. The component ring 226 is recessed relative to the lower surface 214 of the fluid flow component 200. A component seal passage 230 surrounds the component ring 226. The component seal passage 230 is recessed relative to the component ring 226 and the lower surface 214 of the fluid flow component 200. The component ring 226 therefore projects below the component seal passage 230. The component ring 226 may have any desired shape. The component seal passage 230 includes a passage inner surface 231, a passage floor 232, and a passage outer surface 233. The passage inner surface 231 is adjacent to the component ring 226 and forms an outer surface of the component ring 226. The passage outer surface 233 is opposite and radially outward from the passage inner surface 231. The passageway floor 232 joins the passageway inner surface 231 and the passageway outer surface 233 .

[0072] In the assembled condition as shown in FIG. 4C, the passage inner surface 131, 231 engages the inner surface 340 of the seal ring 300, and the passage outer surface 133, 233 engages the outer surface 350 of the seal ring 300. In particular, the passage inner surface 131 engages the lower inner surface 342 of the seal ring 300. The passage inner surface 231 engages the upper inner surface 341 of the seal ring 300. Thus, the outer ring 304 is radially compressed by the substrate seal passage 130 and the component seal passage 230. The upper and lower end surfaces 370, 372 are spaced apart from the passage floors 132, 232. Similarly, the upper web surface 361 is spaced apart from the component ring 226, and the lower web surface 362 is spaced apart from the substrate 126. This ensures that the first and second mating surfaces 330, 120, 220 contact without undue constraint. As a result, the interface between the first and second mating surfaces 330, 120, 220 forms a first seal. The interface between the inner passageway surface 131, 231 and the inner surface 340 of the seal ring 300 forms a second seal. The interface between the outer passageway surface 133, 233 and the outer surface 350 forms a third seal. This prevents leakage to or from the external environment.

[0073] 5A and 5B, a seal ring 400 is shown. The seal ring 400 is similar to the seal ring 300, but incorporates additional features as described herein. All reference numbers are the same as those described above unless otherwise noted. The seal ring 400 has an inner sleeve 402 and an outer ring 404. A sleeve fluid passage 408 extends through the inner sleeve 402. The seal ring 400 is formed in a generally annular configuration, with the inner sleeve 402 and the outer ring 404 symmetrical about a longitudinal axis AA. The inner sleeve 402 has a passage surface 420 that forms a wall of the sleeve fluid passage 408. The passage surface 420 includes an upper inclined surface 422, a lower inclined surface 423, and an intermediate surface 421. The intermediate surface 421 connects the upper inclined surface 422 and the lower inclined surface 423. The upper and lower inclined surfaces 422, 423 may have a straight profile (i.e., straight with a constant slope) or may have a curved profile. The curved profile may be convex, concave, or any other desired shape. Similarly, the intermediate surface 421 may be straight and parallel to the longitudinal axis, straight and sloped relative to the longitudinal axis, or curved with a convex or concave profile.

[0074] The inner sleeve 402 also includes a first mating surface 430. The first mating surface 430 includes an upper mating surface 431 and a lower mating surface 432. The upper and lower mating surfaces 431, 432 may have a linear, convex, or concave shape. In this embodiment, the upper mating surface 431 and the lower mating surface 432 have a linear shape.

[0075] The outer ring 404 has an inner surface 440 and an outer surface 450. The inner surface 440 is adjacent to the inner sleeve 402 and faces the first mating surface 430. The outer surface 450 is opposite the inner surface 440. The inner surface 440 may be divided into an upper inner surface 441 and a lower inner surface 442.

[0076] The inner sleeve 402 is coupled to the outer ring 404 by a web 406, which separates the upper and lower inner surfaces 441, 442 from the upper and lower mating surfaces 431, 432. The web 406 has an upper web surface 461 and a lower web surface 462. The upper web surface 461, together with the upper inner surface 441 of the inner surface 440 of the outer ring 404 and the upper mating surface 431 of the first mating surface 430, forms an annular upper sleeve groove 465. Similarly, the lower web surface 462, together with the lower inner surface 442 of the inner surface 440 of the outer ring 404 and the lower mating surface 432 of the first mating surface 430, forms an annular lower sleeve groove 466. The outer ring 404 further comprises an upper end surface 470 and a lower end surface 472. An upper end surface 470 and a lower end surface 472 join the inner surface 440 to the outer surface 450 .

[0077] Formed on the outer surface 450 of the seal ring 400 is a seal retention feature 480. The seal retention feature 480 takes the form of a groove 482 that extends from the upper end surface 470 to the lower end surface 472. The groove 482 of the seal retention feature 480 extends parallel to the longitudinal axis AA. In other embodiments, the groove 482 may extend at an angle to the longitudinal axis AA, helical, inclined toward or away from the longitudinal axis AA, or have any other shape. The groove 482 need not have a constant cross-sectional shape, but may have any desired shape. In this example, the groove 480 has a concave curvature such that it is a portion of a circle.

[0078] In the assembled state, the inner surface 440 and the outer surface 450 are in contact with the corresponding surfaces of the seal cavities 110, 210, except for the groove 480. The passage inner surface 131, 231 engages the inner surface 440 of the seal ring 400, and the passage outer surface 133, 233 engages the outer surface 450 of the seal ring 400. In particular, the passage inner surface 131 engages the lower inner surface 442 of the seal ring 400. The passage inner surface 231 engages the upper inner surface 441 of the seal ring 400. Thus, the outer ring 404 is radially compressed by the substrate seal passage 130 and the component seal passage 230. The upper and lower end surfaces 470, 472 are spaced apart from the passage floors 132, 232. Similarly, the upper web surface 461 is spaced apart from the component ring 226, and the lower web surface 462 is spaced apart from the substrate 126. This advantageously ensures that the first and second mating surfaces 430, 120, 220 contact without undue constraint. As a result, the mating interface between the first mating surface 430 and the second mating surface 120, 220 forms a first seal. The mating interface between the passageway inner surface 131, 231 and the inner surface 440 of the seal ring 300 forms a second seal. The mating interface between the passageway outer surface 133, 233 and the outer surface 450 does not form a third seal due to the presence of the groove 482 of the seal retention feature 480.

[0079] 5C-5F, a method of installing the seal ring 400 is illustrated. In FIG. 5C, the seal ring 400 is shown positioned over the seal cavity 110 of the substrate block 104. A liquid 399 is positioned within the substrate seal passage 130. FIG. 5D shows the seal ring 400 being inserted into the seal cavity 110. As the seal ring 400 is inserted into the seal cavity 110, the liquid 399 is pushed out by the outer ring 404. The liquid escapes through the grooves 482, reducing the force required to insert and retain the seal ring 400 in the seal cavity 110. In FIG. 5E, substantially all of the liquid 399 is shown to have been pushed out. Finally, in FIG. 5F, the fluid flow component 200 is attached to the substrate block 104. The seal retention mechanism 480 ensures that the seal ring 400 remains in place within the seal cavity 110 by allowing the liquid 399 to escape and preventing pressure being applied to the liquid 399.

[0080] 6A-6F show yet another embodiment of a seal ring 500. The seal ring 500 is similar to the seal ring 300 except as described herein. All reference numbers are the same as above unless otherwise noted. The seal ring 500 comprises an inner sleeve 502 and an outer ring 504. A sleeve fluid passage 508 extends through the inner sleeve 502. The seal ring 500 is formed in a generally annular configuration, with the inner sleeve 502 and the outer ring 504 symmetrical about a longitudinal axis AA. The inner sleeve 502 has a passage surface 520 that forms a wall of the sleeve fluid passage 508. The passage surface 520 comprises an upper inclined surface 522, a lower inclined surface 523, and an intermediate surface 521. The intermediate surface 521 connects the upper inclined surface 522 and the lower inclined surface 523. The upper and lower inclined surfaces 422, 523 may have a straight profile (i.e., straight with a constant slope) or may have a curved profile. The curved profile may be convex, concave, or any other desired shape. Similarly, the intermediate surface 521 may be straight and parallel to the longitudinal axis, straight and sloped relative to the longitudinal axis, or curved with a convex or concave profile.

[0081] The inner sleeve 502 also includes a first mating surface 530. The first mating surface 530 includes an upper mating surface 531 and a lower mating surface 532. The upper and lower mating surfaces 531, 532 may have a linear, convex, or concave shape. In this embodiment, the upper mating surface 531 and the lower mating surface 532 have a linear shape.

[0082] The outer ring 504 has an inner surface 540 and an outer surface 550. The inner surface 540 is adjacent to the inner sleeve 502 and faces the first mating surface 530. The outer surface 550 is opposite the inner surface 540. The inner surface 540 may be divided into an upper inner surface 541 and a lower inner surface 542.

[0083] The inner sleeve 502 is coupled to the outer ring 504 by a web 506, which separates the upper and lower inner surfaces 541, 542 from the upper and lower abutment surfaces 531, 532. The web 506 has an upper web surface 561 and a lower web surface 562. The web 506 has an upper web surface 561 and a lower web surface 562. The upper web surface 561, together with the upper inner surface 541 of the inner surface 540 of the outer ring 504 and the upper abutment surface 531 of the first abutment surface 530, forms an annular upper sleeve groove 565. Similarly, the lower web surface 562, together with the lower inner surface 542 of the inner surface 540 of the outer ring 504 and the lower abutment surface 532 of the first abutment surface 530, forms an annular lower sleeve groove 566. The outer ring 504 further comprises an upper end surface 570 and a lower end surface 572. An upper end surface 570 and a lower end surface 572 join the inner surface 540 to the outer surface 550 .

[0084] Formed on the outer surface 550 of the seal ring 500 are a pair of seal retention features 580. The seal retention features 580 take the form of a pair of lips 584 extending from the upper end surface 570 and the lower end surface 572. The lips 584 of the seal retention feature 580 extend substantially perpendicular to the longitudinal axis AA and circumscribe the annular ring 500. Each lip 584 extends around the entire circumference of the outer surface 550. The lips 584 protrude beyond the outer surface 550 and are located at the upper end 574 and the lower end 576 of the outer ring 504. The outer diameter of each lip 584 is greater than the outer diameter of the outer surface 550. In other embodiments, the lips 584 may extend at an angle other than perpendicular to the longitudinal axis AA or may not extend around the entire circumference of the seal ring 500.

[0085] In the assembled state, the inner surface 540 is in contact with the corresponding surface of the seal cavity 110, 210. The passage inner surface 131, 231 engages the inner surface 540 of the seal ring 500. In particular, the passage inner surface 131 engages the lower inner surface 542 of the seal ring 500. The passage inner surface 231 engages the upper inner surface 541 of the seal ring 500. Thus, the outer ring 504 is radially compressed against the inner surfaces 131, 231 of the substrate seal passage 130 and the component seal passage 230. The upper and lower end surfaces 570, 572 are spaced apart from the passage floors 132, 232. Similarly, the upper web surface 561 is spaced apart from the component ring 226, and the lower web surface 562 is spaced apart from the substrate 126. This advantageously ensures that the first and second mating surfaces 530, 120, 220 contact without undue constraint. As a result, the mating interface between the first mating surface 530 and the second mating surface 120, 220 forms a first seal. The mating interface between the passage inner surface 131, 231 and the inner surface 540 of the seal ring 500 forms a second seal. The interface between the passage outer surface 133, 233 and the outer surface 550 does not form a third seal due to the presence of the lip 584 of the seal retention mechanism 580. However, the lip 584 engages and is compressed by the passage outer surface 133, 233. As a result, a third seal is formed at the mating interface between the passage outer surface 133, 233 and the lip 584.

[0086] 6C-6F, a method of installing the seal ring 500 is shown. In FIG. 6C, the seal ring 500 is positioned over the seal cavity 110 of the substrate block 104. In FIG. 6D, the seal ring 500 is partially inserted into the seal cavity 110. The outer ring 504 is received within the substrate seal passage 130. As can be seen, the lip 584 is in contact with the passage outer surface 133 and the outer surface 550 is spaced from the passage outer surface 133.

[0087] In FIG. 6E, the fluid flow component 200 is attached to the substrate block 104 with the seal ring 500 compressed therebetween. The lip 584 of the seal retention feature 580 remains in contact with the passage outer surface 133 of the seal passage 130, and the outer surface 550 is spaced from the passage outer surface 133. Finally, FIG. 6F shows the fluid flow component 200 and the seal ring 500 removed. As can be seen, a groove 184 is formed by the extended contact between the passage outer surface 133 and the lip 584. If the seal ring 500 is attached for an extended period of time, the lip 584 will deform the passage outer surface 133. The formation of the groove 184 may occur after a day, a week, a month, or longer.

[0088] The lip 584 serves to increase the retention of the seal ring 500 when installed within the seal cavity 110. This advantageously aids in the assembly of the fluid flow component 200 by reducing the likelihood of the seal ring 500 moving while the fluid flow component 200 is disposed on the substrate block 104. Additionally, the formation of the groove 184 facilitates maintenance and reassembly by improving the retention of a replacement seal ring 500.

[0089] 7A and 7B, another embodiment of a seal ring 600 is shown. The seal ring 600 is substantially identical to the seal ring 500, except for an additional groove 682. Accordingly, the seal ring 600 includes an inner sleeve 602, an outer ring 604, and a web 606 extending from the inner sleeve 602 to the outer ring 604. The outer ring 604 has an inner surface 640 and an outer surface 650. The outer surface 650 has a seal retention feature 680 formed thereon. In particular, the seal retention feature 680 includes a groove 682 disposed parallel to the longitudinal axis AA, similar to the seal ring 500.

[0090] Also formed at the upper end 674 and the lower end 676 is a pair of lips 684. The lip 684 extends around the circumference of the seal ring 600 and has an outer diameter that is greater than the outer diameter of the outer surface 650 of the outer ring 604. The lip 684 is interrupted by a groove 682, but is otherwise continuous. The groove 682 has a concave surface and extends through both the lip 684 and the outer surface 650. The groove 682 may have any shape, including a slot with flat walls and a bottom, or any other profile. The cross section of the groove 682 need not be continuous, but may vary from the upper end 674 to the lower end 676 as shown.

[0091] 7C shows a seal ring 600 installed between the fluid flow component 200 and the substrate block 104. The seal ring 600 is inserted into the seal cavities 210, 110 of the fluid flow component 200 and the substrate block 104. As can be seen, the outer ring 604 is inserted into the substrate seal passage 130 and the component seal passage 230. The outer surface 650 of the seal ring 600 is spaced from the inner surfaces 133, 233 of the passages. The lip 684 engages the inner surfaces 133, 233 of the passages and the groove 682 allows any fluid trapped in the seal cavities 110, 210 to escape before the fluid flow component 200 is attached to the substrate block 104.

[0092] 8A-8C, another embodiment of a sealing ring 700 is shown. The sealing ring 700 is substantially identical to the sealing ring 300, except as described below. Accordingly, the sealing ring 700 has an inner sleeve 702, an outer ring 704, and a web 706 extending from the inner sleeve 702 to the outer ring 704. The outer ring 704 has an inner surface 740 and an outer surface 750. The inner surface 740 is divided into an upper inner surface 741 and a lower inner surface 742. The outer ring 704 is modified such that a thickness of the outer ring 704 measured from the inner surface 740 to the outer surface 750 may be reduced. Similarly, the web 706 may be modified to have a reduced thickness along the longitudinal axis AA from the upper web surface 761 to the lower web surface 762.

[0093] This reduction in thickness facilitates assembly and only slightly reduces the effectiveness of the second and third seals formed by the bonded interfaces between the passage inner surface 131, 231 and the inner surface 740 and between the passage outer surface 133, 233 and the outer surface 750. The reduction in thickness of the web 706 also provides increased space for liquid if any remains. Finally, the reduced thickness of the web 706 and outer ring 704 allows liquid to escape, allowing the second and third seals to be formed while avoiding seal ring retention issues during assembly.

[0094] 9A-9C, an exemplary substrate block 804 is shown. Substrate block 804 is substantially identical to substrate block 104 described above, with the exceptions noted herein. Substrate block 804 employs a seal cavity 810 that surrounds a port 809. Seal cavity 810 has a second mating surface 820, a substrate ring 826, and a substrate seal passage 830. Second mating surface 820 forms part of substrate port 809, similar to substrate block 104.

[0095] The substrate ring 826 defines a substrate port 809. The substrate port 809 terminates in and is surrounded by the substrate ring 826. The substrate ring 826 is recessed relative to the top surface 812 of the substrate block 804. Surrounding the substrate ring 826 is a substrate seal passage 830. The substrate seal passage 830 is recessed relative to the substrate ring 826 and the top surface 812 of the substrate block 804. The substrate ring 826 therefore protrudes above the substrate seal passage 830. The substrate ring 826 may have any desired shape.

[0096] The substrate seal passage 830 has a passage inner surface 831, a passage floor 832, and a passage outer surface 833. The passage inner surface 831 is adjacent to the substrate ring 826. The passage outer surface 833 is opposite and radially outward from the passage inner surface 831. The passage floor 832 couples the passage inner surface 831 and the passage outer surface 833.

[0097] The seal cavity 810 further comprises a seal retention mechanism 840. The seal retention mechanism 840 comprises a vent passage 842 formed in the seal cavity 810 in place of the seal 300. The vent passage 842 prevents the passage outer surface 833 from sealing against the outer surface 350, but allows fluid to pass unimpeded through the vent passage 842. This advantageously aids in seal retention. The vent passage 842 may have a concave surface as shown, or may be any other shape as desired. The vent passage 842 extends from the top surface 812 to the passage floor 832. However, in other embodiments, the vent passage 842 may not extend to the passage floor 832, but may be spaced therefrom.

[0098] 9C, the fluid flow component 200, substrate block 804, and seal 300 are shown with the seal 300 compressed between the substrate block 804 and the fluid flow component 200. In an alternative configuration, the fluid flow component 200 may also incorporate a seal retention mechanism 840, such as a vent passage 842. In yet other configurations, both the fluid flow component 200 and the substrate block 804 may incorporate a vent passage 842.

[0099] 10A-C show yet another embodiment of a substrate block 904. The substrate block 904 is substantially identical to the substrate block 104 described above, with the exceptions noted herein. The substrate block 904 employs a seal cavity 910 that surrounds a port 909. The seal cavity 910 has a second mating surface 920, a substrate ring 926, and a substrate seal passage 930. The second mating surface 920 forms part of the substrate port 909, similar to the substrate block 104.

[0100] The substrate ring 926 defines a substrate port 909. The substrate port 909 terminates in and is surrounded by the substrate ring 926. The substrate ring 926 is recessed relative to the top surface 912 of the substrate block 904. A substrate seal passage 930 surrounds the substrate ring 926. The substrate seal passage 930 is recessed relative to the substrate ring 926 and the top surface 912 of the substrate block 904. The substrate ring 926 therefore protrudes above the substrate seal passage 930. The substrate ring 926 may have any desired shape.

[0101] The substrate seal passage 930 has a passage inner surface 931, a passage floor 932, and a passage outer surface 933. The passage inner surface 931 is adjacent to the substrate ring 926. The passage outer surface 933 is opposite and radially outward from the passage inner surface 931. The passage floor 932 couples the passage inner surface 931 and the passage outer surface 933.

[0102] The seal cavity 910 further comprises a seal retention feature 940. The seal retention feature 940 comprises a lip 942 formed on the passage outer surface 933 of the seal cavity 910 in place of the seal 300. The lip 942 engages the outer surface 350 of the seal 300. In this embodiment of the substrate block 904, the passage outer surface 933 is spaced from the outer surface 350 of the seal 300. The lip 942 deforms the outer surface 350 of the seal 300 and retains the seal 300. As can be seen, the lip 942 has an inner diameter that is smaller than the outer diameter of the outer surface 350 of the seal 300. In some embodiments, the lip 942 does not extend around the entire circumference of the passage outer surface 933. In other embodiments, the lip 942 may be combined with other seal retention features described above. Additionally, the lip 942 may be incorporated into either or both of the substrate block 904 and the fluid flow component 200.

[0103] 10C, the fluid flow component 200, substrate block 904, and seal 300 are shown, with the seal 300 compressed between the substrate block 904 and the fluid flow component 200. In an alternative configuration, the fluid flow component 200 may also incorporate a seal retention feature 940, such as a lip 942. As noted above, both the fluid flow component 200 and the substrate block 904 may incorporate a lip 942.

[0104] 11A-11C, another embodiment of a sealing ring 1500 is shown. The sealing ring 1500 is similar to the sealing ring 500 except as described below. Accordingly, the sealing ring 1500 has an inner sleeve 1502, an outer ring 1504, and a first web 1506 extending from the inner sleeve 1502 to the outer ring 1504. The outer ring 1504 has an inner surface 1540 and an outer surface 1550. A sleeve fluid passageway 1508 is defined by an inner surface 1509 of the inner sleeve 1502. A second web 1510 extends across the sleeve fluid passageway 1508. The second web 1510 includes an opening 1511 extending through the second web 1510 along a longitudinal axis AA. The longitudinal axis AA extends along the sleeve fluid passageway 1508 of the inner sleeve 1502. The seal ring 1500 is symmetrical about its longitudinal axis.

[0105] The openings 1511 may be sized to provide a known pressure drop for a particular fluid and flow rate. Thus, the openings 1511 may be used to restrict flow, and the exact size of the openings 1511 may be selected to achieve a predetermined pressure drop or flow rate for a particular fluid. The second web 1510 has a maximum height H Max and the minimum height H Min and may have a maximum height H Max is the minimum height H Min Greater than the maximum height H Max is located near the inner surface 1509 of the inner sleeve 1502 and has a minimum height H Minis located near the opening 1511. Thus, the second web 1510 tapers toward the longitudinal axis AA. Optionally, the second web 1510 has a maximum height H Max and minimum height H Min The thickness may be constant so that the maximum height H Max is the height H of the inner sleeve 1502 I Less than.

[0106] Diameter D of opening 1511 A is the diameter D of the sleeve fluid passage 1508 S Therefore, the opening 1511 is more restrictive to fluid flow than a seal ring without the second web 1510. A may be sized to achieve a desired pressure drop or flow rate of the fluid used in the fluid delivery system 1500. Optionally, a plurality of openings 1511 may be provided through the second web 1510, not all of which need be aligned with the longitudinal axis AA. Instead, the plurality of openings 1511 may be spaced apart in a circular pattern about the circumference of the second web 1510, or may be arranged in any desired configuration.

[0107] FIG. 11C shows a seal ring 1500 installed between the fluid flow component 200 and the substrate block 104. The seal ring 1500 is inserted into the seal cavities 210, 110 of the fluid flow component 200 and the substrate block 104. As shown, the outer ring 1504 is inserted into the substrate seal passage 130 and the component seal passage 230. The outer surface 1550 of the seal ring 1500 is in contact with the inner surfaces 133, 233 of the passages. The openings 1511 narrow the flow passages in the substrate block 104 and the fluid flow component 200, restricting the flow of fluid. This restriction may be selected to achieve a desired flow restriction, or may be selected to improve mixing of the fluids or for any other purpose. Optionally, the seal ring 1500 may also incorporate any of the seal retention mechanisms described above.

[0108] 12A-C, another embodiment of a sealing ring 1600 is shown. The sealing ring 1600 is similar to the sealing ring 500 except as described below. Accordingly, the sealing ring 1600 has an inner sleeve 1602, an outer ring 1604, and a first web 1606 extending from the inner sleeve 1602 to the outer ring 1604. The outer ring 1604 has an inner surface 1640 and an outer surface 1650. A sleeve fluid passage 1608 is defined by an inner surface 1609 of the inner sleeve 1602. A second web 1610 extends across the sleeve fluid passage 1608. A longitudinal axis AA extends along the sleeve fluid passage 1608 of the inner sleeve 1602. The sealing ring 1600 is symmetrical about the longitudinal axis.

[0109] The second web 1610 has a maximum height H Max and the minimum height H Min and has a maximum height H Max is the minimum height H Min Greater than the maximum height H Max is located near the inner surface 1609 of the inner sleeve 1602 and has a minimum height H Min is located near the longitudinal axis AA. Thus, the second web 1610 tapers toward the longitudinal axis AA. Optionally, the second web 1610 has a maximum height H Max and minimum height H Min The thickness may be constant so that the maximum height H Max is the height H of the inner sleeve 1602 I The sleeve fluid passage 1608 has a diameter D S The second web 1610 has a diameter D S 16 and completely blocks the sleeve fluid passageway 1608. The second web 1610 prevents fluid flow through the sleeve fluid passageway 1608 and has no holes or passageways.

[0110] FIG. 12C shows a seal ring 1600 installed between the fluid flow component 200 and the substrate block 104. The seal ring 1600 is inserted into the seal cavities 210, 110 of the fluid flow component 200 and the substrate block 104. As shown, the outer ring 1604 is inserted into the substrate seal passage 130 and the component seal passage 230. The outer surface 1650 of the seal ring 1600 contacts the inner surfaces 133, 233 of the passages. The second web 1610 blocks the flow path in the substrate block 104 and the fluid flow component 200, preventing fluid flow. This restriction may be selected to achieve a desired flow restriction, may be selected to improve mixing of the fluids, or for any other purpose. Optionally, the seal ring 1600 may incorporate any of the seal retention mechanisms described above.

[0111] Although the present invention has been described in terms of specific examples, including currently preferred modes for carrying out the invention, those skilled in the art will appreciate that numerous variations and permutations of the above-described systems and techniques exist. It is to be understood that other embodiments may be utilized and structural and functional changes may be made without departing from the scope of the present invention. Accordingly, the spirit and scope of the present invention should be construed broadly as set forth in the appended claims.

[0112] The present invention may be further detailed through the following exemplary claims.

[0113] Exemplary claim 1: A fluid delivery system comprising a substrate block comprising: a top surface; a first substrate port in the top surface; a second substrate port in the top surface; a substrate fluid passage extending between a first substrate port and a second substrate port; a substrate ring defining a second substrate port; and a substrate seal passage formed in the top surface and surrounding the substrate ring, an outer surface of the substrate ring forming an inner surface of the substrate seal passage. The fluid delivery system further comprises an active component comprising: a bottom surface; a first component port in the bottom surface; a component fluid passage extending from a first component port; a component ring defining a first component port; and a component seal passage formed in the bottom surface and surrounding the component ring, an outer surface of the component ring forming an inner surface of the component seal passage. The fluid delivery system further includes a seal ring comprising: an inner sleeve defining a sleeve fluid passage; and an outer ring connected to and surrounding the inner sleeve, (1) an annular upper sleeve groove formed between an upper portion of the outer ring and an upper portion of the inner sleeve, and (2) an annular lower sleeve groove formed between a lower portion of the outer ring and a lower portion of the inner sleeve, the outer ring comprising an inner surface, an outer surface, and a seal retention feature formed on the outer surface of the outer ring. The active component is mounted to the substrate block such that (1) the second substrate port and the first component port are aligned, and (2) the seal ring fits into each of the substrate seal passage and the component seal passage, such that the seal ring fluidly seals the substrate fluid passage and the component fluid passage.

[0114] Exemplary Claim 2: The fluid delivery system of claim 1, wherein the sealing ring has a longitudinal axis that extends parallel to the inner sleeve, the sealing ring being symmetrical about the longitudinal axis.

[0115] Exemplary Claim 3: The fluid delivery system of claim 1, wherein the seal retention feature comprises a groove.

[0116] Exemplary Claim 4: The fluid delivery system of claim 3, wherein the seal retention mechanism comprises a plurality of grooves.

[0117] Exemplary Claim 5: The fluid delivery system of claim 3, wherein the sealing ring has a longitudinal axis extending parallel to the inner sleeve, and the groove extends parallel to the longitudinal axis.

[0118] Exemplary Claim 6: The fluid delivery system of claim 1, wherein the seal retention mechanism comprises a lip.

[0119] Exemplary Claim 7: The fluid delivery system of claim 6, wherein the lip is disposed at either an upper end of the outer ring or a lower end of the outer ring.

[0120] Exemplary Claim 8: The fluid delivery system of claim 6, wherein the seal retention mechanism comprises a plurality of lips.

[0121] Exemplary Claim 9: The fluid delivery system of claim 6, wherein the lip has an outer diameter greater than an outer diameter of the outer surface of the outer ring.

[0122] Exemplary Claim 10: The fluid delivery system of claim 9, wherein the outer diameter of the lip is greater than an outer diameter of an outer surface of the substrate seal passage.

[0123] Exemplary claim 11: A sealing ring comprising an inner sleeve defining a sleeve fluid passage and an outer ring connected to and surrounding the inner sleeve, (1) an annular upper sleeve groove formed between an upper portion of the outer ring and an upper portion of the inner sleeve, and (2) an annular lower sleeve groove formed between a lower portion of the outer ring and a lower portion of the inner sleeve, the outer ring comprising an inner surface, an outer surface, and a seal retention mechanism formed on the outer surface of the outer ring.

[0124] Exemplary Claim 12: The seal ring of claim 11, wherein the seal ring has a longitudinal axis extending parallel to the inner sleeve, the seal ring being symmetrical about the longitudinal axis.

[0125] Exemplary Claim 13: The seal ring of claim 11, wherein the seal retention feature comprises a groove.

[0126] Exemplary Claim 14: The seal ring of claim 13, wherein the seal retention feature comprises a plurality of grooves.

[0127] Exemplary Claim 15: The seal ring of claim 13, wherein the seal ring has a longitudinal axis extending parallel to the inner sleeve, and the groove extends parallel to the longitudinal axis.

[0128] Exemplary Claim 16: The seal ring of claim 11, wherein the seal retention feature comprises a lip.

[0129] Exemplary Claim 17: The seal ring of claim 16, wherein the lip is disposed at either an upper end of the outer ring or a lower end of the outer ring.

[0130] Exemplary Claim 18: The seal ring of claim 16, wherein the seal retention mechanism comprises a plurality of lips.

[0131] Exemplary Claim 19: The seal ring of claim 16, wherein the lip has an outer diameter greater than an outer diameter of the outer surface of the outer ring.

[0132] Exemplary claim 20: A method of assembling a fluid delivery system, comprising the steps of: a) providing a substrate block, the substrate block comprising a top surface, a first substrate port in the top surface, a second substrate port in the top surface, and a substrate fluid passage extending between the first substrate port and the second substrate port, a substrate ring defining the second substrate port, a substrate seal passage formed in the top surface and surrounding the substrate ring, an outer surface of the substrate ring forming an inner surface of the substrate seal passage; b) inserting a seal ring into the first substrate port in the top surface of the substrate block, the seal ring comprising an inner sleeve and an outer ring connecting to and surrounding the inner sleeve, whereby: (1) an annular upper sleeve groove is formed between an upper portion of the outer ring and an upper portion of the inner sleeve; (2) an annular lower sleeve groove is formed between a lower portion of the outer ring and a lower portion of the inner sleeve, the outer ring having an inner surface, an outer surface, and a seal retention feature, the seal retention feature formed on the outer surface of the outer ring, the seal annular lower sleeve groove receiving the substrate ring of a first substrate port; c) an active component is coupled to the substrate block, the active component having a lower surface, a first component port on the lower surface, a component fluid passage extending from the first component port, a component ring defining a first component port, and a component seal passage formed in the lower surface and surrounding the component ring, an outer surface of the component ring forming an inner surface of the component seal passage, and the annular upper sleeve groove of the seal ring receiving the component ring of the active component.

[0133] Exemplary Claim 21: The method of claim 20, wherein in step b), the seal retention mechanism comprises a groove forming a passage between an outer surface of the substrate seal passage and the outer ring of the seal ring.

[0134] Exemplary Claim 22: The method of claim 21, wherein in step b-1), liquid in the substrate seal passage is forced through the passage formed by the groove and the outer surface of the substrate seal passage.

[0135] Exemplary Claim 23: The method of claim 20, wherein in step b), the seal retention feature comprises a lip that engages the outer surface of the substrate seal passage.

[0136] Exemplary Claim 24: The method of claim 23, wherein in step b-2), the lip deforms the outer surface of the substrate seal passage to form an undercut.

[0137] Exemplary claim 25: A fluid delivery system comprising a substrate block comprising: a top surface; a first substrate port in the top surface; a second substrate port in the top surface; a substrate fluid passage extending between a first substrate port and a second substrate port; a substrate ring defining a second substrate port; a substrate seal passage formed in the top surface and surrounding the substrate ring, an outer surface of the substrate ring forming an inner surface of the substrate seal passage; and a substrate seal retention feature formed in an outer surface of the substrate seal passage, the outer surface being opposite the inner surface of the substrate seal passage. The fluid delivery system further comprises an active component comprising: a bottom surface; a first component port in the bottom surface; a component fluid passage extending from a first component port; a component ring defining a first component port; and a component seal passage formed in the bottom surface and surrounding the component ring, an outer surface of the component ring forming an inner surface of the component seal passage. The fluid delivery system further comprises a seal ring comprising: an inner sleeve defining a sleeve fluid passage; and an outer ring connected to and surrounding the inner sleeve, (1) an annular upper sleeve groove formed between an upper portion of the outer ring and an upper portion of the inner sleeve, and (2) an annular lower sleeve groove formed between a lower portion of the outer ring and a lower portion of the inner sleeve. The active component is mounted to the substrate block such that (1) a second substrate port and a first component port are aligned, and (2) the seal ring fits into the substrate seal passage and the component seal passage, respectively, so that the seal ring fluidly seals the substrate fluid passage and the component fluid passage.

[0138] Exemplary Claim 26: The fluid delivery system of claim 25, wherein the substrate seal retention feature comprises a groove.

[0139] Exemplary Claim 27: The fluid delivery system of claim 26, wherein the substrate seal retention mechanism comprises a plurality of grooves.

[0140] Exemplary Claim 28: The fluid delivery system of claim 26, wherein the sealing ring has a longitudinal axis extending parallel to the inner sleeve, and the groove extends parallel to the longitudinal axis.

[0141] Exemplary Claim 29: The fluid delivery system of claim 25, wherein the substrate seal retention mechanism comprises a lip.

[0142] Exemplary Claim 30: The fluid delivery system of claim 29, wherein the lip protrudes from the outer surface of the substrate seal passage.

[0143] Exemplary Claim 31: The fluid delivery system of claim 29, wherein the lip has an inner diameter that is smaller than an outer diameter of the outer ring of the sealing ring.

[0144] Exemplary claim 32: A method of assembling a fluid delivery system, comprising the steps of: a) providing a substrate block, the substrate block comprising a top surface, a first substrate port on the top surface, a second substrate port on the top surface, and a substrate fluid passage extending between the first substrate port and the second substrate port, a substrate ring defining the second substrate port, a substrate seal passage formed on the top surface and surrounding the substrate ring, an outer surface of the substrate ring forming an inner surface of the substrate seal passage, a substrate seal retention feature formed on the outer surface of the substrate seal passage, the outer surface being opposite the inner surface of the substrate seal passage; b) inserting a seal ring into the first substrate port on the top surface of the substrate block, the seal ring comprising an inner sleeve and an outer ring defining a sleeve fluid passage, the outer ring being connected to the inner sleeve and surrounding the inner sleeve; whereby (1) an annular upper sleeve groove is formed between an upper portion of the outer ring and an upper portion of the inner sleeve, and (2) an annular lower sleeve groove is formed between a lower portion of the outer ring and a lower portion of the inner sleeve, the sealing annular lower sleeve groove receiving the substrate ring of a first substrate port; and c) an active component is coupled to the substrate block, the active component comprising a lower surface, a first component port on the lower surface, a component fluid passage extending from the first component port, a component ring defining the first component port, and a component seal passage formed in the lower surface and surrounding the component ring, an outer surface of the component ring forming an inner surface of the component seal passage, and the annular upper sleeve groove of the seal ring receiving the component ring of the active component.

[0145] Exemplary claim 33: A sealing ring comprising: an inner sleeve defining a sleeve fluid passage; an outer ring connected to and surrounding the inner sleeve, wherein (1) an annular upper sleeve groove is formed between an upper portion of the outer ring and an upper portion of the inner sleeve; and (2) an annular lower sleeve groove is formed between a lower portion of the outer ring and a lower portion of the inner sleeve; and a web extending across the sleeve fluid passage.

[0146] Exemplary Claim 34: The seal ring of claim 33, wherein the seal ring has a longitudinal axis extending along the inner sleeve, the seal ring being symmetrical about the longitudinal axis.

[0147] Exemplary Claim 35: The seal ring of claim 33, wherein the web has no holes or passages.

[0148] Exemplary Claim 36: The seal ring of claim 33, wherein the web prevents fluid flow through the sleeve fluid passage.

[0149] Exemplary Claim 37: The seal ring of claim 33, wherein the web includes an opening, the opening having a diameter smaller than a diameter of the sleeve fluid passage.

[0150] Exemplary Claim 38: The seal ring of claim 33, wherein the web tapers toward a longitudinal axis, the longitudinal axis extending along the sleeve fluid passageway.

[0151] Exemplary Claim 39: The seal ring of claim 33, wherein the web has a constant thickness.

[0152] Exemplary Claim 40: The seal ring of claim 33, wherein the web has a maximum height that is less than a height of the inner sleeve.

[0153] Exemplary Claim 41: The seal ring of claim 33, wherein the outer ring comprises a seal retention mechanism.

Claims

1. 1. A fluid delivery system comprising: A substrate block comprising: Top surface; a first substrate port on the top surface; a second substrate port on said top surface; a substrate fluid passageway extending between the first substrate port and the second substrate port; a substrate ring defining a second substrate port; and a substrate seal passage formed in the top surface and surrounding the substrate ring, the outer surface of the substrate ring forming an inner surface of the substrate seal passage; An active component comprising: Bottom surface; a first component port on said lower surface; a component fluid passageway extending from the first component port; a component ring defining a first component port; and a component seal passage formed in the lower surface and surrounding the component ring, the outer surface of the component ring forming the inner surface of the component seal passage; and A seal ring comprising: an inner sleeve defining a sleeve fluid passage; and an outer ring connected to and surrounding the inner sleeve, (1) an annular upper sleeve groove formed between an upper portion of the outer ring and an upper portion of the inner sleeve, and (2) an annular lower sleeve groove formed between a lower portion of the outer ring and a lower portion of the inner sleeve, the outer ring having an inner surface, an outer surface, and a seal retention mechanism formed on the outer surface of the outer ring; The active component is mounted to a substrate block such that (1) a second substrate port and a first component port are aligned, and (2) the seal ring fits into each of the substrate seal passage and the component seal passage, and the seal ring fluidically seals the substrate fluid passage and the component fluid passage.

2. The fluid delivery system of claim 1 , wherein the sealing ring has a longitudinal axis extending parallel to the inner sleeve, the sealing ring being symmetrical about the longitudinal axis.

3. The fluid delivery system of claim 1 , wherein the seal retention feature comprises a groove.

4. The fluid delivery system of claim 3 , wherein the seal retention mechanism comprises a plurality of grooves.

5. The fluid delivery system of claim 3 , wherein the sealing ring has a longitudinal axis extending parallel to the inner sleeve, and the groove extends parallel to the longitudinal axis.

6. The fluid delivery system of claim 1 , wherein the seal retention mechanism comprises a lip.

7. The fluid delivery system of claim 6 , wherein the lip is located at either an upper end of the outer ring or a lower end of the outer ring.

8. The fluid delivery system of claim 6 , wherein the seal retention mechanism comprises a plurality of lips.

9. The fluid delivery system of claim 6 , wherein the lip has an outer diameter that is greater than an outer diameter of the outer surface of the outer ring.

10. The fluid delivery system of claim 9 , wherein the outer diameter of the lip is greater than an outer diameter of an outer surface of the substrate seal passage.

11. A seal ring, the seal ring comprising: an inner sleeve defining a sleeve fluid passage; an outer ring connected to the inner sleeve and surrounding the inner sleeve, (1) an annular upper sleeve groove formed between an upper portion of the outer ring and an upper portion of the inner sleeve, and (2) an annular lower sleeve groove formed between a lower portion of the outer ring and a lower portion of the inner sleeve, the outer ring having an inner surface, an outer surface, and a seal retention mechanism, the seal retention mechanism being formed on the outer surface of the outer ring.

12. The seal ring of claim 11 , wherein the seal ring has a longitudinal axis extending parallel to the inner sleeve, the seal ring being symmetrical about the longitudinal axis.

13. The seal ring of claim 11 , wherein the seal retention feature comprises a groove.

14. The seal ring of claim 13 , wherein the seal retention mechanism comprises a plurality of grooves.

15. The seal ring of claim 13 , wherein the seal ring has a longitudinal axis extending parallel to the inner sleeve, and the groove extends parallel to the longitudinal axis.

16. The seal ring of claim 11 , wherein the seal retention feature comprises a lip.

17. The seal ring of claim 16 , wherein the lip is located at either an upper end of the outer ring or a lower end of the outer ring.

18. The seal ring of claim 16 , wherein the seal retention mechanism comprises a plurality of lips.

19. The seal ring of claim 16 , wherein the lip has an outer diameter greater than an outer diameter of the outer surface of the outer ring.

20. 1. A method of assembling a fluid delivery system, comprising: a) providing a substrate block comprising a top surface, a first substrate port in the top surface, a second substrate port in the top surface, and a substrate fluid passage extending between the first and second substrate ports, a substrate ring defining the second substrate port, a substrate seal passage formed in the top surface surrounding the substrate ring, an outer surface of the substrate ring forming an inner surface of the substrate seal passage; b) inserting a seal ring into a first substrate port in the top surface of the substrate block, the seal ring comprising an inner sleeve and an outer ring defining a sleeve fluid passage, the outer ring connected to and surrounding the inner sleeve, whereby (1) an annular upper sleeve groove is formed between an upper portion of the outer ring and an upper portion of the inner sleeve, and (2) an annular lower sleeve groove is formed between a lower portion of the outer ring and a lower portion of the inner sleeve, the outer ring comprising an inner surface, an outer surface, and a seal retention mechanism, the seal retention mechanism being formed on the outer surface of the outer ring, and the seal annular lower sleeve groove receiving the substrate ring of the first substrate port; c) an active component is coupled to the substrate block, the active component having a lower surface, a first component port in the lower surface, a component fluid passage extending from the first component port, a component ring defining the first component port, and a component seal passage formed in the lower surface and surrounding the component ring, an outer surface of the component ring forming an inner surface of the component seal passage, and the annular upper sleeve groove of the seal ring receiving the component ring of the active component.

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